WO2009066390A1 - スパッタ装置およびスパッタ方法 - Google Patents

スパッタ装置およびスパッタ方法 Download PDF

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Publication number
WO2009066390A1
WO2009066390A1 PCT/JP2007/072625 JP2007072625W WO2009066390A1 WO 2009066390 A1 WO2009066390 A1 WO 2009066390A1 JP 2007072625 W JP2007072625 W JP 2007072625W WO 2009066390 A1 WO2009066390 A1 WO 2009066390A1
Authority
WO
WIPO (PCT)
Prior art keywords
gas introduction
gas
spattering
jetting
connection hole
Prior art date
Application number
PCT/JP2007/072625
Other languages
English (en)
French (fr)
Inventor
Masahiro Shibamoto
Kazuto Yamanaka
Hitoshi Jimba
David Djulianto Djayaprawira
Original Assignee
Canon Anelva Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Anelva Corporation filed Critical Canon Anelva Corporation
Priority to JP2008545488A priority Critical patent/JPWO2009066390A1/ja
Priority to PCT/JP2007/072625 priority patent/WO2009066390A1/ja
Priority to US12/274,022 priority patent/US20090134010A1/en
Publication of WO2009066390A1 publication Critical patent/WO2009066390A1/ja

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/568—Transferring the substrates through a series of coating stations

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

　本発明に従ったスパッタ装置は、基板を保持する基板保持手段、及び基板の周囲を囲む複数の位置に配置された、ガス噴出口を有するガス導入経路を有し、ガス導入接続口が少なくとも１つのガス導入経路上に設けられており、ガス導入接続口が設けられた少なくとも１つのガス導入経路に設けたガス噴出口数は、ガス導入接続口が設けられていないガス導入経路に設けたガス噴出口数より少であること、又は、ガス導入接続口が設けられた少なくとも１つのガス導入経路に設けたガス噴出口の口径は、ガス導入接続口が設けられていないガス導入経路に設けたガス噴出口の口径より小さいことを特徴とする。
PCT/JP2007/072625 2007-11-22 2007-11-22 スパッタ装置およびスパッタ方法 WO2009066390A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2008545488A JPWO2009066390A1 (ja) 2007-11-22 2007-11-22 スパッタ装置およびスパッタ方法
PCT/JP2007/072625 WO2009066390A1 (ja) 2007-11-22 2007-11-22 スパッタ装置およびスパッタ方法
US12/274,022 US20090134010A1 (en) 2007-11-22 2008-11-19 Sputtering apparatus and sputtering method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/072625 WO2009066390A1 (ja) 2007-11-22 2007-11-22 スパッタ装置およびスパッタ方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/274,022 Continuation US20090134010A1 (en) 2007-11-22 2008-11-19 Sputtering apparatus and sputtering method

Publications (1)

Publication Number Publication Date
WO2009066390A1 true WO2009066390A1 (ja) 2009-05-28

Family

ID=40667227

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/072625 WO2009066390A1 (ja) 2007-11-22 2007-11-22 スパッタ装置およびスパッタ方法

Country Status (3)

Country Link
US (1) US20090134010A1 (ja)
JP (1) JPWO2009066390A1 (ja)
WO (1) WO2009066390A1 (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009060541A1 (ja) * 2007-11-09 2009-05-14 Canon Anelva Corporation インライン型ウェハ搬送装置
WO2009060540A1 (ja) * 2007-11-09 2009-05-14 Canon Anelva Corporation インライン型ウェハ搬送装置
WO2009060539A1 (ja) * 2007-11-09 2009-05-14 Canon Anelva Corporation インライン型ウェハ搬送装置
WO2011028597A1 (en) * 2009-08-26 2011-03-10 Veeco Instruments, Inc. System for fabricating a pattern on magnetic recording media
TW201137143A (en) * 2010-04-28 2011-11-01 Hon Hai Prec Ind Co Ltd Sputtering system
WO2014105872A2 (en) * 2012-12-27 2014-07-03 Flir Systems, Inc. Deposition systems and methods

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05311425A (ja) * 1992-05-12 1993-11-22 Sumitomo Electric Ind Ltd 半導体装置の製造装置
JPH0897288A (ja) * 1994-09-22 1996-04-12 Sony Corp リフロー方法及びリフロー装置
JPH10212575A (ja) * 1997-01-29 1998-08-11 Sony Corp スパッタリング装置
JPH11343568A (ja) * 1998-05-29 1999-12-14 Toyota Motor Corp 光輝化製品の製造方法及びスパッタリング装置
JP2004346406A (ja) * 2003-05-26 2004-12-09 Anelva Corp スパッタリング装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05311425A (ja) * 1992-05-12 1993-11-22 Sumitomo Electric Ind Ltd 半導体装置の製造装置
JPH0897288A (ja) * 1994-09-22 1996-04-12 Sony Corp リフロー方法及びリフロー装置
JPH10212575A (ja) * 1997-01-29 1998-08-11 Sony Corp スパッタリング装置
JPH11343568A (ja) * 1998-05-29 1999-12-14 Toyota Motor Corp 光輝化製品の製造方法及びスパッタリング装置
JP2004346406A (ja) * 2003-05-26 2004-12-09 Anelva Corp スパッタリング装置

Also Published As

Publication number Publication date
JPWO2009066390A1 (ja) 2011-03-31
US20090134010A1 (en) 2009-05-28

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