JP5396369B2 - 半導体基板構造および半導体素子 - Google Patents
半導体基板構造および半導体素子 Download PDFInfo
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- 239000000758 substrate Substances 0.000 title claims description 123
- 239000004065 semiconductor Substances 0.000 title claims description 113
- 239000000463 material Substances 0.000 claims description 22
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 14
- 229910052710 silicon Inorganic materials 0.000 claims description 14
- 239000010703 silicon Substances 0.000 claims description 13
- 239000000203 mixture Substances 0.000 claims description 12
- 229910052733 gallium Inorganic materials 0.000 claims description 10
- 150000004767 nitrides Chemical class 0.000 claims description 9
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 9
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 9
- 230000006870 function Effects 0.000 claims description 8
- 239000002800 charge carrier Substances 0.000 claims description 5
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 4
- 238000009826 distribution Methods 0.000 claims description 4
- 229910000577 Silicon-germanium Inorganic materials 0.000 claims description 3
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 claims description 3
- 229910052732 germanium Inorganic materials 0.000 claims description 3
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 281
- 229910002601 GaN Inorganic materials 0.000 description 52
- 238000002161 passivation Methods 0.000 description 35
- 238000000034 method Methods 0.000 description 34
- 230000015556 catabolic process Effects 0.000 description 24
- 229910052581 Si3N4 Inorganic materials 0.000 description 22
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 21
- 238000004519 manufacturing process Methods 0.000 description 19
- 238000005530 etching Methods 0.000 description 14
- 238000000151 deposition Methods 0.000 description 12
- 235000012431 wafers Nutrition 0.000 description 12
- 230000003071 parasitic effect Effects 0.000 description 10
- 229910004298 SiO 2 Inorganic materials 0.000 description 9
- 230000008021 deposition Effects 0.000 description 9
- 230000005669 field effect Effects 0.000 description 9
- 238000000059 patterning Methods 0.000 description 9
- 229910002704 AlGaN Inorganic materials 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 5
- 230000007547 defect Effects 0.000 description 5
- 238000013461 design Methods 0.000 description 5
- 238000011065 in-situ storage Methods 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 208000012868 Overgrowth Diseases 0.000 description 4
- 239000004642 Polyimide Substances 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 229920001721 polyimide Polymers 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000001465 metallisation Methods 0.000 description 3
- 230000006911 nucleation Effects 0.000 description 3
- 238000010899 nucleation Methods 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- 230000005533 two-dimensional electron gas Effects 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000002513 implantation Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 238000011068 loading method Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 229910004140 HfO Inorganic materials 0.000 description 1
- -1 SiCN Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 229910008807 WSiN Inorganic materials 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000005280 amorphization Methods 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 238000004581 coalescence Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910000449 hafnium oxide Inorganic materials 0.000 description 1
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000010329 laser etching Methods 0.000 description 1
- 239000002346 layers by function Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
- 229910003465 moissanite Inorganic materials 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
- 238000003631 wet chemical etching Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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Description
本発明の第1態様によれば、請求項1に係る半導体素子構造が提供される。半導体基板構造は、半導体基板と、半導体基板の上部にGaNタイプの層スタックとを備え、
GaNタイプ層スタックは、少なくとも1つのバッファ層と、第1活性層と、第2活性層とを備え、
第1活性層と第2活性層の界面において能動素子領域が規定可能である。
パターン化した半導体基板での溝が過成長するように、少なくとも1つのバッファ層を堆積するステップと、
少なくとも能動素子領域の範囲で連続するように、第1活性層および第2活性層を堆積するステップと、を含む。
能動素子領域が両電極間に位置してチャネルとして機能するように、ソース電極およびドレイン電極を規定するステップと、
前記チャネルの内部で電荷キャリア分布に影響を与えるためのゲート電極を規定するステップと、を含む。
GaNタイプ層スタックは、少なくとも1つのバッファ層と、第1活性層と、第2活性層とを備え、
第1活性層と第2活性層の界面において、チャネルを構成するように能動素子領域が規定され、
ゲート電極が、前記チャネルの内部での電荷キャリア分布に影響を与えるために存在し、
ソース電極およびドレイン電極が、前記活性層の少なくとも1つと接触しており、
半導体基板は、互いに電気絶縁された第1領域および第2領域を備え、第1領域および第2領域は、前記ソースおよびドレイン電極の前記半導体基板への垂直投影(projection)と実質的に重なる(overlap)半導体素子。
GaNタイプ層スタックは、少なくとも1つのバッファ層と、第1活性層と、第2活性層とを備え、
第1活性層と第2活性層の界面において、ソース電極とドレイン電極との間で延びているチャネルを構成するように、能動素子領域が規定可能であり、
半導体基板は、互いに電気絶縁された第1領域および第2領域を備え、第1領域および第2領域は、前記ソースおよびドレイン電極の前記半導体基板への垂直投影と実質的に重なる半導体素子。
Claims (11)
- 半導体基板と、半導体基板の上部にGaNタイプの層スタックとを備え、
GaNタイプ層スタックは、少なくとも1つのバッファ層と、第1活性層と、第2活性層とを備え、
第1活性層と第2活性層の界面において、能動素子領域が規定可能であり、
半導体基板は、絶縁層の上に存在しており、所定のパターンに従って溝を規定するようにパターン化され、
そのパターンは、こうした能動素子領域の下地となる少なくとも1つの溝を含み、
前記溝は、絶縁層から、GaNタイプ層スタックの少なくとも1つのバッファ層の中まで延びており、
第1および第2活性層は、少なくとも能動素子領域の範囲で連続しており、
絶縁層は、ハンドリングウエハと半導体基板との間に存在する埋め込み絶縁層であり、
溝は、該埋め込み絶縁層を通って延びて、ハンドリングウエハを露出させており、
前記半導体基板は、半導体材料からなる層であり、前記層は、シリコン、シリコンカーバイド、シリコンゲルマニウム、またはゲルマニウムを含む、半導体基板構造。 - 少なくとも1つのバッファ層は、ガリウム、窒化物、追加のIII族元素を含有する三元またはより複雑な組成を有し、
少なくとも1つのバッファ層は、第1副層と、第1副層の上部に第2副層とを備え、
第2副層は、第1副層のGa含有量より大きいGa含有量を有し、
溝は、第2副層において過成長している請求項1記載の半導体基板構造。 - 第2副層は、Gaリッチであり、
Ga含有量は、追加のIII族元素と比べて50原子%より大きい請求項2記載の半導体基板構造。 - 溝は、絶縁層の中まで、あるいはそれを超えて延びている請求項1記載の半導体基板構造。
- 溝のパターンは、能動素子領域の下地となる一連の平行な矩形状ストライプを含む請求項1記載の半導体基板構造。
- 半導体基板と、半導体基板の上部にGaNタイプの層スタックとを備え、
GaNタイプ層スタックは、少なくとも1つのバッファ層と、第1活性層と、第2活性層とを備え、
第1活性層と第2活性層の界面において能動素子領域が規定されており、
能動素子領域は、ソース電極およびドレイン電極の間のチャネルとして機能し、
ゲート電極が、前記能動素子領域での電荷キャリア分布に影響を与えるために存在しており、
半導体基板は、絶縁層の上に存在し、所定のパターンに従って溝を規定するようにパターン化され、
そのパターンは、こうした能動素子領域の下地となる少なくとも1つの溝を含み、
前記溝は、絶縁層から、GaNタイプ層スタックの少なくとも1つのバッファ層の中まで延びており、
第1および第2活性層は少なくとも能動素子領域の範囲で連続しており、
絶縁層は、ハンドリングウエハと半導体基板との間に存在する埋め込み絶縁層であり、
溝は、該埋め込み絶縁層を通って延びて、ハンドリングウエハを露出させており、
前記半導体基板は、半導体材料からなる層であり、前記層は、シリコン、シリコンカーバイド、シリコンゲルマニウム、またはゲルマニウムを含む、半導体素子。 - 溝のパターンは、こうした能動素子領域の下地となる一連の平行な矩形状ストライプを含み、
そのストライプは少なくとも、ゲート電極と実質的に整列している請求項6記載の半導体素子。 - ソース電極およびドレイン電極は、櫛歯形フィンガー対の形状で規定され、
ゲート電極は、ソース電極およびドレイン電極の前記フィンガーに対して平行に延びるフィンガーを有し、
前記少なくとも1つの溝は、ゲート電極とドレイン電極との間で能動素子領域の下地となるように、電極に対して規定されている請求項6記載の半導体素子。 - 半導体基板は、ソース電極およびドレイン電極の半導体基板への垂直投影と実質的に重なる第1領域および第2領域を備え、
第1領域および第2領域は、互いに電気絶縁されている請求項6記載の半導体素子。 - 少なくとも1つのバッファ層は、ガリウム、窒化物、追加のIII族元素を含有する三元またはより複雑な組成を有し、
少なくとも1つのバッファ層は、第1副層と、第1副層の上部に第2副層とを備え、
第2副層は、第1副層のGa含有量より大きいGa含有量を有し、
溝は、第2副層において過成長している請求項6記載の半導体素子。 - 溝は、絶縁層の中まで、あるいはそれを超えて延びている請求項6記載の半導体素子。
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Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7417266B1 (en) | 2004-06-10 | 2008-08-26 | Qspeed Semiconductor Inc. | MOSFET having a JFET embedded as a body diode |
KR101120904B1 (ko) * | 2010-03-25 | 2012-02-27 | 삼성전기주식회사 | 반도체 소자 및 그 제조 방법 |
US9245760B2 (en) * | 2010-09-30 | 2016-01-26 | Infineon Technologies Ag | Methods of forming epitaxial layers on a porous semiconductor layer |
EP2538445B1 (en) * | 2011-06-22 | 2016-10-05 | Imec | Manufacturing method of a III-nitride device and associated III-nitride device |
KR20130035024A (ko) * | 2011-09-29 | 2013-04-08 | 삼성전자주식회사 | 고 전자 이동도 트랜지스터 및 그 제조방법 |
US8633094B2 (en) | 2011-12-01 | 2014-01-21 | Power Integrations, Inc. | GaN high voltage HFET with passivation plus gate dielectric multilayer structure |
US20130143392A1 (en) * | 2011-12-06 | 2013-06-06 | Epowersoft, Inc. | In-situ sin growth to enable schottky contact for gan devices |
US8940620B2 (en) | 2011-12-15 | 2015-01-27 | Power Integrations, Inc. | Composite wafer for fabrication of semiconductor devices |
US20140077266A1 (en) * | 2012-09-14 | 2014-03-20 | Power Integrations, Inc. | Heterostructure Transistor with Multiple Gate Dielectric Layers |
DE102012217073A1 (de) | 2012-09-21 | 2014-03-27 | Robert Bosch Gmbh | Vertikales mikroelektronisches Bauelement und entsprechendes Herstellungsverfahren |
KR20140083591A (ko) * | 2012-12-26 | 2014-07-04 | 에스케이하이닉스 주식회사 | 반도체 장치 제조 방법 |
CN103117294B (zh) | 2013-02-07 | 2015-11-25 | 苏州晶湛半导体有限公司 | 氮化物高压器件及其制造方法 |
US8928037B2 (en) | 2013-02-28 | 2015-01-06 | Power Integrations, Inc. | Heterostructure power transistor with AlSiN passivation layer |
DE102013210814A1 (de) | 2013-06-10 | 2014-12-11 | Robert Bosch Gmbh | Verfahren zum Herstellen eines Transistors mit hoher Elektronenbeweglichkeit |
US9368584B2 (en) | 2013-07-09 | 2016-06-14 | Vishay General Semiconductor Llc | Gallium nitride power semiconductor device having a vertical structure |
US9425312B2 (en) | 2014-06-23 | 2016-08-23 | International Business Machines Corporation | Silicon-containing, tunneling field-effect transistor including III-N source |
US9640620B2 (en) * | 2014-11-03 | 2017-05-02 | Texas Instruments Incorporated | High power transistor with oxide gate barriers |
JP6520197B2 (ja) * | 2015-02-20 | 2019-05-29 | 富士通株式会社 | 化合物半導体装置及びその製造方法 |
CN105244377B (zh) * | 2015-10-29 | 2018-09-18 | 杭州士兰微电子股份有限公司 | 一种基于硅衬底的hemt器件及其制造方法 |
US10381473B2 (en) | 2016-12-02 | 2019-08-13 | Vishay-Siliconix | High-electron-mobility transistor with buried interconnect |
US10224426B2 (en) | 2016-12-02 | 2019-03-05 | Vishay-Siliconix | High-electron-mobility transistor devices |
CN108922849B (zh) * | 2018-07-13 | 2019-07-12 | 苏州汉骅半导体有限公司 | 半导体结构制造方法 |
US10833063B2 (en) | 2018-07-25 | 2020-11-10 | Vishay SIliconix, LLC | High electron mobility transistor ESD protection structures |
CN112242442A (zh) * | 2019-07-16 | 2021-01-19 | 世界先进积体电路股份有限公司 | 半导体结构及其形成方法 |
CN112993005B (zh) * | 2019-12-02 | 2024-01-09 | 联华电子股份有限公司 | 具有平台结构的半导体元件及其制作方法 |
US20220139709A1 (en) * | 2020-11-05 | 2022-05-05 | International Business Machines Corporation | Confined gallium nitride epitaxial layers |
WO2022140906A1 (en) * | 2020-12-28 | 2022-07-07 | Innoscience (suzhou) Semiconductor Co., Ltd. | Semiconductor device structures and methods of manufacturing the same |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
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JP3376211B2 (ja) * | 1996-05-29 | 2003-02-10 | 株式会社東芝 | 半導体装置、半導体基板の製造方法及び半導体装置の製造方法 |
US6265289B1 (en) | 1998-06-10 | 2001-07-24 | North Carolina State University | Methods of fabricating gallium nitride semiconductor layers by lateral growth from sidewalls into trenches, and gallium nitride semiconductor structures fabricated thereby |
JP2000031491A (ja) * | 1998-07-14 | 2000-01-28 | Hitachi Ltd | 半導体装置,半導体装置の製造方法,半導体基板および半導体基板の製造方法 |
WO2000055893A1 (fr) * | 1999-03-17 | 2000-09-21 | Mitsubishi Cable Industries, Ltd. | Base de semiconducteur et son procede de fabrication et procede de fabrication de cristal semiconducteur |
US7087965B2 (en) * | 2004-04-22 | 2006-08-08 | International Business Machines Corporation | Strained silicon CMOS on hybrid crystal orientations |
EP2273553B1 (en) | 2004-06-30 | 2020-02-12 | IMEC vzw | A method for fabricating AlGaN/GaN HEMT devices |
FR2877491B1 (fr) | 2004-10-29 | 2007-01-19 | Soitec Silicon On Insulator | Structure composite a forte dissipation thermique |
US20060223211A1 (en) * | 2004-12-02 | 2006-10-05 | The Regents Of The University Of California | Semiconductor devices based on coalesced nano-rod arrays |
US7247889B2 (en) | 2004-12-03 | 2007-07-24 | Nitronex Corporation | III-nitride material structures including silicon substrates |
JP2006196869A (ja) * | 2004-12-13 | 2006-07-27 | Matsushita Electric Ind Co Ltd | 半導体装置及びその製造方法 |
US8163575B2 (en) * | 2005-06-17 | 2012-04-24 | Philips Lumileds Lighting Company Llc | Grown photonic crystals in semiconductor light emitting devices |
US7697584B2 (en) * | 2006-10-02 | 2010-04-13 | Philips Lumileds Lighting Company, Llc | Light emitting device including arrayed emitters defined by a photonic crystal |
JP5242068B2 (ja) * | 2007-03-23 | 2013-07-24 | 古河電気工業株式会社 | GaN系半導体デバイスおよびその製造方法 |
WO2009005894A2 (en) * | 2007-05-08 | 2009-01-08 | Nitek, Inc. | Non-polar ultraviolet light emitting device and method for fabricating same |
WO2009012536A1 (en) | 2007-07-20 | 2009-01-29 | Interuniversitair Microelektronica Centrum | Damascene contacts on iii-v cmos devices |
US8378387B2 (en) * | 2008-03-04 | 2013-02-19 | Nec Corporation | Field effect transistor and method of manufacturing the same |
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