JP5299279B2 - 封止充てん用フィルム状樹脂組成物、それを用いた半導体パッケージ及び半導体装置の製造方法、並びに半導体装置 - Google Patents
封止充てん用フィルム状樹脂組成物、それを用いた半導体パッケージ及び半導体装置の製造方法、並びに半導体装置 Download PDFInfo
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- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/35—Mechanical effects
- H01L2924/351—Thermal stress
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/50—Improvements relating to the production of bulk chemicals
- Y02P20/582—Recycling of unreacted starting or intermediate materials
Description
本発明で用いる(a)熱可塑性樹脂は、封止充てん用フィルム状樹脂組成物の保管温度(25℃以下)で固形であり、少なくとも封止充てん用フィルム状樹脂組成物の適用温度(100℃以上)で溶融状態となる樹脂である。
本発明において用いる(b)エポキシ樹脂は、エポキシ基(オキシラン環)を2以上有する(2官能以上)の化合物である。
本発明において使用する(c)硬化剤は、(b)エポキシ樹脂を硬化する硬化剤を意味し、(b)エポキシ樹脂以外の成分(例えば、2個以上のフェノール性水酸基を有する化合物)の硬化反応をも生じるものであってもよい。
本発明において用いる(d)2個以上(1分子当り2個以上を意味する)のフェノール性水酸基を有する化合物は、フェノール性水酸基、すなわちベンゼン環に結合した水酸基を2個以上有する化合物である。すなわち、(d)2個以上のフェノール性水酸基を有する化合物は、ベンゼン環を少なくとも1つ有し、ベンゼン環(縮合環を形成していてもよい)に結合する水酸基を少なくとも2つ有する化合物である。
η=8πFtZ4Z0 4/3V2(Z0 4−Z4)…(1)
η:粘度(Pa・s)
F:荷重(N)
t:加圧時間(s)
Z:加圧後の樹脂厚み(m)
Z0:加圧前の樹脂厚み(m)
V:樹脂の体積(m3)
(a)熱可塑性樹脂として、フェノキシ樹脂FX293(東都化成株式会社製、製品名)25重量部、(b)エポキシ樹脂として、固形多官能エポキシ樹脂EP1032H60(ジャパンエポキシレジン製、製品名)30重量部、及び液状ビスフェノールA型エポキシ樹脂EP828(ジャパンエポキシレジン製、製品名)45重量部、(d)2個以上のフェノール性水酸基を有する化合物として、表1に示す化合物を5重量部、球状シリカフィラーとしてSE6050(株式会社アドマテックス製、製品名、平均粒径2μm)100重量部、をトルエン−酢酸エチル溶媒中に固形分濃度が60〜70%になるように溶解混合してワニスを作製した。このワニスをセパレータフィルム(PETフィルム)上にナイフコーターを用いて塗布した後、70℃のオーブンで10分間乾燥させることによって、厚さ40〜45μmの参考例1〜7のフィルム状樹脂組成物を作製した。使用する際には、ホットロールラミネータにて2枚重ね合わせて、厚さを80〜90μmに調整して使用した。
参考例のフラックス活性を以下の手順で評価した。
25mm角に切断した両面銅はく付きガラスエポキシ基板(日立化成工業株式会社製、製品名:MCL−E−679F、厚み0.3mm、脱脂及び酸洗処理済み)の銅表面に10mm角に切り出したフィルム状樹脂組成物を貼り付け、セパレータフィルムをはく離した後、フィルム状樹脂組成物の上に、はんだボール(千住金属工業株式会社製、製品名:M705(Sn−3Ag−0.5Cu)、ボール径0.4mm、融点217〜220℃)を5個配置し、さらに、カバーガラス(サイズ18mm角、厚み0.17mm)を置いて評価用サンプルを作製し、各フィルム状樹脂組成物について評価用サンプルを2個ずつ用いて評価することとした。
はんだ濡れ広がり率(%)=(基板表面に残ったはんだボールの直径−初期はんだボール直径)/初期はんだボール直径×100…(2)
化合物の揮発終了温度(熱重量変化率が0%となる最低温度)の測定は、TG/DTA6300(セイコーインスツルメント社製、製品名)を用いて、昇温速度10℃/min、エア流量200ml/min、測定温度範囲30〜300℃、サンプル重量5〜10mgで行った。
(a)熱可塑性樹脂として、フェノキシ樹脂FX293(東都化成株式会社製、製品名)25重量部、(b)エポキシ樹脂として、固形多官能エポキシ樹脂EP1032H60(ジャパンエポキシレジン製、製品名)30重量部、及び液状ビスフェノールA型エポキシ樹脂EP828(ジャパンエポキシレジン製、製品名)45重量部、(c)硬化剤として、2,4−ジヒドロキシメチル−5−フェニルイミダゾール2PHZ(四国化成株式会社製、製品名)3重量部、(d)2個以上のフェノール性水酸基を有する化合物として、表2に示す化合物を5重量部、さらに無機フィラーとして、球状シリカフィラーであるSE6050(株式会社アドマテックス製、製品名)100重量部、をトルエン−酢酸エチル溶媒中に固形分濃度が60〜70%になるように溶解混合してワニスを作製した。このワニスをセパレータフィルム(PETフィルム)上にナイフコーターを用いて塗布した後、70℃のオーブンで10分間乾燥させることによって、厚さ40〜45μmの参照例1、2、実施例3、4及び比較例1〜3に示す封止充てん用フィルム状樹脂組成物を作製した。使用する際には、ホットロールラミネータにて2枚重ね合わせて、厚さを80〜90μmに調整して使用した。
無機フィラーの配合量を220重量部にした以外は、参照例1、2、実施例3、4及び比較例1、2と同様に作製した。
(平均線膨張係数の測定)
200℃/1hの加熱条件で処理したサンプルを3.0mm×25mmの大きさに切り出したものを準備し、TMA/SS6000(セイコーインスツルメント社製、製品名)を用いて、チャック間距離15mm、測定温度範囲20〜300℃、昇温速度5℃/min、フィルム断面積に対して0.5MPaとなる引っ張り荷重の条件で行ない、40〜100℃の温度範囲における平均線膨張係数を算出した。
200℃/1hの加熱条件で処理したサンプルを5.0mm×45mmの大きさに切り出したものを準備し、DMS6100(セイコーインスツルメント社製、製品名)を用いて、チャック間距離20mm、周波数1Hz、測定温度範囲20〜300℃、昇温速度5.0℃/minの条件で、貯蔵弾性率、損失弾性率、及びtanδの測定を行い、40℃の貯蔵弾性率及びガラス転移温度(Tg)としてtanδのピーク温度を読み取った。
15mm角(厚さ0.7mm)のガラス板の上に直径4mmの円形に打ち抜いた封止充てん用フィルム状樹脂組成物を貼り付け、セパレーターフィルムをはく離した後、カバーガラス(サイズ18mm角、厚さ0.17mm)を封止充てん用フィルム状樹脂組成物を覆うように載せたものを準備した。これを、フリップチップボンダーFCB3(パナソニックファクトリーソリューションズ製、製品名)に配置し、ヘッド温度185℃、ステージ温度50℃、荷重12.6N、加圧時間1s(到達150℃)の条件で加熱、加圧した。樹脂体積を一定と仮定すると次式(3)の関係が成立することから、加圧後の半径を顕微鏡で測定し、前述した式(1)に従い、150℃での粘度を算出した。
Z/Z0=(r0/r)2…(3)
Z0:加圧前の樹脂厚み
Z:加圧後の樹脂厚み
r0:加圧前の樹脂の半径(直径4mmで打ち抜いているので、2mm)
r:加圧後の樹脂の半径
40℃の恒温槽に封止充てん用フィルム状樹脂組成物を放置し、6日後の粘度が初期粘度の2倍以下であるものを保存安定性があるとして「A」とし、2倍より大きいものを保存安定性がないとして「B」とした。粘度測定は前述の方法で測定した。
260℃の熱板上にセパレーターをはく離した封止充てん用フィルム状樹脂組成物を配置し、スパチュラで攪拌不能になるまでの時間をゲル化時間とした。
銅配線表面にSn−3.0Ag−0.5Cuの受けはんだ層が形成されたプリント基板JKIT TYPE III(日立超LSIシステムズ製、製品名)のチップ搭載領域に、10mm角に切り出した封止充てん用フィルム状樹脂組成物を80℃/50N/5sの条件で貼り付けた後、セパレータフィルムをはく離し、高融点はんだバンプ(95Pb−5Sn)が形成されたチップPhase2E175(日立超LSIシステムズ製、製品名、サイズ10mm角、厚み550μm、バンプ数832、バンプピッチ175μm)とプリント基板をフリップチップボンダーFCB3(パナソニックファクトリーソリューションズ製、製品名)を用いて位置合わせを行い、荷重5Nで加圧しながら、180℃/5〜30s+230〜280℃/5sの温度プロファイルで加熱してチップと基板を接続した。その後、165℃のオーブンで2時間加熱処理を行い、接続サンプルを作製した。
接続サンプルの導通検査を行い、導通がとれたものについて「A」とした。そして、接続部の断面を観察し、バンプと受けはんだが均一に濡れて接合されているものを「A」とし、均一に濡れていないものを「B」とした。
接続サンプルを温度130℃/相対湿度85%に設定した試験槽内に100時間放置した後、導通検査を行い、放置前の接続抵抗と比較して、抵抗変化率が±10%以内であるものを耐湿信頼性があるとして「A」とした。
配線幅20μm、配線間距離40μmで形成された銅配線の櫛型パターンを有するポリイミド基板に、封止充てん用フィルム状樹脂組成物を80℃/100N/5sの条件で櫛型パターンを覆うように貼り付けて、セパレータフィルムをはがした後、165℃のオーブンで2時間加熱処理を行い、評価用サンプルを作製した。このサンプルを温度130℃/相対湿度85%に設定した試験槽内に5Vの直流電圧を印加しながら放置し、マイグレーションテスターMIG−8600(IMV社製、製品名)にて試験槽内における絶縁抵抗を連続測定した。100時間の測定中に106Ω以上の絶縁抵抗を保持しているものを「A」とし、絶縁抵抗が106Ω未満となったものを「B」とした。
Claims (7)
- (a)熱可塑性樹脂、(b)エポキシ樹脂、(c)硬化剤及び(d)2個以上のフェノール性水酸基を有する化合物を含有し、
(d)2個以上のフェノール性水酸基を有する化合物は、アリル化フェノールノボラック樹脂、ジアリルビスフェノールA、ジアリルビスフェノールF及びジアリルビフェノールからなる群より選ばれる少なくとも1種である、封止充てん用フィルム状樹脂組成物。 - (d)2個以上のフェノール性水酸基を有する化合物は、120〜300℃で液状を呈する化合物である、請求項1に記載の封止充てん用フィルム状樹脂組成物。
- (c)硬化剤はイミダゾール化合物である、請求項1又は2に記載の封止充てん用フィルム状樹脂組成物。
- さらに無機フィラーを含有する、請求項1〜3のいずれか一項に記載の封止充てん用フィルム状樹脂組成物。
- 請求項1〜4のいずれか一項に記載の封止充てん用フィルム状樹脂組成物により、半導体チップと基板をフリップチップ接続する、半導体パッケージの製造方法。
- 請求項1〜4のいずれか一項に記載の封止充てん用フィルム状樹脂組成物により、半導体パッケージと基板を接続する、半導体装置の製造方法。
- 請求項1〜4のいずれか一項に記載の封止充てん用フィルム状樹脂組成物で、接続された基板を備える半導体装置。
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JP5577640B2 (ja) * | 2009-07-24 | 2014-08-27 | 日立化成株式会社 | 半導体装置の製造方法 |
KR101688677B1 (ko) * | 2009-09-30 | 2016-12-21 | 세키스이가가쿠 고교가부시키가이샤 | 플립 칩 실장용 접착제, 플립 칩 실장용 접착 필름, 반도체 칩의 실장 방법 및 반도체 장치 |
JP5633214B2 (ja) * | 2010-07-05 | 2014-12-03 | 住友ベークライト株式会社 | 半導体装置の製造方法およびそれを用いてなる半導体装置、並びに電気、電子部品の製造方法およびそれを用いてなる電気、電子部品 |
JP2012089750A (ja) * | 2010-10-21 | 2012-05-10 | Hitachi Chem Co Ltd | 半導体封止充てん用熱硬化性樹脂組成物及び半導体装置 |
CN102083281B (zh) * | 2010-10-27 | 2013-04-10 | 北京遥测技术研究所 | 一种提升高频qfn器件焊装可靠性的方法 |
JP2012156385A (ja) * | 2011-01-27 | 2012-08-16 | Sumitomo Bakelite Co Ltd | 樹脂組成物、半導体装置、多層回路基板および電子部品 |
KR101666101B1 (ko) * | 2012-02-24 | 2016-10-13 | 히타치가세이가부시끼가이샤 | 반도체용 접착제, 플럭스제, 반도체 장치의 제조 방법 및 반도체 장치 |
JP6228799B2 (ja) * | 2013-09-30 | 2017-11-08 | 新日鉄住金化学株式会社 | エポキシ樹脂組成物及びその硬化物 |
CN104910585B (zh) * | 2015-06-10 | 2018-03-30 | 苏州生益科技有限公司 | 热固性树脂组合物及使用其制作的半固化片及层压板 |
KR102064584B1 (ko) * | 2015-10-29 | 2020-01-10 | 히타치가세이가부시끼가이샤 | 반도체용 접착제, 반도체 장치 및 그것을 제조하는 방법 |
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US11935803B2 (en) | 2018-04-26 | 2024-03-19 | Mitsubishi Gas Chemical Company, Inc. | Resin composition, laminate, semiconductor wafer with resin composition layer, substrate for mounting semiconductor with resin composition layer and semiconductor device |
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JPWO2009081874A1 (ja) | 2011-05-06 |
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