JP5416139B2 - 太陽電池基板用の非接触型エッジコーティング装置 - Google Patents

太陽電池基板用の非接触型エッジコーティング装置 Download PDF

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Publication number
JP5416139B2
JP5416139B2 JP2010545929A JP2010545929A JP5416139B2 JP 5416139 B2 JP5416139 B2 JP 5416139B2 JP 2010545929 A JP2010545929 A JP 2010545929A JP 2010545929 A JP2010545929 A JP 2010545929A JP 5416139 B2 JP5416139 B2 JP 5416139B2
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substrate
edge
coating
coating material
roller
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Japanese (ja)
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JP2011515827A5 (enExample
JP2011515827A (ja
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アバス、エマヌエル
パヴァニ、ルカ
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サンパワー コーポレイション
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C1/00Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
    • B05C1/04Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
    • B05C1/08Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line
    • B05C1/0804Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line the material being applied without contact with the roller
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C1/00Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
    • B05C1/006Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to the edges of essentially flat articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C1/00Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
    • B05C1/04Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
    • B05C1/08Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line
    • B05C1/0813Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line characterised by means for supplying liquid or other fluent material to the roller
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C1/00Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
    • B05C1/04Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
    • B05C1/08Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line
    • B05C1/0821Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line characterised by driving means for rollers or work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1015Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to a conditions of ambient medium or target, e.g. humidity, temperature ; responsive to position or movement of the coating head relative to the target
    • B05C11/1021Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to a conditions of ambient medium or target, e.g. humidity, temperature ; responsive to position or movement of the coating head relative to the target responsive to presence or shape of target
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C13/00Means for manipulating or holding work, e.g. for separate articles
    • B05C13/02Means for manipulating or holding work, e.g. for separate articles for particular articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • B05C9/08Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
    • B05C9/10Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation the auxiliary operation being performed before the application
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00Manufacture or treatment of devices covered by this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/30Coatings
    • H10F77/306Coatings for devices having potential barriers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C1/00Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
    • B05C1/04Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
    • B05C1/08Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line
    • B05C1/0808Details thereof, e.g. surface characteristics
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Coating Apparatus (AREA)
  • Photovoltaic Devices (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
JP2010545929A 2008-02-07 2009-01-28 太陽電池基板用の非接触型エッジコーティング装置 Active JP5416139B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/069,030 2008-02-07
US12/069,030 US8662008B2 (en) 2008-02-07 2008-02-07 Edge coating apparatus for solar cell substrates
PCT/US2009/032276 WO2009099838A1 (en) 2008-02-07 2009-01-28 Non-contact edge coating apparatus for solar cell substrates and methods for using same

Publications (3)

Publication Number Publication Date
JP2011515827A JP2011515827A (ja) 2011-05-19
JP2011515827A5 JP2011515827A5 (enExample) 2012-03-15
JP5416139B2 true JP5416139B2 (ja) 2014-02-12

Family

ID=40939107

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010545929A Active JP5416139B2 (ja) 2008-02-07 2009-01-28 太陽電池基板用の非接触型エッジコーティング装置

Country Status (6)

Country Link
US (1) US8662008B2 (enExample)
EP (1) EP2240283B1 (enExample)
JP (1) JP5416139B2 (enExample)
KR (1) KR101600411B1 (enExample)
CN (1) CN201940332U (enExample)
WO (1) WO2009099838A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6664768B1 (ja) * 2019-03-12 2020-03-13 カワノ株式会社 接着剤塗布装置及び接着剤塗布方法

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8322300B2 (en) * 2008-02-07 2012-12-04 Sunpower Corporation Edge coating apparatus with movable roller applicator for solar cell substrates
KR101555081B1 (ko) * 2008-07-21 2015-09-22 선파워 코포레이션 비원형 태양 전지 기판용 에지 코팅 장치 및 방법
US9016235B2 (en) * 2009-03-19 2015-04-28 Tazmo Co., Ltd Substrate coating device that controls coating amount based on optical measurement of bead shape
US8519729B2 (en) 2010-02-10 2013-08-27 Sunpower Corporation Chucks for supporting solar cell in hot spot testing
WO2012092301A2 (en) * 2010-12-29 2012-07-05 Intevac, Inc. Method and apparatus for masking substrates for deposition
US9539605B2 (en) * 2012-02-28 2017-01-10 Toray Plastics (America), Inc. Gravure roll edge masking system for in-line film coating
FR2988323B1 (fr) * 2012-03-23 2014-04-11 Airbus Operations Sas Dispositif et procede de formation d'un revetement microstructure sur un substrat tel qu'un element d'aeronef
KR20150091342A (ko) * 2012-11-28 2015-08-10 코닝 인코포레이티드 유리 에지를 코팅하기 위한 방법 및 시스템
JP5735035B2 (ja) * 2013-05-13 2015-06-17 株式会社エナテック 塗布装置及び塗布方法
JP5735047B2 (ja) * 2013-06-21 2015-06-17 株式会社エナテック 塗布装置及び塗布方法
US9488857B2 (en) * 2014-01-10 2016-11-08 Corning Incorporated Method of strengthening an edge of a glass substrate
ES2647822T3 (es) * 2014-12-22 2017-12-26 Kuka Systems Aerospace Dispositivo de aplicación de fluido
DE102015121449A1 (de) 2015-12-09 2017-06-14 Ba Assembly & Turnkey Systems Gmbh Verstreicheinheit
US9966487B2 (en) 2015-12-14 2018-05-08 Solarcity Corporation Strain relief apparatus for solar modules
EP3453053B1 (en) * 2016-05-06 2021-03-10 Applied Materials Italia Srl Apparatus for aligning a solar cell element, system for use in the manufacture of a solar cell arrangement, and method for aligning a solar cell element
USD822890S1 (en) 2016-09-07 2018-07-10 Felxtronics Ap, Llc Lighting apparatus
US10775030B2 (en) 2017-05-05 2020-09-15 Flex Ltd. Light fixture device including rotatable light modules
USD862777S1 (en) 2017-08-09 2019-10-08 Flex Ltd. Lighting module wide distribution lens
USD846793S1 (en) 2017-08-09 2019-04-23 Flex Ltd. Lighting module locking mechanism
USD833061S1 (en) 2017-08-09 2018-11-06 Flex Ltd. Lighting module locking endcap
USD877964S1 (en) 2017-08-09 2020-03-10 Flex Ltd. Lighting module
USD872319S1 (en) 2017-08-09 2020-01-07 Flex Ltd. Lighting module LED light board
USD832494S1 (en) 2017-08-09 2018-10-30 Flex Ltd. Lighting module heatsink
USD832495S1 (en) 2017-08-18 2018-10-30 Flex Ltd. Lighting module locking mechanism
USD862778S1 (en) 2017-08-22 2019-10-08 Flex Ltd Lighting module lens
USD888323S1 (en) 2017-09-07 2020-06-23 Flex Ltd Lighting module wire guard
CN111656541B (zh) 2018-01-18 2023-07-25 应用材料意大利有限公司 用于对准太阳能电池元件的设备、在制造太阳能电池布置中使用的系统及方法
US11127871B2 (en) 2018-10-17 2021-09-21 Sunpower Corporation Structures and methods for forming electrodes of solar cells
CN110479541B (zh) * 2019-09-05 2021-06-22 陈时琳 一种智能视觉多轴机械手油边装置及其工作方法
JP6990759B1 (ja) 2020-12-02 2022-01-12 大建工業株式会社 塗布装置及び化粧板の製造方法
CN113680594B (zh) * 2021-08-25 2022-10-28 三一机器人科技有限公司 自动辊涂系统及辊涂方法
CN116417532A (zh) 2021-12-31 2023-07-11 苏州太阳井新能源有限公司 一种光伏电池片的自动封边设备与封边方法

Family Cites Families (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2880697A (en) * 1957-04-19 1959-04-07 Corning Glass Works Coating apparatus
DE1260714B (de) * 1964-12-04 1968-02-08 Telefunken Patent Verfahren und Vorrichtung zum Aufbringen einer glasverbindenden Masse auf die Anschlussflaeche eines nichtkreisfoermigen Bildroehrenteils
US3575131A (en) * 1968-05-08 1971-04-13 Owens Illinois Inc Apparatus for applying bonding material to annular sealing surfaces
US3966334A (en) * 1975-02-06 1976-06-29 Indian Head Inc. Adhesive applicator device and method
US4007704A (en) * 1975-02-14 1977-02-15 Loctite Corporation Gasket material applicator
US4069354A (en) * 1975-12-15 1978-01-17 Zenith Radio Corporation Method for dispensing cement onto the seal land of a color crt funnel
US4056075A (en) * 1976-01-12 1977-11-01 Abe Seiderman Automatic hot melt adhesive depositing machine
US4194463A (en) * 1978-07-24 1980-03-25 Rca Corporation Apparatus for applying sealing material to a cathode-ray tube
US4535721A (en) 1983-12-01 1985-08-20 California Linear Circuits, Inc. Apparatus for rotating a wafer
US5047262A (en) * 1987-12-11 1991-09-10 Automate-Tech Apparatus and method for selectively coating printed circuit panels
JPH01176469A (ja) * 1987-12-28 1989-07-12 Nissha Printing Co Ltd 薄板側面コーティング装置
US4989059A (en) * 1988-05-13 1991-01-29 Mobil Solar Energy Corporation Solar cell with trench through pn junction
US4936203A (en) * 1988-09-03 1990-06-26 Rheon Automatic Machinery Co., Ltd. Apparatus for shaping and arraying spheroidal bodies of food materials
JPH02130922A (ja) * 1988-11-11 1990-05-18 Toshiba Corp 半導体基板エッチング装置
US4957605A (en) 1989-04-17 1990-09-18 Materials Research Corporation Method and apparatus for sputter coating stepped wafers
US5411894A (en) * 1990-03-20 1995-05-02 Abbott Laboratories Method of using tissue and cell adhesive preparations for biological test systems
US5094885A (en) 1990-10-12 1992-03-10 Genus, Inc. Differential pressure cvd chuck
US5411897A (en) * 1994-02-04 1995-05-02 Mobil Solar Energy Corporation Machine and method for applying solder paste to electronic devices such as solar cells
JPH07263474A (ja) * 1994-03-22 1995-10-13 Toshiba Corp 半導体ウェーハの塗布装置
DE4415132C2 (de) * 1994-04-29 1997-03-20 Siemens Ag Verfahren zur formgebenden Bearbeitung von dünnen Wafern und Solarzellen aus kristallinem Silizium
US5862560A (en) * 1996-08-29 1999-01-26 Ontrak Systems, Inc. Roller with treading and system including the same
DE29617525U1 (de) * 1996-10-11 1996-12-12 Josef Schiele oHG, 56651 Niederzissen Lackierkopf
TW340415U (en) 1996-10-21 1998-09-11 Winbond Electronics Corp A water-absorbent sponge dismounting system
DE19652836C1 (de) * 1996-12-18 1998-03-26 Leico Werkzeugmaschb Gmbh & Co Verfahren und Vorrichtung zur Herstellung eines Werkstücks mit einem rotationssymmetrischen gehärteten Oberflächenbereich
KR20000017539U (ko) * 1999-02-27 2000-09-25 전주범 다기능 리모컨에 설치되는 터치 마우스
JP2001007362A (ja) * 1999-06-17 2001-01-12 Canon Inc 半導体基材および太陽電池の製造方法
US6231327B1 (en) * 1999-07-02 2001-05-15 Mastercraft Industries, L.P. Composite extrusion and patterning machine for irregularly curved edges and method of manufacture thereof
JP4085538B2 (ja) * 1999-10-15 2008-05-14 ソニー株式会社 検査装置
DE10048749A1 (de) * 2000-09-29 2002-04-11 Josef Schucker Anordnung zum Aufbringen von Klebstoff auf ein Werkstück
AU2002359239A1 (en) * 2001-07-27 2003-05-06 Astropower, Inc. Method and apparatus for applying conductive ink onto semiconductor substrates
US20080017316A1 (en) * 2002-04-26 2008-01-24 Accretech Usa, Inc. Clean ignition system for wafer substrate processing
US7179333B2 (en) * 2002-09-23 2007-02-20 Computrol, Inc. Closure sealant dispenser
US7208046B1 (en) * 2003-01-10 2007-04-24 White Electronic Designs Corporation Spray coating apparatus and fixtures
JP2007527109A (ja) * 2003-07-07 2007-09-20 ダウ・コ−ニング・コ−ポレ−ション 太陽電池の封入
KR101133121B1 (ko) * 2005-02-17 2012-04-06 삼성테크윈 주식회사 웨이퍼 고정용 지그, 웨이퍼 코팅 장치 및 이를 이용한 반도체 소자 제조 방법
US8322300B2 (en) * 2008-02-07 2012-12-04 Sunpower Corporation Edge coating apparatus with movable roller applicator for solar cell substrates
JP5457866B2 (ja) * 2010-02-08 2014-04-02 株式会社日立ハイテクノロジーズ スピンコート方法及びスピンコーター
JP2013077588A (ja) * 2011-09-29 2013-04-25 Toshiba Corp 基板処理方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6664768B1 (ja) * 2019-03-12 2020-03-13 カワノ株式会社 接着剤塗布装置及び接着剤塗布方法

Also Published As

Publication number Publication date
EP2240283A1 (en) 2010-10-20
KR20100120651A (ko) 2010-11-16
WO2009099838A1 (en) 2009-08-13
US8662008B2 (en) 2014-03-04
KR101600411B1 (ko) 2016-03-08
US20090202727A1 (en) 2009-08-13
CN201940332U (zh) 2011-08-24
EP2240283A4 (en) 2013-04-10
EP2240283B1 (en) 2015-05-13
JP2011515827A (ja) 2011-05-19

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