JP5298101B2 - 有機elパネル - Google Patents
有機elパネル Download PDFInfo
- Publication number
- JP5298101B2 JP5298101B2 JP2010256056A JP2010256056A JP5298101B2 JP 5298101 B2 JP5298101 B2 JP 5298101B2 JP 2010256056 A JP2010256056 A JP 2010256056A JP 2010256056 A JP2010256056 A JP 2010256056A JP 5298101 B2 JP5298101 B2 JP 5298101B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- organic
- light emitting
- film formation
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- 230000015572 biosynthetic process Effects 0.000 claims description 101
- 239000012044 organic layer Substances 0.000 claims description 22
- 239000010408 film Substances 0.000 description 135
- 239000010410 layer Substances 0.000 description 107
- 238000005755 formation reaction Methods 0.000 description 97
- 239000000463 material Substances 0.000 description 28
- 238000007789 sealing Methods 0.000 description 27
- 101100269850 Caenorhabditis elegans mask-1 gene Proteins 0.000 description 24
- 238000000034 method Methods 0.000 description 23
- 239000000758 substrate Substances 0.000 description 20
- 238000004519 manufacturing process Methods 0.000 description 12
- 230000007261 regionalization Effects 0.000 description 10
- 239000002274 desiccant Substances 0.000 description 9
- 239000002346 layers by function Substances 0.000 description 9
- 230000007547 defect Effects 0.000 description 8
- 230000005525 hole transport Effects 0.000 description 8
- 239000000853 adhesive Substances 0.000 description 7
- 239000003086 colorant Substances 0.000 description 7
- 230000002950 deficient Effects 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 230000001070 adhesive effect Effects 0.000 description 6
- 239000000470 constituent Substances 0.000 description 6
- 238000000151 deposition Methods 0.000 description 6
- 230000008021 deposition Effects 0.000 description 6
- 239000011521 glass Substances 0.000 description 5
- 238000002347 injection Methods 0.000 description 5
- 239000007924 injection Substances 0.000 description 5
- 239000011295 pitch Substances 0.000 description 5
- -1 polyphenylene vinylene Polymers 0.000 description 5
- 238000007740 vapor deposition Methods 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 239000003822 epoxy resin Substances 0.000 description 4
- 238000009413 insulation Methods 0.000 description 4
- 229920000647 polyepoxide Polymers 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- 229920003023 plastic Polymers 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 239000004925 Acrylic resin Substances 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- QDOXWKRWXJOMAK-UHFFFAOYSA-N dichromium trioxide Chemical compound O=[Cr]O[Cr]=O QDOXWKRWXJOMAK-UHFFFAOYSA-N 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 238000010422 painting Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- TVIVIEFSHFOWTE-UHFFFAOYSA-K tri(quinolin-8-yloxy)alumane Chemical compound [Al+3].C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1 TVIVIEFSHFOWTE-UHFFFAOYSA-K 0.000 description 2
- HXWWMGJBPGRWRS-CMDGGOBGSA-N 4- -2-tert-butyl-6- -4h-pyran Chemical compound O1C(C(C)(C)C)=CC(=C(C#N)C#N)C=C1\C=C\C1=CC(C(CCN2CCC3(C)C)(C)C)=C2C3=C1 HXWWMGJBPGRWRS-CMDGGOBGSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 229920001774 Perfluoroether Polymers 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910021536 Zeolite Inorganic materials 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 229910000272 alkali metal oxide Inorganic materials 0.000 description 1
- 150000004703 alkoxides Chemical class 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 238000004061 bleaching Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000002041 carbon nanotube Substances 0.000 description 1
- 229910021393 carbon nanotube Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- MAYPHUUCLRDEAZ-UHFFFAOYSA-N chlorine peroxide Inorganic materials ClOOCl MAYPHUUCLRDEAZ-UHFFFAOYSA-N 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000009500 colour coating Methods 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- OSVXSBDYLRYLIG-UHFFFAOYSA-N dioxidochlorine(.) Chemical compound O=Cl=O OSVXSBDYLRYLIG-UHFFFAOYSA-N 0.000 description 1
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 150000002222 fluorine compounds Chemical class 0.000 description 1
- 229920002313 fluoropolymer Polymers 0.000 description 1
- 239000004811 fluoropolymer Substances 0.000 description 1
- PVADDRMAFCOOPC-UHFFFAOYSA-N germanium monoxide Inorganic materials [Ge]=O PVADDRMAFCOOPC-UHFFFAOYSA-N 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- UJMWVICAENGCRF-UHFFFAOYSA-N oxygen difluoride Chemical compound FOF UJMWVICAENGCRF-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 125000002080 perylenyl group Chemical group C1(=CC=C2C=CC=C3C4=CC=CC5=CC=CC(C1=C23)=C45)* 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920000553 poly(phenylenevinylene) Polymers 0.000 description 1
- 229920000767 polyaniline Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920001195 polyisoprene Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
- 239000010457 zeolite Substances 0.000 description 1
Landscapes
- Electroluminescent Light Sources (AREA)
Description
同色の発光領域を直列状に複数整列形成し、整列された前記発光領域に沿ってストライプ状の成膜領域を形成し、前記成膜領域は、成膜用マスクを用いて第1の有機膜を成膜された後、前記成膜用マスクを設計余裕以下の距離だけ移動させて第2の有機膜が成膜されたことを特徴とする有機ELパネル。
<実施例>
1A 開口部
2 有機ELパネル
10 有機EL素子
11 基板
12 下部電極
13 絶縁膜
14 上部電極
20(20R,20G,20B) 発光領域
30 有機層
31 正孔輸送層
32 発光層
32A 第1の発光層
32B 第2の発光層
33 電子輸送層
S(S1,S2,S3) 成膜領域
c 未成膜部分
Claims (3)
- 一対の電極間に有機層を含む有機EL素子を形成した有機ELパネルであって、
同色の発光領域を直列状に複数整列形成し、
整列された前記発光領域に沿ってストライプ状の成膜領域を形成し、
前記成膜領域は、成膜用マスクを用いて第1の有機膜を成膜された後、前記成膜用マスクを設計余裕以下の距離だけ移動させて第2の有機膜が成膜されたことを特徴とする有機ELパネル。 - 前記成膜領域は、前記第2の有機膜の成膜時に、前記成膜用マスクが前記第1の有機膜の成膜時に対して前記直列方向に設計余裕以下の距離だけ移動させて成膜されたことを特徴とする請求項1に記載の有機ELパネル。
- 前記成膜領域は、前記第2の有機膜の成膜時に、前記成膜用マスクが前記第1の有機膜の成膜時に対して前記直列方向と略垂直方向に設計余裕以下の距離だけ移動させて成膜されたことを特徴とする請求項1に記載の有機ELパネル。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010256056A JP5298101B2 (ja) | 2010-11-16 | 2010-11-16 | 有機elパネル |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010256056A JP5298101B2 (ja) | 2010-11-16 | 2010-11-16 | 有機elパネル |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003143059A Division JP4651918B2 (ja) | 2003-05-21 | 2003-05-21 | 有機elパネルの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011034984A JP2011034984A (ja) | 2011-02-17 |
JP5298101B2 true JP5298101B2 (ja) | 2013-09-25 |
Family
ID=43763807
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010256056A Expired - Lifetime JP5298101B2 (ja) | 2010-11-16 | 2010-11-16 | 有機elパネル |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5298101B2 (ja) |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09306667A (ja) * | 1996-05-21 | 1997-11-28 | Seiko Precision Kk | 有機el素子の製造方法 |
JP3928823B2 (ja) * | 1997-05-09 | 2007-06-13 | パイオニア株式会社 | 発光ディスプレイパネル、その製造方法、及びその第2電極製造用マスク |
JPH1140362A (ja) * | 1997-07-15 | 1999-02-12 | Casio Comput Co Ltd | 電界発光素子及びその製造方法 |
JP2000048954A (ja) * | 1998-07-30 | 2000-02-18 | Toray Ind Inc | 有機電界発光素子の製造方法 |
JP2000200680A (ja) * | 1999-01-07 | 2000-07-18 | Toray Ind Inc | 有機電界発光素子の製造方法 |
JP4505872B2 (ja) * | 1999-04-16 | 2010-07-21 | 住友化学株式会社 | 高分子発光素子およびその製造方法 |
JP4521741B2 (ja) * | 1999-06-25 | 2010-08-11 | 大日本印刷株式会社 | カラーフィルタの欠陥修正方法 |
JP2002158089A (ja) * | 2000-11-21 | 2002-05-31 | Toppan Printing Co Ltd | 有機エレクトロルミネッセンス表示素子及びその製造方法 |
JP2002359073A (ja) * | 2001-05-31 | 2002-12-13 | Ricoh Co Ltd | 有機電界発光素子の製造方法 |
JP2004119243A (ja) * | 2002-09-27 | 2004-04-15 | Dainippon Printing Co Ltd | 有機エレクトロルミネッセント素子の欠陥除去方法 |
-
2010
- 2010-11-16 JP JP2010256056A patent/JP5298101B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
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JP2011034984A (ja) | 2011-02-17 |
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