JP5266201B2 - ガス供給装置 - Google Patents

ガス供給装置 Download PDF

Info

Publication number
JP5266201B2
JP5266201B2 JP2009500933A JP2009500933A JP5266201B2 JP 5266201 B2 JP5266201 B2 JP 5266201B2 JP 2009500933 A JP2009500933 A JP 2009500933A JP 2009500933 A JP2009500933 A JP 2009500933A JP 5266201 B2 JP5266201 B2 JP 5266201B2
Authority
JP
Japan
Prior art keywords
inlet
gas
holes
selector
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2009500933A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009530563A (ja
JP2009530563A5 (enExample
Inventor
フィリップ ノース
ディヴィッド ポール マンソン
Original Assignee
エドワーズ リミテッド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by エドワーズ リミテッド filed Critical エドワーズ リミテッド
Publication of JP2009530563A publication Critical patent/JP2009530563A/ja
Publication of JP2009530563A5 publication Critical patent/JP2009530563A5/ja
Application granted granted Critical
Publication of JP5266201B2 publication Critical patent/JP5266201B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/32—Means for additional adjustment of the rate of flow
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F16K11/02—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit
    • F16K11/08—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only taps or cocks
    • F16K11/085—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only taps or cocks with cylindrical plug
    • F16K11/0856—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only taps or cocks with cylindrical plug having all the connecting conduits situated in more than one plane perpendicular to the axis of the plug
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F16K11/02—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit
    • F16K11/06—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements
    • F16K11/065—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements with linearly sliding closure members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F16K11/02—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit
    • F16K11/06—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements
    • F16K11/065—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements with linearly sliding closure members
    • F16K11/0655—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements with linearly sliding closure members with flat slides
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F16K11/02—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit
    • F16K11/08—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only taps or cocks
    • F16K11/085—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only taps or cocks with cylindrical plug

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Measuring Volume Flow (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Branch Pipes, Bends, And The Like (AREA)
  • Pipeline Systems (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
JP2009500933A 2006-03-20 2007-02-15 ガス供給装置 Active JP5266201B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GBGB0605554.5A GB0605554D0 (en) 2006-03-20 2006-03-20 Gas supply apparatus
GB0605554.5 2006-03-20
PCT/GB2007/050067 WO2007107781A1 (en) 2006-03-20 2007-02-15 Gas supply apparatus

Publications (3)

Publication Number Publication Date
JP2009530563A JP2009530563A (ja) 2009-08-27
JP2009530563A5 JP2009530563A5 (enExample) 2010-03-18
JP5266201B2 true JP5266201B2 (ja) 2013-08-21

Family

ID=36293092

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009500933A Active JP5266201B2 (ja) 2006-03-20 2007-02-15 ガス供給装置

Country Status (7)

Country Link
EP (1) EP1996842B1 (enExample)
JP (1) JP5266201B2 (enExample)
KR (1) KR101321323B1 (enExample)
AT (1) ATE553323T1 (enExample)
GB (1) GB0605554D0 (enExample)
TW (1) TWI422705B (enExample)
WO (1) WO2007107781A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8624896B2 (en) 2007-05-31 2014-01-07 Sony Corporation Information processing apparatus, information processing method and computer program

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2500610A (en) 2012-03-26 2013-10-02 Edwards Ltd Apparatus to supply purge gas to a multistage vacuum pump
GB2535703B (en) * 2015-02-23 2019-09-18 Edwards Ltd Gas supply apparatus
CN106870800B (zh) * 2017-01-06 2022-12-30 重庆金山医疗技术研究院有限公司 流体切换电磁阀及装有该电磁阀的内窥镜
CN209221267U (zh) * 2017-11-23 2019-08-09 北京万生人和科技有限公司 一种智能呼吸过滤装置
EP3719399A1 (en) * 2019-04-02 2020-10-07 BSH Hausgeräte GmbH Gas valve and gas stove
FR3121962B1 (fr) * 2021-04-16 2023-05-12 Pfeiffer Vacuum Pompe à vide

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2278246A (en) * 1937-12-21 1942-03-31 Cordova Jose Juan Valve and the like
US2855955A (en) * 1955-01-21 1958-10-14 Harper Wyman Co Gas valves
GB845187A (en) * 1955-11-23 1960-08-17 Tecalemit Ltd Improvements in or relating to fluid control selector valves
US3678959A (en) * 1970-07-30 1972-07-25 Richard B Liposky Hand operable selector valve
JPH0678927B2 (ja) * 1985-12-16 1994-10-05 帝人株式会社 流量計
JPS62194077A (ja) * 1986-02-17 1987-08-26 Toyoda Autom Loom Works Ltd 可変オリフイス装置
JPH09280388A (ja) * 1996-04-19 1997-10-28 Toshiba Corp 可変式流量制限オリフィスおよびこのオリフィスを用いた配管構造体
JP4422295B2 (ja) * 2000-05-17 2010-02-24 キヤノンアネルバ株式会社 Ｃｖｄ装置
DE10152186C1 (de) 2001-10-23 2003-06-12 Ballard Power Systems Brennstoffzellanlage mit einer Vorrichtung zur dosierten Zufuhr von sauerstoffhaltigem Medium an Dosierstellen eines Gaserzeugungssystems
JP2003229417A (ja) * 2001-11-28 2003-08-15 Tokyo Electron Ltd 真空処理装置及びその制御方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8624896B2 (en) 2007-05-31 2014-01-07 Sony Corporation Information processing apparatus, information processing method and computer program

Also Published As

Publication number Publication date
GB0605554D0 (en) 2006-04-26
KR101321323B1 (ko) 2013-10-23
TW200813251A (en) 2008-03-16
TWI422705B (zh) 2014-01-11
JP2009530563A (ja) 2009-08-27
EP1996842A1 (en) 2008-12-03
KR20080104154A (ko) 2008-12-01
WO2007107781A1 (en) 2007-09-27
EP1996842B1 (en) 2012-04-11
ATE553323T1 (de) 2012-04-15

Similar Documents

Publication Publication Date Title
JP5266201B2 (ja) ガス供給装置
JP5330709B2 (ja) 処理チャンバへのガスフローを制御する方法及び装置
JP5582684B2 (ja) 半導体処理システムにガスを分配する装置及び半導体処理チャンバにガスを分配する装置
JP2008211218A (ja) 処理チャンバへのガスフローを制御する方法及び装置
JP3926747B2 (ja) フローを分割するためのシステム及び方法
US11322369B2 (en) Powder protecting three-way valve
JP2013506242A (ja) 質量分析システム
TW201402950A (zh) 真空幫浦裝置
KR102528898B1 (ko) 가스 공급 장치
US7198455B2 (en) Vacuum pumping arrangement
CN100485190C (zh) 泵装置的气体提供系统
US20100095890A1 (en) Gas supply system, pumping system, coating system, gas supply method, and pumping method
US20050211315A1 (en) Rotatable valve
JP7138167B2 (ja) 真空ポンプとその冷却部品
KR102520159B1 (ko) 흡착트랩을 포함하는 플라즈마 에칭시스템
KR102811524B1 (ko) 반도체 프로세스 챔버의 압력 조절 장치
CN222861619U (zh) 传输腔室压力控制装置及薄膜沉积设备
JP2009507164A (ja) ロータリーポンプ
CN120418544A (zh) 用于逆流泄漏检测的具有可变侧入口位置的涡轮分子泵
KR20210123668A (ko) 챔버 진공유지방법 및 진공유지장치
KR20170078068A (ko) 원자층 증착 장치의 배기 시스템
KR20240077022A (ko) 유체 제어장치 및 유체 제어방법
KR20050108938A (ko) 세정용 산소가스 공급라인을 별도로 구비하는 플라즈마강화 ｃｖｄ장치
EP2186923A1 (en) Gas supply system, pumping system, coating system, gas supply method, and pumping method
JPH05306948A (ja) 流体等分配機構

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100127

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20100127

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20120423

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20120703

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20120710

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20121023

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20130422

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20130502

R150 Certificate of patent or registration of utility model

Ref document number: 5266201

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250