JP5273147B2 - 高分子フィルム基板の脱ガス処理方法及び脱ガス処理装置 - Google Patents
高分子フィルム基板の脱ガス処理方法及び脱ガス処理装置 Download PDFInfo
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Description
プラスチックフィルムからなる基板61の表面に形成した単位光電変換素子62および基板61の裏面に形成した接続電極層63はそれぞれ複数の単位ユニットに完全に分離され、それぞれの分離位置をずらして形成されている。このため、光電変換素子62のアモルファス半導体部分である光電変換層65で発生した電流は、まず透明電極層66に集められ、次に該透明電極層領域に形成された集電孔67を介して背面の接続電極層63に通じ、さらに該接続電極層領域で素子の透明電極層領域の外側に形成された直列接続用の接続孔68を介して上記素子と隣り合う素子の透明電極層領域の外側に延びている下電極層64に達し、両素子の直列接続が行われている。
プラスチックフィルムからなる基板71を準備し(工程(a))、これに接続孔78を形成し(工程(b))、基板71の両面に第1電極層(下電極)74および第3電極層(接続電極の一部)73を形成(工程(c))した後、接続孔78と所定の距離離れた位置に集電孔77を形成する(工程(d))。次に、第1電極層74の上に、光電変換層となる半導体層75および第2電極層である透明電極層76を順次形成するとともに(工程(e)および工程(f))、第3電極層73の上に第4電極層(接続電極層)79を形成する(工程(g))。この後、レーザビームを用いて、基板71の両側の薄膜を分離加工して図7に示すような直列接続構造を形成する。
このときの各熱処理温度における脱ガス完了時間は、温度100℃では20分、温度150℃では5分、温度200℃では3.5分、温度250℃では2.5分、温度300℃では2分となった。ここで、フィルム基板に含まれているガスを加熱によりガス放出して90%減量した時点を脱ガス完了時間とする。脱ガス完了時間は、タイムコンスタント×loge10と表すことができる。図3より熱処理温度150℃〜300℃ではガス放出速度のタイムコンスタントが活性化型で、そのエネルギーが0.13eVであった。つまり、活性化エネルギーをE、絶対温度をT、ボルツマン定数をkとすると、タイムコンスタントはexp(E/kT)に比例する。この場合のタイムコンスタントτはτ=0.066exp(1470/T)と表された。ただし、熱処理温度100℃はこの関係から外れてタイムコンスタントが非常に長くなった。
このように、ガス放出速度のタイムコンスタントから脱ガス処理時間を算出することができ、金属膜をコーティングした高分子フィルム基板の真空中での熱処理条件を算定することができる。
上記脱ガス処理を実施するための脱ガス処理装置の実施例について説明する。
図4は実施例に係る脱ガス処理装置の概略的な構成図である。真空槽11内に巻き出しロール12と巻取りロール13とを備え、ガイドロール14a〜14dにて矩形状に形成されたフィルム搬送路に沿って基板加熱用加熱ヒータ15が配置されている。高分子フィルム基板16は、真空槽11内の巻き出しロール12に取り付けられ、基板加熱用加熱ヒータ15で加熱され巻取りロール13で巻き取られる。真空槽11は真空ポンプ17で排気されることで真空に保たれる。
上記実施例1の脱ガス処理装置を用いて脱ガス処理した高分子フィルム基板を用いて、図7に示す構造を有する薄膜太陽電池を製造する。薄膜太陽電池の製造工程は図8(a)〜(g)の製造工程に従うものとする。
Claims (5)
- 可撓性フィルムの表面に金属又は無機物からなる膜がコーティングされてなる高分子フィルム基板を、当該高分子フィルム基板の表面に真空プロセスで薄膜を形成する前に、真空中で加熱処理して脱ガス処理する脱ガス処理方法であって、
100℃以上で、かつ前記可撓性フィルムの分解温度以下となるように加熱処理温度を選択し、
時間とともに指数的に減少するガス放出速度のタイムコンスタントを基準に、そのloge10倍以上となるように加熱処理時間を算定し、
前記加熱処理温度および前記加熱処理時間を満たすように、前記高分子フィルム基板を加熱処理し、
前記指数的に減少するガス放出速度のタイムコンスタントは、その活性化エネルギーをEとし、絶対温度をT、ボルツマン定数をkとして、exp(E/kT)に比例することを特徴とする高分子フィルム基板の脱ガス処理方法。 - 前記加熱処理温度が150℃〜250℃であり、前記加熱処理時間が少なくとも2分〜5分であることを特徴とする請求項1記載の高分子フィルム基板の脱ガス処理方法。
- 前記加熱処理温度が150℃以上であり、前記加熱処理時間が5分以上であることを特徴とする請求項2記載の高分子フィルム基板の脱ガス処理方法。
- 前記可撓性フィルムは、ポリイミド、ポリスチレン、ポリカーボネート、ポリブチレンテレフタラート、ポリエチレンテレフタラート、ポリエチレンナフタレート、ポリアリレート、ポリエーテルスルホン、ポリスルホン、ポリフェニレンスルフィド、ポリエーテルエーテルケトン、ポリエーテルイミド、アラミドからなる群から選ばれた高分子材料からなることを特徴とする請求項1から請求項3のいずれかに記載の高分子フィルム基板の脱ガス処理方法。
- 前記高分子フィルム基板にコーティングされた膜は、高反射率材料及び透明導電性材料からなることを特徴とする請求項1から請求項4のいずれかに記載の高分子フィルム基板の脱ガス処理方法。
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JP7370229B2 (ja) * | 2018-12-28 | 2023-10-27 | 旭化成株式会社 | 半導体装置、及びその製造方法 |
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JP2003027234A (ja) * | 2001-07-19 | 2003-01-29 | Hirano Koon Kk | 連続シート状材料の表面処理装置及びそのガスシール構造 |
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JP2003027234A (ja) * | 2001-07-19 | 2003-01-29 | Hirano Koon Kk | 連続シート状材料の表面処理装置及びそのガスシール構造 |
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