KR101321323B1 - 가스 공급 장치 - Google Patents

가스 공급 장치 Download PDF

Info

Publication number
KR101321323B1
KR101321323B1 KR1020087022812A KR20087022812A KR101321323B1 KR 101321323 B1 KR101321323 B1 KR 101321323B1 KR 1020087022812 A KR1020087022812 A KR 1020087022812A KR 20087022812 A KR20087022812 A KR 20087022812A KR 101321323 B1 KR101321323 B1 KR 101321323B1
Authority
KR
South Korea
Prior art keywords
holes
inlet
flow selector
gas
purge gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020087022812A
Other languages
English (en)
Korean (ko)
Other versions
KR20080104154A (ko
Inventor
필립 노쓰
데이비드 폴 맨슨
Original Assignee
에드워즈 리미티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 에드워즈 리미티드 filed Critical 에드워즈 리미티드
Publication of KR20080104154A publication Critical patent/KR20080104154A/ko
Application granted granted Critical
Publication of KR101321323B1 publication Critical patent/KR101321323B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/32—Means for additional adjustment of the rate of flow
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F16K11/02—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit
    • F16K11/08—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only taps or cocks
    • F16K11/085—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only taps or cocks with cylindrical plug
    • F16K11/0856—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only taps or cocks with cylindrical plug having all the connecting conduits situated in more than one plane perpendicular to the axis of the plug
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F16K11/02—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit
    • F16K11/06—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements
    • F16K11/065—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements with linearly sliding closure members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F16K11/02—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit
    • F16K11/06—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements
    • F16K11/065—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements with linearly sliding closure members
    • F16K11/0655—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements with linearly sliding closure members with flat slides
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F16K11/02—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit
    • F16K11/08—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only taps or cocks
    • F16K11/085—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only taps or cocks with cylindrical plug

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Measuring Volume Flow (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Branch Pipes, Bends, And The Like (AREA)
  • Pipeline Systems (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
KR1020087022812A 2006-03-20 2007-02-15 가스 공급 장치 Active KR101321323B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB0605554.5 2006-03-20
GBGB0605554.5A GB0605554D0 (en) 2006-03-20 2006-03-20 Gas supply apparatus
PCT/GB2007/050067 WO2007107781A1 (en) 2006-03-20 2007-02-15 Gas supply apparatus

Publications (2)

Publication Number Publication Date
KR20080104154A KR20080104154A (ko) 2008-12-01
KR101321323B1 true KR101321323B1 (ko) 2013-10-23

Family

ID=36293092

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020087022812A Active KR101321323B1 (ko) 2006-03-20 2007-02-15 가스 공급 장치

Country Status (7)

Country Link
EP (1) EP1996842B1 (enExample)
JP (1) JP5266201B2 (enExample)
KR (1) KR101321323B1 (enExample)
AT (1) ATE553323T1 (enExample)
GB (1) GB0605554D0 (enExample)
TW (1) TWI422705B (enExample)
WO (1) WO2007107781A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4900051B2 (ja) 2007-05-31 2012-03-21 ソニー株式会社 情報処理装置、および情報処理方法、並びにコンピュータ・プログラム
GB2500610A (en) 2012-03-26 2013-10-02 Edwards Ltd Apparatus to supply purge gas to a multistage vacuum pump
GB2535703B (en) * 2015-02-23 2019-09-18 Edwards Ltd Gas supply apparatus
CN106870800B (zh) * 2017-01-06 2022-12-30 重庆金山医疗技术研究院有限公司 流体切换电磁阀及装有该电磁阀的内窥镜
CN209221267U (zh) * 2017-11-23 2019-08-09 北京万生人和科技有限公司 一种智能呼吸过滤装置
EP3719399A1 (en) * 2019-04-02 2020-10-07 BSH Hausgeräte GmbH Gas valve and gas stove
FR3121962B1 (fr) * 2021-04-16 2023-05-12 Pfeiffer Vacuum Pompe à vide

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62194077A (ja) * 1986-02-17 1987-08-26 Toyoda Autom Loom Works Ltd 可変オリフイス装置
JPH09280388A (ja) * 1996-04-19 1997-10-28 Toshiba Corp 可変式流量制限オリフィスおよびこのオリフィスを用いた配管構造体
DE10152186C1 (de) * 2001-10-23 2003-06-12 Ballard Power Systems Brennstoffzellanlage mit einer Vorrichtung zur dosierten Zufuhr von sauerstoffhaltigem Medium an Dosierstellen eines Gaserzeugungssystems

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2278246A (en) * 1937-12-21 1942-03-31 Cordova Jose Juan Valve and the like
US2855955A (en) * 1955-01-21 1958-10-14 Harper Wyman Co Gas valves
GB845187A (en) * 1955-11-23 1960-08-17 Tecalemit Ltd Improvements in or relating to fluid control selector valves
US3678959A (en) * 1970-07-30 1972-07-25 Richard B Liposky Hand operable selector valve
JPH0678927B2 (ja) * 1985-12-16 1994-10-05 帝人株式会社 流量計
JP4422295B2 (ja) * 2000-05-17 2010-02-24 キヤノンアネルバ株式会社 Ｃｖｄ装置
JP2003229417A (ja) * 2001-11-28 2003-08-15 Tokyo Electron Ltd 真空処理装置及びその制御方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62194077A (ja) * 1986-02-17 1987-08-26 Toyoda Autom Loom Works Ltd 可変オリフイス装置
JPH09280388A (ja) * 1996-04-19 1997-10-28 Toshiba Corp 可変式流量制限オリフィスおよびこのオリフィスを用いた配管構造体
DE10152186C1 (de) * 2001-10-23 2003-06-12 Ballard Power Systems Brennstoffzellanlage mit einer Vorrichtung zur dosierten Zufuhr von sauerstoffhaltigem Medium an Dosierstellen eines Gaserzeugungssystems

Also Published As

Publication number Publication date
KR20080104154A (ko) 2008-12-01
EP1996842A1 (en) 2008-12-03
EP1996842B1 (en) 2012-04-11
WO2007107781A1 (en) 2007-09-27
GB0605554D0 (en) 2006-04-26
ATE553323T1 (de) 2012-04-15
TWI422705B (zh) 2014-01-11
TW200813251A (en) 2008-03-16
JP5266201B2 (ja) 2013-08-21
JP2009530563A (ja) 2009-08-27

Similar Documents

Publication Publication Date Title
KR101321323B1 (ko) 가스 공급 장치
KR102129136B1 (ko) 원자층 증착 및 화학 기상 증착 반응기들에 대한 pou 밸브 매니폴드
US8905074B2 (en) Apparatus for controlling gas distribution using orifice ratio conductance control
TWI418963B (zh) 應用壓差測量的氣體流調控
US6418954B1 (en) System and method for dividing flow
KR102564514B1 (ko) 방위각 믹서
EP1961837A1 (en) Apparatus for controlling gas flow to a processing chamber
EP1961836A1 (en) Apparatus for controlling gas flow to a processing chamber
KR20170012124A (ko) 반도체 프로세싱 툴을 위한 유체 혼합 허브
JP2008211219A (ja) 処理チャンバへのガスフローを制御する方法及び装置
US11322369B2 (en) Powder protecting three-way valve
US10497542B2 (en) Flow control showerhead with integrated flow restrictors for improved gas delivery to a semiconductor process
TW201402950A (zh) 真空幫浦裝置
KR102528898B1 (ko) 가스 공급 장치
US10844491B2 (en) Gas supply unit and substrate processing system
US20100095890A1 (en) Gas supply system, pumping system, coating system, gas supply method, and pumping method
JP5284640B2 (ja) 排気装置用ガス供給システム
KR101366385B1 (ko) 원자층 박막 증착 장치
JP7530961B2 (ja) 流量制限器用のシール
US20230241563A1 (en) Fluid delivery module
WO2024173019A1 (en) Modular substrate assembly and system incorporating same
US10753914B2 (en) Flow controller
EP2186923A1 (en) Gas supply system, pumping system, coating system, gas supply method, and pumping method

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

A201 Request for examination
E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

FPAY Annual fee payment

Payment date: 20161011

Year of fee payment: 4

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

FPAY Annual fee payment

Payment date: 20181010

Year of fee payment: 6

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 6

FPAY Annual fee payment

Payment date: 20191002

Year of fee payment: 7

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 7

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 8

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 9

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 10

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 11

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 12

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 13

U11 Full renewal or maintenance fee paid

Free format text: ST27 STATUS EVENT CODE: A-4-4-U10-U11-OTH-PR1001 (AS PROVIDED BY THE NATIONAL OFFICE)

Year of fee payment: 13