JP5371425B2 - 酸化物膜に窒素を組込むための方法及び装置 - Google Patents
酸化物膜に窒素を組込むための方法及び装置 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 203
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 title claims description 121
- 229910052757 nitrogen Inorganic materials 0.000 title claims description 62
- 239000000758 substrate Substances 0.000 claims abstract description 115
- 230000003446 memory effect Effects 0.000 claims description 26
- 150000004767 nitrides Chemical class 0.000 claims description 26
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 5
- 239000001301 oxygen Substances 0.000 claims description 5
- 229910052760 oxygen Inorganic materials 0.000 claims description 5
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 210000002381 plasma Anatomy 0.000 description 163
- 239000010408 film Substances 0.000 description 25
- 230000015572 biosynthetic process Effects 0.000 description 17
- 235000012431 wafers Nutrition 0.000 description 15
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 11
- 239000000463 material Substances 0.000 description 11
- 230000001965 increasing effect Effects 0.000 description 9
- 239000007789 gas Substances 0.000 description 7
- 235000012239 silicon dioxide Nutrition 0.000 description 7
- 229910052734 helium Inorganic materials 0.000 description 6
- VIKNJXKGJWUCNN-XGXHKTLJSA-N norethisterone Chemical compound O=C1CC[C@@H]2[C@H]3CC[C@](C)([C@](CC4)(O)C#C)[C@@H]4[C@@H]3CCC2=C1 VIKNJXKGJWUCNN-XGXHKTLJSA-N 0.000 description 5
- 239000000377 silicon dioxide Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 4
- 239000001307 helium Substances 0.000 description 4
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 4
- 230000008021 deposition Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 238000009832 plasma treatment Methods 0.000 description 3
- 238000007781 pre-processing Methods 0.000 description 3
- 238000002203 pretreatment Methods 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000005121 nitriding Methods 0.000 description 2
- 125000004433 nitrogen atom Chemical group N* 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910017121 AlSiO Inorganic materials 0.000 description 1
- 229910003855 HfAlO Inorganic materials 0.000 description 1
- 229910004129 HfSiO Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910006501 ZrSiO Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 230000002939 deleterious effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000005865 ionizing radiation Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910001404 rare earth metal oxide Inorganic materials 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 150000004760 silicates Chemical class 0.000 description 1
- 125000005624 silicic acid group Chemical class 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
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Description
本発明は、半導体デバイスの処理に関し、更に詳細には、酸化物膜に窒素を組込むための方法及び装置に関する。
より高い性能、より高い密度の電子部品に対する駆動力は、金属酸化物半導体(MOS)の側面寸法の継続的縮小化を導いてきた。側面のデバイス寸法が縮小されるにつれて、MOSデバイスのゲート誘電体厚さ(例えば、二酸化シリコンの厚さ)もまたMOSデバイスの適切な動作に対して十分な電荷蓄積容量を維持するよう低減されなければならない。
本発明の第一態様において、第一方法が提供される。第一方法は、(1)プロセスチャンバを攻撃プラズマで前処理するステップと、(2)プロセスチャンバ内に基板を装填するステップと、(3)プロセスチャンバ内で基板上にプラズマ窒化物形成を行うステップと、を含む。プロセスチャンバは、基板のプラズマ窒化物形成中に用いられるプラズマ電力より少なくとも150%大きいプラズマ電力で前処理される。
本発明は、基板上に形成される酸化物膜に組込むことができる窒素の密度を増加させる改善された方法及び装置を提供する。本発明によれば、例えば、ゲート酸化物又はその他の物質層に窒素を組込むために、プラズマリアクタを用いることができる。
(1)曲線200a-bで示されるPEW無し、
(2)曲線202a-bで示される40ワット連続波、20ミリトールチャンバ圧、32秒間、200sccmN2流量の低電力N2PEW、
(3)曲線204a-bで示される2000ワット連続波、20ミリトールチャンバ圧、32秒間、200sccmN2流量の高電力ヘリウムPEW、
(4)曲線206a-bで示される1000ワット連続波、20ミリトールチャンバ圧、32秒間、200sccmN2流量の高電力N2PEW、
(5)曲線208a-bで示される2000ワット連続波、20ミリトールチャンバ圧、32秒間、200sccmN2流量の高電力N2PEW。
(1)曲線300において、カリフォルニア州サンタクララのアプライドマテリアルズ社から入手可能なDPNプロセスチャンバを用いて、50ワット実効、75ワット実効、100ワット実効の低RFパルス電力で、10オングストロームのベース酸化物(急速熱酸化物)、5%のデューティサイクルと高められたパルス高周波生成のパルス、20mTのチャンバ圧、30秒間のN2プラズマ、チャック無し、あらかじめ設定された保持、窒化物形成後のアニール、15%のDivcapで窒化物形成した厚さとNドーズ、
(2)曲線302において、カリフォルニア州サンタクララのアプライドマテリアルズ社から入手可能なDPNプロセスチャンバを用いて、100W、200W、300Wの中ぐらいのRF電力で、10オングストロームのベース酸化物(急速熱酸化物)、連続波、高められたパルス高周波生成、20mTのチャンバ圧、30秒間のN2プラズマ、チャック無し、窒化物形成後のアニール、15%のDivcapで窒化物形成した厚さとNドーズ、
(3)曲線304において、カリフォルニア州サンタクララのアプライドマテリアルズ社から入手可能なDPNplusチャンバを用いて、50ワット実効、75ワット実効、100ワット実効の低RFパルス電力で、10オングストロームのベース酸化物(急速熱酸化物)、5%のデューティサイクルと高められたパルス高周波生成のパルス、20mTのチャンバ圧、30秒間のN2プラズマ、チャック無し、窒化物形成後の窒化アニール、30%のDivcapで窒化物形成した厚さとNドーズ、
(4)曲線306において、カリフォルニア州サンタクララのアプライドマテリアルズ社から入手可能なDPNplusチャンバを用いて、100W、200W、300Wの中ぐらいのRF電力で、10オングストロームのベース酸化物(急速熱酸化物)、連続波、高められたパルス高周波生成、20mTのチャンバ圧、30秒間のN2プラズマ、チャック無し、窒化物形成後のアニール、50%のDivcapで窒化物形成した厚さとNドーズ、
(5)曲線308において、N2PEW(20ミリトールチャンバ圧、32秒間、200sccmのN2流量で2000ワット連続波)による上記(3)と同じもの、
(6)曲線310において、N2PEW(20ミリトールチャンバ圧、32秒間、200sccmのN2流量で2000ワット連続波)による上記(4)と同じもの。
Claims (14)
- プロセスチャンバを、窒素プラズマである攻撃プラズマで前処理して、窒化物形成中に酸化物膜厚及び/又は窒素取込みレベルに影響を与えるプロセス間メモリ効果を低減するステップと、
該プロセスチャンバに基板を装填するステップと、
該プロセスチャンバ内で該基板上にプラズマ窒化物形成を行うステップと、
を含み、
該プロセスチャンバが、該基板のプラズマ窒化物形成中に用いられるプラズマ電力より少なくとも150%大きいプラズマ電力を用いて前処理される、方法。 - 該プロセスチャンバを攻撃プラズマで前処理するステップが、800〜2500ワットのプラズマ電力を用いる工程を含む、請求項1に記載の方法。
- 該プロセスチャンバを攻撃プラズマで前処理するステップが、該プロセスチャンバを5〜60秒間前処理する工程を含む、請求項1に記載の方法。
- 該プロセスチャンバを攻撃プラズマで前処理するステップが、10〜100ミリトールのチャンバ圧を用いる工程を含む、請求項1に記載の方法。
- 該プロセスチャンバを窒素プラズマで前処理するステップが、窒素をプロセスキット部品の少なくとも一つと該プロセスチャンバのチャンバ壁に吸収させるか又は吸着させる工程を含む、請求項1に記載の方法。
- 該プロセスチャンバを攻撃プラズマで前処理するステップが、該プロセスチャンバ内の酸素と水の少なくとも一つの相対分圧を低減させる工程を含む、請求項1に記載の方法。
- 異なる電力レベルを用いる窒化物形成ステップのシーケンス間で、該攻撃プラズマ前処理ステップを用いる工程を更に含む、請求項1に記載の方法。
- 該プロセスチャンバを前処理するステップが、該基板上にプラズマ窒化物形成を行う直前に行われる、請求項1に記載の方法。
- 該プロセスチャンバを前処理するステップが、該プロセスチャンバのアイドル時間中に行われる、請求項1に記載の方法。
- 該プロセスチャンバが、該基板のプラズマ窒化物形成中に用いられるプラズマ電力より少なくとも200%大きいプラズマ電力を用いて前処理される、請求項1に記載の方法。
- 該プロセスチャンバ内で各基板が処理される前に該プロセスチャンバを攻撃プラズマで前処理するステップを更に含む、請求項1に記載の方法。
- プロセスチャンバを第一攻撃窒素プラズマで前処理して、窒化物形成中に酸化物膜厚及び/又は窒素取込みレベルに影響を与えるプロセス間メモリ効果を低減するステップと、
該プロセスチャンバに第一基板を装填するステップと、
該第一基板上にプラズマ窒化物形成を行うステップであって、該プロセスチャンバが、該第一基板のプラズマ窒化物形成中に用いられるプラズマ電力より少なくとも150%大きいプラズマ電力を用いる該第一攻撃窒素プラズマで前処理される、前記ステップと、
該プロセスチャンバを第二攻撃窒素プラズマで前処理して、該プロセス間メモリ効果を低減するステップと、
該プロセスチャンバ内に第二基板を装填するステップと、
該第二基板上にプラズマ窒化物形成を行うステップであって、該プロセスチャンバが、該第二基板のプラズマ窒化物形成中に用いられるプラズマ電力より少なくとも150%大きいプラズマ電力を用いる該第二攻撃窒素プラズマで前処理される、前記ステップと、
を含む方法。 - プロセスチャンバと、
該プロセスチャンバに結合され、該プロセスチャンバを制御するコントローラであって、
該プロセスチャンバを、窒素プラズマである攻撃プラズマで前処理して、窒化物形成中に酸化物膜厚及び/又は窒素取込みレベルに影響を与えるプロセス間メモリ効果を低減する処理と、
該プロセスチャンバ内に基板を装填する処理と、
該プロセスチャンバ内で該基板上にプラズマ窒化物形成を行う処理とを制御する、コントローラと、を備え、
該プロセスチャンバが、該基板のプラズマ窒化物形成中に用いられるプラズマ電力より少なくとも150%大きいプラズマ電力を用いて前処理される、装置。 - プロセスチャンバと、
該プロセスチャンバに結合され、該プロセスチャンバを制御するコントローラであって、
該プロセスチャンバを第一攻撃窒素プラズマで前処理して、窒化物形成中に酸化物膜厚及び/又は窒素取込みレベルに影響を与えるプロセス間メモリ効果を低減する処理と、
該プロセスチャンバ内に第一基板を装填する処理と、
該第一基板上にプラズマ窒化物形成を行う処理と、
該プロセスチャンバを第二攻撃窒素プラズマで前処理して、該プロセス間メモリ効果を低減する処理と、
該プロセスチャンバ内に第二基板を装填する処理と、
該第二基板上にプラズマ窒化物形成を行う処理とを制御する、コントローラと、を備え、
該プロセスチャンバが該第一基板のプラズマ窒化物形成中に用いられるプラズマ電力より少なくとも150%大きいプラズマ電力を用いる該第一攻撃窒素プラズマで前処理され、
該プロセスチャンバが該第二基板のプラズマ窒化物形成中に用いられるプラズマ電力より少なくとも150%大きいプラズマ電力を用いる該第二攻撃窒素プラズマで前処理される、装置。
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