CN101687280B - 用于检测激光束在物体的棱边上的接触点的方法和激光加工机 - Google Patents

用于检测激光束在物体的棱边上的接触点的方法和激光加工机 Download PDF

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Publication number
CN101687280B
CN101687280B CN2008800219257A CN200880021925A CN101687280B CN 101687280 B CN101687280 B CN 101687280B CN 2008800219257 A CN2008800219257 A CN 2008800219257A CN 200880021925 A CN200880021925 A CN 200880021925A CN 101687280 B CN101687280 B CN 101687280B
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China
Prior art keywords
laser beam
laser
edge
laser processing
processing machine
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CN2008800219257A
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English (en)
Chinese (zh)
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CN101687280A (zh
Inventor
J-M·韦克
A·米利希
U·里特尔
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Trumpf Werkzeugmaschinen SE and Co KG
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Trumpf Werkzeugmaschinen SE and Co KG
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/042Automatically aligning the laser beam
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/042Automatically aligning the laser beam
    • B23K26/043Automatically aligning the laser beam along the beam path, i.e. alignment of laser beam axis relative to laser beam apparatus
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/0869Devices involving movement of the laser head in at least one axial direction
    • B23K26/0876Devices involving movement of the laser head in at least one axial direction in at least two axial directions
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01HMEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H9/00Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Laser Beam Processing (AREA)
  • Lasers (AREA)
CN2008800219257A 2007-06-27 2008-04-24 用于检测激光束在物体的棱边上的接触点的方法和激光加工机 Active CN101687280B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102007029787.6 2007-06-27
DE102007029787A DE102007029787B3 (de) 2007-06-27 2007-06-27 Verfahren zum Ermitteln eines Berührungspunkts eines Laserstrahls an einer Kante eines Körpers und Laserbearbeitungsmaschine
PCT/EP2008/003297 WO2009000356A1 (de) 2007-06-27 2008-04-24 Verfahren zum ermitteln eines berührpunkts eines laserstrahls an einer kante eines körpers und laserbearbeitungsmaschine

Publications (2)

Publication Number Publication Date
CN101687280A CN101687280A (zh) 2010-03-31
CN101687280B true CN101687280B (zh) 2013-08-07

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CN2008800219257A Active CN101687280B (zh) 2007-06-27 2008-04-24 用于检测激光束在物体的棱边上的接触点的方法和激光加工机

Country Status (5)

Country Link
US (1) US8258430B2 (enExample)
JP (1) JP5260644B2 (enExample)
CN (1) CN101687280B (enExample)
DE (1) DE102007029787B3 (enExample)
WO (1) WO2009000356A1 (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
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EP2300193B9 (de) * 2008-06-20 2015-03-18 TRUMPF Werkzeugmaschinen GmbH + Co. KG Laserbearbeitungsmaschine mit einem photoakustisch-messkopf in der eine gasatmosphäre enthaltenden strahlführung
DE102009042529A1 (de) 2009-09-22 2011-05-26 Precitec Kg Laserbearbeitungskopf mit einer Fokuslagenjustageeinheit sowie ein System und ein Verfahren zum Justieren einer Fokuslage eines Laserstrahls
EP2338635B8 (de) * 2009-12-22 2014-10-08 Antares GmbH Vorrichtung und Verfahren zum Laserschutz durch Schwingungsmessung
US20130200053A1 (en) * 2010-04-13 2013-08-08 National Research Council Of Canada Laser processing control method
DE102013217126B4 (de) * 2013-08-28 2015-09-03 Trumpf Laser- Und Systemtechnik Gmbh Verfahren zum Feststellen von Abweichungen einer Ist-Lage eines Laserbearbeitungskopfes von einer Soll-Lage, Laserbearbeitungsmaschine und Computerprogrammprodukt
DE102015224963B3 (de) * 2015-12-11 2017-04-13 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Verfahren zur Bestimmung der Referenz-Fokuslage eines Laserstrahls
KR102197497B1 (ko) 2016-04-19 2020-12-31 주식회사 에이치케이 레이저빔의 얼라인먼트 검사장치와 검사방법
JP2018047478A (ja) * 2016-09-20 2018-03-29 デュプロ精工株式会社 レーザ加工装置
CN106338337A (zh) * 2016-11-11 2017-01-18 盐城工学院 一种激光打孔中在线监测打孔质量的装置及其监测方法
DE102017213511A1 (de) 2017-08-03 2019-02-07 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Verfahren zur Lasermaterialbearbeitung und Lasermaschine
JP6665243B2 (ja) * 2017-12-15 2020-03-13 株式会社スギノマシン ノズルの検査方法およびその装置
JP6630763B2 (ja) * 2018-03-12 2020-01-15 株式会社アマダホールディングス レーザ加工機におけるノズル芯出し装置及びノズル芯出し方法
JP6799038B2 (ja) 2018-08-24 2020-12-09 ファナック株式会社 レーザ加工システム、噴流観測装置、レーザ加工方法、及び噴流観測方法
US20200189027A1 (en) * 2018-12-07 2020-06-18 Seoul Laser Dieboard System Co., Ltd. Constant kerf dieboard cutting system using laser and vision
CN112629654A (zh) * 2020-12-11 2021-04-09 苏州瑞派宁科技有限公司 检测装置、激光等离子光源及其调节方法
JP2023117002A (ja) * 2022-02-10 2023-08-23 株式会社ディスコ レーザー加工装置
DE102024101110A1 (de) 2024-01-16 2025-07-17 TRUMPF Werkzeugmaschinen SE + Co. KG Verfahren zum Kalibrieren eines Messsystems eines Laserbearbeitungskopfs

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US5574225A (en) * 1993-06-18 1996-11-12 British Nuclear Fuels Plc Apparatus and a method for detecting the position of a laser beam
CN1644297A (zh) * 2003-09-12 2005-07-27 奥博泰克有限公司 多米束显微机械加工系统及方法
CN1939644A (zh) * 2005-09-30 2007-04-04 日立比亚机械股份有限公司 激光加工方法以及激光加工装置

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JPS63108985A (ja) * 1986-10-24 1988-05-13 Mitsubishi Electric Corp レ−ザ加工装置
JPS6411087A (en) * 1987-07-03 1989-01-13 Origin Electric Method and apparatus for discriminating working condition of body to be worked
JP2587732B2 (ja) * 1991-03-25 1997-03-05 理化学研究所 レーザー光の位置検出方法
JPH05237677A (ja) * 1992-02-28 1993-09-17 Murata Mach Ltd レーザ加工機のピアス孔貫通検知装置
JPH06246467A (ja) * 1993-03-03 1994-09-06 Mazda Motor Corp レーザ溶接品質の検査装置および検査方法
JP3259462B2 (ja) * 1993-08-30 2002-02-25 松下電器産業株式会社 レーザ加工機の焦点位置検出方法およびその装置
JP2728358B2 (ja) * 1993-11-19 1998-03-18 株式会社新潟鉄工所 レーザ加工機のノズルのセンタリング方法及び装置
JPH08118047A (ja) * 1994-10-19 1996-05-14 Ricoh Co Ltd レーザ加工装置
FR2726496B1 (fr) * 1994-11-09 1997-01-17 Aerospatiale Procede de localisation spatiale du point focal d'un faisceau laser d'une machine d'usinage et outillage pour la mise en oeuvre de ce procede
US6559934B1 (en) * 1999-09-14 2003-05-06 Visx, Incorporated Method and apparatus for determining characteristics of a laser beam spot
JP3357646B2 (ja) * 2000-03-29 2002-12-16 名古屋市 レーザ加工装置およびレーザ加工方法
EP1491280A1 (de) * 2003-06-25 2004-12-29 Reinhard Diem Laserkopf einer Laserstrahlbearbeitungsmaschine mit Wechseldüsen
JP2005103587A (ja) * 2003-09-30 2005-04-21 Disco Abrasive Syst Ltd レーザー加工装置
JP2005334926A (ja) * 2004-05-26 2005-12-08 Yamazaki Mazak Corp レーザ加工機におけるレーザ加工工具のノズルプリセッタ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5574225A (en) * 1993-06-18 1996-11-12 British Nuclear Fuels Plc Apparatus and a method for detecting the position of a laser beam
CN1644297A (zh) * 2003-09-12 2005-07-27 奥博泰克有限公司 多米束显微机械加工系统及方法
CN1939644A (zh) * 2005-09-30 2007-04-04 日立比亚机械股份有限公司 激光加工方法以及激光加工装置

Also Published As

Publication number Publication date
US20100116797A1 (en) 2010-05-13
US8258430B2 (en) 2012-09-04
JP2010531236A (ja) 2010-09-24
DE102007029787B3 (de) 2008-09-11
JP5260644B2 (ja) 2013-08-14
WO2009000356A1 (de) 2008-12-31
CN101687280A (zh) 2010-03-31

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