JP2009530563A - ガス供給装置 - Google Patents
ガス供給装置 Download PDFInfo
- Publication number
- JP2009530563A JP2009530563A JP2009500933A JP2009500933A JP2009530563A JP 2009530563 A JP2009530563 A JP 2009530563A JP 2009500933 A JP2009500933 A JP 2009500933A JP 2009500933 A JP2009500933 A JP 2009500933A JP 2009530563 A JP2009530563 A JP 2009530563A
- Authority
- JP
- Japan
- Prior art keywords
- holes
- gas
- inlet
- outlet
- manifold
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010926 purge Methods 0.000 claims abstract description 42
- 239000007789 gas Substances 0.000 description 124
- 238000000034 method Methods 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000009530 blood pressure measurement Methods 0.000 description 4
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/30—Details
- F16K3/32—Means for additional adjustment of the rate of flow
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
- F16K11/02—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit
- F16K11/08—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only taps or cocks
- F16K11/085—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only taps or cocks with cylindrical plug
- F16K11/0856—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only taps or cocks with cylindrical plug having all the connecting conduits situated in more than one plane perpendicular to the axis of the plug
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
- F16K11/02—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit
- F16K11/06—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements
- F16K11/065—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements with linearly sliding closure members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
- F16K11/02—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit
- F16K11/06—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements
- F16K11/065—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements with linearly sliding closure members
- F16K11/0655—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements with linearly sliding closure members with flat slides
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
- F16K11/02—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit
- F16K11/08—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only taps or cocks
- F16K11/085—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only taps or cocks with cylindrical plug
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Measuring Volume Flow (AREA)
- Sampling And Sample Adjustment (AREA)
- Branch Pipes, Bends, And The Like (AREA)
- Pipeline Systems (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Abstract
【選択図】図3
Description
Claims (15)
- パージガスを排気装置に供給するための装置であって、
ガス入口と、各々、ガスを、排気装置のそれぞれのポートに供給するための複数のガス出口を有するマニホールドと、
入口と出口との間に配置された流量セレクタと、を含み、
流量セレクタは、複数の様々なサイズの間隔を隔てた孔を含み、流量セレクタの中への、および流量セレクタからの、ガスの流量を変化させるために、第1の組の孔が入口および出口と整合される第1の位置から第2の組の孔が入口および出口と整合される第2の位置までマニホールドに対して移動できる、
ことを特徴とする装置。 - 各組は、入口と整合させるための入口孔と、各々を、それぞれの出口と整合させるための複数の出口孔と、を含み、出口孔は、軸線方向に整合される、請求項1に記載の装置。
- 入口孔は、出口孔から角度的に間隔を隔てられる、請求項2に記載の装置。
- 入口孔は、流量セレクタの、出口孔と反対側に配置される、請求項2または3に記載の装置。
- 入口孔は、出口孔から軸線方向に間隔を隔てられる、請求項2に記載の装置。
- 入口孔は、流量セレクタの一端に向って配置される、請求項2乃至5のいずれか1項に記載の装置。
- 各組の出口孔は、様々なサイズを有している、請求項2乃至6のいずれか1項に記載の装置。
- 入口孔は、異なるサイズを有する、請求項2乃至7のいずれか1項に記載の装置。
- 第1の組の孔は、第2の組の孔から角度的に間隔を隔てられる、請求項1乃至8のいずれか1項に記載の装置。
- 第1の組の孔は、第2の組の孔から角度的に間隔を隔てられる、請求項1乃至8のいずれか1項に記載の装置。
- 流量セレクタは中空であり、孔は流量セレクタの周囲に配置される、請求項1乃至10のいずれか1項に記載の装置。
- 流量セレクタは管状である、請求項11に記載の装置。
- 流量セレクタは、プレートからなる、請求項1乃至10のいずれか1項に記載の装置。
- 流量セレクタの一端は、マニホールドの内側に配置され、流量セレクタの他端は、マニホールドの外部にある、請求項1乃至13のいずれか1項に記載の装置。
- 流量セレクタの外部端は、使用者が流量セレクタの位置を手動で調整できるようにする、ハンドルを提供する、請求項14に記載の装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0605554.5 | 2006-03-20 | ||
GBGB0605554.5A GB0605554D0 (en) | 2006-03-20 | 2006-03-20 | Gas supply apparatus |
PCT/GB2007/050067 WO2007107781A1 (en) | 2006-03-20 | 2007-02-15 | Gas supply apparatus |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2009530563A true JP2009530563A (ja) | 2009-08-27 |
JP2009530563A5 JP2009530563A5 (ja) | 2010-03-18 |
JP5266201B2 JP5266201B2 (ja) | 2013-08-21 |
Family
ID=36293092
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009500933A Active JP5266201B2 (ja) | 2006-03-20 | 2007-02-15 | ガス供給装置 |
Country Status (7)
Country | Link |
---|---|
EP (1) | EP1996842B1 (ja) |
JP (1) | JP5266201B2 (ja) |
KR (1) | KR101321323B1 (ja) |
AT (1) | ATE553323T1 (ja) |
GB (1) | GB0605554D0 (ja) |
TW (1) | TWI422705B (ja) |
WO (1) | WO2007107781A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20170118888A (ko) * | 2015-02-23 | 2017-10-25 | 에드워즈 리미티드 | 가스 공급 장치 |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4900051B2 (ja) | 2007-05-31 | 2012-03-21 | ソニー株式会社 | 情報処理装置、および情報処理方法、並びにコンピュータ・プログラム |
GB2500610A (en) | 2012-03-26 | 2013-10-02 | Edwards Ltd | Apparatus to supply purge gas to a multistage vacuum pump |
CN106870800B (zh) * | 2017-01-06 | 2022-12-30 | 重庆金山医疗技术研究院有限公司 | 流体切换电磁阀及装有该电磁阀的内窥镜 |
CN209221267U (zh) * | 2017-11-23 | 2019-08-09 | 北京万生人和科技有限公司 | 一种智能呼吸过滤装置 |
EP3719399A1 (en) * | 2019-04-02 | 2020-10-07 | BSH Hausgeräte GmbH | Gas valve and gas stove |
FR3121962B1 (fr) * | 2021-04-16 | 2023-05-12 | Pfeiffer Vacuum | Pompe à vide |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62140026A (ja) * | 1985-12-16 | 1987-06-23 | Teijin Ltd | 流量計及びそれを用いた酸素富化気体供給装置 |
JPS62194077A (ja) * | 1986-02-17 | 1987-08-26 | Toyoda Autom Loom Works Ltd | 可変オリフイス装置 |
JPH09280388A (ja) * | 1996-04-19 | 1997-10-28 | Toshiba Corp | 可変式流量制限オリフィスおよびこのオリフィスを用いた配管構造体 |
DE10152186C1 (de) * | 2001-10-23 | 2003-06-12 | Ballard Power Systems | Brennstoffzellanlage mit einer Vorrichtung zur dosierten Zufuhr von sauerstoffhaltigem Medium an Dosierstellen eines Gaserzeugungssystems |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2278246A (en) * | 1937-12-21 | 1942-03-31 | Cordova Jose Juan | Valve and the like |
US2855955A (en) * | 1955-01-21 | 1958-10-14 | Harper Wyman Co | Gas valves |
GB845187A (en) * | 1955-11-23 | 1960-08-17 | Tecalemit Ltd | Improvements in or relating to fluid control selector valves |
US3678959A (en) * | 1970-07-30 | 1972-07-25 | Richard B Liposky | Hand operable selector valve |
JP4422295B2 (ja) * | 2000-05-17 | 2010-02-24 | キヤノンアネルバ株式会社 | Cvd装置 |
JP2003229417A (ja) * | 2001-11-28 | 2003-08-15 | Tokyo Electron Ltd | 真空処理装置及びその制御方法 |
-
2006
- 2006-03-20 GB GBGB0605554.5A patent/GB0605554D0/en not_active Ceased
-
2007
- 2007-02-15 KR KR1020087022812A patent/KR101321323B1/ko active IP Right Grant
- 2007-02-15 AT AT07705380T patent/ATE553323T1/de active
- 2007-02-15 JP JP2009500933A patent/JP5266201B2/ja active Active
- 2007-02-15 EP EP07705380A patent/EP1996842B1/en active Active
- 2007-02-15 WO PCT/GB2007/050067 patent/WO2007107781A1/en active Application Filing
- 2007-03-20 TW TW096109537A patent/TWI422705B/zh active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62140026A (ja) * | 1985-12-16 | 1987-06-23 | Teijin Ltd | 流量計及びそれを用いた酸素富化気体供給装置 |
JPS62194077A (ja) * | 1986-02-17 | 1987-08-26 | Toyoda Autom Loom Works Ltd | 可変オリフイス装置 |
JPH09280388A (ja) * | 1996-04-19 | 1997-10-28 | Toshiba Corp | 可変式流量制限オリフィスおよびこのオリフィスを用いた配管構造体 |
DE10152186C1 (de) * | 2001-10-23 | 2003-06-12 | Ballard Power Systems | Brennstoffzellanlage mit einer Vorrichtung zur dosierten Zufuhr von sauerstoffhaltigem Medium an Dosierstellen eines Gaserzeugungssystems |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20170118888A (ko) * | 2015-02-23 | 2017-10-25 | 에드워즈 리미티드 | 가스 공급 장치 |
KR102528898B1 (ko) * | 2015-02-23 | 2023-05-03 | 에드워즈 리미티드 | 가스 공급 장치 |
Also Published As
Publication number | Publication date |
---|---|
TW200813251A (en) | 2008-03-16 |
JP5266201B2 (ja) | 2013-08-21 |
KR20080104154A (ko) | 2008-12-01 |
EP1996842B1 (en) | 2012-04-11 |
EP1996842A1 (en) | 2008-12-03 |
KR101321323B1 (ko) | 2013-10-23 |
ATE553323T1 (de) | 2012-04-15 |
GB0605554D0 (en) | 2006-04-26 |
WO2007107781A1 (en) | 2007-09-27 |
TWI422705B (zh) | 2014-01-11 |
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