JP5414499B2 - インクジェットヘッド及びその製造方法 - Google Patents

インクジェットヘッド及びその製造方法 Download PDF

Info

Publication number
JP5414499B2
JP5414499B2 JP2009282695A JP2009282695A JP5414499B2 JP 5414499 B2 JP5414499 B2 JP 5414499B2 JP 2009282695 A JP2009282695 A JP 2009282695A JP 2009282695 A JP2009282695 A JP 2009282695A JP 5414499 B2 JP5414499 B2 JP 5414499B2
Authority
JP
Japan
Prior art keywords
substrate
ink
supply port
jet head
flow path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2009282695A
Other languages
English (en)
Japanese (ja)
Other versions
JP2010162887A (ja
JP2010162887A5 (enExample
Inventor
明彦 岡野
雅彦 久保田
亮二 柬理
篤司 平本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2009282695A priority Critical patent/JP5414499B2/ja
Publication of JP2010162887A publication Critical patent/JP2010162887A/ja
Publication of JP2010162887A5 publication Critical patent/JP2010162887A5/ja
Application granted granted Critical
Publication of JP5414499B2 publication Critical patent/JP5414499B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14016Structure of bubble jet print heads
    • B41J2/14032Structure of the pressure chamber
    • B41J2/1404Geometrical characteristics
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14016Structure of bubble jet print heads
    • B41J2/14145Structure of the manifold
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1601Production of bubble jet print heads
    • B41J2/1603Production of bubble jet print heads of the front shooter type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching
    • B41J2/1628Manufacturing processes etching dry etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1632Manufacturing processes machining
    • B41J2/1634Manufacturing processes machining laser machining

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Optics & Photonics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2009282695A 2008-12-15 2009-12-14 インクジェットヘッド及びその製造方法 Expired - Fee Related JP5414499B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009282695A JP5414499B2 (ja) 2008-12-15 2009-12-14 インクジェットヘッド及びその製造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2008318510 2008-12-15
JP2008318510 2008-12-15
JP2009282695A JP5414499B2 (ja) 2008-12-15 2009-12-14 インクジェットヘッド及びその製造方法

Publications (3)

Publication Number Publication Date
JP2010162887A JP2010162887A (ja) 2010-07-29
JP2010162887A5 JP2010162887A5 (enExample) 2013-02-07
JP5414499B2 true JP5414499B2 (ja) 2014-02-12

Family

ID=42239991

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009282695A Expired - Fee Related JP5414499B2 (ja) 2008-12-15 2009-12-14 インクジェットヘッド及びその製造方法

Country Status (2)

Country Link
US (1) US8398212B2 (enExample)
JP (1) JP5414499B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5539547B2 (ja) 2012-01-24 2014-07-02 キヤノン株式会社 液体吐出ヘッド及びその製造方法
JP7195792B2 (ja) * 2018-07-05 2022-12-26 キヤノン株式会社 基板の加工方法、並びに、液体吐出ヘッド用基板およびその製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3984689B2 (ja) 1996-11-11 2007-10-03 キヤノン株式会社 インクジェットヘッドの製造方法
JP2003025577A (ja) * 2001-07-11 2003-01-29 Canon Inc 液体吐出ヘッド
US7517052B2 (en) * 2003-12-15 2009-04-14 Canon Kabushiki Kaisha Ink-jet head and ink-jet recording apparatus using the head
JP2005169993A (ja) * 2003-12-15 2005-06-30 Canon Inc インクジェット記録ヘッドおよびインクジェット記録ヘッドの製造方法
JP5188049B2 (ja) * 2006-09-13 2013-04-24 キヤノン株式会社 記録ヘッド
US8007069B2 (en) * 2007-05-25 2011-08-30 Canon Kabushiki Kaisha Ink jet recording head

Also Published As

Publication number Publication date
US8398212B2 (en) 2013-03-19
JP2010162887A (ja) 2010-07-29
US20100149260A1 (en) 2010-06-17

Similar Documents

Publication Publication Date Title
EP1380425B1 (en) Method of producing microstructure, and method of producing liquid discharge head
US6951380B2 (en) Method of manufacturing microstructure, method of manufacturing liquid discharge head, and liquid discharge head
KR0152452B1 (ko) 잉크 제트 기록 헤드 제조 방법
EP1768848B1 (en) Liquid discharge head manufacturing method, and liquid discharge head obtained using this method
US8613141B2 (en) Manufacturing method of liquid ejection head
JP5224771B2 (ja) 記録ヘッド基板の製造方法
KR100541904B1 (ko) 미세 구조화된 부재의 제조 방법, 미세 중공 구조화된부재의 제조 방법 및 액체 토출 헤드의 제조 방법
JP4447974B2 (ja) インクジェットヘッドの製造方法
JP5414499B2 (ja) インクジェットヘッド及びその製造方法
JP5031597B2 (ja) インクジェット記録ヘッドの製造方法
JP2005074747A (ja) インクジェットヘッドの製造方法およびインクジェットヘッド
JP5059056B2 (ja) 微細構造体の製造方法及び液体吐出ヘッドの製造方法
KR20100060423A (ko) 잉크젯 프린트헤드 및 그 제조방법
JP2009233955A (ja) 微細構造体の製造方法及び液体吐出ヘッドの製造方法
JP4646610B2 (ja) インクジェット記録ヘッド
JP2006110910A (ja) インクジェット記録ヘッド及びその製造方法
JP2010208023A (ja) インクジェットヘッドの製造方法及びインクジェットヘッド
JP2008126481A (ja) インクジェット記録ヘッド用基板の製造方法、およびインクジェット記録ヘッドの製造方法
JP2006035763A (ja) インクジェット記録ヘッドの製造方法
JP2006069009A (ja) インクジェットヘッドの製造方法
JP5553538B2 (ja) 液体吐出ヘッドの製造方法
KR20070022805A (ko) 액체 토출 헤드 제조 방법, 및 이러한 방법을 사용하여얻어지는 액체 토출 헤드
JP2016215466A (ja) 液体吐出ヘッドの製造方法

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20121213

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20121213

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20130723

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130917

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20131015

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20131112

R151 Written notification of patent or utility model registration

Ref document number: 5414499

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151

LAPS Cancellation because of no payment of annual fees