JP5416813B2 - 硬質皮膜 - Google Patents
硬質皮膜 Download PDFInfo
- Publication number
- JP5416813B2 JP5416813B2 JP2012149494A JP2012149494A JP5416813B2 JP 5416813 B2 JP5416813 B2 JP 5416813B2 JP 2012149494 A JP2012149494 A JP 2012149494A JP 2012149494 A JP2012149494 A JP 2012149494A JP 5416813 B2 JP5416813 B2 JP 5416813B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- ratio
- formula
- film
- pqr
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000576 coating method Methods 0.000 title claims description 60
- 239000011248 coating agent Substances 0.000 title claims description 50
- 239000013078 crystal Substances 0.000 claims description 37
- 150000004767 nitrides Chemical class 0.000 claims description 37
- 238000004544 sputter deposition Methods 0.000 claims description 21
- 238000007733 ion plating Methods 0.000 claims description 18
- 239000010410 layer Substances 0.000 description 86
- 239000010408 film Substances 0.000 description 60
- 238000001704 evaporation Methods 0.000 description 59
- 230000008020 evaporation Effects 0.000 description 56
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 31
- 229910052799 carbon Inorganic materials 0.000 description 31
- 229910052726 zirconium Inorganic materials 0.000 description 22
- 229910052735 hafnium Inorganic materials 0.000 description 21
- 230000003647 oxidation Effects 0.000 description 20
- 238000007254 oxidation reaction Methods 0.000 description 20
- 238000000034 method Methods 0.000 description 17
- 239000007789 gas Substances 0.000 description 14
- 238000005520 cutting process Methods 0.000 description 12
- 239000002356 single layer Substances 0.000 description 9
- 230000001965 increasing effect Effects 0.000 description 8
- 239000000203 mixture Substances 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- 238000005240 physical vapour deposition Methods 0.000 description 7
- 230000007423 decrease Effects 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 229910010037 TiAlN Inorganic materials 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 5
- 229910052804 chromium Inorganic materials 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 230000007246 mechanism Effects 0.000 description 5
- 230000000704 physical effect Effects 0.000 description 5
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical group [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 4
- 229910052796 boron Inorganic materials 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 229910000760 Hardened steel Inorganic materials 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- -1 TiCN Inorganic materials 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000003610 charcoal Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 235000002639 sodium chloride Nutrition 0.000 description 2
- 239000011780 sodium chloride Substances 0.000 description 2
- 230000006641 stabilisation Effects 0.000 description 2
- 238000011105 stabilization Methods 0.000 description 2
- 230000000087 stabilizing effect Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 229910052984 zinc sulfide Inorganic materials 0.000 description 2
- 229910000997 High-speed steel Inorganic materials 0.000 description 1
- 229910007991 Si-N Inorganic materials 0.000 description 1
- 229910006294 Si—N Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 229910001315 Tool steel Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000011195 cermet Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000008199 coating composition Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 238000005242 forging Methods 0.000 description 1
- 238000007542 hardness measurement Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Images
Landscapes
- Drilling Tools (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Laminated Bodies (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012149494A JP5416813B2 (ja) | 2012-07-03 | 2012-07-03 | 硬質皮膜 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012149494A JP5416813B2 (ja) | 2012-07-03 | 2012-07-03 | 硬質皮膜 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006012092A Division JP5138892B2 (ja) | 2006-01-20 | 2006-01-20 | 硬質皮膜 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012233260A JP2012233260A (ja) | 2012-11-29 |
| JP2012233260A5 JP2012233260A5 (https=) | 2013-06-06 |
| JP5416813B2 true JP5416813B2 (ja) | 2014-02-12 |
Family
ID=47433834
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012149494A Expired - Fee Related JP5416813B2 (ja) | 2012-07-03 | 2012-07-03 | 硬質皮膜 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5416813B2 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102646471B1 (ko) | 2019-05-09 | 2024-03-11 | 가부시키가이샤 몰디노 | 피복 절삭 공구 |
| CN116288184B (zh) * | 2023-02-24 | 2025-08-15 | 厦门钨业股份有限公司 | 纳米多层复合涂层及其制备方法和切削工具 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0873289A (ja) * | 1994-08-31 | 1996-03-19 | Sumitomo Electric Ind Ltd | 工具用複合高硬度材料 |
| JPH08134629A (ja) * | 1994-09-16 | 1996-05-28 | Sumitomo Electric Ind Ltd | 超微粒積層膜と、それを有する工具用複合高硬度材料 |
| JPH0941127A (ja) * | 1995-08-03 | 1997-02-10 | Kobe Steel Ltd | 硬質皮膜 |
| JPH10176289A (ja) * | 1996-12-10 | 1998-06-30 | Balzers Ag | 被覆硬質合金 |
| JP4375691B2 (ja) * | 1999-12-17 | 2009-12-02 | 住友電工ハードメタル株式会社 | 複合高硬度材料 |
| JP2004082230A (ja) * | 2002-08-23 | 2004-03-18 | Hitachi Tool Engineering Ltd | 精密旋盤加工用硬質皮膜被覆インサート |
| JP2004238736A (ja) * | 2003-01-17 | 2004-08-26 | Hitachi Tool Engineering Ltd | 硬質皮膜及び硬質皮膜被覆工具 |
| JP2004306228A (ja) * | 2003-04-10 | 2004-11-04 | Hitachi Tool Engineering Ltd | 硬質皮膜 |
| JP2006082208A (ja) * | 2004-09-17 | 2006-03-30 | Sumitomo Electric Hardmetal Corp | 表面被覆切削工具 |
| JP2006082209A (ja) * | 2004-09-17 | 2006-03-30 | Sumitomo Electric Hardmetal Corp | 表面被覆切削工具 |
-
2012
- 2012-07-03 JP JP2012149494A patent/JP5416813B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2012233260A (ja) | 2012-11-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5138892B2 (ja) | 硬質皮膜 | |
| JP4713413B2 (ja) | 硬質皮膜およびその製造方法 | |
| CN100419117C (zh) | 硬质叠层被膜、其制造方法及成膜装置 | |
| JP4950499B2 (ja) | 硬質皮膜およびその成膜方法 | |
| JP6236601B2 (ja) | 高性能工具のためのナノ層コーティング | |
| JP5909273B2 (ja) | 硬質皮膜および硬質皮膜の製造方法 | |
| JP4388582B2 (ja) | 硬質皮膜層及びその形成方法 | |
| JP4448342B2 (ja) | 微細結晶硬質皮膜 | |
| JP5043908B2 (ja) | 微細結晶硬質皮膜の形成方法 | |
| JP4408231B2 (ja) | 硬質積層皮膜および硬質積層皮膜の形成方法 | |
| JP6842233B2 (ja) | コーティングされた切削工具、及びコーティングされた切削工具の製造方法 | |
| JP7067689B2 (ja) | 表面被覆切削工具及びその製造方法 | |
| KR100674773B1 (ko) | 경질 필름, 다층 경질 필름 및 그 제조 방법 | |
| JP5416429B2 (ja) | 表面被覆切削工具 | |
| IL226024A (en) | Part coated in hard film and method of production | |
| JP5416813B2 (ja) | 硬質皮膜 | |
| JP2010111952A (ja) | 硬質皮膜およびその形成方法 | |
| JP7055961B2 (ja) | 表面被覆切削工具及びその製造方法 | |
| JP2009072838A (ja) | 高速ミーリング加工で硬質被覆層がすぐれた耐摩耗性を発揮する表面被覆切削工具およびその製造方法 | |
| JP6273161B2 (ja) | 耐摩耗性に優れた積層皮膜 | |
| JP4408230B2 (ja) | 硬質積層皮膜および硬質積層皮膜の形成方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130422 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20131112 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20131115 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 5416813 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| LAPS | Cancellation because of no payment of annual fees |