JP5271437B1 - 静電塗布装置及び液体の塗布方法 - Google Patents
静電塗布装置及び液体の塗布方法 Download PDFInfo
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- JP5271437B1 JP5271437B1 JP2012110933A JP2012110933A JP5271437B1 JP 5271437 B1 JP5271437 B1 JP 5271437B1 JP 2012110933 A JP2012110933 A JP 2012110933A JP 2012110933 A JP2012110933 A JP 2012110933A JP 5271437 B1 JP5271437 B1 JP 5271437B1
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- 239000007788 liquid Substances 0.000 title claims abstract description 57
- 238000009503 electrostatic coating Methods 0.000 title claims abstract description 19
- 238000000576 coating method Methods 0.000 title claims abstract description 11
- 230000004323 axial length Effects 0.000 claims abstract description 3
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 abstract description 24
- 239000002245 particle Substances 0.000 abstract description 3
- 229920005989 resin Polymers 0.000 description 7
- 239000011347 resin Substances 0.000 description 7
- 239000002904 solvent Substances 0.000 description 7
- 239000000178 monomer Substances 0.000 description 4
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 3
- ZWNGBXQHXLKZLV-UHFFFAOYSA-N 9-hydroxynonyl prop-2-enoate Chemical compound OCCCCCCCCCOC(=O)C=C ZWNGBXQHXLKZLV-UHFFFAOYSA-N 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000012777 electrically insulating material Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- -1 naphthodiazide Substances 0.000 description 2
- 229920003986 novolac Polymers 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- DAKWPKUUDNSNPN-UHFFFAOYSA-N Trimethylolpropane triacrylate Chemical compound C=CC(=O)OCC(CC)(COC(=O)C=C)COC(=O)C=C DAKWPKUUDNSNPN-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000012454 non-polar solvent Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000003504 photosensitizing agent Substances 0.000 description 1
- 239000002798 polar solvent Substances 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
- B05B5/025—Discharge apparatus, e.g. electrostatic spray guns
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
- B05B5/025—Discharge apparatus, e.g. electrostatic spray guns
- B05B5/0255—Discharge apparatus, e.g. electrostatic spray guns spraying and depositing by electrostatic forces only
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
- B05B5/025—Discharge apparatus, e.g. electrostatic spray guns
- B05B5/053—Arrangements for supplying power, e.g. charging power
- B05B5/0533—Electrodes specially adapted therefor; Arrangements of electrodes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
- B05B5/08—Plant for applying liquids or other fluent materials to objects
- B05B5/10—Arrangements for supplying power, e.g. charging power
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/007—Processes for applying liquids or other fluent materials using an electrostatic field
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/02—Processes for applying liquids or other fluent materials performed by spraying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/02—Processes for applying liquids or other fluent materials performed by spraying
- B05D1/04—Processes for applying liquids or other fluent materials performed by spraying involving the use of an electrostatic field
Landscapes
- Electrostatic Spraying Apparatus (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
Abstract
【解決手段】静電塗布装置100は、導電性の壁で内面が形成された第一流路F1を形成する筒状電極1と、第一流路F1の軸線の延長線上に配置された対向電極20と、筒状電極1と対向電極20との間に電圧を印加する電源30と、第一流路F1に対して液体を供給する液体供給部40と、を備える。第一流路F1の軸方向長さをL1とし、第一流路F1の内径をD1としたときに、L1/D1が35以上である。
【選択図】図1
Description
電極と、
前記第一流路の軸線の延長線を遮るように配置された対向電極と、
前記筒状電極と前記対向電極との間に電圧を印加する電源と、
前記第一流路に対して液体を供給する液体供給部と、を備え、
前記第一流路の軸方向長さをL1とし、前記第一流路の内径をD1としたときに、L1
/D1が35以上であり、前記第一流路の内径D1は0.5〜2.0mmであり、前記第一流路の長さL1は20〜100mmである。
例えば、上記実施形態では、最初に射出される液滴の径を小さくすべく、ノズル2が設けられているが、D1が例えば、0.1mm以下程度に小さい場合には、ノズル2が無くても、微少な液滴を形成することができる。
Claims (7)
- 内面が導電性の壁で形成された第一流路を形成する筒状電極と、
前記第一流路の軸線の延長線を遮るように配置された対向電極と、
前記筒状電極と前記対向電極との間に電圧を印加する電源と、
前記第一流路に対して液体を供給する液体供給部と、を備え、
前記第一流路の軸方向長さをL1とし、前記第一流路の内径をD1としたときに、
L1/D1が35以上であり、
前記第一流路の内径D1は0.5〜2.0mmであり、
前記第一流路の長さL1は20〜100mmである、静電塗布装置。 - 前記第一流路と連通しかつ前記第一流路の内径よりも小さい内径を有する第二流路を形成するノズルをさらに備えた請求項1記載の装置。
- 前記第二流路の内径D2は0.1〜0.5mmである請求項2記載の装置。
- 前記ノズルが電気絶縁性である請求項2又は3記載の装置。
- 前記液体供給部は、前記筒状電極の流路にレジスト溶液を供給する請求項1〜4のいずれか一項に記載の装置。
- 請求項1〜5のいずれか一項に記載の静電塗布装置を用いた、液体の塗布方法。
- 請求項1〜5のいずれか一項に記載の静電塗布装置を用い、前記電源から10kV以下の電圧を印加する、液体の塗布方法。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012110933A JP5271437B1 (ja) | 2012-05-14 | 2012-05-14 | 静電塗布装置及び液体の塗布方法 |
TW102117036A TWI600471B (zh) | 2012-05-14 | 2013-05-14 | Electrostatic coating device and liquid coating method |
EP13790488.4A EP2851128A4 (en) | 2012-05-14 | 2013-05-14 | ELECTROSTATIC APPLICATION APPARATUS AND LIQUID APPLICATION METHOD |
PCT/JP2013/063453 WO2013172356A1 (ja) | 2012-05-14 | 2013-05-14 | 静電塗布装置及び液体の塗布方法 |
US14/401,381 US9630205B2 (en) | 2012-05-14 | 2013-05-14 | Electrostatic application apparatus and method for applying liquid |
KR1020147031006A KR101630639B1 (ko) | 2012-05-14 | 2013-05-14 | 정전 도포 장치 및 액체의 도포 방법 |
CN201380025219.0A CN104284734B (zh) | 2012-05-14 | 2013-05-14 | 静电涂布装置及液体的涂布方法 |
Applications Claiming Priority (1)
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JP2012110933A JP5271437B1 (ja) | 2012-05-14 | 2012-05-14 | 静電塗布装置及び液体の塗布方法 |
Publications (2)
Publication Number | Publication Date |
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JP5271437B1 true JP5271437B1 (ja) | 2013-08-21 |
JP2013237002A JP2013237002A (ja) | 2013-11-28 |
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Country Status (7)
Country | Link |
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US (1) | US9630205B2 (ja) |
EP (1) | EP2851128A4 (ja) |
JP (1) | JP5271437B1 (ja) |
KR (1) | KR101630639B1 (ja) |
CN (1) | CN104284734B (ja) |
TW (1) | TWI600471B (ja) |
WO (1) | WO2013172356A1 (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
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JP6112130B2 (ja) | 2015-03-25 | 2017-04-12 | トヨタ自動車株式会社 | 静電ノズル、吐出装置及び半導体モジュールの製造方法 |
JP5833781B1 (ja) * | 2015-03-25 | 2015-12-16 | ナガセテクノエンジニアリング株式会社 | 静電噴霧装置 |
CN106391363B (zh) * | 2015-07-29 | 2019-04-05 | 清华大学 | 一种多喷头、多通道微滴喷射设备和工艺 |
JP6657505B2 (ja) | 2015-11-09 | 2020-03-04 | アネスト岩田株式会社 | 静電噴霧装置及び静電噴霧方法 |
KR101903712B1 (ko) * | 2016-05-12 | 2018-11-30 | 참엔지니어링(주) | 패턴라인 형성장치 |
WO2018181267A1 (ja) * | 2017-03-31 | 2018-10-04 | ナガセテクノエンジニアリング株式会社 | 粒子膜の製造方法、静電噴霧用液、及び、粒子膜 |
CN109907880B (zh) * | 2019-04-15 | 2021-07-20 | 江苏师范大学 | 眼睛医治用的眼药水滴液系统 |
JP7394595B2 (ja) * | 2019-11-19 | 2023-12-08 | 花王株式会社 | 静電噴出装置 |
CN114226092B (zh) * | 2021-12-16 | 2023-04-25 | 蒋恒 | 一种胶水涂覆装置及其使用方法 |
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JP2006305321A (ja) * | 2005-03-28 | 2006-11-09 | Matsushita Electric Ind Co Ltd | 空気浄化装置およびそれを利用した空気清浄機および加湿器 |
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Family Cites Families (8)
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GB8604328D0 (en) | 1986-02-21 | 1986-03-26 | Ici Plc | Producing spray of droplets of liquid |
JP2004136652A (ja) | 2002-09-24 | 2004-05-13 | Konica Minolta Holdings Inc | 液体吐出装置 |
JP3956224B2 (ja) | 2002-09-24 | 2007-08-08 | コニカミノルタホールディングス株式会社 | 液体吐出装置 |
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EP1829688A4 (en) * | 2004-12-20 | 2009-12-02 | Konica Minolta Holdings Inc | LIQUID SEPARATING HEAD, LIQUID EJECTOR AND LIQUID EJECTION PROCEDURE |
KR100920769B1 (ko) | 2008-03-11 | 2009-10-08 | 연세대학교 산학협력단 | 전기수력학적 분사노즐, 이를 이용한 분사장치 및패터닝방법 |
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- 2013-05-14 US US14/401,381 patent/US9630205B2/en active Active
- 2013-05-14 KR KR1020147031006A patent/KR101630639B1/ko active IP Right Grant
- 2013-05-14 WO PCT/JP2013/063453 patent/WO2013172356A1/ja active Application Filing
- 2013-05-14 TW TW102117036A patent/TWI600471B/zh active
- 2013-05-14 CN CN201380025219.0A patent/CN104284734B/zh active Active
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JP2640851B2 (ja) * | 1989-01-17 | 1997-08-13 | ノードソン株式会社 | 液状フォトレジスト剤の塗布方法とその装置 |
WO2006011403A1 (ja) * | 2004-07-26 | 2006-02-02 | Konica Minolta Holdings, Inc. | 液体吐出装置 |
JP2006305321A (ja) * | 2005-03-28 | 2006-11-09 | Matsushita Electric Ind Co Ltd | 空気浄化装置およびそれを利用した空気清浄機および加湿器 |
JP2007275745A (ja) * | 2006-04-05 | 2007-10-25 | Daikin Ind Ltd | 静電噴霧装置 |
WO2012008459A1 (ja) * | 2010-07-15 | 2012-01-19 | 横浜油脂工業株式会社 | 静電塗装装置 |
Also Published As
Publication number | Publication date |
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CN104284734B (zh) | 2018-06-08 |
CN104284734A (zh) | 2015-01-14 |
WO2013172356A1 (ja) | 2013-11-21 |
US20150125619A1 (en) | 2015-05-07 |
TW201412405A (zh) | 2014-04-01 |
EP2851128A4 (en) | 2015-12-30 |
JP2013237002A (ja) | 2013-11-28 |
TWI600471B (zh) | 2017-10-01 |
KR101630639B1 (ko) | 2016-06-15 |
KR20150013492A (ko) | 2015-02-05 |
EP2851128A1 (en) | 2015-03-25 |
US9630205B2 (en) | 2017-04-25 |
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