JP5333418B2 - 硬質皮膜被覆工具の製造方法 - Google Patents
硬質皮膜被覆工具の製造方法 Download PDFInfo
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- JP5333418B2 JP5333418B2 JP2010258961A JP2010258961A JP5333418B2 JP 5333418 B2 JP5333418 B2 JP 5333418B2 JP 2010258961 A JP2010258961 A JP 2010258961A JP 2010258961 A JP2010258961 A JP 2010258961A JP 5333418 B2 JP5333418 B2 JP 5333418B2
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 12
- 239000011248 coating agent Substances 0.000 title description 17
- 238000000576 coating method Methods 0.000 title description 17
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 129
- 239000013078 crystal Substances 0.000 claims abstract description 75
- 239000000203 mixture Substances 0.000 claims abstract description 55
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 46
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 44
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 43
- 239000001301 oxygen Substances 0.000 claims abstract description 43
- 230000015572 biosynthetic process Effects 0.000 claims description 81
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 74
- 229910001882 dioxygen Inorganic materials 0.000 claims description 74
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 57
- 238000000151 deposition Methods 0.000 claims description 43
- 230000008021 deposition Effects 0.000 claims description 43
- 229910052782 aluminium Inorganic materials 0.000 claims description 35
- 229910052804 chromium Inorganic materials 0.000 claims description 34
- 238000002441 X-ray diffraction Methods 0.000 claims description 32
- 239000000758 substrate Substances 0.000 claims description 28
- 238000000034 method Methods 0.000 claims description 24
- 238000005240 physical vapour deposition Methods 0.000 claims description 18
- 239000012298 atmosphere Substances 0.000 claims description 16
- 229910052751 metal Inorganic materials 0.000 claims description 16
- 230000007423 decrease Effects 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 11
- 239000012495 reaction gas Substances 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 230000003247 decreasing effect Effects 0.000 claims description 5
- 229910052796 boron Inorganic materials 0.000 claims description 4
- 229910052799 carbon Inorganic materials 0.000 claims description 4
- 230000000737 periodic effect Effects 0.000 claims description 4
- 229910052755 nonmetal Inorganic materials 0.000 claims description 3
- 238000005289 physical deposition Methods 0.000 abstract 1
- 230000000452 restraining effect Effects 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 411
- 239000011651 chromium Substances 0.000 description 60
- 230000000052 comparative effect Effects 0.000 description 26
- 239000007789 gas Substances 0.000 description 16
- 238000005259 measurement Methods 0.000 description 15
- 238000005520 cutting process Methods 0.000 description 14
- 238000009826 distribution Methods 0.000 description 11
- 230000000694 effects Effects 0.000 description 11
- 230000008859 change Effects 0.000 description 10
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 8
- 230000008569 process Effects 0.000 description 8
- 230000008020 evaporation Effects 0.000 description 6
- 238000001704 evaporation Methods 0.000 description 6
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 5
- 229910000423 chromium oxide Inorganic materials 0.000 description 5
- 150000004767 nitrides Chemical class 0.000 description 5
- 239000000523 sample Substances 0.000 description 5
- 230000003746 surface roughness Effects 0.000 description 5
- 230000032798 delamination Effects 0.000 description 4
- 238000005137 deposition process Methods 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 229920006395 saturated elastomer Polymers 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 239000010431 corundum Substances 0.000 description 3
- 229910052593 corundum Inorganic materials 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 238000005121 nitriding Methods 0.000 description 3
- 229910010038 TiAl Inorganic materials 0.000 description 2
- 229910010037 TiAlN Inorganic materials 0.000 description 2
- 238000002083 X-ray spectrum Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 2
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- QDOXWKRWXJOMAK-UHFFFAOYSA-N dichromium trioxide Chemical compound O=[Cr]O[Cr]=O QDOXWKRWXJOMAK-UHFFFAOYSA-N 0.000 description 2
- 238000004453 electron probe microanalysis Methods 0.000 description 2
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- 238000007733 ion plating Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 238000012935 Averaging Methods 0.000 description 1
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 229910000997 High-speed steel Inorganic materials 0.000 description 1
- 229910052774 Proactinium Inorganic materials 0.000 description 1
- 229910001315 Tool steel Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011195 cermet Substances 0.000 description 1
- UOUJSJZBMCDAEU-UHFFFAOYSA-N chromium(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Cr+3].[Cr+3] UOUJSJZBMCDAEU-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000002173 cutting fluid Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005430 electron energy loss spectroscopy Methods 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000005211 surface analysis Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
Landscapes
- Chemical & Material Sciences (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Physical Vapour Deposition (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010258961A JP5333418B2 (ja) | 2010-03-31 | 2010-11-19 | 硬質皮膜被覆工具の製造方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010094451 | 2010-03-31 | ||
| JP2010094451 | 2010-03-31 | ||
| JP2010258961A JP5333418B2 (ja) | 2010-03-31 | 2010-11-19 | 硬質皮膜被覆工具の製造方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013111221A Division JP5621881B2 (ja) | 2010-03-31 | 2013-05-27 | 硬質皮膜被覆工具 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2011224768A JP2011224768A (ja) | 2011-11-10 |
| JP5333418B2 true JP5333418B2 (ja) | 2013-11-06 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010258961A Active JP5333418B2 (ja) | 2010-03-31 | 2010-11-19 | 硬質皮膜被覆工具の製造方法 |
| JP2013111221A Active JP5621881B2 (ja) | 2010-03-31 | 2013-05-27 | 硬質皮膜被覆工具 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013111221A Active JP5621881B2 (ja) | 2010-03-31 | 2013-05-27 | 硬質皮膜被覆工具 |
Country Status (1)
| Country | Link |
|---|---|
| JP (2) | JP5333418B2 (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5660457B2 (ja) * | 2011-01-19 | 2015-01-28 | 日立金属株式会社 | 硬質皮膜被覆金型 |
| KR101429645B1 (ko) * | 2012-10-15 | 2014-08-13 | 재단법인 포항산업과학연구원 | 경질 코팅층 및 그 제조방법 |
| DE102013005437A1 (de) * | 2013-03-29 | 2014-10-02 | Empa | Hartstoffschichten mit ausgewählter Wärmeleitfähigkeit |
| DE102013221102A1 (de) * | 2013-10-17 | 2015-05-07 | Mahle International Gmbh | Stahlkolben für eine Brennkraftmaschine und Verfahren zu dessen Herstellung |
| JP6640577B2 (ja) * | 2016-01-27 | 2020-02-05 | トーヨーエイテック株式会社 | 硬質皮膜 |
| JP7357542B2 (ja) * | 2017-04-21 | 2023-10-06 | エーリコン・サーフェス・ソリューションズ・アーゲー・プフェフィコン | 超合金スパッタリングターゲット |
| CN109153082B (zh) * | 2017-04-25 | 2020-04-21 | 住友电气工业株式会社 | 切削工具及其制造方法 |
| ES2929111T3 (es) * | 2017-12-22 | 2022-11-24 | Oerlikon Surface Solutions Ag Pfaeffikon | Revestimiento resistente a la corrosión y a la erosión para palas de turbinas de gas |
| CN115011920B (zh) * | 2021-03-05 | 2023-09-05 | 株洲钻石切削刀具股份有限公司 | 含双层氧化物的复合涂层切削刀具 |
| JP7240045B2 (ja) * | 2021-08-11 | 2023-03-15 | 株式会社オンワード技研 | ＡｌＣｒ耐酸化耐摩耗性被膜及びその被覆物 |
| CN115142029B (zh) * | 2022-08-25 | 2023-07-28 | 西安稀有金属材料研究院有限公司 | 一种耐蚀Cr基多层结构复合涂层的制备方法 |
| CN119685763A (zh) * | 2024-12-19 | 2025-03-25 | 安徽工业大学 | 一种纳米结构氮氧化物耐腐蚀涂层及其制备方法 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE514181C2 (sv) * | 1995-04-05 | 2001-01-15 | Sandvik Ab | Belagt hårmetallskär för fräsning av gjutjärn |
| JP3678924B2 (ja) * | 1998-11-05 | 2005-08-03 | 日立ツール株式会社 | 酸化アルミニウム被覆工具 |
| JP2003025114A (ja) * | 2001-07-16 | 2003-01-29 | Toshiba Tungaloy Co Ltd | 酸化アルミニウム被覆工具 |
| JP2004314186A (ja) * | 2003-04-11 | 2004-11-11 | Hitachi Tool Engineering Ltd | 被覆超硬ブローチ |
| JP5238687B2 (ja) * | 2006-04-21 | 2013-07-17 | コムコン・アーゲー | 被覆物 |
| NZ576185A (en) * | 2006-10-10 | 2012-10-26 | Oerlikon Trading Ag | A PVD layer system for coating workpieces with a mixed crystal layer of a polyoxide |
| JP2008290163A (ja) * | 2007-05-22 | 2008-12-04 | Sumitomo Electric Ind Ltd | 被膜、切削工具および被膜の製造方法 |
| JP5234925B2 (ja) * | 2008-04-03 | 2013-07-10 | 株式会社神戸製鋼所 | 硬質皮膜およびその形成方法ならびに硬質皮膜被覆部材 |
-
2010
- 2010-11-19 JP JP2010258961A patent/JP5333418B2/ja active Active
-
2013
- 2013-05-27 JP JP2013111221A patent/JP5621881B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP5621881B2 (ja) | 2014-11-12 |
| JP2011224768A (ja) | 2011-11-10 |
| JP2013163263A (ja) | 2013-08-22 |
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