JP5383917B2 - 圧力補正装置を備えた真空ポンプ - Google Patents

圧力補正装置を備えた真空ポンプ Download PDF

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Publication number
JP5383917B2
JP5383917B2 JP2012525954A JP2012525954A JP5383917B2 JP 5383917 B2 JP5383917 B2 JP 5383917B2 JP 2012525954 A JP2012525954 A JP 2012525954A JP 2012525954 A JP2012525954 A JP 2012525954A JP 5383917 B2 JP5383917 B2 JP 5383917B2
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JP
Japan
Prior art keywords
vacuum pump
pump
medium
surroundings
pressure correction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2012525954A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013502537A (ja
Inventor
フライク ハリ
ヨハニング アンドレ
バウアー ベルトラム
クリューガー ハルトムート
メルツ ハラルト
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of JP2013502537A publication Critical patent/JP2013502537A/ja
Application granted granted Critical
Publication of JP5383917B2 publication Critical patent/JP5383917B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C13/00—Adaptations of machines or pumps for special use, e.g. for extremely high pressures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C14/00—Control of, monitoring of, or safety arrangements for, machines, pumps or pumping installations
    • F04C14/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C15/00—Component parts, details or accessories of machines, pumps or pumping installations, not provided for in groups F04C2/00 - F04C14/00
    • F04C15/06—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F04C15/064—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston machines or pumps
    • F04C15/066—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston machines or pumps of the non-return type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Valves And Accessory Devices For Braking Systems (AREA)
  • Compressor (AREA)
JP2012525954A 2009-08-24 2010-07-13 圧力補正装置を備えた真空ポンプ Expired - Fee Related JP5383917B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102009028831.7 2009-08-24
DE200910028831 DE102009028831A1 (de) 2009-08-24 2009-08-24 Unterdruckpumpe mit Druckausgleich
PCT/EP2010/060001 WO2011023448A1 (de) 2009-08-24 2010-07-13 Unterdruckpumpe mit druckausgleich

Publications (2)

Publication Number Publication Date
JP2013502537A JP2013502537A (ja) 2013-01-24
JP5383917B2 true JP5383917B2 (ja) 2014-01-08

Family

ID=42751884

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012525954A Expired - Fee Related JP5383917B2 (ja) 2009-08-24 2010-07-13 圧力補正装置を備えた真空ポンプ

Country Status (5)

Country Link
EP (1) EP2470790A1 (https=)
JP (1) JP5383917B2 (https=)
DE (1) DE102009028831A1 (https=)
IN (1) IN2012DN01495A (https=)
WO (1) WO2011023448A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013104375A1 (de) 2013-04-30 2014-10-30 Hella Kgaa Hueck & Co. Vakuumpumpe
DE102018203031A1 (de) * 2018-03-01 2019-09-05 Robert Bosch Gmbh Drucksensor für einen Bremskraftverstärker
CN110654360B (zh) * 2018-06-28 2021-06-22 长城汽车股份有限公司 电子真空泵控制方法、装置、系统及机器可读存储介质
JP7568077B2 (ja) * 2021-04-27 2024-10-16 株式会社村田製作所 ポンプ装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4412416A (en) * 1980-10-20 1983-11-01 General Motors Corporation Altitude compensated vacuum supply system and control
JPH08192737A (ja) * 1995-01-18 1996-07-30 Nabco Ltd 負圧供給装置
GB0326613D0 (en) * 2003-11-14 2003-12-17 Boc Group Plc Vacuum pump
GB2440542A (en) * 2006-07-31 2008-02-06 Boc Group Plc Vacuum pump gearbox purge gas arrangement
JP5350598B2 (ja) * 2007-03-28 2013-11-27 東京エレクトロン株式会社 排気ポンプ、連通管、排気システム及び基板処理装置

Also Published As

Publication number Publication date
EP2470790A1 (de) 2012-07-04
DE102009028831A1 (de) 2011-03-03
JP2013502537A (ja) 2013-01-24
IN2012DN01495A (https=) 2015-06-05
WO2011023448A1 (de) 2011-03-03

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