JP2009530563A5 - - Google Patents

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Publication number
JP2009530563A5
JP2009530563A5 JP2009500933A JP2009500933A JP2009530563A5 JP 2009530563 A5 JP2009530563 A5 JP 2009530563A5 JP 2009500933 A JP2009500933 A JP 2009500933A JP 2009500933 A JP2009500933 A JP 2009500933A JP 2009530563 A5 JP2009530563 A5 JP 2009530563A5
Authority
JP
Japan
Prior art keywords
holes
outlet
inlet
selector
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2009500933A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009530563A (ja
JP5266201B2 (ja
Filing date
Publication date
Priority claimed from GBGB0605554.5A external-priority patent/GB0605554D0/en
Application filed filed Critical
Publication of JP2009530563A publication Critical patent/JP2009530563A/ja
Publication of JP2009530563A5 publication Critical patent/JP2009530563A5/ja
Application granted granted Critical
Publication of JP5266201B2 publication Critical patent/JP5266201B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2009500933A 2006-03-20 2007-02-15 ガス供給装置 Active JP5266201B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GBGB0605554.5A GB0605554D0 (en) 2006-03-20 2006-03-20 Gas supply apparatus
GB0605554.5 2006-03-20
PCT/GB2007/050067 WO2007107781A1 (en) 2006-03-20 2007-02-15 Gas supply apparatus

Publications (3)

Publication Number Publication Date
JP2009530563A JP2009530563A (ja) 2009-08-27
JP2009530563A5 true JP2009530563A5 (enExample) 2010-03-18
JP5266201B2 JP5266201B2 (ja) 2013-08-21

Family

ID=36293092

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009500933A Active JP5266201B2 (ja) 2006-03-20 2007-02-15 ガス供給装置

Country Status (7)

Country Link
EP (1) EP1996842B1 (enExample)
JP (1) JP5266201B2 (enExample)
KR (1) KR101321323B1 (enExample)
AT (1) ATE553323T1 (enExample)
GB (1) GB0605554D0 (enExample)
TW (1) TWI422705B (enExample)
WO (1) WO2007107781A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4900051B2 (ja) 2007-05-31 2012-03-21 ソニー株式会社 情報処理装置、および情報処理方法、並びにコンピュータ・プログラム
GB2500610A (en) 2012-03-26 2013-10-02 Edwards Ltd Apparatus to supply purge gas to a multistage vacuum pump
GB2535703B (en) * 2015-02-23 2019-09-18 Edwards Ltd Gas supply apparatus
CN106870800B (zh) * 2017-01-06 2022-12-30 重庆金山医疗技术研究院有限公司 流体切换电磁阀及装有该电磁阀的内窥镜
CN209221267U (zh) * 2017-11-23 2019-08-09 北京万生人和科技有限公司 一种智能呼吸过滤装置
EP3719399A1 (en) * 2019-04-02 2020-10-07 BSH Hausgeräte GmbH Gas valve and gas stove
FR3121962B1 (fr) * 2021-04-16 2023-05-12 Pfeiffer Vacuum Pompe à vide

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2278246A (en) * 1937-12-21 1942-03-31 Cordova Jose Juan Valve and the like
US2855955A (en) * 1955-01-21 1958-10-14 Harper Wyman Co Gas valves
GB845187A (en) * 1955-11-23 1960-08-17 Tecalemit Ltd Improvements in or relating to fluid control selector valves
US3678959A (en) * 1970-07-30 1972-07-25 Richard B Liposky Hand operable selector valve
JPH0678927B2 (ja) * 1985-12-16 1994-10-05 帝人株式会社 流量計
JPS62194077A (ja) * 1986-02-17 1987-08-26 Toyoda Autom Loom Works Ltd 可変オリフイス装置
JPH09280388A (ja) * 1996-04-19 1997-10-28 Toshiba Corp 可変式流量制限オリフィスおよびこのオリフィスを用いた配管構造体
JP4422295B2 (ja) * 2000-05-17 2010-02-24 キヤノンアネルバ株式会社 Ｃｖｄ装置
DE10152186C1 (de) 2001-10-23 2003-06-12 Ballard Power Systems Brennstoffzellanlage mit einer Vorrichtung zur dosierten Zufuhr von sauerstoffhaltigem Medium an Dosierstellen eines Gaserzeugungssystems
JP2003229417A (ja) * 2001-11-28 2003-08-15 Tokyo Electron Ltd 真空処理装置及びその制御方法

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