JP5286259B2 - SiCに基づく半導体ヘテロ接合デバイス - Google Patents
SiCに基づく半導体ヘテロ接合デバイス Download PDFInfo
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- JP5286259B2 JP5286259B2 JP2009518199A JP2009518199A JP5286259B2 JP 5286259 B2 JP5286259 B2 JP 5286259B2 JP 2009518199 A JP2009518199 A JP 2009518199A JP 2009518199 A JP2009518199 A JP 2009518199A JP 5286259 B2 JP5286259 B2 JP 5286259B2
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- 239000004065 semiconductor Substances 0.000 title claims description 27
- 239000000758 substrate Substances 0.000 claims description 19
- 229910052782 aluminium Inorganic materials 0.000 claims description 16
- 229910052738 indium Inorganic materials 0.000 claims description 10
- 230000004888 barrier function Effects 0.000 claims description 7
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 42
- 229910010271 silicon carbide Inorganic materials 0.000 description 41
- 239000010410 layer Substances 0.000 description 18
- 239000000463 material Substances 0.000 description 17
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 15
- 229910002601 GaN Inorganic materials 0.000 description 13
- 238000005516 engineering process Methods 0.000 description 9
- 229910052732 germanium Inorganic materials 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 230000007547 defect Effects 0.000 description 7
- 239000002019 doping agent Substances 0.000 description 7
- 229910002704 AlGaN Inorganic materials 0.000 description 6
- 238000005229 chemical vapour deposition Methods 0.000 description 6
- 238000005240 physical vapour deposition Methods 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 4
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 3
- 230000005533 two-dimensional electron gas Effects 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 238000003776 cleavage reaction Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 230000007017 scission Effects 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 229910000962 AlSiC Inorganic materials 0.000 description 1
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 1
- 229910003923 SiC 4 Inorganic materials 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000001878 scanning electron micrograph Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
- H01L29/1608—Silicon carbide
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
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- H01L29/66068—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
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- H01L29/66242—Heterojunction transistors [HBT]
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66431—Unipolar field-effect transistors with a heterojunction interface channel or gate, e.g. HFET, HIGFET, SISFET, HJFET, HEMT
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- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/73—Bipolar junction transistors
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- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
- H01L29/7781—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with inverted single heterostructure, i.e. with active layer formed on top of wide bandgap layer, e.g. IHEMT
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- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
- H01L29/7786—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT
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- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Junction Field-Effect Transistors (AREA)
- Bipolar Transistors (AREA)
Description
基板は、(001)配向を有する既存の6H SiCウエーハとした。ソースのSiC材料は粉末とした。アルミニウムをドーパントとして用いた。おおよそ6%のアルミニウムをるつぼ内に設置した。アルゴンをグロースチェンバー内で用いた。15時間の成長時間で、エピタキシャル成長したフィルムを製造した。成長条件を表1に示す。
Claims (17)
- SiC基板上に形成させたSi(1-x)MxC(式中、MがAl又はInであり、xが0〜1である)のヘテロ接合を含み、前記ヘテロ接合が、Si(1-x)MxC又はSiCチャネル層、前記チャネル層それぞれの上のSiC又はSi(1-x)MxCバリア層、及び前記バリア層それぞれの上のn+SiC又はn+Si(1-x)GexC層とを含む半導体デバイス。
- 前記ヘテロ接合が、ドープされた(001)SiCから形成される請求項1に記載の半導体デバイス。
- 前記xが約0.06である請求項1又は2に記載の半導体デバイス。
- 前記Si(1-x)MxCのヘテロ接合が、約12μmの厚さのSi(1-x)MxC層を含む請求項1〜3のいずれか1つに記載の半導体デバイス。
- 前記MがAlである請求項1〜4のいずれか1つに記載の半導体デバイス。
- 前記MがInである請求項1〜4のいずれか1つに記載の半導体デバイス。
- 前記xが0.0001〜0.1である請求項1,2及び4〜6のいずれか1つに記載の半導体デバイス。
- SiC基板、
前記基板上に形成させたSi(1-x)MxC(式中、MがAl又はInであり、xが0〜1である)のエピタキシャルフィルム、
前記Si(1-x)MxCフィルム上に形成させたSiC又はSi(1-x)GexC層、及び
前記エピタキシャルフィルム上に形成させた少なくとも一つのトランジスタ構造を含む半導体デバイス。 - 前記トランジスタ構造が、高周波移動度トランジスタ、ヘテロ接合バイポーラトランジスタ又は高電子移動度トランジスタを含む請求項8に記載の半導体デバイス。
- 前記xが約0.06である請求項8又は9に記載の半導体デバイス。
- 前記エピタキシャルフィルムが、ドープされた(001)SiCから形成される請求項8〜10のいずれか1つに記載の半導体デバイス。
- Si(1-x)MxCの前記エピタキシャルフィルムが、約12μmの厚さを有する請求項8〜11のいずれか1つに記載の半導体デバイス。
- SiC緩衝層を前記基板と前記エピタキシャルフィルムとの間に形成させた請求項8〜12のいずれか1つに記載の半導体デバイス。
- 前記SiC緩衝層とSiCチャネル層が、前記基板とエピタキシャルフィルムとの間に形成されている請求項8〜13のいずれか1つに記載の半導体デバイス。
- 前記MがAlである請求項8〜14のいずれか1つに記載の半導体デバイス。
- 前記MがInである請求項8〜14のいずれか1つに記載の半導体デバイス。
- 前記xが0.0001〜0.1である請求項8,9及び11〜16のいずれか1つに記載の半導体デバイス。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/474,398 US7683400B1 (en) | 2006-06-26 | 2006-06-26 | Semiconductor heterojunction devices based on SiC |
US11/474,398 | 2006-06-26 | ||
PCT/US2007/014697 WO2008002521A2 (en) | 2006-06-26 | 2007-06-26 | Semiconductor heterojunction devices based on sic |
Publications (3)
Publication Number | Publication Date |
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JP2009542032A JP2009542032A (ja) | 2009-11-26 |
JP2009542032A5 JP2009542032A5 (ja) | 2010-07-29 |
JP5286259B2 true JP5286259B2 (ja) | 2013-09-11 |
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Application Number | Title | Priority Date | Filing Date |
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JP2009518199A Expired - Fee Related JP5286259B2 (ja) | 2006-06-26 | 2007-06-26 | SiCに基づく半導体ヘテロ接合デバイス |
Country Status (4)
Country | Link |
---|---|
US (2) | US7683400B1 (ja) |
EP (1) | EP2041795B1 (ja) |
JP (1) | JP5286259B2 (ja) |
WO (1) | WO2008002521A2 (ja) |
Families Citing this family (1)
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KR20130008280A (ko) * | 2011-07-12 | 2013-01-22 | 삼성전자주식회사 | 안정성이 우수한 질화물계 반도체 소자 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
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US5281831A (en) | 1990-10-31 | 1994-01-25 | Kabushiki Kaisha Toshiba | Optical semiconductor device |
SE9503630D0 (sv) | 1995-10-18 | 1995-10-18 | Abb Research Ltd | A semiconductor device having a heterojunction |
JP3201993B2 (ja) * | 1998-04-28 | 2001-08-27 | 松下電器産業株式会社 | 半導体装置とその製造方法 |
US6221700B1 (en) | 1998-07-31 | 2001-04-24 | Denso Corporation | Method of manufacturing silicon carbide semiconductor device with high activation rate of impurities |
SE9900358D0 (sv) | 1999-02-03 | 1999-02-03 | Ind Mikroelektronikcentrum Ab | A lateral field effect transistor of SiC, a method for production thereof and a use of such a transistor |
DE60042045D1 (de) | 1999-06-22 | 2009-06-04 | Panasonic Corp | Heteroübergangsbipolartransistoren und entsprechende Herstellungsverfahren |
JP2005011915A (ja) * | 2003-06-18 | 2005-01-13 | Hitachi Ltd | 半導体装置、半導体回路モジュールおよびその製造方法 |
JP4874527B2 (ja) * | 2004-04-01 | 2012-02-15 | トヨタ自動車株式会社 | 炭化珪素半導体基板及びその製造方法 |
-
2006
- 2006-06-26 US US11/474,398 patent/US7683400B1/en active Active
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2007
- 2007-06-26 EP EP07796414.6A patent/EP2041795B1/en not_active Expired - Fee Related
- 2007-06-26 JP JP2009518199A patent/JP5286259B2/ja not_active Expired - Fee Related
- 2007-06-26 WO PCT/US2007/014697 patent/WO2008002521A2/en active Application Filing
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- 2010-02-26 US US12/713,753 patent/US7855108B2/en active Active
Also Published As
Publication number | Publication date |
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US20100192840A1 (en) | 2010-08-05 |
WO2008002521A2 (en) | 2008-01-03 |
JP2009542032A (ja) | 2009-11-26 |
WO2008002521A3 (en) | 2008-02-14 |
US7855108B2 (en) | 2010-12-21 |
EP2041795B1 (en) | 2016-05-04 |
EP2041795A2 (en) | 2009-04-01 |
US7683400B1 (en) | 2010-03-23 |
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R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
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LAPS | Cancellation because of no payment of annual fees |