JP5426966B2 - 半導体集積回路装置 - Google Patents
半導体集積回路装置 Download PDFInfo
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Description
前記第2の半導体チップ群は、前記第1の半導体チップ群の最上層の半導体チップに対して前記他方の対向辺を一致させるとともに、前記一方の対向辺を前記他方の対向辺の延在方向に沿った第2の方向に順次所定のピッチでずらして積層した複数枚の半導体チップからなり、前記第3の半導体チップ群は、前記第2の半導体チップ群の最上層の半導体チップに対して前記一方の対向辺を一致させるとともに、前記他方の対向辺を前記第1の方向と反対方向の第3の方向に順次所定のピッチでずらして積層した前記第1の半導体チップ群と同じ枚数の半導体チップからなり、前記第4の半導体チップ群は、前記第3の半導体チップ群の最上層の半導体チップに対して前記他方の対向辺を一致させるとともに、前記一方の対向辺を前記第2の方向と反対方向の第4の方向に順次所定のピッチでずらして積層した前記第2の半導体チップ群と同じ枚数の半導体チップからなる。
{(30μm+5μm)×8+(60μm+5μm)×2}×8=3,280μm
になる。
{(30μm+5μm)×8}×8=2,240μm
になり、68%に減る。
なお、この実施例4は上記の実施例1のNANDメモリチップC2を基点として積層を開始したものである。
12 メモリセル
13 ワード線
14 ビット線
15,16 周辺回路
17 平行コイル
18 送受信器
19 斜めコイル
20 同心二重コイル
21 送信用コイル
22 受信用コイル
C1〜C9 NANDメモリチップ
S1,S2 スペーサ
B1〜B10 接着剤
Claims (8)
- 積層基点となる半導体チップと、前記積層基点となる半導体チップに対して、少なくとも4組の半導体チップ群を積層方向からみた位置をずらして積層した階段型積層半導体集積回路装置であって、
前記第1の半導体チップ群は、前記積層基点となる半導体チップに対して、半導体チップの二対の対向辺の内、一方の対向辺を一致させるとともに、他方の対向辺を前記一方の対向辺の延在方向に沿った第1の方向に順次所定のピッチでずらして積層した複数枚の半導体チップからなり、
前記第2の半導体チップ群は、前記第1の半導体チップ群の最上層の半導体チップに対して前記他方の対向辺を一致させるとともに、前記一方の対向辺を前記他方の対向辺の延在方向に沿った第2の方向に順次所定のピッチでずらして積層した複数枚の半導体チップからなり、
前記第3の半導体チップ群は、前記第2の半導体チップ群の最上層の半導体チップに対して前記一方の対向辺を一致させるとともに、前記他方の対向辺を前記第1の方向と反対方向の第3の方向に順次所定のピッチでずらして積層した前記第1の半導体チップ群と同じ枚数の半導体チップからなり、
前記第4の半導体チップ群は、前記第3の半導体チップ群の最上層の半導体チップに対して前記他方の対向辺を一致させるとともに、前記一方の対向辺を前記第2の方向と反対方向の第4の方向に順次所定のピッチでずらして積層した前記第2の半導体チップ群と同じ枚数の半導体チップからなる階段型積層半導体集積回路装置。 - 積層基点となる半導体チップと、前記積層基点となる半導体チップに対して、少なくとも4組の半導体チップ群を積層方向からみた位置をずらして積層した階段型積層半導体集積回路装置であって、
前記第1の半導体チップ群は、前記積層基点となる半導体チップに対して、半導体チップの二対の対向辺の内、一方の対向辺を一致させるとともに、他方の対向辺を前記一方の対向辺の延在方向に沿った第1の方向に順次第1の所定ピッチでずらして積層した少なくとも一枚の半導体チップを有する第1のサブチップ群と、
前記第1のサブチップ群の最上層の半導体チップに対して前記他方の対向辺を一致させるとともに、前記一方の対向辺を前記他方の対向辺の延在方向に沿った第2の方向に順次第2の所定ピッチでずらして積層した少なくとも1枚の半導体チップを有する第2のサブチップ群とからなり、
前記第2の半導体チップ群は、前記第2のサブチップ群の最上層の半導体チップに対して、前記他方の対向辺を一致させるとともに、前記一方の対向辺を前記他方の対向辺の延在方向に沿った第2の方向に順次第2の所定ピッチでずらして積層した少なくとも1枚の半導体チップを有する第3のサブチップ群と、
前記第3のサブチップ群の最上層の半導体チップに対して前記一方の対向辺を一致させるとともに、前記他方の対向辺を前記第1の方向と反対方向の第3の方向に順次第1の所定ピッチでずらして積層した少なくとも1枚の半導体チップを有する第4のサブチップ群とからなり、
前記第3の半導体チップ群は、前記第4のサブチップ群の最上層の半導体チップに対して、前記他方の対向辺を前記第3の方向に順次第1の所定ピッチでずらして積層した少なくとも1枚の半導体チップを有する第5のサブチップ群と、
前記第5のサブチップ群の最上層の半導体チップに対して前記他方の対向辺を一致させるとともに、前記一方の対向辺を前記第2の方向と反対方向の第4の方向に順次第2の所定ピッチでずらして積層した少なくとも1枚の半導体チップを有する第6のサブチップ群とからなり、
前記第4の半導体チップ群は、前記第6のサブチップ群の最上層の半導体チップに対して前記他方の対向辺を一致させるとともに、前記一方の対向辺を前記第4の方向に順次第2の所定ピッチでずらして積層した少なくとも1枚の半導体チップを有する第7のサブチップ群と、
前記第7のサブチップ群の最上層の半導体チップに対して、前記一方の対向辺を一致させるとともに、前記他方の対向辺を前記第1の方向に順次第1の所定ピッチでずらして積層した少なくとも一枚の半導体チップを有する第8のサブチップ群とからなり、
前記第1のサブチップ群の枚数と前記第8のサブチップ群の枚数の和と、前記第4のサブチップ群の枚数と前記第5のサブチップ群の枚数の和とが等しく、且つ、前記第2のサブチップ群の枚数と前記第3のサブチップ群の枚数の和と、前記第6のサブチップ群の枚数と前記第7のサブチップ群の枚数の和とが等しい階段型積層半導体集積回路装置。 - 前記各半導体チップは、前記半導体チップの4辺に沿って電源用パッドと接地用パッドとを少なくとも有するとともに、チップ間通信用の送受信用コイルを備えている請求項1または請求項2に記載の階段型積層半導体集積回路装置。
- 前記各半導体チップは、前記半導体チップの隣接する2辺に沿ってのみ電源用パッドと接地用パッドとを少なくとも有するとともに、チップ間通信用の送受信用コイルを備え、且つ、前記第2の半導体チップ群の最上層の半導体チップから前記第4の半導体チップ群の最上層から一つ下層の半導体チップまでを前記最下層の半導体チップに対して水平方向において180°回転して積層されている請求項1に記載の階段型積層半導体集積回路装置。
- 前記送受信用コイルの主要部は矩形状であり、且つ、前記矩形状の主要部を構成する複数のコイル要素の延在方向が、前記半導体チップの主要な配線方向に対して傾斜している請求項1乃至請求項4のいずれか1項に記載の階段型積層半導体集積回路装置。
- 積層基点となる半導体チップと、前記積層基点となる半導体チップに対して、少なくとも4組の半導体チップ群を積層方向からみた位置をずらして積層した階段型積層半導体集積回路装置であって、
前記第1の半導体チップ群は、前記積層基点となる半導体チップに対して、半導体チップの隣接する2辺の内の第1の辺に対して第1の方向に第1の所定のピッチでずらすとともに前記2辺の内の第2の辺に対して第2の方向に第2の所定のピッチでずらして積層した複数枚の半導体チップからなり、
前記第2の半導体チップ群は、前記第1の半導体チップ群の最上層の半導体チップに対して前記第1の方向に前記第1の所定のピッチでずらすとともに、前記第2の方向と反対の第3の方向に前記第2の所定のピッチでずらして積層した複数枚の半導体チップからなり、
前記第3の半導体チップ群は、前記第2の半導体チップ群の最上層の半導体チップに対して前記第1の方向と反対方向の第4の方向に前記第1の所定のピッチでずらすとともに、前記第3の方向に前記第2の所定のピッチでずらして積層した前記第1の半導体チップ群と同じ枚数の半導体チップからなり、
前記第4の半導体チップ群は、前記第3の半導体チップ群の最上層の半導体チップに対して前記半導体チップを第4の方向に前記第1の所定のピッチでずらすとともに、前記第2の方向に前記第2の所定のピッチでずらして積層した前記第2の半導体チップ群と同じ枚数の半導体チップからなる階段型積層半導体集積回路装置。 - 前記各半導体チップは、前記半導体チップの4辺に沿って電源用パッドと接地用パッドとを少なくとも有するとともに、チップ間通信用の送受信用コイルを備えている請求項6に記載の階段型積層半導体集積回路装置。
- 積層基点となる半導体チップと、前記積層基点となる半導体チップに対して、少なくとも3組の半導体チップ群を積層方向からみた位置をずらして積層した階段型積層半導体集積回路装置であって、
前記第1の半導体チップ群は、前記積層基点となる半導体チップに対して、前記半導体チップの二対の対向辺の内、一方の対向辺を一致させるとともに、他方の対向辺を前記一方の対向辺の延在方向に沿った第1の方向に順次所定のピッチでずらして積層した所定枚数の半導体チップからなり、
前記第2の半導体チップ群は、第1のスペーサを介して、最下層の半導体チップを前記第1の半導体チップ群の最上層の半導体チップに一致させるとともに、前記一方の対向辺を一致させるとともに、前記第1の方向と反対方向に順次前記所定のピッチでずらして積層した前記第1の半導体チップ群の2倍或いは2倍±1の枚数の半導体チップからなり、
前記第3の半導体チップ群は、第2のスペーサを介して、最下層の半導体チップを前記第2の半導体チップ群の最上層の半導体チップに一致させるとともに、前記一方の対向辺を一致させるとともに、前記第1の方向と反対方向に順次前記所定のピッチでずらして積層した前記第2の半導体チップ群より少ないか或いは同じ枚数の半導体チップからなり、
前記各半導体チップは、前記他方の対向辺の少なくとも一方に沿って電源用パッドと接地用パッドとを少なくとも有するとともに、主要部が矩形状のチップ間通信用の送受信用コイルを備えている階段型積層半導体集積回路装置。
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