JP5460002B2 - Multi-cavity wiring board, wiring board and electronic device - Google Patents

Multi-cavity wiring board, wiring board and electronic device Download PDF

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JP5460002B2
JP5460002B2 JP2008217915A JP2008217915A JP5460002B2 JP 5460002 B2 JP5460002 B2 JP 5460002B2 JP 2008217915 A JP2008217915 A JP 2008217915A JP 2008217915 A JP2008217915 A JP 2008217915A JP 5460002 B2 JP5460002 B2 JP 5460002B2
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wiring board
depth
dividing groove
wiring
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JP2010056204A (en
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博記 立和名
陽介 森山
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Kyocera Corp
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本発明は、母基板の中央部に、各々が電子部品を搭載するための配線基板となる複数の配線基板領域が縦横に配列形成され、配線基板領域の境界に分割溝が形成された多数個取り配線基板、およびその多数個取り配線基板を分割して得られる配線基板、ならびにこの配線基板に電子部品が搭載された電子装置に関するものである。   In the present invention, a plurality of wiring board regions, each of which is a wiring board for mounting electronic components, are arranged vertically and horizontally in the central portion of the mother board, and a plurality of dividing grooves are formed at the boundary of the wiring board area. The present invention relates to a wiring board, a wiring board obtained by dividing the wiring board, and an electronic device in which electronic components are mounted on the wiring board.

従来、半導体素子や水晶振動子等の電子部品を搭載するための配線基板は、例えば、酸化アルミニウム質焼結体等の電気絶縁材料から成る絶縁基体の表面に、タングステンやモリブデン等の金属粉末メタライズから成る配線導体が配設されることにより形成されている。   Conventionally, wiring boards for mounting electronic components such as semiconductor elements and crystal resonators are made of metal powder metallization such as tungsten or molybdenum on the surface of an insulating base made of an electrically insulating material such as an aluminum oxide sintered body. It is formed by arranging a wiring conductor made of

このような配線基板は、近年の電子装置の小型化の要求に伴い、その大きさが小さくなっており、複数の配線基板を効率よく製作するために、図10(a)に平面図で示すような、いわゆる多数個取り配線基板を分割することにより作製するということが行なわれている。多数個取り配線基板は、広面積の母基板1の中央部に配線基板となる複数の配線基板領域1aが縦横に配列形成され、各配線基板領域1aを区分する分割溝2(2x,2y)が縦横に形成されたものである。この分割溝2(2x,2y)に沿って母基板1を分割することにより、複数の配線基板が得られる。また、配線基板に効率よく電子部品を搭載するために、多数個取り配線基板の各配線基板領域1aに電子部品を搭載した後に分割することも行なわれている。   Such a wiring board has been reduced in size in accordance with the recent demand for miniaturization of electronic devices. In order to efficiently manufacture a plurality of wiring boards, a plan view is shown in FIG. Such a so-called multi-piece wiring board is manufactured by dividing it. In the multi-cavity wiring board, a plurality of wiring board regions 1a serving as wiring boards are arranged vertically and horizontally in the center of a large-area mother board 1, and divided grooves 2 (2x, 2y) for dividing each wiring board area 1a. Are formed vertically and horizontally. A plurality of wiring boards can be obtained by dividing the mother board 1 along the dividing grooves 2 (2x, 2y). In addition, in order to efficiently mount electronic components on the wiring board, the electronic components are mounted on each wiring board region 1a of the multi-piece wiring board and then divided.

このような多数個取り配線基板には、母基板1を分割溝2(2x,2y)に沿って良好に分割しやすくするとともに、その取り扱い時に母基板1全体が不用意に割れてしまうことを抑制するために、例えば、図10(b)に図10(a)のA−A線における断面図で、図10(c)に図10(a)のB−B線における断面図で示すように、分割溝2xの深さを母基板1の端部側から中央部側に向かってステップ状に変化させているものが知られている(特許文献1を参照。)。   In such a multi-piece wiring board, the mother board 1 can be easily divided well along the dividing grooves 2 (2x, 2y), and the whole mother board 1 is inadvertently cracked during handling. In order to suppress, for example, FIG. 10B is a cross-sectional view taken along line AA in FIG. 10A, and FIG. 10C is a cross-sectional view taken along line BB in FIG. In addition, there is known one in which the depth of the dividing groove 2x is changed stepwise from the end side to the center side of the mother substrate 1 (see Patent Document 1).

このような分割溝は、多数個取り配線基板用のセラミック生成形体の各配線基板領域の外縁に沿ってV字状のカッター刃を押し当てることにより形成され、断面が母基板の主面に対して傾斜した斜面で構成されたV字型である場合が多い。
特開2004−119490号公報
Such a dividing groove is formed by pressing a V-shaped cutter blade along the outer edge of each wiring board region of the ceramic generation form for the multi-cavity wiring board, and the cross section is against the main surface of the mother board. In many cases, the shape is a V-shape composed of inclined slopes.
JP 2004-119490 A

しかしながら、従来の断面がV型の1つの分割溝においてステップ状に(不連続に)分割溝の深さを変えるには、例えば、分割溝の開口幅を一定にする場合であれば、分割溝の深さの深い領域における分割溝の斜面の傾斜角度(母基板の主面と斜面との間の角度)を、分割溝の深さの浅い領域における分割溝の斜面の傾斜角度よりも小さくし、また、分割溝の斜面の傾斜角度をすべて同じにして底部の角度を同じにする場合であれば、深さの浅い領域の開口幅を小さくするものであった。このため、分割溝の傾斜角度が同じである場合は、分割溝の深さが浅い領域は開口幅が小さいので、この領域の斜面が分割溝の内側に突出した形状となり、また、分割溝の開口幅が一定である場合においては、分割溝の深さの浅い領域の斜面が、分割溝の深さの深い領域の斜面に対して分割溝の内側に突出した形状となる。   However, in order to change the depth of the split groove stepwise (discontinuously) in one V-shaped split groove of the conventional cross section, for example, when the opening width of the split groove is constant, the split groove The inclination angle of the inclined surface of the dividing groove in the deep region (angle between the main surface of the mother substrate and the inclined surface) is smaller than the inclination angle of the inclined surface of the dividing groove in the shallow region of the dividing groove. In addition, when the inclination angles of the slopes of the dividing grooves are all the same and the angle of the bottom is the same, the opening width of the shallow region is reduced. For this reason, when the angle of inclination of the dividing groove is the same, the area where the depth of the dividing groove is shallow has a small opening width, so that the slope of this area protrudes to the inside of the dividing groove. When the opening width is constant, the slope of the shallow region of the dividing groove has a shape protruding inward of the dividing groove with respect to the slope of the deep region of the dividing groove.

このように、分割溝内で一部の領域が突出して形成されていると、分割溝側を中心としてその両側を主面側に撓ませて母基板を分割した際に、突出した部分同士のみが接触しやすくなることから、配線基板の、特に分割時の支点となる分割溝の底部から離れた開口側において、分割溝の深さの深い領域と浅い領域との境界の角部に欠けが発生しやすいというものであった。   As described above, when a part of the region is formed so as to protrude in the dividing groove, only the protruding portions are separated when the mother substrate is divided by bending both sides of the dividing groove toward the main surface side. Therefore, the corner of the boundary between the deep region and the shallow region of the dividing groove is chipped, especially on the opening side of the wiring board, which is away from the bottom of the dividing groove, which is a fulcrum when dividing. It was easy to occur.

配線基板に欠けがあると、配線基板の外縁を基準にして配線基板に電子部品を搭載したり、配線基板に電子部品を搭載した電子装置の外縁を基準にして外部電気回路基板に電子装置を搭載したりする際に、その搭載を精度よく行なうことができないという問題点があった。   If the wiring board is chipped, an electronic component is mounted on the wiring board with reference to the outer edge of the wiring board, or the electronic device is mounted on the external electric circuit board with reference to the outer edge of the electronic device having the electronic component mounted on the wiring board. When mounting, there was a problem that the mounting could not be performed accurately.

本発明は、上記従来技術の問題点を鑑み案出されたもので、その目的は、分割溝の深さが不連続に異なる部分を有する多数個取り配線基板を分割する際に、配線基板に発生する欠けを低減することができる多数個取り配線基板を提供することにある。また、多数個取り配線基板により得られる、配線基板、電子装置を提供することにある。   The present invention has been devised in view of the above-described problems of the prior art, and its purpose is to provide a wiring board when dividing a multi-cavity wiring board having discontinuously different depths. An object of the present invention is to provide a multi-piece wiring board capable of reducing generated chips. Another object of the present invention is to provide a wiring board and an electronic device obtained by using a multi-piece wiring board.

本発明の多数個取り配線基板は、複数の配線基板領域が縦横に配列された母基板の一方主面における前記複数の配線基板領域の境界に設けられた分割溝と前記境界の一部分に跨るように前記複数の配線基板領域のそれぞれに対応して配置された凹部とを有する多数個取り配線基板において、前記分割溝は、前記一方主面からの深さが不連続に異なる、第1
の領域と該第1の領域よりも深さの深い第2の領域とを備え、断面において、前記第1の領域は、前記一方主面に対して傾斜した第1の斜面で構成されたV字型であり、断面において、前記第2の領域は、前記一方主面において前記第1の領域と同じ開口幅を有しているとともに前記第1の斜面と同じ傾斜角度を有している第1の斜面を前記一方主面側に備え、前記第1の斜面よりも小さい傾斜角度を有する第2の斜面を底部側に備えた、V字状であり、平面視において、前記第2の領域は前記凹部を横切るように設けられており、前記複数の配線基板領域のそれぞれに対応して前記第1の領域と前記第2の領域とによる深さの不連続部が前記凹部を挟むように配置されており、前記分割溝の前記第1の領域における深さは前記凹部の深さよりも浅く、前記分割溝の前記第2の領域における深さは前記凹部の深さよりも深いことを特徴とするものである。
Multiple patterning wiring board of the present invention, spanning a plurality of the wiring substrate area division groove provided on a boundary of the plurality of wiring boards region definitive within one main surface of the mother substrate arranged vertically and horizontally with a portion of the boundary in multiple patterning wiring board having a recess disposed corresponding to each of the plurality of wiring substrate regions as, the dividing grooves are different discontinuous depth from the one main surface, first
And a second region having a depth deeper than the first region, and the first region is configured by a first inclined surface inclined with respect to the one main surface in a longitudinal sectional view . In the longitudinal sectional view , the second region has the same opening width as the first region and the same inclination angle as the first slope in the longitudinal cross-sectional view . the first slope is provided on the one main surface side, a second inclined surface having a smaller angle of inclination than the first inclined surface provided on the bottom side, a V-shape, in plan view, the The second region is provided so as to cross the concave portion, and a discontinuous portion having a depth due to the first region and the second region corresponding to each of the plurality of wiring board regions is the concave portion. And the depth of the dividing groove in the first region is the recess. Shallower than the depth, the depth of the second region of the dividing groove is characterized in that deeper than the depth of the recess.

本発明の配線基板は、上記構成の多数個取り配線基板が分割溝に沿って分割されたものであることを特徴とするものである。   The wiring board of the present invention is characterized in that the multi-piece wiring board having the above configuration is divided along the dividing groove.

本発明の電子装置は、上記構成の配線基板に電子部品が搭載されていることを特徴とする。   The electronic device of the present invention is characterized in that an electronic component is mounted on the wiring board having the above-described configuration.

本発明の多数個取り配線基板によれば、第1の領域と第2の領域とは開口側においては連続した同一面である第1の斜面を有しており、また、第2の領域の底部側の第2の斜面は第1の領域の底部よりも凹んで(外側に)位置することとなる。さらに平面視において、第2の領域は凹部を横切るように設けられており、複数の配線基板領域のそれぞれに対応して第1の領域と第2の領域とによる深さの不連続部が凹部を挟むように配置されており、分割溝の第1の領域における深さは凹部の深さよりも浅く、分割溝の第2の領域における深さは凹部の深さよりも深い。そのため、分割溝を中心としてその両側を一方主面側に撓ませて母基板を分割した際に、第1の領域および第2の領域はともに第1の斜面同士が同時に面接触し、第1の領域または第2の領域のいずれか一方の領域のみに力が集中することが抑制され、配線基板に発生する欠けを低減することができる。
According to the multi-cavity wiring board of the present invention , the first region and the second region have the first slope that is the same continuous surface on the opening side, and the second region The second inclined surface on the bottom side is positioned so as to be recessed (outside) from the bottom of the first region . Further, in plan view, the second region is provided so as to cross the concave portion, and a discontinuous portion having a depth due to the first region and the second region corresponds to each of the plurality of wiring board regions. The depth in the first region of the dividing groove is shallower than the depth of the recess, and the depth in the second region of the dividing groove is deeper than the depth of the recess. Therefore , when the mother substrate is divided by bending both sides toward the one main surface with the dividing groove as the center, both the first region and the second region are in surface contact with each other at the same time. It is possible to suppress the force from concentrating on only one of the second region and the second region, and it is possible to reduce chipping generated in the wiring board.

また、本発明の配線基板によれば、上記構成の多数個取り配線基板が分割溝に沿って分割されたものであることから、配線基板の外縁部には欠けの発生が低減されているので、配線基板の外縁を画像認識装置等により良好に認識でき、配線基板の外縁を基準とした配線基板への電子部品の搭載を、良好な位置精度で行なうことができる配線基板となる。   Further, according to the wiring board of the present invention, since the multi-piece wiring board having the above configuration is divided along the dividing grooves, the occurrence of chipping is reduced at the outer edge portion of the wiring board. Thus, the outer edge of the wiring board can be well recognized by an image recognition device or the like, and the electronic component can be mounted on the wiring board with the outer edge of the wiring board as a reference with good positional accuracy.

また、本発明の電子装置によれば、上記構成の配線基板に電子部品が搭載されていることから、電子装置の外縁部にはかけの発生が低減されているので、電子装置の外縁を画像認識装置等により良好に認識でき、電子装置の外縁を基準とした外部電気回路基板への電子装置の搭載を、良好な位置精度で行なうことができる電子装置となる。   Further, according to the electronic device of the present invention, since the electronic component is mounted on the wiring board having the above-described configuration, the occurrence of overhang is reduced on the outer edge portion of the electronic device. The electronic device can be well recognized by a recognition device or the like, and the electronic device can be mounted on the external electric circuit board with reference to the outer edge of the electronic device with good positional accuracy.

本発明の多数個取り配線基板について、添付の図面を参照しつつ説明する。   A multi-piece wiring board of the present invention will be described with reference to the accompanying drawings.

図1(a)は、本発明の多数個取り配線基板を説明するための参考例としての平面図であり、図1(b)は、図1(a)のA−A線断面を示す断面図であり、図1(c)は、図1(a)のB−B線断面を示す断面図である。また、図2(a)は、図1(a)のA部を拡大して示す平面図であり、図2(b)は、図1(b)のA部を拡大して示す断面図であり、図2(c)は、図1(c)のA部を拡大して示す断面図である。図1および図2において、1は母基板、1aは配線基板領域、2(2x,2y)は分割溝、2x1,2y1は第1の領域、2x2,2y2は第2の領域、3は第1の斜面、4は第2の斜面である。
また、これらの図面では省略しているが、各配線基板領域1aの表面および内部には配線導体が形成されている。
FIG. 1A is a plan view as a reference example for explaining a multi-piece wiring board of the present invention, and FIG. 1B is a cross-sectional view showing a cross section taken along line AA of FIG. FIG. 1C is a cross-sectional view showing a cross section taken along line B-B in FIG. FIG. 2A is an enlarged plan view showing a portion A of FIG. 1A, and FIG. 2B is a sectional view showing an enlarged portion A of FIG. FIG. 2C is an enlarged cross-sectional view of a portion A in FIG. 1 and 2, 1 is a mother board, 1a is a wiring board area, 2 (2x, 2y) is a dividing groove, 2x1, 2y1 is a first area, 2x2, 2y2 is a second area, and 3 is a first area. The slope 4 is a second slope.
Although not shown in these drawings, wiring conductors are formed on the surface and inside of each wiring board region 1a.

図1(a)に示す例においては、母基板1に縦横に8個ずつ計64個の配線基板領域1aが配列され、各配線基板領域1aの境界には、縦方向の分割溝2yと横方向の分割溝2xとからなる分割溝2が形成されている。また、64個の配線基板領域1aが縦横に配列された中央部の外周部にはダミー領域が設けられ、ダミー部と配線基板領域1aとの境界にも分割溝が形成されている。そして、縦方向の分割溝2yおよび横方向の分割溝2xはともに、中央の5本が、分割溝2の端部から母基板1の外辺から2つ目の配線基板領域1aまでの領域に母基板1の一方主面からの深さがd1である第1の領域2x1,2y1と、それよりも内側の領域に第1の領域2x1,2y1より深い深さd2である第2の領域2x2,2y2とを有している。   In the example shown in FIG. 1A, a total of 64 wiring board regions 1a are arranged on the mother board 1 in the vertical and horizontal directions, and the dividing grooves 2y in the vertical direction and the horizontal dividing grooves 2y are arranged at the boundaries of the wiring board regions 1a. A dividing groove 2 composed of a dividing groove 2x in the direction is formed. In addition, a dummy region is provided in the outer periphery of the central portion where 64 wiring board regions 1a are arranged vertically and horizontally, and a dividing groove is also formed at the boundary between the dummy part and the wiring substrate region 1a. The vertical dividing groove 2y and the horizontal dividing groove 2x are both located in the center from the end of the dividing groove 2 to the second wiring board region 1a from the outer edge of the mother board 1. The first region 2x1,2y1 having a depth d1 from the one main surface of the mother substrate 1 and the second region 2x2 having a depth d2 deeper than the first region 2x1,2y1 inside the region. , 2y2.

1および図2に示す例のように、複数の配線基板領域1aが縦横に配列された母基板1の一方主面に、配線基板領域1の境界に分割溝2が形成された多数個取り配線基板において、分割溝2は、一方主面からの深さが不連続に異なる、第1の領域2x1,2y1と第1の領域2x1,2y1よりも深さの深い第2の領域2x2,2y2とを備え、第1の領域2x1,2y1は断面が一方主面に対して傾斜した第1の斜面3で構成されたV字型であり、第2の領域2x2,2y2は断面が第1の領域2x1,2y1の開口幅と同じ開口幅で一方主面側に第1の斜面3と同じ傾斜角度の第1の斜面3を備え、底部側に第1の斜面3よりも傾斜角度の小さい第2の斜面4とを備えた、V字状である。
As shown in FIG. 1 and FIG. 2, a large number of pieces in which a dividing groove 2 is formed at the boundary of the wiring board region 1 on one main surface of the mother board 1 in which a plurality of wiring board regions 1 a are arranged vertically and horizontally. In the wiring substrate, the dividing groove 2 has the first regions 2x1, 2y1 and the second regions 2x2, 2y2 which are deeper than the first regions 2x1, 2y1 and have different depths from one main surface. The first regions 2x1 and 2y1 are V-shaped with a first inclined surface 3 whose cross section is inclined with respect to one main surface, and the second regions 2x2 and 2y2 have a first cross-section The first inclined surface 3 having the same opening width as that of the regions 2x1 and 2y1 and having the same inclination angle as that of the first inclined surface 3 is provided on one main surface side, and the first inclination surface 3 has a smaller inclination angle than the first inclined surface 3 on the bottom side. and a second inclined surface 4, Ru V-shaped der.

このような構成としたことから、第1の領域2x1,2y1と第2の領域2x2,2y2とは開口側においては連続した同一面である第1の斜面3を有しており、また、第2の領域2x2,2y2の底部側の第2の斜面4は第1の領域2x1,2y1の底部よりも凹んで(外側に)位置することとなるので、分割溝2を中心としてその両側を一方主面側に撓ませて母基板1を分割した際に、第1の領域2x1,2y1および第2の領域2x2,2y2はともに第1の斜面3同士が同時に面接触し、第1の領域2x1,2y1または第2の領域2x2,2y2のいずれか一方の領域のみに力が集中することが抑制され、配線基板に発生する欠けを低減することができる。   Due to such a configuration, the first regions 2x1, 2y1 and the second regions 2x2, 2y2 have the first slope 3 which is the same continuous surface on the opening side, The second slope 4 on the bottom side of the second regions 2x2 and 2y2 is positioned so as to be recessed (outside) from the bottom of the first regions 2x1 and 2y1, so that both sides of the second groove 2 are centered on the dividing groove 2. When the mother board 1 is divided by being bent toward the main surface side, the first slopes 3 of the first regions 2x1, 2y1 and the second regions 2x2, 2y2 are both in surface contact with each other at the same time. , 2y1 or the second region 2x2, 2y2 can be prevented from concentrating force only on one of the regions, and chipping generated on the wiring board can be reduced.

分割溝2が、一方主面からの深さが不連続に異なる領域を有する例としては、図3〜図5に示す例のようなものもある。図3(a)は、本発明の多数個取り配線基板の実施の形態の一例を示す平面図であり、図3(b)は、図3(a)の多数個取り配線基板を分割して得られる配線基板の斜視図である。図4(a)は、図3(a)のA−A線断面を示す断面図であり、図4(b)は、図3(a)のB−B線断面を示す断面図であり、図4(c)は、図3(a)のC−C線断面を示す断面図である。また、図5(a)は、図3(a)のA部を拡大して示す平面図であり、図5(b)は、図4(a)のA部を拡大して示す断面図であり、図5(c)は、図4(c)のA部を拡大して示す断面図である。図3〜図5において、1bは母基板を分割して得られる配線基板、5は凹部、5aは切欠き部であり、その他の符号は図1および図2と同じものを示す。
As an example in which the dividing groove 2 has regions where the depths from the one main surface are discontinuously different, there are examples as shown in FIGS. FIG. 3A is a plan view showing an example of an embodiment of a multi-piece wiring board according to the present invention, and FIG. 3B is a diagram obtained by dividing the multi-piece wiring board of FIG. It is a perspective view of the wiring board obtained in this way. 4A is a cross-sectional view showing a cross section taken along the line AA of FIG. 3A, and FIG. 4B is a cross-sectional view showing a cross section taken along the line BB of FIG. FIG.4 (c) is sectional drawing which shows the CC line cross section of Fig.3 (a). 5A is an enlarged plan view showing an A portion of FIG. 3A, and FIG. 5B is an enlarged sectional view showing an A portion of FIG. 4A. FIG. 5C is a cross-sectional view showing an enlarged portion A of FIG. 4C. 3 to 5, 1b is a wiring board obtained by dividing the mother board, 5 is a recess, 5a is a notch, and the other reference numerals are the same as those in FIGS.

この例は、図3(b)に示す例のような、外辺部に電子部品等を搭載するための切欠き部5aを有する配線基板1bを得るための多数個取り配線基板の例である。このような多数個取り配線基板においては、図3(a)に示す例のように、2つの配線基板領域1a,1aに跨るような凹部5が形成され、2つの配線基板領域1a,1aの境界には、この凹部5を横切るように分割溝2xが形成される。母基板1を分割溝2xに沿って撓折することにより凹部5が2つに分断され、それぞれ配線基板1bの切欠き部5aとなる。このときの分割溝2xの深さが一様である場合は、分割溝2xの深さが凹部5より深いと母基板1が不用意に割れ易く、逆に凹部5よりも浅いと凹部5の底面が境界線に沿って割れないという問題がある。このため、図4および図5に示す例のように、凹部5を横切る部分(第2の領域2x2)の深さd2は凹部5より深く、それ以外の部分(第1の領域2x1)の深さd1は凹部5より浅くするとよい。このようにすると、凹部5の底面が良好に分割されるとともに、母基板1が不用意に割れることのない多数個取り配線基板となる。凹部5を横切らない縦方向の分割溝2yは一定の深さであり、横方向の分割溝2xの第1の領域2x1と同程度の深さである。   This example is an example of a multi-cavity wiring board for obtaining a wiring board 1b having a notch 5a for mounting an electronic component or the like on the outer side, as in the example shown in FIG. 3B. . In such a multi-piece wiring board, as shown in FIG. 3A, a recess 5 is formed so as to straddle the two wiring board areas 1a and 1a, and the two wiring board areas 1a and 1a are formed. A dividing groove 2x is formed at the boundary so as to cross the recess 5. By bending the mother board 1 along the dividing grooves 2x, the recesses 5 are divided into two parts, which respectively become the notches 5a of the wiring board 1b. If the depth of the dividing groove 2x at this time is uniform, the mother substrate 1 is easily cracked if the depth of the dividing groove 2x is deeper than the recess 5, and conversely if the depth of the recess 5 is shallower than the recess 5, There is a problem that the bottom surface does not break along the boundary line. Therefore, as in the example shown in FIGS. 4 and 5, the depth d2 of the portion (second region 2x2) crossing the recess 5 is deeper than the recess 5, and the depth of the other portion (first region 2x1). The length d1 is preferably shallower than the recess 5. If it does in this way, while the bottom face of the recessed part 5 will be divided | segmented favorably, it will become the multi-piece wiring board by which the mother board 1 does not break carelessly. The vertical dividing groove 2y that does not cross the concave portion 5 has a constant depth, which is about the same depth as the first region 2x1 of the horizontal dividing groove 2x.

また、本発明の配線基板1bは、上記構成の多数個取り配線基板が分割溝2に沿って分割されたものである。このような構成であることから、配線基板1bの外縁部には欠けの発生が抑制されているので、配線基板1bの外縁を画像認識装置等により良好に認識でき、配線基板1bへの電子部品の搭載を、配線基板1bの外縁を基準として、位置精度を良好に行なうことができる配線基板1bとなる。   The wiring board 1b according to the present invention is obtained by dividing the multi-piece wiring board having the above-described configuration along the dividing groove 2. Due to such a configuration, the occurrence of chipping is suppressed at the outer edge portion of the wiring board 1b, so that the outer edge of the wiring board 1b can be well recognized by an image recognition device or the like, and an electronic component to the wiring board 1b is obtained. The wiring board 1b can be mounted with good positional accuracy with reference to the outer edge of the wiring board 1b.

また、本発明の電子装置は、上記構成の配線基板1bに電子部品が搭載されている。このような構成であることから、電子装置の外縁部には欠けの発生が抑制されているので、電子装置の外縁を画像認識装置等により良好に認識でき、外部電気回路基板への電子装置の搭載を、電子装置の外縁を基準として、位置精度を良好に行なうことができる電子装置となる。   In the electronic device of the present invention, electronic components are mounted on the wiring board 1b having the above-described configuration. Due to such a configuration, since the occurrence of chipping is suppressed at the outer edge of the electronic device, the outer edge of the electronic device can be well recognized by an image recognition device or the like, and the electronic device can be connected to the external electric circuit board. The electronic device can be mounted with good positional accuracy with reference to the outer edge of the electronic device.

母基板1は、例えば酸化アルミニウム質焼結体やムライト質焼結体,窒化アルミニウム質焼結体,炭化珪素質焼結体,窒化珪素質焼結体,ガラスセラミックス等のセラミック材料から成る電気絶縁性の絶縁基体の中央部に、タングステンやモリブデン,銅,銀等の金属粉末メタライズから成る配線導体が形成された、複数の配線基板領域1aが縦横に配列形成されたものである。   The base substrate 1 is an electrical insulator made of a ceramic material such as an aluminum oxide sintered body, a mullite sintered body, an aluminum nitride sintered body, a silicon carbide sintered body, a silicon nitride sintered body, or a glass ceramic. A plurality of wiring board regions 1a, in which wiring conductors made of metal powder metallization such as tungsten, molybdenum, copper, silver, etc. are formed in the central part of the conductive insulating substrate, are arranged vertically and horizontally.

絶縁基体は、例えば酸化アルミニウム質焼結体から成る場合であれば、酸化アルミニウム,酸化珪素,酸化マグネシウム,酸化カルシウム等のセラミック原料粉末に適当な有機バインダーおよび溶剤,可塑剤,分散剤等を添加混合して得たセラミックスラリーを従来周知のドクターブレード法等のシート成形方法を採用してシート状に成形してセラミックグリーンシートを得る。しかる後、セラミックグリーンシートに適当な打ち抜き加工を施すとともに必要に応じてこれを複数枚積層して母基板1となる生成形体を作製し、約1500〜1800℃の温度で焼成することで、単数あるいは複数の絶縁層からなるものが製作される。   If the insulating substrate is made of, for example, an aluminum oxide sintered body, an appropriate organic binder, solvent, plasticizer, dispersant, etc. are added to ceramic raw material powders such as aluminum oxide, silicon oxide, magnesium oxide, and calcium oxide. The ceramic slurry obtained by mixing is formed into a sheet by using a conventionally known sheet forming method such as a doctor blade method to obtain a ceramic green sheet. After that, the ceramic green sheet is appropriately punched, and if necessary, a plurality of the green sheets are laminated to produce a formed body to be the mother substrate 1 and fired at a temperature of about 1500 to 1800 ° C. Or what consists of a several insulating layer is manufactured.

配線導体は、絶縁基体の表面や絶縁層間に配置される配線導体層と、絶縁層を貫通して上下に位置する配線導体層同士を電気的に接続する貫通導体とがある。配線導体層は、母基板1用のセラミックグリーンシートにスクリーン印刷法等の印刷手段により配線導体層用のメタライズペーストを印刷塗布し、母基板1用の生成形体とともに焼成することによって形成する。貫通導体は、配線導体を形成するためのメタライズペーストの印刷塗布に先立って母基板1用のセラミックグリーンシートに金型やパンチングによる打ち抜き方法またはレーザ加工等の加工方法により貫通導体用の貫通孔を形成し、この貫通孔に貫通導体用のメタライズペーストをスクリーン印刷法等の印刷手段により充填しておき、母基板1となる生成形体とともに焼成することによって形成する。メタライズペーストは、主成分の金属粉末に有機バインダー,有機溶剤,必要に応じて分散剤等を加えてボールミル,三本ロールミル,プラネタリーミキサー等の混練手段により混合および混練することで作製する。また、セラミックグリーンシートの焼結挙動に合わせたり、焼成後の母基板との接合強度を高めたりするためにガラスやセラミックスの粉末を添加してもよい。貫通導体用のメタライズペーストは、有機バインダーや有機溶剤の種類や添加量により、充填に適した、一般的に配線導体層用のメタライズペーストよりも高い粘度に調整される。   The wiring conductor includes a wiring conductor layer disposed between the surface of the insulating base and the insulating layer, and a through conductor that electrically connects the wiring conductor layers that pass through the insulating layer and are positioned above and below. The wiring conductor layer is formed by printing and applying a metallized paste for the wiring conductor layer on a ceramic green sheet for the mother board 1 by printing means such as a screen printing method, and baking it together with the generated shape for the mother board 1. Prior to the printing and application of the metallized paste for forming the wiring conductor, the through conductor has a through hole for the through conductor formed on the ceramic green sheet for the mother substrate 1 by a punching method using a die or punching or a processing method such as laser processing. It is formed by filling the through hole with a metallized paste for a through conductor by a printing means such as a screen printing method, and firing it together with the formed body to be the mother substrate 1. The metallized paste is prepared by adding an organic binder, an organic solvent, and a dispersant as required to the metal powder of the main component and mixing and kneading by a kneading means such as a ball mill, a three roll mill, a planetary mixer or the like. Further, glass or ceramic powder may be added in order to match the sintering behavior of the ceramic green sheet or to increase the bonding strength with the mother substrate after firing. The metallized paste for through conductors is adjusted to have a higher viscosity than the metallized paste for wiring conductor layers, which is suitable for filling, depending on the type and amount of organic binder or organic solvent.

なお、配線導体の露出する表面には、必要に応じて、ニッケル,金等の耐蝕性に優れる金属が被着される。これにより、配線導体が腐食することを効果的に抑制することができるとともに、配線導体と電子部品との固着、配線導体とボンディングワイヤとの接合、および配線導体と外部電気回路基板の配線導体との接合を強固にすることができる。また、例えば、配線導体の露出する表面には、厚さ1〜10μm程度のニッケルめっき層と厚さ0.1〜3μm程度の金めっき層とが、電解めっき法もしくは無電解めっき法により順次被着される。   In addition, the metal which is excellent in corrosion resistance, such as nickel and gold | metal | money, is adhered to the exposed surface of a wiring conductor as needed. As a result, corrosion of the wiring conductor can be effectively suppressed, the wiring conductor and the electronic component are fixed, the wiring conductor and the bonding wire are joined, and the wiring conductor and the wiring conductor of the external electric circuit board are connected. Can be strengthened. Further, for example, a nickel plating layer having a thickness of about 1 to 10 μm and a gold plating layer having a thickness of about 0.1 to 3 μm are sequentially deposited on the exposed surface of the wiring conductor by an electrolytic plating method or an electroless plating method. The

分割溝2は、母基板1の一方主面の各配線基板領域1aの境界に形成されている。母基板1は、図1(a)および図3(a)に示す例のように、複数の配線基板領域1aが縦横に配列された中央部の外周部に、ダミー領域を有することが好ましい。ダミー領域は、多数個取り配線基板の製造や搬送を容易とするための領域であり、このダミー領域を用いて母基板1となる生成形体や多数個取り配線基板の加工時や搬送時の位置決めあるいは固定等を行うことができる。この場合は、分割溝2は配線基板領域1aとダミー領域との境界にも形成される。このとき、分割溝2の両端部が、最外周に配列される配線基板領域1aと母基板1の外周部との間のダミー領域に位置するように形成しておくと、母基板1の搬送時等に外部から加わる力により母基板1が不用意に割れてしまうことを防止することができるので好ましい。また、複数の配線基板領域1a間にもダミー領域を設けても構わない。この場合は、配線基板領域1aとダミー領域との境界に、上記構造の分割溝2が形成される。   The dividing groove 2 is formed at the boundary of each wiring board region 1 a on one main surface of the mother board 1. As shown in the example shown in FIGS. 1A and 3A, the mother board 1 preferably has a dummy area at the outer periphery of the center where a plurality of wiring board areas 1a are arranged vertically and horizontally. The dummy area is an area for facilitating the manufacture and transportation of the multi-piece wiring board. Using the dummy area, the generated shape to be the mother board 1 and the positioning when the multi-piece wiring board is processed or carried. Alternatively, fixing or the like can be performed. In this case, the dividing groove 2 is also formed at the boundary between the wiring board region 1a and the dummy region. At this time, if both end portions of the dividing groove 2 are formed so as to be positioned in a dummy region between the wiring substrate region 1 a arranged on the outermost periphery and the outer peripheral portion of the mother substrate 1, the mother substrate 1 is transported. It is preferable because the mother substrate 1 can be prevented from being carelessly cracked by an external force applied at times. Further, a dummy region may be provided between the plurality of wiring board regions 1a. In this case, the dividing groove 2 having the above structure is formed at the boundary between the wiring board region 1a and the dummy region.

図6は、図5(a)のA部を拡大して模式的に示す斜視図であり、横方向の分割溝2xの第1の領域2x1と第2の領域2x2との境界部を拡大して示している。図1および図2に示す例においても、第1の領域2x1,2y1と第2の領域2x2,2y2との境界部は同様である。   FIG. 6 is a perspective view schematically showing an enlarged portion A of FIG. 5A, in which the boundary between the first region 2x1 and the second region 2x2 of the horizontal dividing groove 2x is enlarged. It shows. In the example shown in FIGS. 1 and 2, the boundary between the first regions 2x1, 2y1 and the second regions 2x2, 2y2 is the same.

分割溝2は一方主面からの深さが不連続に異なる部分を有しているが、分割溝2の深さが不連続に異なるとは、ある領域(第1の領域2x1,2y1と第2の領域2x2,2y2との境界)において分割溝2(2x,2y)の深さが大きく変化することを示す。すなわち、図1〜図6に示す例のように、例えば、横方向の分割溝2xにおいて、深さd1の第1の領域2x1と、深さd1よりも深い深さd2の第2の領域2x2とが、分割溝2xの長さ方向で隣接しているものである。   The dividing groove 2 has a portion where the depth from one main surface is discontinuously different, but the depth of the dividing groove 2 is discontinuously different from a certain region (the first region 2x1, 2y1 and the first region). 2 shows that the depth of the dividing groove 2 (2x, 2y) changes greatly at the boundary between the regions 2x2 and 2y2. That is, as in the example illustrated in FIGS. 1 to 6, for example, in the lateral dividing groove 2x, the first region 2x1 having a depth d1 and the second region 2x2 having a depth d2 deeper than the depth d1. Are adjacent in the length direction of the dividing groove 2x.

また、分割溝2は、図1〜図6に示す例のように、第1の領域2x1,2y1は、その長さ方向に垂直な縦断面は、一方主面に対して傾斜角度θ1で傾斜した一対の第1の斜面3で構成されたV字型である。第2の領域2x2,2y2は、一方主面側に第1の斜面3の傾斜角度θ1と同じ傾斜角度θ1の一対の第1の斜面3を備え、底部側に第1の斜面3の傾斜角度θ1よりも小さい傾斜角度θ2の一対の第2の斜面4とを備えていることから、その断面形状は斜面が溝の内側に凸に屈曲したV字状である。このようにすると、母基板1を撓ませて分割溝2に沿って破断する際に、分割溝2の底部が応力の集中しやすい形状であるので、その破断が容易かつ正確となる。   Further, as in the example shown in FIG. 1 to FIG. 6, the dividing groove 2 has a vertical cross section perpendicular to the length direction of the first regions 2 x 1 and 2 y 1 inclined at an inclination angle θ 1 with respect to the main surface. It is a V-shape comprised of a pair of first slopes 3. The second region 2x2, 2y2 includes a pair of first slopes 3 having the same slope angle θ1 as the slope angle θ1 of the first slope 3 on one main surface side, and the slope angle of the first slope 3 on the bottom side. Since the pair of second inclined surfaces 4 having an inclination angle θ2 smaller than θ1 is provided, the cross-sectional shape thereof is a V shape in which the inclined surface is bent convexly inside the groove. In this way, when the mother substrate 1 is bent and broken along the dividing groove 2, the bottom of the dividing groove 2 has a shape in which stress is likely to concentrate, so that the breaking is easy and accurate.

ここで、第2の領域2x2,2y2の開口幅w1は、第1の領域2x1,2y1の開口幅w1と同じ開口幅w1であるので、第1の領域2x1,2y1と第2の領域2x2,2y2とは開口側においては連続した同一面である第1の斜面3となり、また、第2の領域2x2,2y2の底部側の第2の斜面4は第1の領域2x1,2y1の底部よりも凹んで(外側に)位置するものとなっていることから上述したような効果が得られる。   Here, since the opening width w1 of the second regions 2x2, 2y2 is the same as the opening width w1 of the first regions 2x1, 2y1, the first regions 2x1, 2y1 and the second regions 2x2, 2y2 is the first slope 3 which is the same continuous surface on the opening side, and the second slope 4 on the bottom side of the second regions 2x2 and 2y2 is more than the bottom of the first regions 2x1 and 2y1. The effect as described above is obtained because it is recessed (outside).

また、母基板1の他方主面側にも、配線基板領域1aの境界に第2の分割溝(図示せず)を形成しておいてもよい。第2の分割溝の底部も起点として母基板1を分割することができ、母基板1を両主面とも配線基板領域1aの境界に沿ってより精度良く分割することができるので好ましい。   Further, a second dividing groove (not shown) may be formed on the other main surface side of the mother board 1 at the boundary of the wiring board region 1a. The mother substrate 1 can be divided starting from the bottom of the second dividing groove, and the mother substrate 1 can be divided more accurately along the boundary of the wiring substrate region 1a on both main surfaces.

分割溝2の深さは、絶縁基体の材料や、1つの分割溝2における深さの深い第2の領域2x2,2y2の長さと、深さの浅い第1の領域2x1,2y1の長さとの割合により適宜設定される。図1および図2に示す例のような場合は、深さの深い領域は母基板1の厚みの55〜75%程度に形成され、深さの浅い領域は母基板1の厚みの45〜65%程度に形成される。そして、深さの深い領域と深さの浅い領域との分割溝2の長さ方向における平均深さが、母基板1の厚みの50〜70%程度に形成される。このようにすることで、良好に分割されるとともに、母基板1が不用意に割れることのない多数個取り配線基板となる。なお、母基板1の他方主面側に第2の分割溝を形成している場合、母基板1の厚みに対して、分割溝2の深さと第2の分割溝2の深さの合計が上述の深さとなるように形成される。   The depth of the dividing groove 2 depends on the insulating base material, the length of the second regions 2x2 and 2y2 having a deep depth in one dividing groove 2, and the length of the first regions 2x1 and 2y1 having a small depth. It is set appropriately depending on the ratio. In the case of the example shown in FIGS. 1 and 2, the deep region is formed to be about 55 to 75% of the thickness of the mother substrate 1, and the shallow region is 45 to 65 of the thickness of the mother substrate 1. % Is formed. The average depth in the length direction of the dividing groove 2 between the deep region and the shallow region is formed to be about 50 to 70% of the thickness of the mother substrate 1. By doing in this way, while being divided | segmented favorably, it becomes a multi-piece wiring board by which the mother board 1 does not break carelessly. In addition, when the 2nd division groove is formed in the other main surface side of the motherboard 1, the sum of the depth of the division groove 2 and the depth of the 2nd division groove 2 with respect to the thickness of the motherboard 1 is It is formed to have the above-mentioned depth.

また、図3〜図5に示す例のように、分割溝2が凹部5を横切るような場合は、凹部5を横切る部分の分割溝の深さd2は、凹部5の底部の厚み(凹部5の底面と母基板1の他方主面との間の厚み)の50〜70%程度に形成され、それ以外の部分の分割溝2の深さd1は、母基板1の厚みの50〜70%程度に形成される。   3 to 5, when the dividing groove 2 crosses the recessed portion 5, the depth d2 of the dividing groove in the portion crossing the recessed portion 5 is the thickness of the bottom portion of the recessed portion 5 (the recessed portion 5). The depth d1 of the dividing groove 2 in the other part is 50 to 70% of the thickness of the mother board 1. The thickness between the bottom surface of the mother board 1 and the other main surface of the mother board 1 is approximately 50 to 70%. Formed to a degree.

なお、縦方向の分割溝2yと横方向の分割溝2xとでは、深さや傾斜角度が異なっていても構わない。   It should be noted that the vertical division grooves 2y and the horizontal division grooves 2x may have different depths and inclination angles.

母基板1の一方主面における分割溝2の開口幅は、0.05〜1.0mm程度であると、良好に分割することができ、各配線基板領域1aが小さくならず、分割溝2の形成時に配線基板領域1aが大きく変形することがないので好ましい。   When the opening width of the dividing groove 2 on the one main surface of the mother board 1 is about 0.05 to 1.0 mm, it can be divided satisfactorily, each wiring board region 1a is not reduced, and wiring is formed when the dividing groove 2 is formed. It is preferable because the substrate region 1a is not greatly deformed.

また、分割溝2の第2の領域2x2,2y2の第2の斜面4で構成される底部側の溝の開口幅w2(第1の斜面3と第2の斜面4との境界における開口幅)は、第2の領域2x2,2y2の開口幅w1(一方主面における開口幅)の50%以下とすることが好ましい。言い換えれば、第1の領域2x1,2y1の深さの50%の位置より深い位置に第2の斜面4の上辺が位置するのが好ましい。これにより、母基板1を分割した際に、分割溝2内で広領域にわたって第1の斜面3同士を面接触させやすい。   Further, the opening width w2 of the groove on the bottom side constituted by the second slopes 4 of the second regions 2x2 and 2y2 of the dividing groove 2 (opening width at the boundary between the first slope 3 and the second slope 4). Is preferably 50% or less of the opening width w1 (opening width on one main surface) of the second regions 2x2 and 2y2. In other words, the upper side of the second slope 4 is preferably located at a position deeper than 50% of the depth of the first region 2x1, 2y1. Thereby, when the mother substrate 1 is divided, the first inclined surfaces 3 are easily brought into surface contact with each other over a wide area in the dividing groove 2.

凹部5が形成されている場合の、分割溝2xの深さの深い部分の長さは、凹部5の大きさに応じたものとなる。凹部5の底面の下方にバリや欠けが発生することなく良好に分割されるには、凹部5の底面に分割溝2xが形成されるのが好ましく、そのためには、分割溝2xの第2の領域2x2の長さは、図3〜図5に示す例のように凹部5の長さ以上であることが好ましい。   When the recess 5 is formed, the length of the deep part of the dividing groove 2x depends on the size of the recess 5. In order to divide satisfactorily without the occurrence of burrs or chips below the bottom surface of the recess 5, it is preferable to form the split groove 2x on the bottom surface of the recess 5, and for this purpose, the second of the split groove 2x The length of the region 2x2 is preferably equal to or longer than the length of the recess 5 as in the examples shown in FIGS.

図7および図8は、本発明の多数個取り配線基板を製造する工程の一例を示す断面図である。図7および図8において、1’は母基板1となる生成形体、2x1’,2x2’はそれぞれ横方向の分割溝2xの第1の領域2x1,第2の領域2x2となる切り込み、2y1’,2y2’はそれぞれ縦方向の分割溝2yの第1の領域2y1,第2の領域2y2となる切込み、6(6x(6x1,6x2,6x3),6y(6y1,6y2,6y3))はカッター刃である。これらの図面は、図2(c)に示す部分の、分割溝2(2x(2x1,2x2),2y(2y1,2y2))となる切込み2’(2x’(2x1’,2x2’),2y’(2y1’,2y2’))を生成形体1’に形成する工程を示すものである。   7 and 8 are cross-sectional views showing an example of a process for manufacturing the multi-cavity wiring board of the present invention. 7 and 8, 1 ′ is a generated shape that becomes the mother substrate 1, and 2x1 ′ and 2x2 ′ are cuts that become the first region 2x1 and the second region 2x2 of the lateral dividing grooves 2x, respectively, 2y1 ′, 2y2 ′ is the first region 2y1 and second region 2y2 of the vertical dividing groove 2y, and 6 (6x (6x1, 6x2, 6x3), 6y (6y1, 6y2, 6y3)) is a cutter blade. is there. These drawings show notches 2 '(2x' (2x1 ', 2x2'), 2y that become the division grooves 2 (2x (2x1, 2x2), 2y (2y1, 2y2)) in the portion shown in FIG. '(2y1', 2y2 ')) is formed in the generated feature 1'.

分割溝2は、例えば、以下のようにして形成する。まず、図7(a)に示す例のように、カッター刃6y1を母基板1となる生成形体1’に押し付けて縦方向の分割溝2yの第1の領域2y1および第2の領域2y2の開口側となる、焼成後に深さd1となる深さd1’の切込み2y1’を形成する。次に、図7(b)に示す例のように、切込み2y1’の上から切込み2y2’の底部側に対応する形状のカッター刃6y2を生成形体1’に押し付けて縦方向の分割溝2yの第2の領域2y2となる、焼成後に深さd2となる深さd2’の切込み2y2’の底部側を形成することにより分割溝2yとなる切込み2y’が形成される。そして、図7(c)および図7(d)に示す例のように、切込み2y’の形成と同様にして、カッター刃6x1,6x2を生成形体1’に押し付け、第1の領域2x1および第2の領域2x2を有する横方向の分割溝2xとなる切込み2x’(2x1’,2x2’)を形成する。   The dividing groove 2 is formed as follows, for example. First, as in the example shown in FIG. 7A, the cutter blade 6y1 is pressed against the generated shaped body 1 ′ to be the base substrate 1 to open the first region 2y1 and the second region 2y2 in the longitudinal dividing groove 2y. A notch 2y1 ′ having a depth d1 ′ that becomes the depth d1 after firing is formed on the side. Next, as in the example shown in FIG. 7B, the cutter blade 6y2 having a shape corresponding to the bottom side of the notch 2y2 ′ is pressed against the generated shape 1 ′ from above the notch 2y1 ′ to form the longitudinal dividing groove 2y. By forming the bottom side of the notch 2y2 ′ having the depth d2 ′ that becomes the depth d2 after firing, which becomes the second region 2y2, the notch 2y ′ that becomes the dividing groove 2y is formed. Then, as in the example shown in FIGS. 7C and 7D, the cutter blades 6x1 and 6x2 are pressed against the generated shape 1 ′ in the same manner as the formation of the cut 2y ′, and the first region 2x1 and the first region 2x1 A notch 2x ′ (2 × 1 ′, 2x2 ′) is formed to be a horizontal dividing groove 2x having two regions 2x2.

また、図7においては、分割溝2x,2yとなる切込み2x’,2y’の第2の領域2x2,2y2となる切込み2x2’,2y2’を形成するのに、切込み2x1’,2y1’および切込み2x2’,2y2’の開口側用のカッター刃6x1,6y1と、切込み2x2’,2y2’の底部側用のカッター刃6x2,6y2との2つを用いているが、図8に示す例のように、切込み2x’,2y’の形状に対応した1つのカッター刃6x3,6y3を用いて形成しても構わない。   Further, in FIG. 7, in order to form the notches 2x2 ′ and 2y2 ′ to be the second regions 2x2 and 2y2 of the notches 2x ′ and 2y ′ to be the divided grooves 2x and 2y, the notches 2x1 ′ and 2y1 ′ and the notches are formed. Two cutter blades 6x1 and 6y1 for the opening side of 2x2 'and 2y2' and two cutter blades 6x2 and 6y2 for the bottom side of the cuts 2x2 'and 2y2' are used, as in the example shown in FIG. Alternatively, one cutter blade 6x3, 6y3 corresponding to the shape of the cuts 2x ′, 2y ′ may be used.

図9(a)および図9(b)は、図3〜図5に示す例の多数個取り配線基板を製造する際に用いられるカッター刃の一例を示す斜視図である。第2の領域2x2を有する横方向の分割溝2xとなる切込み2x’を形成するために用いられるカッター刃である。図9(a)は、図7に示す例のように、第2の領域2x2となる切込み2x2’を形成するのに2つのカッター刃を用いる場合のものであり、切込み2x1’および切込み2x2’の開口側用のカッター刃6x1、切込み2x2’の底部側用のカッター刃6x2を示す。図9(b)は、図8に示す例のように、第2の領域2x2となる切込み2x2’を形成するのに1つのカッター刃を用いる場合のカッター刃6x3である。図3〜図5に示す例の多数個取り配線基板を製造する際に縦方向の分割溝2yとなる切込み2y’を形成するには、図9(a)の切込み2x1’および切込み2x2’の開口側用のカッター刃6x1と同様のものを用いればよい。   FIG. 9A and FIG. 9B are perspective views showing an example of a cutter blade used when manufacturing the multi-cavity wiring board of the example shown in FIGS. It is a cutter blade used for forming a cut 2x 'that becomes a lateral dividing groove 2x having a second region 2x2. FIG. 9A shows a case where two cutter blades are used to form the cut 2x2 ′ to be the second region 2x2, as in the example shown in FIG. 7, and the cut 2x1 ′ and the cut 2x2 ′. The cutter blade 6x1 for the opening side and the cutter blade 6x2 for the bottom side of the cut 2x2 'are shown. FIG. 9B shows a cutter blade 6x3 when one cutter blade is used to form the cut 2x2 'that becomes the second region 2x2 as in the example shown in FIG. In order to form the notches 2y ′ that become the vertical dividing grooves 2y when the multi-cavity wiring board of the example shown in FIGS. 3 to 5 is manufactured, the notches 2x1 ′ and 2x2 ′ in FIG. What is necessary is just to use the same thing as the cutter blade 6x1 for opening sides.

図7および図8に示す例では、複数の切込み2y’を同時に形成しているが、1つずつ形成してもよい。また、縦方向の切込み2y’を形成した後に横方向の切込み2x’を形成しているが、逆順でもよいし、縦横のカッター刃が一体的に形成された金型を用いて両方同時に行なってもよい。   In the example shown in FIGS. 7 and 8, a plurality of cuts 2y 'are formed simultaneously, but they may be formed one by one. Further, the horizontal cut 2x ′ is formed after the vertical cut 2y ′ is formed, but the reverse order may be used, or both may be performed simultaneously using a mold in which the vertical and horizontal cutter blades are integrally formed. Also good.

なお、図7のように、2つのカッター刃6を用いて切込みを形成した場合、母基板1となる生成形体1’にカッター刃6により2回に分割して切込みを形成するので、1つのカッター刃6により1回で切込みを深く形成する場合と比較して、生成形体1’の弾性により、第2の領域2x2,2y2の一対の第2の斜面4間の開口幅w2が小さくなりにくいので、分割溝2を精度良く形成することができる。   In addition, as shown in FIG. 7, when the cut is formed using two cutter blades 6, the generated shape 1 ′ to be the base substrate 1 is divided into two by the cutter blade 6 to form the cut. The opening width w2 between the pair of second inclined surfaces 4 in the second regions 2x2 and 2y2 is less likely to be smaller due to the elasticity of the generated shape 1 ', compared to the case where the cutting is deeply formed by the cutter blade 6 once. Therefore, the dividing groove 2 can be formed with high accuracy.

凹部5は、そこに搭載される電子部品等の大きさや数量に応じた大きさとすればよい。また、図3に示す例は、1つの配線基板1bの対向する1対の外辺に切欠き部5aを有する場合であるが、必要とされる切欠き部5aの数、位置、および形状に応じた凹部5とすればよい。凹部5の内面には、電子部品の端子が接続される配線導体を有する。   The recessed part 5 should just be the magnitude | size according to the magnitude | size and quantity of electronic components etc. which are mounted there. In addition, the example shown in FIG. 3 is a case where notches 5a are provided on a pair of opposing outer sides of one wiring board 1b, but the number, position, and shape of the notches 5a required are different. The corresponding concave portion 5 may be used. The inner surface of the recess 5 has a wiring conductor to which a terminal of the electronic component is connected.

凹部5は、母基板1用のセラミックグリーンシートのいくつかに凹部5用の貫通孔を金型やパンチングによる打ち抜き方法またはレーザ加工等の加工方法により形成しておいて積層し、一方主面に開口した凹部5’を有する生成形体1’を作製すればよい。   The concave portion 5 is formed by laminating a plurality of ceramic green sheets for the mother substrate 1 by forming through holes for the concave portion 5 by a punching method using a die or punching or a processing method such as laser processing. What is necessary is just to produce the production | generation form 1 'which has the recessed part 5' opened.

母基板1の各配線基板領域1aには、切欠き部5aとなる凹部5とは別の、分割溝2と交わらない位置に、電子部品を収納するための凹部、いわゆるキャビティを設けてもよい。母基板1の一方主面の各キャビティの周囲には、蓋体を接合するためのシールリングを配線導体と同様の方法で形成してもよい。   Each wiring board region 1a of the mother board 1 may be provided with a so-called cavity for storing electronic components at a position not intersecting with the dividing groove 2 other than the recessed part 5 serving as the notch part 5a. . A seal ring for joining the lid may be formed around each cavity on the one main surface of the mother board 1 in the same manner as the wiring conductor.

このような多数個取り配線基板を分割溝2に沿って分割することにより複数の配線基板1bが作製され、配線基板1b上に電子部品を搭載することにより電子装置が作製される。多数個取り配線基板の各配線基板領域1aにそれぞれ電子部品を搭載した後に、分割溝2に沿って分割することで電子装置を作製してもよい。   A plurality of wiring boards 1b are produced by dividing such a multi-piece wiring board along the dividing grooves 2, and an electronic device is produced by mounting electronic components on the wiring board 1b. The electronic device may be fabricated by dividing along the dividing grooves 2 after mounting electronic components on each wiring board region 1a of the multi-cavity wiring board.

配線基板1b上に搭載される電子部品は、ICチップやLSIチップ等の半導体素子、水晶振動子や圧電振動子等の圧電素子、各種センサ等である。   Electronic components mounted on the wiring board 1b are semiconductor elements such as IC chips and LSI chips, piezoelectric elements such as crystal oscillators and piezoelectric vibrators, and various sensors.

電子部品の搭載は、例えば、電子部品がフリップチップ型の半導体素子である場合には、はんだバンプや金バンプ、または導電性樹脂(異方性導電樹脂等)を介して、半導体素子の電極と配線導体とを電気的に接続することにより行なわれる。あるいは、例えば、電子部品がワイヤボンディング型の半導体素子である場合には、ガラス,樹脂,ろう材等の接合材により固定した後、ボンディングワイヤを介して半導体素子の電極と配線導体とを電気的に接続することにより行なわれる。また、例えば、電子部品が水晶振動子等の圧電素子である場合には、導電性樹脂により圧電素子の固定と圧電素子の電極と配線導体との電気的な接続を行なう。また、必要に応じて、電子部品の周囲や切欠き部5a内に抵抗素子や容量素子等の小型の電子部品を搭載してもよい。   For example, when the electronic component is a flip chip type semiconductor element, the electronic component is mounted on the electrode of the semiconductor element via a solder bump, a gold bump, or a conductive resin (anisotropic conductive resin, etc.). This is done by electrically connecting the wiring conductor. Alternatively, for example, when the electronic component is a wire bonding type semiconductor element, the electrode and the wiring conductor of the semiconductor element are electrically connected to each other through a bonding wire after being fixed with a bonding material such as glass, resin, or brazing material. This is done by connecting to. Further, for example, when the electronic component is a piezoelectric element such as a crystal resonator, the piezoelectric element is fixed and the electrode of the piezoelectric element and the wiring conductor are electrically connected by a conductive resin. Moreover, you may mount small electronic components, such as a resistive element and a capacitive element, around the electronic component and in the notch part 5a as needed.

そして、電子部品は、必要に応じて封止される。封止は、エポキシ樹脂等の封止樹脂で電子部品を覆ったり、電子部品を覆うようにして載置した樹脂や金属、セラミックスからなる蓋体をガラス,樹脂,ろう材等の接着剤により配線基板に接合したりすればよい。   And an electronic component is sealed as needed. For sealing, cover the electronic parts with a sealing resin such as epoxy resin, or wire the lid made of resin, metal, or ceramic placed so as to cover the electronic parts with an adhesive such as glass, resin, or brazing material. What is necessary is just to join to a board | substrate.

なお、本発明は、本発明の要旨を逸脱しない範囲であれば種々の変更は可能である。例えば、上記した例においては、1つの分割溝2は、2つの深さd1,d2を有しているが、3つ以上の深さを有するものであっても構わない。この場合、第1の領域2x1,2y1より深さの深いそれぞれの領域は、第1の領域2x1,2y1の開口幅と同じ開口幅で、一方主面側に第1の斜面3と同じ傾斜角度の、第1の領域の第1の斜面に連続する第1の斜面3を備え、より底部側の斜面の傾斜角度を小さくするように形成しておけばよい。   The present invention can be variously modified without departing from the gist of the present invention. For example, in the above-described example, one division groove 2 has two depths d1 and d2, but may have three or more depths. In this case, each region deeper than the first region 2x1,2y1 has the same opening width as the opening width of the first region 2x1,2y1, and the same inclination angle as that of the first inclined surface 3 on one main surface side. The first slope 3 may be provided so as to be continuous with the first slope in the first region, and the slope angle of the slope on the bottom side may be made smaller.

(a)は本発明の多数個取り配線基板を説明するための参考例としての平面図であり、(b)は(a)のA−A線断面を示す断面図であり、(c)は(a)のB−B線断面を示す断面図である。(A) is a top view as a reference example for demonstrating the multi-piece wiring board of this invention, (b) is sectional drawing which shows the AA line cross section of (a), (c) is It is sectional drawing which shows the BB line cross section of (a). (a)は図1(a)のA部を拡大して示す平面図であり、(b)は図1(b)のA部を拡大して示す断面図であり、(c)は図1(c)のA部を拡大して示す断面図である。1A is an enlarged plan view showing an A part of FIG. 1A, FIG. 1B is an enlarged sectional view showing an A part of FIG. 1B, and FIG. It is sectional drawing which expands and shows the A section of (c). (a)は本発明の多数個取り配線基板の実施の形態の一例を示す平面図であり、(b)は(a)の多数個取り配線基板を分割して得られる配線基板の斜視図である。(A) is a top view which shows an example of embodiment of the multi-cavity wiring board of this invention, (b) is a perspective view of the wiring board obtained by dividing | segmenting the multi-cavity wiring board of (a). It is. (a)は図3(a)のA−A線断面を示す断面図であり、(b)は図3(a)のB−B線断面を示す断面図であり、(c)は図3(a)のC−C線断面を示す断面図である。(A) is sectional drawing which shows the AA line cross section of Fig.3 (a), (b) is sectional drawing which shows the BB sectional view of Fig.3 (a), (c) is FIG.3. It is sectional drawing which shows the CC line cross section of (a). (a)は図3(a)のA部を拡大して示す平面図であり、(b)は図4(a)のA部を拡大して示す平面図であり、(c)は図4(c)のA部を拡大して示す平面図である。FIG. 4A is an enlarged plan view showing an A portion of FIG. 3A, FIG. 4B is an enlarged plan view showing an A portion of FIG. 4A, and FIG. It is a top view which expands and shows the A section of (c). 図5(a)のA部を拡大して模式的に示す斜視図である。It is a perspective view which expands and schematically shows the A section of Fig.5 (a). (a)〜(d)は、本発明の多数個取り配線基板を製造する工程の一例を示す断面図である。(A)-(d) is sectional drawing which shows an example of the process of manufacturing the multi-piece wiring board of this invention. (a)〜(b)は、本発明の多数個取り配線基板を製造する工程の一例を示す断面図である。(A)-(b) is sectional drawing which shows an example of the process of manufacturing the multi-piece wiring board of this invention. (a)および(b)は、本発明の多数個取り配線基板を製造する際に用いられるカッター刃の一例を示す斜視図である。(A) And (b) is a perspective view which shows an example of the cutter blade used when manufacturing the multi-piece wiring board of this invention. (a)は従来の多数個取り配線基板の形態の一例を示す平面図であり、(b)は(a)のA−A線断面を示す断面図であり、(c)は(a)のB−B線断面を示す断面図である。(A) is a top view which shows an example of the form of the conventional multi-cavity wiring board, (b) is sectional drawing which shows the AA cross section of (a), (c) is (a). It is sectional drawing which shows a BB line cross section.

符号の説明Explanation of symbols

1・・・・母基板
1a・・・配線基板領域
1b・・・配線基板
2・・・・分割溝
3・・・・第1の斜面
4・・・・第2の斜面
5・・・・凹部
6・・・・カッター刃
DESCRIPTION OF SYMBOLS 1 ... Mother board 1a ... Wiring board area | region 1b ... Wiring board 2 ... Dividing groove 3 ... First slope 4 ... Second slope 5 ... Recess 6 ... Cutter blade

Claims (3)

複数の配線基板領域が縦横に配列された母基板の一方主面における前記複数の配線基板領域の境界に設けられた分割溝と前記境界の一部分に跨るように前記複数の配線基板領域のそれぞれに対応して配置された凹部とを有する多数個取り配線基板において、
前記分割溝は、前記一方主面からの深さが不連続に異なる、第1の領域と該第1の領域よりも深さの深い第2の領域とを備え、
断面において、前記第1の領域は、前記一方主面に対して傾斜した第1の斜面で構成されたV字型であり、
断面において、前記第2の領域は、前記一方主面において前記第1の領域と同じ開口幅を有しているとともに前記第1の斜面と同じ傾斜角度を有している第1の斜面を前記一方主面側に備え、前記第1の斜面よりも小さい傾斜角度を有する第2の斜面を底部側に備えた、V字状であり、
平面視において、前記第2の領域は前記凹部を横切るように設けられており、前記複数の配線基板領域のそれぞれに対応して前記第1の領域と前記第2の領域とによる深さの不連続部が前記凹部を挟むように配置されており、
前記分割溝の前記第1の領域における深さは前記凹部の深さよりも浅く、前記分割溝の前記第2の領域における深さは前記凹部の深さよりも深いことを特徴とする多数個取り配線基板。
A plurality of wiring substrate regions each of the plurality of wiring substrate regions so as to extend over a portion of the the divided groove provided on a boundary of the plurality of wiring boards region definitive on one main surface of the mother board which is arranged vertically and horizontally boundary In a multi- cavity wiring board having recesses arranged corresponding to
The dividing groove, wherein the different discontinuous depth from one main surface, and a deep second region depth than the first region and the first region,
In a longitudinal sectional view , the first region is a V-shape configured by a first inclined surface inclined with respect to the one main surface,
In a longitudinal sectional view , the second region has a first inclined surface having the same opening width as the first region on the one main surface and the same inclination angle as the first inclined surface. the one provided on the main surface side, a second inclined surface having a smaller angle of inclination than the first inclined surface provided on the bottom side, Ri V-der,
In plan view, the second region is provided so as to cross the concave portion, and the depth of the first region and the second region corresponding to each of the plurality of wiring board regions is not increased. The continuous part is arranged so as to sandwich the concave part,
The multi- cavity wiring , wherein the depth of the dividing groove in the first region is shallower than the depth of the recess, and the depth of the dividing groove in the second region is deeper than the depth of the recess. substrate.
請求項1に記載の多数個取り配線基板が前記分割溝に沿って分割されたものであることを特徴とする配線基板。   The wiring board according to claim 1, wherein the multi-cavity wiring board according to claim 1 is divided along the dividing groove. 請求項2に記載の配線基板に電子部品が搭載されていることを特徴とする電子装置。   An electronic device, wherein an electronic component is mounted on the wiring board according to claim 2.
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