JP5303781B2 - 電子顕微鏡装置 - Google Patents
電子顕微鏡装置 Download PDFInfo
- Publication number
- JP5303781B2 JP5303781B2 JP2008334063A JP2008334063A JP5303781B2 JP 5303781 B2 JP5303781 B2 JP 5303781B2 JP 2008334063 A JP2008334063 A JP 2008334063A JP 2008334063 A JP2008334063 A JP 2008334063A JP 5303781 B2 JP5303781 B2 JP 5303781B2
- Authority
- JP
- Japan
- Prior art keywords
- scanning
- electron
- microscope
- electron microscope
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/06—Means for illuminating specimens
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
- G02B21/365—Control or image processing arrangements for digital or video microscopes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical or photographic arrangements associated with the tube
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/261—Details
- H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/248—Components associated with the control of the tube
- H01J2237/2482—Optical means
Description
2 走査型電子顕微鏡
3 光学顕微鏡
4 干渉計
5 制御部
8 測定対象
11 電子
12 電子検出器
13 LED
26 走査エリア
Claims (4)
- 電子ビームを走査する走査手段と、電子ビームが走査された試料から発せられる電子を検出する電子検出器を有し、該電子検出器からの検出結果に基づき走査電子像を得る走査型電子顕微鏡と、試料に照明光を照射して該試料からの反射光を受光して光学像を得る光学顕微鏡とを具備し、前記走査型電子顕微鏡の光軸と前記光学顕微鏡の光軸が前記試料の観察点上で交差する電子顕微鏡装置であって、前記走査手段は前記電子ビームを走査エリアの幅を超える走査幅で走査し、前記光学顕微鏡は前記電子ビームが前記走査エリアを超えるオーバラン部分で照明光を発して光学像を得、前記走査型電子顕微鏡は前記電子ビームが前記走査エリアを走査する際に発せられる電子に基づき走査電子像を得る様構成した電子顕微鏡装置であって、
前記光学顕微鏡は、前記照明光を前記オーバラン部分が始った時点で点灯し、該オーバラン部分が終了する前に消灯させ、
前記照明光の点灯と前記オーバラン部分の関係は、前記電子検出器が前記照明光を受光した後前記オーバラン部分が終了する前に前記電子検出器の放電が完了する様にしたことを特徴とする電子顕微鏡装置。 - 前記走査型電子顕微鏡は、前記オーバラン部分では前記電子検出器を検出不可状態とし、前記電子ビームが前記走査エリアを走査している状態では前記電子検出器を検出可状態とする請求項1の電子顕微鏡装置。
- 前記走査型電子顕微鏡は、前記オーバラン部分の変更が可能である請求項1の電子顕微鏡装置。
- 前記オーバラン部分は、前記電子ビームの走査終端部と該走査終端部に続く走査始端部で形成される請求項1又は請求項2の電子顕微鏡装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008334063A JP5303781B2 (ja) | 2008-12-26 | 2008-12-26 | 電子顕微鏡装置 |
US12/653,324 US8097849B2 (en) | 2008-12-26 | 2009-12-11 | Electron microscope device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008334063A JP5303781B2 (ja) | 2008-12-26 | 2008-12-26 | 電子顕微鏡装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010157392A JP2010157392A (ja) | 2010-07-15 |
JP5303781B2 true JP5303781B2 (ja) | 2013-10-02 |
Family
ID=42283681
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008334063A Expired - Fee Related JP5303781B2 (ja) | 2008-12-26 | 2008-12-26 | 電子顕微鏡装置 |
Country Status (2)
Country | Link |
---|---|
US (1) | US8097849B2 (ja) |
JP (1) | JP5303781B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11244442B2 (en) * | 2013-11-04 | 2022-02-08 | Kla Corporation | Method and system for correlating optical images with scanning electron microscopy images |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5492409B2 (ja) | 2008-12-26 | 2014-05-14 | 株式会社堀場製作所 | 電子顕微鏡装置 |
JP5770434B2 (ja) | 2010-06-24 | 2015-08-26 | 株式会社堀場製作所 | 電子顕微鏡装置 |
WO2012018800A2 (en) * | 2010-08-02 | 2012-02-09 | Omniprobe, Inc. | Method for acquiring simultaneous and overlapping optical and charged particle beam images |
KR20210021369A (ko) * | 2018-07-13 | 2021-02-25 | 에이에스엠엘 네델란즈 비.브이. | Sem 이미지 향상 방법들 및 시스템들 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04280053A (ja) | 1991-03-06 | 1992-10-06 | Jeol Ltd | 走査電子顕微鏡 |
JP3227224B2 (ja) | 1992-10-09 | 2001-11-12 | 日本原子力研究所 | 光学フィルターによりシンチレータ出力パルス波高及び立ち上がり時間が制御可能なホスウィッチ検出器 |
JP3719794B2 (ja) * | 1996-11-11 | 2005-11-24 | 株式会社トプコン | 反射電子検出装置及びそれを有する走査型電子顕微鏡装置 |
JP2003100247A (ja) * | 2001-09-27 | 2003-04-04 | Jeol Ltd | 荷電粒子ビーム装置 |
US7157703B2 (en) | 2002-08-30 | 2007-01-02 | Ebara Corporation | Electron beam system |
JP2006107870A (ja) * | 2004-10-04 | 2006-04-20 | Jeol Ltd | 分析走査電子顕微鏡 |
JP5110977B2 (ja) | 2007-06-22 | 2012-12-26 | 株式会社日立ハイテクノロジーズ | 欠陥観察装置及びその方法 |
JP5325522B2 (ja) * | 2008-10-15 | 2013-10-23 | 株式会社堀場製作所 | 複合型観察装置 |
JP5492409B2 (ja) | 2008-12-26 | 2014-05-14 | 株式会社堀場製作所 | 電子顕微鏡装置 |
-
2008
- 2008-12-26 JP JP2008334063A patent/JP5303781B2/ja not_active Expired - Fee Related
-
2009
- 2009-12-11 US US12/653,324 patent/US8097849B2/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11244442B2 (en) * | 2013-11-04 | 2022-02-08 | Kla Corporation | Method and system for correlating optical images with scanning electron microscopy images |
Also Published As
Publication number | Publication date |
---|---|
US8097849B2 (en) | 2012-01-17 |
US20100163728A1 (en) | 2010-07-01 |
JP2010157392A (ja) | 2010-07-15 |
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