JP5339372B2 - Zn(OH)2ナノシートとZnOナノウィスカー膜によるハイブリッドフィルム、ZnOナノシートとZnOナノウィスカー膜によるハイブリッドフィルム、およびそれらの作製方法 - Google Patents
Zn(OH)2ナノシートとZnOナノウィスカー膜によるハイブリッドフィルム、ZnOナノシートとZnOナノウィスカー膜によるハイブリッドフィルム、およびそれらの作製方法 Download PDFInfo
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- 239000002135 nanosheet Substances 0.000 title claims abstract description 139
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- 238000010438 heat treatment Methods 0.000 claims abstract description 14
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 474
- 239000011787 zinc oxide Substances 0.000 claims description 235
- 239000011701 zinc Substances 0.000 claims description 125
- 238000006243 chemical reaction Methods 0.000 claims description 28
- 229910052725 zinc Inorganic materials 0.000 claims description 12
- 238000011282 treatment Methods 0.000 claims description 11
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 9
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- 229910006404 SnO 2 Inorganic materials 0.000 claims description 6
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- XIOUDVJTOYVRTB-UHFFFAOYSA-N 1-(1-adamantyl)-3-aminothiourea Chemical compound C1C(C2)CC3CC2CC1(NC(=S)NN)C3 XIOUDVJTOYVRTB-UHFFFAOYSA-N 0.000 description 6
- 238000004090 dissolution Methods 0.000 description 6
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- YZYKBQUWMPUVEN-UHFFFAOYSA-N zafuleptine Chemical compound OC(=O)CCCCCC(C(C)C)NCC1=CC=C(F)C=C1 YZYKBQUWMPUVEN-UHFFFAOYSA-N 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
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- 238000001226 reprecipitation Methods 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 229940057499 anhydrous zinc acetate Drugs 0.000 description 3
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- 230000003746 surface roughness Effects 0.000 description 3
- DJWUNCQRNNEAKC-UHFFFAOYSA-L zinc acetate Chemical compound [Zn+2].CC([O-])=O.CC([O-])=O DJWUNCQRNNEAKC-UHFFFAOYSA-L 0.000 description 3
- 238000003917 TEM image Methods 0.000 description 2
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- 229910052718 tin Inorganic materials 0.000 description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
- 229910001887 tin oxide Inorganic materials 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 150000003751 zinc Chemical class 0.000 description 2
- VNDYJBBGRKZCSX-UHFFFAOYSA-L zinc bromide Chemical compound Br[Zn]Br VNDYJBBGRKZCSX-UHFFFAOYSA-L 0.000 description 2
- JIAARYAFYJHUJI-UHFFFAOYSA-L zinc dichloride Chemical compound [Cl-].[Cl-].[Zn+2] JIAARYAFYJHUJI-UHFFFAOYSA-L 0.000 description 2
- BHHYHSUAOQUXJK-UHFFFAOYSA-L zinc fluoride Chemical compound F[Zn]F BHHYHSUAOQUXJK-UHFFFAOYSA-L 0.000 description 2
- UAYWVJHJZHQCIE-UHFFFAOYSA-L zinc iodide Chemical compound I[Zn]I UAYWVJHJZHQCIE-UHFFFAOYSA-L 0.000 description 2
- ONDPHDOFVYQSGI-UHFFFAOYSA-N zinc nitrate Chemical compound [Zn+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O ONDPHDOFVYQSGI-UHFFFAOYSA-N 0.000 description 2
- BGWSILIXRXEWOT-UHFFFAOYSA-N C(C1=CC=CC=C1)(=O)OCCCC.[Zn] Chemical compound C(C1=CC=CC=C1)(=O)OCCCC.[Zn] BGWSILIXRXEWOT-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 206010070834 Sensitisation Diseases 0.000 description 1
- PTFCDOFLOPIGGS-UHFFFAOYSA-N Zinc dication Chemical compound [Zn+2] PTFCDOFLOPIGGS-UHFFFAOYSA-N 0.000 description 1
- WHMDKBIGKVEYHS-IYEMJOQQSA-L Zinc gluconate Chemical compound [Zn+2].OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C([O-])=O.OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C([O-])=O WHMDKBIGKVEYHS-IYEMJOQQSA-L 0.000 description 1
- CANRESZKMUPMAE-UHFFFAOYSA-L Zinc lactate Chemical compound [Zn+2].CC(O)C([O-])=O.CC(O)C([O-])=O CANRESZKMUPMAE-UHFFFAOYSA-L 0.000 description 1
- ZOIORXHNWRGPMV-UHFFFAOYSA-N acetic acid;zinc Chemical compound [Zn].CC(O)=O.CC(O)=O ZOIORXHNWRGPMV-UHFFFAOYSA-N 0.000 description 1
- 239000003929 acidic solution Substances 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- FATUQANACHZLRT-KMRXSBRUSA-L calcium glucoheptonate Chemical compound [Ca+2].OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C(O)C([O-])=O.OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C(O)C([O-])=O FATUQANACHZLRT-KMRXSBRUSA-L 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000000224 chemical solution deposition Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000005493 condensed matter Effects 0.000 description 1
- 239000002537 cosmetic Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- PCERBVBQNKZCFS-UHFFFAOYSA-N dibenzylcarbamodithioic acid Chemical compound C=1C=CC=CC=1CN(C(=S)S)CC1=CC=CC=C1 PCERBVBQNKZCFS-UHFFFAOYSA-N 0.000 description 1
- 229940116901 diethyldithiocarbamate Drugs 0.000 description 1
- LMBWSYZSUOEYSN-UHFFFAOYSA-N diethyldithiocarbamic acid Chemical compound CCN(CC)C(S)=S LMBWSYZSUOEYSN-UHFFFAOYSA-N 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
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- 238000000724 energy-dispersive X-ray spectrum Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- MFGZXPGKKJMZIY-UHFFFAOYSA-N ethyl 5-amino-1-(4-sulfamoylphenyl)pyrazole-4-carboxylate Chemical compound NC1=C(C(=O)OCC)C=NN1C1=CC=C(S(N)(=O)=O)C=C1 MFGZXPGKKJMZIY-UHFFFAOYSA-N 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
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- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 230000036571 hydration Effects 0.000 description 1
- 238000006703 hydration reaction Methods 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000002070 nanowire Substances 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000001139 pH measurement Methods 0.000 description 1
- UOURRHZRLGCVDA-UHFFFAOYSA-D pentazinc;dicarbonate;hexahydroxide Chemical compound [OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[Zn+2].[Zn+2].[Zn+2].[Zn+2].[Zn+2].[O-]C([O-])=O.[O-]C([O-])=O UOURRHZRLGCVDA-UHFFFAOYSA-D 0.000 description 1
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000012266 salt solution Substances 0.000 description 1
- 230000008313 sensitization Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
- WGIWBXUNRXCYRA-UHFFFAOYSA-H trizinc;2-hydroxypropane-1,2,3-tricarboxylate Chemical compound [Zn+2].[Zn+2].[Zn+2].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O.[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O WGIWBXUNRXCYRA-UHFFFAOYSA-H 0.000 description 1
- BIKXLKXABVUSMH-UHFFFAOYSA-N trizinc;diborate Chemical compound [Zn+2].[Zn+2].[Zn+2].[O-]B([O-])[O-].[O-]B([O-])[O-] BIKXLKXABVUSMH-UHFFFAOYSA-N 0.000 description 1
- VNTDZUDTQCZFKN-UHFFFAOYSA-L zinc 2,2-dimethyloctanoate Chemical compound [Zn++].CCCCCCC(C)(C)C([O-])=O.CCCCCCC(C)(C)C([O-])=O VNTDZUDTQCZFKN-UHFFFAOYSA-L 0.000 description 1
- 239000004246 zinc acetate Substances 0.000 description 1
- 229960000314 zinc acetate Drugs 0.000 description 1
- 229940102001 zinc bromide Drugs 0.000 description 1
- 239000011592 zinc chloride Substances 0.000 description 1
- 235000005074 zinc chloride Nutrition 0.000 description 1
- 239000011746 zinc citrate Substances 0.000 description 1
- 235000006076 zinc citrate Nutrition 0.000 description 1
- 229940068475 zinc citrate Drugs 0.000 description 1
- BOXSVZNGTQTENJ-UHFFFAOYSA-L zinc dibutyldithiocarbamate Chemical compound [Zn+2].CCCCN(C([S-])=S)CCCC.CCCCN(C([S-])=S)CCCC BOXSVZNGTQTENJ-UHFFFAOYSA-L 0.000 description 1
- SRWMQSFFRFWREA-UHFFFAOYSA-M zinc formate Chemical compound [Zn+2].[O-]C=O SRWMQSFFRFWREA-UHFFFAOYSA-M 0.000 description 1
- 239000011670 zinc gluconate Substances 0.000 description 1
- 235000011478 zinc gluconate Nutrition 0.000 description 1
- 229960000306 zinc gluconate Drugs 0.000 description 1
- 239000011576 zinc lactate Substances 0.000 description 1
- 235000000193 zinc lactate Nutrition 0.000 description 1
- 229940050168 zinc lactate Drugs 0.000 description 1
- 229940098697 zinc laurate Drugs 0.000 description 1
- 229940105125 zinc myristate Drugs 0.000 description 1
- 229940118827 zinc phenolsulfonate Drugs 0.000 description 1
- LRXTYHSAJDENHV-UHFFFAOYSA-H zinc phosphate Chemical compound [Zn+2].[Zn+2].[Zn+2].[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O LRXTYHSAJDENHV-UHFFFAOYSA-H 0.000 description 1
- 229910000165 zinc phosphate Inorganic materials 0.000 description 1
- XOOUIPVCVHRTMJ-UHFFFAOYSA-L zinc stearate Chemical compound [Zn+2].CCCCCCCCCCCCCCCCCC([O-])=O.CCCCCCCCCCCCCCCCCC([O-])=O XOOUIPVCVHRTMJ-UHFFFAOYSA-L 0.000 description 1
- 229940057977 zinc stearate Drugs 0.000 description 1
- NWONKYPBYAMBJT-UHFFFAOYSA-L zinc sulfate Chemical compound [Zn+2].[O-]S([O-])(=O)=O NWONKYPBYAMBJT-UHFFFAOYSA-L 0.000 description 1
- 229960001763 zinc sulfate Drugs 0.000 description 1
- 229910000368 zinc sulfate Inorganic materials 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
- BOVNWDGXGNVNQD-UHFFFAOYSA-L zinc;2-hydroxybenzenesulfonate Chemical compound [Zn+2].OC1=CC=CC=C1S([O-])(=O)=O.OC1=CC=CC=C1S([O-])(=O)=O BOVNWDGXGNVNQD-UHFFFAOYSA-L 0.000 description 1
- MQWLIFWNJWLDCI-UHFFFAOYSA-L zinc;carbonate;hydrate Chemical compound O.[Zn+2].[O-]C([O-])=O MQWLIFWNJWLDCI-UHFFFAOYSA-L 0.000 description 1
- RXBXBWBHKPGHIB-UHFFFAOYSA-L zinc;diperchlorate Chemical compound [Zn+2].[O-]Cl(=O)(=O)=O.[O-]Cl(=O)(=O)=O RXBXBWBHKPGHIB-UHFFFAOYSA-L 0.000 description 1
- MLVWCBYTEFCFSG-UHFFFAOYSA-L zinc;dithiocyanate Chemical compound [Zn+2].[S-]C#N.[S-]C#N MLVWCBYTEFCFSG-UHFFFAOYSA-L 0.000 description 1
- GPYYEEJOMCKTPR-UHFFFAOYSA-L zinc;dodecanoate Chemical compound [Zn+2].CCCCCCCCCCCC([O-])=O.CCCCCCCCCCCC([O-])=O GPYYEEJOMCKTPR-UHFFFAOYSA-L 0.000 description 1
- ZPEJZWGMHAKWNL-UHFFFAOYSA-L zinc;oxalate Chemical compound [Zn+2].[O-]C(=O)C([O-])=O ZPEJZWGMHAKWNL-UHFFFAOYSA-L 0.000 description 1
- XDWXRAYGALQIFG-UHFFFAOYSA-L zinc;propanoate Chemical compound [Zn+2].CCC([O-])=O.CCC([O-])=O XDWXRAYGALQIFG-UHFFFAOYSA-L 0.000 description 1
- HSYFJDYGOJKZCL-UHFFFAOYSA-L zinc;sulfite Chemical compound [Zn+2].[O-]S([O-])=O HSYFJDYGOJKZCL-UHFFFAOYSA-L 0.000 description 1
- GBFLQPIIIRJQLU-UHFFFAOYSA-L zinc;tetradecanoate Chemical compound [Zn+2].CCCCCCCCCCCCCC([O-])=O.CCCCCCCCCCCCCC([O-])=O GBFLQPIIIRJQLU-UHFFFAOYSA-L 0.000 description 1
Landscapes
- Inorganic Compounds Of Heavy Metals (AREA)
Description
(1)酸化亜鉛が析出する反応系を用いて、該反応系の温度、原料濃度、添加剤ないしpHを調整することにより、酸化亜鉛を基板上に析出あるいは堆積させ、c軸配向しているZnOウィスカー膜を形成させ、次いで、該ZnOウィスカー膜を、適宜の温度の水中に浸漬し、あるいは水熱合成により、ZnOウィスカー膜上にZn(OH)2ナノシートを形成することを特徴とするZn(OH)2ナノシートとZnOウィスカー膜によるハイブイッドフイルムの製造方法。
(2)ZnOウィスカー膜を、0〜100℃の水中に浸漬し、ZnOウィスカー膜上にZn(OH)2ナノシート構造体を形成する、前記(1)に記載のハイブイッドフイルムの製造方法。
(3)基板として、フッ素ドープSnO2被覆ガラス(FTO)基板を用いる、前記(1)または(2)に記載のハイブイッドフイルムの製造方法。
(4)前記(1)から(3)のいずれかに記載の方法で作製したZn(OH)2ナノシートとZnOウィスカー膜によるハイブリッドフィルムを、加熱反応に供して、Zn(OH)2ナノシートの構造を保ったまま、ZnOナノシートへと相転移させることを特徴とするZnOナノシートとZnOナノウィスカー膜によるハイブリッドフィルムの製造方法。
(5)上記ハイブリッドフィルムを、120−450℃の温度範囲の加熱反応に供して相転移させる、前記(4)に記載のハイブリッドフィルムの製造方法。
(6)基板上に析出法で形成したZnOナノウィスカー膜と該ウィスカー膜上に形成されたZn(OH)2ナノシートとからなるハイブリッドフィルム。
(7)ZnOウィスカー膜の温水処理により作製してなる、前記(6)に記載のZnOナノウィスカー膜とZn(OH)2ナノシートとからなるハイブリッドフィルム。
(8)前記(6)又は(7)に記載の亜鉛含有ハイブリッドフィルムを構成要素として含むことを特徴とする酸化亜鉛系または水酸化亜鉛系デバイス。
本発明は、ZnOウィスカーの温水処理や、Zn(OH)2の成長、加熱処理を用いて、Zn(OH)2ナノシートとZnOナノウィスカー膜によるハイブリッドフィルム、ZnOナノシートとZnOナノウィスカー膜によるハイブリッドフィルムを合成することを最も主要な特徴とするものである。
(1)Zn(OH)2ナノシートとZnOナノウィスカー膜によるハイブリッドフィルムを作製することができる。
(2)Zn(OH)2ナノシートを作製することができる。
(3)ZnOナノシートとZnOナノウィスカー膜によるハイブリッドフィルムを作製することができる。
(4)ZnOナノシートを作製することができる。
(5)本発明は、上記ハイブリッドフィルムを、FTO基板上のハイブリッドフィルムとして、あるいは、任意の基板上に形成したハイブリッドフィルムとして提供することができる。
(6)本発明の上記ハイブリッドフィルムは、例えば、DNAセンサー、たんぱく質センサー、溶液センサー、ガスセンサー、色素増感型太陽電池、フィルター、触媒などとしての用途を有するものである。
・ 酢酸亜鉛2水和物(Zn(CH3COO)2・2H2O,99%)
・ 硝酸亜鉛6水和物(Zn(NO3)2・6H2O,99%)
・ ヘキサメチレンテトラミン(hexamethylenetetramine)[HMT,C6H12N4,99%]
・ ポリエチレンイミン[PEI,(C2H5N)n,branched mean molecular weight of 600,99%]
・ フッ素ドープSnO2被覆ガラス基板(FTO基板)
・ 無水酢酸亜鉛(anhydrous zinc acetate)
[文献2]Song,J.;Baek,S.;Lim,S.,Effect of hydrothermal reaction conditions on the optical properties of ZnO nanorods.Physica B:Condensed Matter 2008,403,(10−11),1960−1963
[文献3]McBride,R.A.;Kelly,J.M.;McCormack,D.E.,Growth of well−defined ZnO microparticles by hydroxide ion hydrolysis of zinc salts.Journal of Materials Chemistry 2003,13,(5),1196−1201
[文献4]Lieth,R.M.A.,Preparation and Crystal Growth of Materials with Layered Structures.Springer 1977,ISBN 9027706387,9789027706386,123−128
[文献5]Stumm,W.;Morgan,J.J.,Aquatic Chemistry.Wiley−Interscience 1995,New York,p.1002
[文献6]Gao,Y.;Nagai,M.;Chang,T.−C.;Shyue,J.−J.,Solution−Derived ZnO Nanowire Array Film as Photoelectrode in Dye−Sensitized Solar Cells.Cryst.Growth Des.2007,7,(12),2467−2471
[文献7]Obrien,P.;Saeed,T.;Knowles,J.,Speciation and the nature of ZnO thin films from chemical bath deposition.Journal of Materials Chemistry 1996,6,(7),1135−1139
[文献8]Zhao,J.;Jin,Z.−G.;Liu,X.−X.;Liu,Z.−F.,Growth and morphology of ZnO nanorods prepared from Zn(NO3)2/NaOH solutions.Journal of the European Ceramic Society 2006,26,(16),3745−3752
[文献9]Yamabi,S.;Imai,H.,Growth conditions for wurtzite zinc oxide films in aqueous solutions.Journal of Materials Chemistry 2002,12,(12),3773−3778
[文献10]Ziemniak,S.E.,Metal Oxide Solubility Behavior in High Temparature Aqueous Solutions.Journal of Solution Chemistry 1992,21,(8),745−760
[文献11]Benezeth,P.;Palmer,D.A.;Wesolowski,D.J.,The solubility of zinc oxide in 0.03m NaTr as a function of temperature,with in situ pH measurement.Geochimica et Cosmochimica Acta 1999,63,(10),1571−1586
[文献12]Benezeth,P.;Palmer,D.A.;Wesolowski,D.J.;Xiao,C.B.,New Measurements of the Solubility of Zinc Oxide from 150 to 350oC.Journal of Solution Chemistry 2002,31,(12),947−973
Claims (8)
- 酸化亜鉛が析出する反応系を用いて、該反応系の温度、原料濃度、添加剤ないしpHを調整することにより、酸化亜鉛を基板上に析出あるいは堆積させ、c軸配向しているZnOウィスカー膜を形成させ、次いで、該ZnOウィスカー膜を、適宜の温度の水中に浸漬し、あるいは水熱合成により、ZnOウィスカー膜上にZn(OH)2ナノシートを形成することを特徴とするZn(OH)2ナノシートとZnOウィスカー膜によるハイブイッドフイルムの製造方法。
- ZnOウィスカー膜を、0〜100℃の水中に浸漬し、ZnOウィスカー膜上にZn(OH)2ナノシート構造体を形成する、請求項1に記載のハイブイッドフイルムの製造方法。
- 基板として、フッ素ドープSnO2被覆ガラス(FTO)基板を用いる、請求項1または2に記載のハイブイッドフイルムの製造方法。
- 請求項1から3のいずれかに記載の方法で作製したZn(OH)2ナノシートとZnOウィスカー膜によるハイブリッドフィルムを、加熱反応に供して、Zn(OH)2ナノシートの構造を保ったまま、ZnOナノシートへと相転移させることを特徴とするZnOナノシートとZnOナノウィスカー膜によるハイブリッドフィルムの製造方法。
- 上記ハイブリッドフィルムを、120−450℃の温度範囲の加熱反応に供して相転移させる、請求項4に記載のハイブリッドフィルムの製造方法。
- 基板上に析出法で形成したZnOナノウィスカー膜と該ウィスカー膜上に形成されたZn(OH)2ナノシートとからなるハイブリッドフィルム。
- ZnOウィスカー膜の温水処理により作製してなる、請求項6に記載のZnOナノウィスカー膜とZn(OH)2ナノシートとからなるハイブリッドフィルム。
- 請求項6又は7に記載の亜鉛含有ハイブリッドフィルムを構成要素として含むことを特徴とする酸化亜鉛系または水酸化亜鉛系デバイス。
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