JP5378635B2 - シリコン・オン・インシュレータ内に形成された金属酸化膜半導体デバイス - Google Patents
シリコン・オン・インシュレータ内に形成された金属酸化膜半導体デバイス Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims description 35
- 229910044991 metal oxide Inorganic materials 0.000 title claims description 4
- 150000004706 metal oxides Chemical class 0.000 title claims description 4
- 239000012212 insulator Substances 0.000 title description 2
- 239000000758 substrate Substances 0.000 claims description 61
- 235000012431 wafers Nutrition 0.000 claims description 59
- 238000000034 method Methods 0.000 claims description 51
- 210000000746 body region Anatomy 0.000 claims description 26
- 238000009792 diffusion process Methods 0.000 claims description 9
- 230000008569 process Effects 0.000 claims description 9
- 230000003071 parasitic effect Effects 0.000 claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 18
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 16
- 238000004519 manufacturing process Methods 0.000 description 16
- 229910052710 silicon Inorganic materials 0.000 description 16
- 239000010703 silicon Substances 0.000 description 16
- 239000012535 impurity Substances 0.000 description 12
- 230000015556 catabolic process Effects 0.000 description 10
- 239000000463 material Substances 0.000 description 10
- 235000012239 silicon dioxide Nutrition 0.000 description 9
- 239000000377 silicon dioxide Substances 0.000 description 9
- 238000005530 etching Methods 0.000 description 8
- 238000002513 implantation Methods 0.000 description 7
- 229910021332 silicide Inorganic materials 0.000 description 7
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 7
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 6
- 229910052785 arsenic Inorganic materials 0.000 description 6
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 6
- 229910052698 phosphorus Inorganic materials 0.000 description 6
- 239000011574 phosphorus Substances 0.000 description 6
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 6
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 5
- 229910052581 Si3N4 Inorganic materials 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 5
- 229910052796 boron Inorganic materials 0.000 description 5
- 239000004020 conductor Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 229920005591 polysilicon Polymers 0.000 description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 239000002019 doping agent Substances 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 238000001312 dry etching Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 239000000969 carrier Substances 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- -1 oxygen ions Chemical class 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000008186 active pharmaceutical agent Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000002457 bidirectional effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
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- 238000006731 degradation reaction Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000002028 premature Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
- H01L29/78609—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device for preventing leakage current
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- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
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- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
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- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
- H01L29/41725—Source or drain electrodes for field effect devices
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66742—Thin film unipolar transistors
- H01L29/66772—Monocristalline silicon transistors on insulating substrates, e.g. quartz substrates
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7833—Field effect transistors with field effect produced by an insulated gate with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's
- H01L29/7835—Field effect transistors with field effect produced by an insulated gate with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's with asymmetrical source and drain regions, e.g. lateral high-voltage MISFETs with drain offset region, extended drain MISFETs
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
- H01L29/78618—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device characterised by the drain or the source properties, e.g. the doping structure, the composition, the sectional shape or the contact structure
- H01L29/78621—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device characterised by the drain or the source properties, e.g. the doping structure, the composition, the sectional shape or the contact structure with LDD structure or an extension or an offset region or characterised by the doping profile
- H01L29/78624—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device characterised by the drain or the source properties, e.g. the doping structure, the composition, the sectional shape or the contact structure with LDD structure or an extension or an offset region or characterised by the doping profile the source and the drain regions being asymmetrical
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78645—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with multiple gate
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- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
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Description
本発明のこれらおよび他の特徴は、以下の例示的な実施形態の詳細な説明を添付図面と共に読めば明らかになるであろう。
Claims (10)
- 第1導電型の基板と、
前記基板の少なくとも一部分上に形成された第1の絶縁層と、
前記第1絶縁層の少なくとも一部分上に形成された第2導電型のエピタキシャル層と、
前記エピタキシャル層内でその上面に近接して形成され、互いに横に間隔を置いて設置された第2導電型のソース領域およびドレイン領域と、
前記エピタキシャル層の上にその上面に近接して、少なくとも部分的に前記ソース領域および前記ドレイン領域の間に形成されたゲートと、
前記エピタキシャル層および第1絶縁層を貫通して形成され、前記基板、前記ソース領域および前記エピタキシャル層を直接に電気接続するように構成されたソース接点と、
前記エピタキシャル層を少なくとも部分的に貫通して形成され、前記ドレイン領域と直接に電気接続するように構成されたドレイン接点とを備える、半導体デバイス。 - 前記エピタキシャル層内でその上面に近接して形成され、少なくとも部分的に前記ゲートの下に形成された第1導電型の本体領域をさらに備え、
前記ソース接点が、前記デバイスに関連する寄生的バイポーラ・トランジスタのトリガを妨げるように構成され、前記寄生的バイポーラ・トランジスタが、前記本体領域と前記ソース領域の間に形成されたベース−エミッタ領域、および前記本体領域と前記エピタキシャル層の間に形成されたベース−コレクタ領域を備える、請求項1に記載のデバイス。 - 前記ソース接点が、前記エピタキシャル層、前記基板、前記本体領域、および前記ソース領域を互いに実質的に短絡させることによって前記寄生的バイポーラ・トランジスタのトリガを妨げる、請求項2に記載のデバイス。
- エピタキシャル層の上面に近接して前記ゲートと前記ドレイン領域の間に形成された遮蔽構造をさらに備え、前記遮蔽構造が前記ソース領域に電気接続され、前記ゲートから横に間隔を置いて設置されており、前記ゲートと実質的に重ならない、請求項1に記載のデバイス。
- 前記ゲートおよび前記遮蔽構造の少なくとも一部分の下に形成された第2絶縁層をさらに備える、請求項4に記載のデバイス。
- 前記ゲートおよび遮蔽構造の下に形成された第2絶縁層が互いに異なる厚みである請求項5に記載のデバイス。
- デバイスが側方拡散MOS(LDMOS)を備える、請求項1に記載のデバイス。
- 前記基板、第1絶縁層およびエピタキシャル層がウェハ・ボンディング法で形成され、第1半導体ウェハは第1導電型の基板を備えて提供され、第2半導体ウェハは第2導電型の基板を備えて提供され、前記第1および第2半導体ウェハの少なくとも一方はそれぞれの基板上に形成された前記第1絶縁層の少なくとも一部分をさらに備え、前記第2半導体ウェハは裏返しにされ前記第1絶縁層で前記第1半導体ウェハと接合される、請求項1に記載のデバイス。
- 半導体ウェハ内に金属酸化膜デバイスを形成する方法であって、
第1導電型の半導体基板の少なくとも一部分上に第1絶縁層を形成する工程と、
前記第1絶縁層の少なくとも一部分上に第2導電型のエピタキシャル層を形成する工程と、
前記半導体ウェハの上面にゲートを形成する工程と、
前記エピタキシャル層内でその上面に近接して第1導電型の本体領域を形成する工程であって、前記本体領域が、前記ゲートの下に少なくとも部分的に形成される工程と、
前記エピタキシャル層内に第2導電型のソース領域およびドレイン領域を形成する工程であって、前記ゲートが、前記ソース領域および前記ドレイン領域より上で、少なくとも前記ソース領域および前記ドレイン領域の間に形成される工程と、
前記エピタキシャル層および前記第1絶縁層を貫通してソース接点を形成する工程であって、前記ソース接点が、前記基板、前記ソース領域および前記エピタキシャル層と直接に電気接続される工程と、
前記エピタキシャル層を少なくとも部分的に貫通してドレイン接点を形成する工程であって、前記ドレイン接点が、前記ドレイン領域と直接に電気接続されるように構成される工程とを含む、方法。 - 少なくとも1つの半導体デバイスを備えた集積回路であって、前記少なくとも1つの半導体デバイスが、
第1導電型の基板と、
前記基板の少なくとも一部分上に形成された第1絶縁層と、
前記第1絶縁層の少なくとも一部分上に形成された第2導電型のエピタキシャル層と、
前記エピタキシャル層内でその上面に近接して形成され、互いに横に間隔を置いて設置されている前記第2導電型のソース領域およびドレイン領域と、
前記エピタキシャル層の上でその上面に近接して、少なくとも部分的に前記ソース領域および前記ドレイン領域の間に形成されたゲートと、
前記エピタキシャル層および前記第1絶縁層を貫通して形成され、前記基板、前記ソース領域および前記エピタキシャル層と直接に電気的に接続するように構成されたソース接点と、
前記エピタキシャル層を少なくとも部分的に貫通して形成され、前記ドレイン領域と直接に電気接続するように構成されたドレイン接点とを備える、集積回路。
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US10/719,195 US6890804B1 (en) | 2003-11-21 | 2003-11-21 | Metal-oxide-semiconductor device formed in silicon-on-insulator |
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US7238986B2 (en) * | 2004-05-03 | 2007-07-03 | Texas Instruments Incorporated | Robust DEMOS transistors and method for making the same |
US7061057B2 (en) * | 2004-06-16 | 2006-06-13 | Cree Microwave, Llc | Laterally diffused MOS transistor having N+ source contact to N-doped substrate |
US20060043479A1 (en) * | 2004-09-02 | 2006-03-02 | Patrice Parris | Metal oxide semiconductor device including a shielding structure for low gate-drain capacitance |
JP2006294155A (ja) * | 2005-04-13 | 2006-10-26 | Tdk Corp | 磁気メモリデバイス |
SG130099A1 (en) * | 2005-08-12 | 2007-03-20 | Ciclon Semiconductor Device Co | Power ldmos transistor |
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JP2005159349A (ja) | 2005-06-16 |
TW200518206A (en) | 2005-06-01 |
TWI319598B (en) | 2010-01-11 |
US20050112808A1 (en) | 2005-05-26 |
US6890804B1 (en) | 2005-05-10 |
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