JP5260644B2 - 対象物の縁部におけるレーザ光線の接触点を検出するための方法及びレーザ加工機 - Google Patents

対象物の縁部におけるレーザ光線の接触点を検出するための方法及びレーザ加工機 Download PDF

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Publication number
JP5260644B2
JP5260644B2 JP2010513684A JP2010513684A JP5260644B2 JP 5260644 B2 JP5260644 B2 JP 5260644B2 JP 2010513684 A JP2010513684 A JP 2010513684A JP 2010513684 A JP2010513684 A JP 2010513684A JP 5260644 B2 JP5260644 B2 JP 5260644B2
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Prior art keywords
laser beam
edge
laser
opening
laser processing
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JP2010513684A
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Japanese (ja)
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JP2010531236A (ja
JP2010531236A5 (enExample
Inventor
ヴァイク ユルゲン−ミヒャエル
ミリッヒ アンドレアス
リッター ウルリヒ
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Trumpf Werkzeugmaschinen SE and Co KG
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Trumpf Werkzeugmaschinen SE and Co KG
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/042Automatically aligning the laser beam
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/042Automatically aligning the laser beam
    • B23K26/043Automatically aligning the laser beam along the beam path, i.e. alignment of laser beam axis relative to laser beam apparatus
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/0869Devices involving movement of the laser head in at least one axial direction
    • B23K26/0876Devices involving movement of the laser head in at least one axial direction in at least two axial directions
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01HMEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H9/00Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Laser Beam Processing (AREA)
  • Lasers (AREA)
JP2010513684A 2007-06-27 2008-04-24 対象物の縁部におけるレーザ光線の接触点を検出するための方法及びレーザ加工機 Active JP5260644B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102007029787.6 2007-06-27
DE102007029787A DE102007029787B3 (de) 2007-06-27 2007-06-27 Verfahren zum Ermitteln eines Berührungspunkts eines Laserstrahls an einer Kante eines Körpers und Laserbearbeitungsmaschine
PCT/EP2008/003297 WO2009000356A1 (de) 2007-06-27 2008-04-24 Verfahren zum ermitteln eines berührpunkts eines laserstrahls an einer kante eines körpers und laserbearbeitungsmaschine

Publications (3)

Publication Number Publication Date
JP2010531236A JP2010531236A (ja) 2010-09-24
JP2010531236A5 JP2010531236A5 (enExample) 2013-01-31
JP5260644B2 true JP5260644B2 (ja) 2013-08-14

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ID=39678237

Family Applications (1)

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JP2010513684A Active JP5260644B2 (ja) 2007-06-27 2008-04-24 対象物の縁部におけるレーザ光線の接触点を検出するための方法及びレーザ加工機

Country Status (5)

Country Link
US (1) US8258430B2 (enExample)
JP (1) JP5260644B2 (enExample)
CN (1) CN101687280B (enExample)
DE (1) DE102007029787B3 (enExample)
WO (1) WO2009000356A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20170119494A (ko) 2016-04-19 2017-10-27 주식회사 에이치케이 레이저빔의 얼라인먼트 검사장치와 검사방법 그리고 레이저빔의 얼라인먼트 검사용 계측유닛

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2300193B9 (de) * 2008-06-20 2015-03-18 TRUMPF Werkzeugmaschinen GmbH + Co. KG Laserbearbeitungsmaschine mit einem photoakustisch-messkopf in der eine gasatmosphäre enthaltenden strahlführung
DE102009042529A1 (de) 2009-09-22 2011-05-26 Precitec Kg Laserbearbeitungskopf mit einer Fokuslagenjustageeinheit sowie ein System und ein Verfahren zum Justieren einer Fokuslage eines Laserstrahls
EP2338635B8 (de) * 2009-12-22 2014-10-08 Antares GmbH Vorrichtung und Verfahren zum Laserschutz durch Schwingungsmessung
US20130200053A1 (en) * 2010-04-13 2013-08-08 National Research Council Of Canada Laser processing control method
DE102013217126B4 (de) * 2013-08-28 2015-09-03 Trumpf Laser- Und Systemtechnik Gmbh Verfahren zum Feststellen von Abweichungen einer Ist-Lage eines Laserbearbeitungskopfes von einer Soll-Lage, Laserbearbeitungsmaschine und Computerprogrammprodukt
DE102015224963B3 (de) * 2015-12-11 2017-04-13 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Verfahren zur Bestimmung der Referenz-Fokuslage eines Laserstrahls
JP2018047478A (ja) * 2016-09-20 2018-03-29 デュプロ精工株式会社 レーザ加工装置
CN106338337A (zh) * 2016-11-11 2017-01-18 盐城工学院 一种激光打孔中在线监测打孔质量的装置及其监测方法
DE102017213511A1 (de) 2017-08-03 2019-02-07 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Verfahren zur Lasermaterialbearbeitung und Lasermaschine
JP6665243B2 (ja) * 2017-12-15 2020-03-13 株式会社スギノマシン ノズルの検査方法およびその装置
JP6630763B2 (ja) * 2018-03-12 2020-01-15 株式会社アマダホールディングス レーザ加工機におけるノズル芯出し装置及びノズル芯出し方法
JP6799038B2 (ja) 2018-08-24 2020-12-09 ファナック株式会社 レーザ加工システム、噴流観測装置、レーザ加工方法、及び噴流観測方法
US20200189027A1 (en) * 2018-12-07 2020-06-18 Seoul Laser Dieboard System Co., Ltd. Constant kerf dieboard cutting system using laser and vision
CN112629654A (zh) * 2020-12-11 2021-04-09 苏州瑞派宁科技有限公司 检测装置、激光等离子光源及其调节方法
JP2023117002A (ja) * 2022-02-10 2023-08-23 株式会社ディスコ レーザー加工装置
DE102024101110A1 (de) 2024-01-16 2025-07-17 TRUMPF Werkzeugmaschinen SE + Co. KG Verfahren zum Kalibrieren eines Messsystems eines Laserbearbeitungskopfs

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JPS63108985A (ja) * 1986-10-24 1988-05-13 Mitsubishi Electric Corp レ−ザ加工装置
JPS6411087A (en) * 1987-07-03 1989-01-13 Origin Electric Method and apparatus for discriminating working condition of body to be worked
JP2587732B2 (ja) * 1991-03-25 1997-03-05 理化学研究所 レーザー光の位置検出方法
JPH05237677A (ja) * 1992-02-28 1993-09-17 Murata Mach Ltd レーザ加工機のピアス孔貫通検知装置
JPH06246467A (ja) * 1993-03-03 1994-09-06 Mazda Motor Corp レーザ溶接品質の検査装置および検査方法
US5574225A (en) * 1993-06-18 1996-11-12 British Nuclear Fuels Plc Apparatus and a method for detecting the position of a laser beam
JP3259462B2 (ja) * 1993-08-30 2002-02-25 松下電器産業株式会社 レーザ加工機の焦点位置検出方法およびその装置
JP2728358B2 (ja) * 1993-11-19 1998-03-18 株式会社新潟鉄工所 レーザ加工機のノズルのセンタリング方法及び装置
JPH08118047A (ja) * 1994-10-19 1996-05-14 Ricoh Co Ltd レーザ加工装置
FR2726496B1 (fr) * 1994-11-09 1997-01-17 Aerospatiale Procede de localisation spatiale du point focal d'un faisceau laser d'une machine d'usinage et outillage pour la mise en oeuvre de ce procede
US6559934B1 (en) * 1999-09-14 2003-05-06 Visx, Incorporated Method and apparatus for determining characteristics of a laser beam spot
JP3357646B2 (ja) * 2000-03-29 2002-12-16 名古屋市 レーザ加工装置およびレーザ加工方法
EP1491280A1 (de) * 2003-06-25 2004-12-29 Reinhard Diem Laserkopf einer Laserstrahlbearbeitungsmaschine mit Wechseldüsen
US7521651B2 (en) * 2003-09-12 2009-04-21 Orbotech Ltd Multiple beam micro-machining system and method
JP2005103587A (ja) * 2003-09-30 2005-04-21 Disco Abrasive Syst Ltd レーザー加工装置
JP2005334926A (ja) * 2004-05-26 2005-12-08 Yamazaki Mazak Corp レーザ加工機におけるレーザ加工工具のノズルプリセッタ
CN1939644B (zh) * 2005-09-30 2012-10-17 日立比亚机械股份有限公司 激光加工方法以及激光加工装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20170119494A (ko) 2016-04-19 2017-10-27 주식회사 에이치케이 레이저빔의 얼라인먼트 검사장치와 검사방법 그리고 레이저빔의 얼라인먼트 검사용 계측유닛

Also Published As

Publication number Publication date
US20100116797A1 (en) 2010-05-13
US8258430B2 (en) 2012-09-04
JP2010531236A (ja) 2010-09-24
DE102007029787B3 (de) 2008-09-11
CN101687280B (zh) 2013-08-07
WO2009000356A1 (de) 2008-12-31
CN101687280A (zh) 2010-03-31

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