JP5420656B2 - 裏面トレンチを有する裏面照射型イメージセンサ - Google Patents
裏面トレンチを有する裏面照射型イメージセンサ Download PDFInfo
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- JP5420656B2 JP5420656B2 JP2011517413A JP2011517413A JP5420656B2 JP 5420656 B2 JP5420656 B2 JP 5420656B2 JP 2011517413 A JP2011517413 A JP 2011517413A JP 2011517413 A JP2011517413 A JP 2011517413A JP 5420656 B2 JP5420656 B2 JP 5420656B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14632—Wafer-level processed structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1463—Pixel isolation structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1464—Back illuminated imager structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
- H01L27/14687—Wafer level processing
Description
Claims (9)
- それぞれ画素アレイを有する裏面照射型のイメージセンサを、基板及びその上方に形成されたセンサ層を有するイメージセンサウェハを用い、複数個形成するウェハレベルの処理方法であって、
センサ層の裏面に裏面トレンチを形成する工程と、
その裏面トレンチを介しセンサ層内にドーパントをインプラントすることで裏面トレンチに対応する裏面フィールド分離材インプラント領域を形成する工程と、
裏面トレンチを充填する工程と、
充填された裏面トレンチの上方に抗反射層を少なくとも一層形成する工程と、
裏面に一時キャリアウェハを取り付け、前記基板を除去する工程と、
前記基板を除去した後、イメージセンサウェハを更に処理して画素アレイを含むイメージセンサを複数個形成する工程と、
を有し、
前記イメージセンサウェハを更に処理して画素アレイを含むイメージセンサを複数個形成する工程が、
センサ層の表面に画素アレイの感光素子を形成する工程と、
センサ層の表面に表面トレンチを形成する工程と、
表面トレンチに対応する表面フィールド分離材インプラント領域を形成する工程と、
表面トレンチを充填する工程と、
表面トレンチに対応する表面ウェル分離材インプラント領域を形成する工程と、
センサ層の表面に誘電体層を少なくとも一層形成する工程と、
誘電体層の表面にハンドルウェハを取り付ける工程と、
ハンドルウェハを取り付けた後に、一時キャリアウェハを除去する工程と、
イメージセンサウェハを複数個のイメージセンサへと分割する工程と、
を有する処理方法。 - 請求項1記載の処理方法であって、
センサ層の上方に酸化物層を形成する工程と、
その酸化物層の上方に窒化物層を形成する工程と、
それら窒化物層及び酸化物層を貫きセンサ層内に延びるよう整列マークを形成する工程と、
を有する処理方法。 - 請求項2記載の処理方法であって、
センサ層の裏面に裏面トレンチを形成する工程が、上記窒化物層及び酸化物層をエッチングして裏面トレンチを形成する工程を含む処理方法。 - 請求項1記載の処理方法であって、
裏面トレンチを充填する前に、裏面トレンチ内にリニア酸化物層を形成する工程を有する処理方法。 - 請求項1記載の処理方法であって、
センサ層の裏面にあり充填されている裏面トレンチの上方に抗反射層を少なくとも一層形成する工程が、
そのセンサ層の裏面に抗反射酸化物層を形成する工程と、
その抗反射酸化物層の上方に抗反射窒化物層を形成する工程と、
を含む処理方法。 - 請求項1記載の処理方法であって、
充填された裏面トレンチの上方に抗反射層を少なくとも一層形成する前に、センサ層にドーパントをインプラントして裏面パッシベーション材インプラント領域を形成する工程を有する処理方法。 - 請求項1記載の処理方法であって、
充填された裏面トレンチの上方に抗反射層を少なくとも一層形成した後に、センサ層にドーパントをインプラントして裏面パッシベーション材インプラント領域を形成する工程を有する処理方法。 - 請求項1記載の処理方法であって、
抗反射層の上方にフォトレジストを堆積させる工程と、
そのフォトレジストをパターニングすることで裏面トレンチの上方に開口を形成する工程と、
その開口を通じドーパントをインプラントすることで裏面トレンチに対応する裏面ウェル分離材インプラント領域を形成する工程と、
を有する処理方法。 - 請求項1記載の処理方法であって、
イメージセンサウェハを更に処理して画素アレイを含むイメージセンサを複数個形成する工程が、
イメージセンサの中に画素アレイを形成する前に、上記抗反射層の上方に酸化物層を形成する工程
を有する処理方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/169,810 US20100006908A1 (en) | 2008-07-09 | 2008-07-09 | Backside illuminated image sensor with shallow backside trench for photodiode isolation |
US12/169,810 | 2008-07-09 | ||
PCT/US2009/003977 WO2010027395A2 (en) | 2008-07-09 | 2009-07-07 | Backside illuminated image sensor with backside trenches |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2011527829A JP2011527829A (ja) | 2011-11-04 |
JP2011527829A5 JP2011527829A5 (ja) | 2012-06-14 |
JP5420656B2 true JP5420656B2 (ja) | 2014-02-19 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2011517413A Active JP5420656B2 (ja) | 2008-07-09 | 2009-07-07 | 裏面トレンチを有する裏面照射型イメージセンサ |
Country Status (7)
Country | Link |
---|---|
US (2) | US20100006908A1 (ja) |
EP (1) | EP2311091B1 (ja) |
JP (1) | JP5420656B2 (ja) |
KR (1) | KR101341048B1 (ja) |
CN (1) | CN102067316B (ja) |
TW (1) | TWI452684B (ja) |
WO (1) | WO2010027395A2 (ja) |
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- 2009-07-07 WO PCT/US2009/003977 patent/WO2010027395A2/en active Application Filing
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TW201010071A (en) | 2010-03-01 |
CN102067316B (zh) | 2013-05-01 |
CN102067316A (zh) | 2011-05-18 |
US20110059572A1 (en) | 2011-03-10 |
US20100006908A1 (en) | 2010-01-14 |
KR20110030670A (ko) | 2011-03-23 |
WO2010027395A3 (en) | 2010-05-14 |
EP2311091A2 (en) | 2011-04-20 |
WO2010027395A2 (en) | 2010-03-11 |
TWI452684B (zh) | 2014-09-11 |
KR101341048B1 (ko) | 2013-12-12 |
EP2311091B1 (en) | 2016-11-23 |
US8076170B2 (en) | 2011-12-13 |
JP2011527829A (ja) | 2011-11-04 |
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