DE102009028831A1 - Unterdruckpumpe mit Druckausgleich - Google Patents

Unterdruckpumpe mit Druckausgleich Download PDF

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Publication number
DE102009028831A1
DE102009028831A1 DE200910028831 DE102009028831A DE102009028831A1 DE 102009028831 A1 DE102009028831 A1 DE 102009028831A1 DE 200910028831 DE200910028831 DE 200910028831 DE 102009028831 A DE102009028831 A DE 102009028831A DE 102009028831 A1 DE102009028831 A1 DE 102009028831A1
Authority
DE
Germany
Prior art keywords
vacuum pump
medium
environment
pressure compensation
compensation element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE200910028831
Other languages
German (de)
English (en)
Inventor
Harry Fleig
Andre Johanning
Bertram Bauer
Hartmut Krueger
Harald Merz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to DE200910028831 priority Critical patent/DE102009028831A1/de
Priority to JP2012525954A priority patent/JP5383917B2/ja
Priority to EP10734095A priority patent/EP2470790A1/de
Priority to PCT/EP2010/060001 priority patent/WO2011023448A1/de
Priority to IN1495DEN2012 priority patent/IN2012DN01495A/en
Publication of DE102009028831A1 publication Critical patent/DE102009028831A1/de
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C13/00—Adaptations of machines or pumps for special use, e.g. for extremely high pressures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C14/00—Control of, monitoring of, or safety arrangements for, machines, pumps or pumping installations
    • F04C14/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C15/00—Component parts, details or accessories of machines, pumps or pumping installations, not provided for in groups F04C2/00 - F04C14/00
    • F04C15/06—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F04C15/064—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston machines or pumps
    • F04C15/066—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston machines or pumps of the non-return type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Valves And Accessory Devices For Braking Systems (AREA)
  • Compressor (AREA)
DE200910028831 2009-08-24 2009-08-24 Unterdruckpumpe mit Druckausgleich Withdrawn DE102009028831A1 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE200910028831 DE102009028831A1 (de) 2009-08-24 2009-08-24 Unterdruckpumpe mit Druckausgleich
JP2012525954A JP5383917B2 (ja) 2009-08-24 2010-07-13 圧力補正装置を備えた真空ポンプ
EP10734095A EP2470790A1 (de) 2009-08-24 2010-07-13 Unterdruckpumpe mit druckausgleich
PCT/EP2010/060001 WO2011023448A1 (de) 2009-08-24 2010-07-13 Unterdruckpumpe mit druckausgleich
IN1495DEN2012 IN2012DN01495A (https=) 2009-08-24 2010-07-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE200910028831 DE102009028831A1 (de) 2009-08-24 2009-08-24 Unterdruckpumpe mit Druckausgleich

Publications (1)

Publication Number Publication Date
DE102009028831A1 true DE102009028831A1 (de) 2011-03-03

Family

ID=42751884

Family Applications (1)

Application Number Title Priority Date Filing Date
DE200910028831 Withdrawn DE102009028831A1 (de) 2009-08-24 2009-08-24 Unterdruckpumpe mit Druckausgleich

Country Status (5)

Country Link
EP (1) EP2470790A1 (https=)
JP (1) JP5383917B2 (https=)
DE (1) DE102009028831A1 (https=)
IN (1) IN2012DN01495A (https=)
WO (1) WO2011023448A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013104375A1 (de) 2013-04-30 2014-10-30 Hella Kgaa Hueck & Co. Vakuumpumpe
DE102018203031A1 (de) * 2018-03-01 2019-09-05 Robert Bosch Gmbh Drucksensor für einen Bremskraftverstärker
CN110654360B (zh) * 2018-06-28 2021-06-22 长城汽车股份有限公司 电子真空泵控制方法、装置、系统及机器可读存储介质
JP7568077B2 (ja) * 2021-04-27 2024-10-16 株式会社村田製作所 ポンプ装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4412416A (en) * 1980-10-20 1983-11-01 General Motors Corporation Altitude compensated vacuum supply system and control
JPH08192737A (ja) * 1995-01-18 1996-07-30 Nabco Ltd 負圧供給装置
GB0326613D0 (en) * 2003-11-14 2003-12-17 Boc Group Plc Vacuum pump
GB2440542A (en) * 2006-07-31 2008-02-06 Boc Group Plc Vacuum pump gearbox purge gas arrangement
JP5350598B2 (ja) * 2007-03-28 2013-11-27 東京エレクトロン株式会社 排気ポンプ、連通管、排気システム及び基板処理装置

Also Published As

Publication number Publication date
EP2470790A1 (de) 2012-07-04
JP2013502537A (ja) 2013-01-24
IN2012DN01495A (https=) 2015-06-05
JP5383917B2 (ja) 2014-01-08
WO2011023448A1 (de) 2011-03-03

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Legal Events

Date Code Title Description
R005 Application deemed withdrawn due to failure to request examination