JP5316237B2 - 円筒研削機 - Google Patents

円筒研削機 Download PDF

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Publication number
JP5316237B2
JP5316237B2 JP2009137062A JP2009137062A JP5316237B2 JP 5316237 B2 JP5316237 B2 JP 5316237B2 JP 2009137062 A JP2009137062 A JP 2009137062A JP 2009137062 A JP2009137062 A JP 2009137062A JP 5316237 B2 JP5316237 B2 JP 5316237B2
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Japan
Prior art keywords
single crystal
silicon single
cylindrical grinding
grinding machine
chuck
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JP2009137062A
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English (en)
Japanese (ja)
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JP2010280048A (ja
JP2010280048A5 (enExample
Inventor
康裕 齋藤
健一 松尾
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Sumco Corp
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Sumco Corp
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Priority to JP2009137062A priority Critical patent/JP5316237B2/ja
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Publication of JP2010280048A5 publication Critical patent/JP2010280048A5/ja
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  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP2009137062A 2009-06-08 2009-06-08 円筒研削機 Active JP5316237B2 (ja)

Priority Applications (1)

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JP2009137062A JP5316237B2 (ja) 2009-06-08 2009-06-08 円筒研削機

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JP2009137062A JP5316237B2 (ja) 2009-06-08 2009-06-08 円筒研削機

Publications (3)

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JP2010280048A JP2010280048A (ja) 2010-12-16
JP2010280048A5 JP2010280048A5 (enExample) 2012-03-22
JP5316237B2 true JP5316237B2 (ja) 2013-10-16

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JP2009137062A Active JP5316237B2 (ja) 2009-06-08 2009-06-08 円筒研削機

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JP (1) JP5316237B2 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108068012A (zh) * 2016-11-18 2018-05-25 北京七星华创电子股份有限公司 装夹装置及晶体加工设备
CN112207703A (zh) * 2020-12-09 2021-01-12 湖南高福星智能科技有限公司 一种钢管抛光机床

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5867377B2 (ja) * 2012-12-10 2016-02-24 信越半導体株式会社 円筒研削機および単結晶ウエーハの製造方法
CN109366265A (zh) * 2018-12-17 2019-02-22 国网湖北省电力有限公司随州供电公司 一种微孔桩的桩头打磨装置
JP7458232B2 (ja) * 2020-04-08 2024-03-29 株式会社Subaru 転削用回転保持台
CN114310511B (zh) * 2022-01-12 2022-10-18 江苏益芯半导体有限公司 一种用于晶圆片加工的滚磨机
CN114310345A (zh) * 2022-03-09 2022-04-12 新乡职业技术学院 一种机械加工切削打磨一体机

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6261453U (enExample) * 1985-10-05 1987-04-16
JPH06143132A (ja) * 1992-10-30 1994-05-24 Komatsu Denshi Kinzoku Kk ワ−ク保持機構の保持用チャック
JPH08216017A (ja) * 1995-02-10 1996-08-27 Saitou Seiki Kk 研削機における被研削材の支持装置
JPH09102474A (ja) * 1995-10-06 1997-04-15 Hitachi Cable Ltd ウエハの面取加工方法および装置
JP2002276640A (ja) * 2001-03-19 2002-09-25 Fumiaki Toyoda 横滑りしない吸盤及び横滑り防止シート
JP2008200816A (ja) * 2007-02-21 2008-09-04 Shin Etsu Handotai Co Ltd 円筒研削機

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108068012A (zh) * 2016-11-18 2018-05-25 北京七星华创电子股份有限公司 装夹装置及晶体加工设备
CN108068012B (zh) * 2016-11-18 2020-03-31 北京七星华创电子股份有限公司 装夹装置及晶体加工设备
CN112207703A (zh) * 2020-12-09 2021-01-12 湖南高福星智能科技有限公司 一种钢管抛光机床
CN112207703B (zh) * 2020-12-09 2021-03-12 湖南高福星智能科技有限公司 一种钢管抛光机床

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Publication number Publication date
JP2010280048A (ja) 2010-12-16

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