JP5425351B1 - 光透過性導電性フィルム、その製造方法及びその用途 - Google Patents
光透過性導電性フィルム、その製造方法及びその用途 Download PDFInfo
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- JP5425351B1 JP5425351B1 JP2013541094A JP2013541094A JP5425351B1 JP 5425351 B1 JP5425351 B1 JP 5425351B1 JP 2013541094 A JP2013541094 A JP 2013541094A JP 2013541094 A JP2013541094 A JP 2013541094A JP 5425351 B1 JP5425351 B1 JP 5425351B1
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- light
- light transmissive
- conductive film
- optical adjustment
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- 238000004519 manufacturing process Methods 0.000 title description 10
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims abstract description 90
- 239000010408 film Substances 0.000 claims abstract description 90
- 230000003287 optical effect Effects 0.000 claims abstract description 78
- 238000000034 method Methods 0.000 claims abstract description 34
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims abstract description 25
- 238000005259 measurement Methods 0.000 claims abstract description 20
- 239000010409 thin film Substances 0.000 claims abstract description 15
- 239000002245 particle Substances 0.000 claims description 75
- 238000010438 heat treatment Methods 0.000 claims description 8
- 230000003746 surface roughness Effects 0.000 claims description 5
- 230000005540 biological transmission Effects 0.000 abstract description 6
- 239000010410 layer Substances 0.000 description 245
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 48
- 229910003437 indium oxide Inorganic materials 0.000 description 46
- 239000000523 sample Substances 0.000 description 19
- 238000005530 etching Methods 0.000 description 15
- 239000002019 doping agent Substances 0.000 description 14
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- 230000000052 comparative effect Effects 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
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- 239000005020 polyethylene terephthalate Substances 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 3
- 239000002131 composite material Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000010884 ion-beam technique Methods 0.000 description 3
- -1 polyethylene terephthalate Polymers 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910006404 SnO 2 Inorganic materials 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000007733 ion plating Methods 0.000 description 2
- 229920000620 organic polymer Polymers 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
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- 229920001225 polyester resin Polymers 0.000 description 2
- 239000004645 polyester resin Substances 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 229910001887 tin oxide Inorganic materials 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 241000252073 Anguilliformes Species 0.000 description 1
- 229910052684 Cerium Inorganic materials 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- 229930182556 Polyacetal Natural products 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
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- 229920001328 Polyvinylidene chloride Polymers 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 229920000180 alkyd Polymers 0.000 description 1
- 125000005376 alkyl siloxane group Chemical group 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000000084 colloidal system Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005430 electron energy loss spectroscopy Methods 0.000 description 1
- 238000000921 elemental analysis Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- UIWYJDYFSGRHKR-UHFFFAOYSA-N gadolinium atom Chemical compound [Gd] UIWYJDYFSGRHKR-UHFFFAOYSA-N 0.000 description 1
- 229910001938 gadolinium oxide Inorganic materials 0.000 description 1
- 229940075613 gadolinium oxide Drugs 0.000 description 1
- CMIHHWBVHJVIGI-UHFFFAOYSA-N gadolinium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[Gd+3].[Gd+3] CMIHHWBVHJVIGI-UHFFFAOYSA-N 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 229930192419 itoside Natural products 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920006122 polyamide resin Polymers 0.000 description 1
- 239000004431 polycarbonate resin Substances 0.000 description 1
- 229920005668 polycarbonate resin Polymers 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 239000011112 polyethylene naphthalate Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 229920005672 polyolefin resin Polymers 0.000 description 1
- 229920006324 polyoxymethylene Polymers 0.000 description 1
- 229920000069 polyphenylene sulfide Polymers 0.000 description 1
- 229920001709 polysilazane Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229920005990 polystyrene resin Polymers 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 239000005033 polyvinylidene chloride Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/0074—Production of other optical elements not provided for in B29D11/00009- B29D11/0073
- B29D11/00788—Producing optical films
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/0073—Optical laminates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/02—Input arrangements using manually operated switches, e.g. using keyboards or dials
- G06F3/0202—Constructional details or processes of manufacture of the input device
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
- G06F3/0445—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using two or more layers of sensing electrodes, e.g. using two layers of electrodes separated by a dielectric layer
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/13338—Input devices, e.g. touch panels
Landscapes
- Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ophthalmology & Optometry (AREA)
- Human Computer Interaction (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Health & Medical Sciences (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Non-Insulated Conductors (AREA)
- Laminated Bodies (AREA)
- Position Input By Displaying (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Manufacturing Of Electric Cables (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013541094A JP5425351B1 (ja) | 2012-03-23 | 2013-03-22 | 光透過性導電性フィルム、その製造方法及びその用途 |
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012067070 | 2012-03-23 | ||
JP2012067070 | 2012-03-23 | ||
JP2012267511 | 2012-12-06 | ||
JP2012267511 | 2012-12-06 | ||
JP2013541094A JP5425351B1 (ja) | 2012-03-23 | 2013-03-22 | 光透過性導電性フィルム、その製造方法及びその用途 |
PCT/JP2013/058337 WO2013141374A1 (ja) | 2012-03-23 | 2013-03-22 | 光透過性導電性フィルム、その製造方法及びその用途 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013241973A Division JP2014132440A (ja) | 2012-03-23 | 2013-11-22 | 光透過性導電性フィルム、その製造方法及びその用途 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP5425351B1 true JP5425351B1 (ja) | 2014-02-26 |
JPWO2013141374A1 JPWO2013141374A1 (ja) | 2015-08-03 |
Family
ID=49222822
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013541094A Active JP5425351B1 (ja) | 2012-03-23 | 2013-03-22 | 光透過性導電性フィルム、その製造方法及びその用途 |
JP2013241973A Pending JP2014132440A (ja) | 2012-03-23 | 2013-11-22 | 光透過性導電性フィルム、その製造方法及びその用途 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013241973A Pending JP2014132440A (ja) | 2012-03-23 | 2013-11-22 | 光透過性導電性フィルム、その製造方法及びその用途 |
Country Status (5)
Country | Link |
---|---|
JP (2) | JP5425351B1 (ko) |
KR (1) | KR101454148B1 (ko) |
CN (1) | CN103858182B (ko) |
TW (1) | TWI447744B (ko) |
WO (1) | WO2013141374A1 (ko) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5564145B1 (ja) * | 2013-06-21 | 2014-07-30 | 積水化学工業株式会社 | 光透過性導電性フィルム、その製造方法及びその用途 |
JP2015099580A (ja) * | 2013-10-17 | 2015-05-28 | 日東電工株式会社 | 位置センサの製法およびそれによって得られた位置センサ |
JP6422676B2 (ja) * | 2014-06-04 | 2018-11-14 | 日東電工株式会社 | 透明導電性フィルム |
TWI549030B (zh) * | 2014-10-20 | 2016-09-11 | Far Eastern New Century Corp | Conductive transparent laminates, patterned conductive transparent laminates and touch panels |
CN104535597A (zh) * | 2014-12-15 | 2015-04-22 | 惠州Tcl移动通信有限公司 | 触摸屏镀层的检测方法及装置 |
JP6661335B2 (ja) * | 2014-12-22 | 2020-03-11 | 日東電工株式会社 | 透明導電性フィルム |
JP5860558B1 (ja) * | 2015-03-20 | 2016-02-16 | 積水化学工業株式会社 | 光透過性導電性フィルム及びそれを有するタッチパネル |
CN111338500B (zh) * | 2020-02-08 | 2022-09-20 | 业成科技(成都)有限公司 | 改善单层触控感测装置视觉效果的堆栈结构及触控面板 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61183809A (ja) * | 1985-02-08 | 1986-08-16 | 帝人株式会社 | 透明導電性積層体及びその製造方法 |
JPS61227945A (ja) * | 1985-03-30 | 1986-10-11 | Asahi Glass Co Ltd | 電気伝導性ガラス |
JP2948593B2 (ja) * | 1988-08-22 | 1999-09-13 | 日東電工株式会社 | 透明導電性フイルム |
JP4572507B2 (ja) * | 2002-05-23 | 2010-11-04 | 日油株式会社 | 透明導電材料およびタッチパネル |
TWI290328B (en) * | 2002-05-23 | 2007-11-21 | Nof Corp | Transparent conductive laminated film and touch panel |
JP2005071901A (ja) * | 2003-08-27 | 2005-03-17 | Teijin Dupont Films Japan Ltd | 透明導電性積層フィルム |
JP2005116515A (ja) | 2003-09-17 | 2005-04-28 | Teijin Ltd | 透明導電性積層体及び透明タッチパネル |
WO2005036565A1 (ja) * | 2003-10-08 | 2005-04-21 | Teijin Limited | 透明導電性積層体及び透明タッチパネル |
WO2006061964A1 (ja) * | 2004-12-08 | 2006-06-15 | Asahi Glass Company, Limited | 導電膜付き基体およびその製造方法 |
JP2008016698A (ja) | 2006-07-07 | 2008-01-24 | Sony Corp | レーザ光源システムおよびレーザ光源の制御方法 |
JP2010006647A (ja) * | 2008-06-27 | 2010-01-14 | Sumitomo Osaka Cement Co Ltd | 高屈折率透明粒子及びそれを用いた透明複合体 |
CN102043495B (zh) * | 2009-10-21 | 2012-11-21 | 比亚迪股份有限公司 | 一种导电元件及其制备方法、一种触摸屏面板 |
JP5691279B2 (ja) * | 2010-07-26 | 2015-04-01 | 日油株式会社 | 透明導電性フィルム |
CN102157575A (zh) * | 2011-03-28 | 2011-08-17 | 天津师范大学 | 新型多层膜结构的透明导电氧化物薄膜及其制备方法 |
-
2013
- 2013-03-22 JP JP2013541094A patent/JP5425351B1/ja active Active
- 2013-03-22 CN CN201380003369.1A patent/CN103858182B/zh active Active
- 2013-03-22 KR KR1020147014897A patent/KR101454148B1/ko active IP Right Grant
- 2013-03-22 WO PCT/JP2013/058337 patent/WO2013141374A1/ja active Application Filing
- 2013-03-25 TW TW102110449A patent/TWI447744B/zh not_active IP Right Cessation
- 2013-11-22 JP JP2013241973A patent/JP2014132440A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
KR101454148B1 (ko) | 2014-10-22 |
WO2013141374A1 (ja) | 2013-09-26 |
CN103858182B (zh) | 2015-06-03 |
TWI447744B (zh) | 2014-08-01 |
TW201340122A (zh) | 2013-10-01 |
JP2014132440A (ja) | 2014-07-17 |
JPWO2013141374A1 (ja) | 2015-08-03 |
CN103858182A (zh) | 2014-06-11 |
KR20140075816A (ko) | 2014-06-19 |
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