JP5260395B2 - Sealing device - Google Patents

Abstract

The sealing device of this invention can bond an upper and a lower substrate to increase the production efficiency of cell units such as LCDs, organic EL panels, etc. and obtain high quality cell structures. This invention comprises: a chamber housing having an opening part thereon and provided with a ventilation opening, the chamber housing can be installed in a vertically movable manner with a platen, a support shaft of the lower substrate, and a support shaft of the upper substrate; a sheet member covering the opening part of the chamber housing and having flexibility and transparency; a UV mask support frame having a shape substantially in conformity with the chamber housing and comprising a ventilation opening, the UV transmissible mask being received in the UV mask support frame and disposed on the sheet member; a movable sealing plate covering the opening part on the UV mask support frame; and a light source part disposed above the sealing plate. When the chamber housing is partitioned by the sheet member and provided with the UV mask support frame and the movable sealing plate, the chamber housing using the sheet member as the lower boarder becomes a pressure-releasable first treatment chamber; in addition, at the upper part using the sheet member as the boarder, the interior surrounded by the UV mask support frame and the movable sealing plate becomes a pressure-releasable second treatment chamber.

Description

  In the present invention, a light emitting layer is formed inside a pair of substrates bonded together such as a liquid crystal display panel or an organic EL (Organic Electro-Luminescence) display panel, and the light emitting layer is electrically driven to generate an image or image. The present invention relates to a display panel sealing apparatus in which illumination light is obtained.

  A typical liquid crystal display panel as a display panel is manufactured by applying an ultraviolet curable sealing material to one (lower substrate 50) of a pair of substrates (for example, glass substrates) on which transparent electrodes are formed as shown in FIG. 51 is applied in a closed ring shape, and transparent spherical spacers are sprayed on a region surrounded by the sealing material 51, and a liquid crystal material 52 is dropped.

  Then, the lower substrate 50 is mounted and fixed via an elastic sheet 55 on a positioning table 54 supported in a vacuum chamber 53 so as to be movable in a direction parallel to the surface of the lower substrate 50. on the other hand. Similarly, the other of the pair of substrates (upper substrate 56) is suction fixed to a suction disk 57 supported in the vacuum chamber 53 so as to be movable in a direction perpendicular to the surface of the upper substrate 56.

  Then, after the vacuum chamber 53 is evacuated to reach a predetermined degree of vacuum, the suction plate 57 is lowered to a position before the sealing material 51 and the liquid crystal material 52 on the lower substrate 50 come into contact with the upper substrate 56. The positioning is performed by moving the positioning table 54, and the rough alignment processing of both the substrates 50 and 56 is performed.

  Next, after the vacuum chamber 53 is further evacuated to a predetermined degree of vacuum, the suction plate 57 is further lowered to pressurize the upper substrate 56 toward the lower substrate 50, and the upper substrate 56 and the lower substrate 50 are moved. The cell gap in between is maintained in a state held by a transparent spherical spacer. At this time, the sealing material 51 on the lower substrate 50 is crushed between the two substrates 50 and 56, and the crushed liquid crystal material 52 is in a region surrounded by the sealing material 51 and both the substrates 50 and 56. It is fluidly diffused and the entire area is filled with liquid crystal material.

  Next, the vacuum chamber 53 is sucked to return to the atmospheric pressure, and the positional relationship between the alignment marks of the upper substrate 56 and the lower substrate 50 facing each other in the atmospheric pressure is adjusted by moving the positioning table 54. Then, precise alignment processing of both the substrates 50 and 56 is performed. Finally, the sealing material 51 is cured by irradiating the pair of substrates 50 and 56 subjected to the alignment process with ultraviolet rays, and the manufacturing process (bonding process) of the liquid crystal display panel is completed (see, for example, Patent Document 1). ).

  On the other hand, the luminous body of the organic EL display panel has a property of gradually degrading due to energization and the influence of oxygen and moisture, resulting in a decrease in luminance. Therefore, a method for removing bubbles and moisture in the adhesive has been proposed (for example, Patent Document 2). The technique disclosed in Patent Document 2 includes an exhaust unit that enables the first space and the second space partitioned by the elastic sheet to exhaust both spaces. By controlling the space to a negative pressure with respect to the second space and causing the differential pressure generated in both spaces to act on one of the sealing substrate and the element substrate via the elastic sheet, both substrates can be pressure-bonded. I am doing so.

  Further, in the manufacturing process of a liquid crystal display panel or an organic EL display panel, when UV (ultraviolet) is irradiated by an optical press method to cure a photocurable adhesive, the organic EL element is deteriorated particularly when UV is irradiated. Since it becomes remarkable, generally, a light-shielding mask pattern is formed on a quartz light-shielding glass so that only a photocurable adhesive is irradiated with UV (for example, Patent Document 3).

  In the technique disclosed in Patent Document 3, a light shielding glass is disposed on the back side of a substrate on which an electro-optic layer is formed, and the substrate and the sealing member are optically covered in order to hermetically cover the electro-optic layer. In a state in which the substrate and the sealing member are joined by irradiating UV from the light-shielding glass side and curing the photocurable adhesive material in a state of being pressed through the curable adhesive material, For this reason, a water repellent treatment is performed on the contact surface between the light shielding glass and the substrate to prevent the light shielding glass and the substrate from sticking to each other.

  The configuration disclosed in Patent Document 3 is a method of using extremely expensive quartz glass, and there is a problem in terms of durability and the like. Therefore, the applicant of the present application has a sheet member having flexibility and translucency. The upper substrate of the cell structure was pressed against the sheet member, and when the initial performance of the sheet member was lowered to an allowable value or less, the unused portion could be continuously supplied. Then, a first chamber and a second chamber that can be depressurized are formed by using the sheet member as a boundary, and pressure control from both surfaces of the cell structure can be performed (see Patent Document 4).

JP 2002-296601 A JP 2005-276754 A JP 2006-004707 A JP 2009-058883 A

  By the way, the liquid crystal display panel and the organic EL display panel tend to increase in size, and the size of the manufacturing apparatus increases as the panel increases in size. In addition, even when the panel is enlarged, the upper and lower substrates for bonding to and from the sealing device are carried in and out by a dedicated transport device, so that no manual work is required. If the upper and lower substrates are carried in and out by human work, dust will scatter from the operator's clothes, etc., or sweat will evaporate from the body and maintain an appropriate humidity, creating an environment equivalent to a clean room. It will not be obtained and the production yield will be significantly reduced.

  In order to improve the production efficiency, it is desirable that the chambers formed above and below the cell structure have the minimum necessary capacity. In other words, the inside of the chamber in which the upper and lower substrates are bonded must always have a high degree of vacuum every step, and the degree of vacuum in the cell gap between the substrates must be high. However, when the capacity of the chamber is large, the amount of air sucked in the chamber is also large, so that the operation time of the vacuum pump becomes proportionally long, which is a major cause and the production efficiency is lowered. .

  In particular, when an organic EL display panel is manufactured, a very high degree of vacuum is required. Therefore, it is necessary to make the chamber as small as possible so that a vacuum state can be efficiently formed. In addition, while the chamber is downsized, it has an open / close door that allows the upper and lower substrates to be carried into the chamber and the completed display panel to be carried out, enabling automatic production. There must be.

  The present invention has been made to solve the above-described problems, and provides a sealing device capable of improving the production efficiency of a liquid crystal display panel, an organic EL display panel, and the like.

  Therefore, the present invention solves the above problems by means described below. That is, according to the first aspect of the present invention, there is provided a vacant housing having an opening formed on the upper surface and an intake / exhaust port, and a stage, a support rod for the lower substrate, and a support rod for the upper substrate provided therein so as to be movable up and down. A sheet member having flexibility and translucency covering the opening of the vacant housing, an outer shape substantially matching the vacant housing, having an intake / exhaust port, and containing a UV transmission mask therein A UV mask support frame placed on the sheet member, a movable sealing plate covering the opening on the upper surface of the UV mask support frame, and a light source unit disposed above the movable sealing plate. A first chamber capable of depressurizing the interior of the lower vacant housing with the sheet member as a boundary when a UV mask support frame and a movable sealing plate are disposed on the vacant housing via a sheet member. On the other hand, the sheet member To be a sealing apparatus inside surrounded on top of the UV mask support frame and movable sealing plate to field is a second chamber capable of vacuum.

  According to a second aspect of the present invention, there is provided the sealing device according to the first aspect, wherein the first support rod and the second substrate that support the first substrate in the vacant housing and can be moved up and down are provided. A second support rod that is supported and can be moved up and down, and a stage on which the cell structure is placed and can be moved up and down are provided.

  According to a third aspect of the present invention, in the sealing device according to the second aspect, the first support rod is configured to move up and down within the stage.

  According to a fourth aspect of the present invention, in the sealing device according to the second aspect, the first and second support rods and the drive mechanism for raising and lowering the stage are configured below the bottom surface of the empty housing. To.

  According to a fifth aspect of the present invention, in the sealing device according to the second aspect, an opening / closing door is provided on an arbitrary side surface of the vacant housing so that the airtight state of the first chamber can be maintained.

  According to a sixth aspect of the present invention, in the sealing device according to the second aspect, an alignment camera for adjusting the alignment between the first substrate and the second substrate is provided on a side portion of the stage.

  According to the present invention, since the UV mask support frame and the movable sealing board are arranged on the vacant casing via the sheet member, the first vacant casing in the lower vacant casing having the sheet member as a boundary is arranged. This chamber can be made as small as possible. This makes it possible to perform the exhaust treatment of the first chamber quickly, thereby improving the production efficiency.

  Further, in the above configuration, the first support rod configured to support the first substrate in the vacant housing and to be movable up and down and the second support to support the first substrate and the second substrate can be moved up and down. Opening and closing provided with a support rod and a stage on which the cell structure can be placed so that it can be moved up and down, and the first chamber can be kept airtight on any side of the vacant housing Since the door is provided, it is possible to automate the carrying-in of the first and second substrates and the carrying-out of the molded cell structure, and continuous automatic production without any manual work is possible.

It is sectional drawing explaining the structure of the sealing device of this invention. It is a perspective view explaining the structure of the sealing device of this invention. It is a fragmentary perspective view explaining the structure of the sealing device of this invention. It is a figure explaining the operation | movement aspect of the principal part of the sealing device of this invention. It is a figure explaining the structure of the intake / exhaust circuit of the sealing device of this invention. It is explanatory drawing of the 1st board | substrate used as a cell structure. It is explanatory drawing of the 2nd board | substrate used as a cell structure. It is a figure explaining the operation | movement aspect of the sealing device of this invention. It is a figure explaining the operation | movement aspect of the sealing device of this invention. It is a figure explaining the operation | movement aspect of the sealing device of this invention. It is a figure explaining the operation | movement aspect of the sealing device of this invention. It is a figure explaining the operation | movement aspect of the sealing device of this invention. It is a figure explaining the operation | movement aspect of the sealing device of this invention. It is a figure explaining the operation | movement aspect of the sealing device of this invention. It is sectional drawing which shows the example of the conventional sealing device.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the drawings, the same portions are denoted by the same reference numerals so that the description will not be repeated. In addition, since the embodiments described below are preferable specific examples of the present invention, various technically preferable limitations are given. However, the scope of the present invention particularly limits the present invention in the following description. Unless stated to the effect, the present invention is not limited to these embodiments.

  In FIG. 1 and FIG. 2, reference numeral 1 denotes an empty housing that is a hollow body having a first chamber CH1 inside, an opening 1a is formed on the upper surface, and a substrate carry-in window 1b is formed on an arbitrary side surface. Is formed. Further, the vacant housing 1 is provided with an intake / exhaust pipe P1 connected to an intake / exhaust circuit described later.

  A stage 2 is provided at the center of the interior of the vacant housing 1, and a rod 3 fixed to the stage 2 extends from the bottom of the vacant housing 1 to the outside, and a motor provided to the gear box 4. The rod 3 moves up and down by the driving force 5 and the stage 2 moves up and down inside the vacant housing 1. An airtight seal S is provided on the support portion of the rod 3 on the bottom surface of the vacant housing 1 so that the airtight state of this portion is maintained.

  Further, below the bottom surface of the vacant housing 1, support rods that support the four corners on the diagonal line of the first substrate (lower substrate) W <b> 1 carried into the vacant housing 1 from the lower surface. A fluid pressure cylinder 7 for moving up and down 6 is arranged and fixed. Similarly, below the bottom surface of the vacant housing 1 is a support rod provided at the tip with a holder 8a that supports the four corners of the second substrate (upper substrate) W2 carried into the vacant housing 1 from the lower surface. A fluid pressure cylinder 9 for vertically moving 8 is disposed and fixed. Note that an airtight seal S is provided on the support portion of the support rods 6 and 8 on the bottom surface of the vacant housing 1 so that the airtight state of this portion is maintained.

  The support rod 6 that supports the first substrate W1 passes through the stage 2 and moves up and down. However, the first substrate W1 is placed on the stage 2 in the widest possible range. This is due to the fact that there is no uneven pressure during molding. An alignment camera 10 is provided on the side of the stage 2 so that an image signal for performing horizontal alignment between the first substrate W1 and the second substrate W2 can be obtained.

  Next, a UV transmissive special sheet 11 is disposed on the upper surface of the vacant casing 1 so as to cover the entire range, and the UV transmissive special sheet 11 is fed out from a supply roll 12 and taken up by a take-up roll. 13 is wound up. The UV transmissive special sheet 11 is made of a material that transmits ultraviolet rays and has flexibility, for example, PET resin, and is in close contact with the upper surface of the flange 1c of the vacant housing 1, so that the airtightness of this portion is improved. Kept.

  The UV mask support frame 14 placed on the flange 1c of the vacant casing 1 on the UV transmissive special sheet 11 is a frame body having a shape substantially coincident with the outer shape of the vacant casing 1, and the flange 14a is provided inside the frame. In this way, the UV mask 15 is accommodated. The UV mask 15 is formed with a plurality of through holes 15 a for guiding a necessary amount of UV emitted from a lamp house 19, which will be described later, disposed above to the vacant housing 1. Further, the UV mask support frame 14 is provided with an intake / exhaust pipe P2 connected to an intake / exhaust circuit, which will be described later, and O-rings 16 and 17 are provided on the upper and lower surfaces of the frame to maintain airtightness. It is trying to be.

  On the upper surface of the UV mask support frame 14, a movable sealing plate 18 for covering and closing the opening 14b is placed. The movable sealing plate 18 is carried into a fixed position of the UV mask support frame 14 from the front and rear direction or the horizontal direction by a transport mechanism (not shown) and placed on the UV mask support frame 14 as shown in FIG. The pressure is applied downward by a pressurizing apparatus that omits the. Thereby, the space surrounded by the UV transmissive special sheet 11, the inner surface of the UV mask support frame 14, and the back surface of the movable sealing plate 18 becomes the second chamber CH2. Since the O-rings 16 and 17 are crushed by the pressurization by the pressurizing device, the airtightness of this portion is sufficiently maintained.

  A lamp house 19 is disposed above the movable sealing board 18. Inside the lamp house 19, a UV lamp 20 that emits ultraviolet rays sequentially toward the opening 19 a, and from the UV lamp 20. A heat ray cut filter 21 that shuts off radiant heat and a shutter 22 that can be opened and closed are housed.

  The mechanism element of the present invention is configured as described above. However, in order to achieve automation of the apparatus, it is necessary to provide the substrate carry-in window 1b of the vacant housing 1 with an open / close door. FIG. 3 shows an example of such a configuration, and as shown in the figure, an open / close door 23 covering the entire surface of the substrate carry-in window 1b is arranged so that the power is transmitted by the gear mechanism of the elevating device 24 and moves up and down. Has been.

  On the other hand, a fluid pressure tube 25 is disposed on the entire circumference of the flange portion of the substrate carry-in window 1b as shown in FIG. 4, and when the door 23 is lowered as shown in FIG. The fluid in the fluid pressure tube 25 is sucked to avoid contact with the open / close door 23. When the substrate carry-in window 1b is thus opened, the first and second substrates W1 and W2 can be carried in by the robot arms RB1 and RB2, as shown in FIG. When the loading of the first substrate W1 and the second substrate W2 is completed, the open / close door 23 is lifted as shown in FIG. 4B, and a pressurized fluid is injected into the fluid pressure tube 25 to expand it. , So that an airtight state is obtained.

  Here, the structure of the intake / exhaust circuit of the apparatus of the present invention will be described with reference to FIG. As shown in the figure, the intake / exhaust pipe P1 connected to the vacant casing 1 is connected to the atmosphere A via a valve 26a, and is connected to a vacuum pump 28 via valves 26b and 26c. On the other hand, the intake / exhaust pipe P2 connected to the UV mask support frame 14 is connected to the atmosphere A via a valve 27a, and is connected to the vacuum pump 28 via valves 27b and 27c. The pipes from the valve 26c and the valve 27c to the vacuum pump 28 are connected to each other on the way, and are connected to the vacuum pump 28 by one pipe. The valves 26c and 27c are valves for adjusting the vacuum pressure, and are provided for controlling the ultimate vacuum pressure after exhausting.

  The sealing device of the present invention is configured as described above. The first substrate W1 and the second substrate W2 are carried into the vacant housing 1 and processing steps until the cell structure 30 is completed are performed. As will be described below, since the first substrate W1 and the second substrate W2 must be prepared in advance, first, the preformed first substrate W1 and second substrate W2 are prepared. This processing mode will be described below with an example of a liquid crystal display panel.

  As shown in FIG. 6, transparent spherical spacers 31b are dispersed or photo spacers 32b are formed on at least one of the plurality of liquid crystal display regions 31a having a predetermined vertical and horizontal spacing on one surface of the first substrate W1. Thus, when the first substrate W1 and the second substrate W2 are bonded together, a set gap in the liquid crystal display region 31a between the substrates W1 and W2 is ensured. Furthermore, a plurality of alignment marks 31c for positioning the substrates W1 and W2 are provided outside the plurality of liquid crystal display areas 31a.

  On the other hand, as shown in FIG. 7, a plurality of closed annular sealing materials 32a are applied to one surface of the second substrate W2 at predetermined intervals in the vertical and horizontal directions. The sealing material 32a has both UV curable and thermosetting properties, and the cylindrical silica fiber 32b is mixed in the sealing material 32a in advance, and when the substrates W1 and W2 are bonded together, A set gap in the seal portion between both the substrates W1 and W2 can be secured.

  Further, a closed annular sealing material 32c is applied so as to surround the entire area where the plurality of sealing materials 32a are applied. Similarly to the sealing material 32a, a cylindrical silica fiber 32b is mixed in the sealing material 32c in advance so that a set gap can be secured in the seal portion between the substrates W1 and W2 when the substrates W1 and W2 are bonded together. I have to. Note that the silica fiber 32b mixed in the sealing material 32a and the sealing material 32c has the same material, shape and size.

  Further, a plurality of alignment marks 32d and temporary fixing UV curable resins 32e are provided outside the closed annular seal member 32c. A predetermined amount of liquid crystal material 32f is dropped at a plurality of positions in a region surrounded by each closed annular sealing material 32a by a liquid quantitative discharge device such as a dispenser.

  In the case where the formation of the organic EL display panel is targeted in the apparatus of the present invention, the one in which the organic EL layer is formed on either the first W1 or the second substrate W2 is used. Other substrates can be molded as sealing substrates.

  The plurality of first substrates W1 and second substrates W2 preformed as described above are stored in a carry-in device (not shown) and ready for molding. Each mechanism element shown in FIG. 1 in such a premise is in an initial state in which a processing step is started, and the support rod 6 of the first substrate W1, the support rod 8 of the second substrate W2, and the stage 2 are lowered most. In position. When the operation of the apparatus is started, first, the fluid pressure cylinder 7 is actuated as shown in FIG. 8A, and the support rod 6 is raised as shown in FIG. At this time, the valve 27b is opened, the second chamber CH2 is evacuated, and the UV transmission special sheet 11 is in close contact with the UV mask 15.

  Next, as shown in FIG. 4 (A), the first substrate W1 is carried in by the robot arm RB1 from the opened substrate carry-in window 1b, and is shown on the tip 6a of the support rod 6 as shown in FIG. 8 (B). Is placed as follows. Alternatively, the robot arm RB1 may carry in the first substrate W1 first, and then the fluid pressure cylinder 7 may be operated to raise the support rod 6.

  When the first substrate W1 is placed on the tip 6a of the support rod 6 by the above process, the support rod 6 is lowered as shown in FIG. 8C, and the position where the first substrate W1 approaches the stage 2 Placed in. When the first substrate W1 is in the arrangement state shown in FIG. 8C, the fluid pressure cylinder 9 operates to raise the support rod 8 as shown in FIG. 8D.

  When this state is reached, the second substrate W2 is loaded by the robot arm RB2, and the four corners of the second substrate W2 are supported and placed by the holder 8a at the tip of the support rod 8 as shown in FIG. It will be in the state. In this case as well, the second substrate W2 may be carried in by the robot arm RB2 first, and then the fluid pressure cylinder 9 may be operated to raise the support rod 8. When the second substrate W2 is carried in, the alignment camera 10 detects the alignment mark 31c of the first substrate W1 and the alignment mark 32d of the second substrate W2, and fine adjustment is performed by the robot arm RB2 based on this image signal. Horizontal alignment of both the substrates W1 and W2 is possible.

  When the loading of the first substrate W1 and the second substrate W2 is completed as described above, the open / close door 23 is raised, and the pressurized fluid is injected into the fluid pressure tube 25 as shown in FIG. By expanding, this part becomes airtight, and the first chamber CH1 is sealed. In this state, the valve 26b is opened, and evacuation of the first chamber CH1 is started as shown in FIG. 8F, and the degree of vacuum is increased to about 1 Pa (Pascal) by adjusting the valve 26c. To. At this time, the valve 27c is adjusted so that the second chamber CH2 does not become a negative pressure so that the UV transmissive special sheet 11 is not pulled into the first chamber CH1 side.

  The high vacuum level of the first chamber CH1 in this way is significant particularly when an organic EL display panel is manufactured. Oxygen, moisture, and air in the first chamber CH1 are exhausted along with the exhaust. Impurities can be removed and the yield can be increased.

  When the exhaust of the first chamber CH1 is completed at a high degree of vacuum by the above process, the fluid pressure cylinder 7 is actuated as shown in FIG. 8 (G), and the sealing rod 32c of the second substrate W2 is moved to the sealing material 32c by the support rod 6. Temporary fixing is performed by raising to the extent that one substrate W1 contacts. At the same time, the degree of vacuum in the first chamber CH1 is increased by adjusting the valve 26c to about 50 Pa, and the valve 29a is opened to introduce the inert gas G sufficiently dried such as argon or nitrogen gas from the gas supply means 29. To do.

  The process of FIG. 8H shows a state in which the degree of vacuum of the first chamber CH1 is increased to about 100 Pa while the stage 2 is further raised. At this time, the fluid pressure cylinders 7 and 9 are operated, and the support rods 6 and 8 return to the initial positions. In the process of FIG. 8I, the stage 2 is raised until it reaches the highest level, and the valve 26c is adjusted and increased until the vacuum degree of the first chamber CH1 reaches about 50 kPa.

  In the process of FIG. 8J, the valve 27b is closed while the degree of vacuum in the first chamber CH1 is maintained at about 50 kPa, and the valve 27a is opened to introduce the atmosphere A into the second chamber CH2. Indicates the state. As a result, when the atmosphere A fills the second chamber CH2, the atmospheric pressure is about 101 kPa. Therefore, the inside of the first chamber 1 becomes a negative pressure, and the positive pressure of the second chamber CH2 becomes the UV transmission special sheet 11. Is pressed down through the through-hole 15a, and is applied in close contact with the entire surface of the second substrate W2.

  The process of FIG. 8K shows a state where the movable sealing plate 18 is removed from the upper surface of the UV mask support frame 14 by the transport mechanism. Even if the movable sealing plate 18 is removed, UV transmission is performed. Since the upper surface of the special sheet 11 is still at atmospheric pressure, the negative pressure state in the first chamber CH1 is maintained. Accordingly, even in this state, the pressure applied to the second substrate W2 by the UV transmitting special sheet 11 does not change.

  Thus, when atmospheric pressure is applied to the second substrate W2, the second substrate W2 moves toward the first substrate W1, and the gap between the substrates W1 and W2 is reduced. If this is a case where a liquid crystal display panel is formed, the gap (cell gap) between the substrates W1 and W2 is determined by the silica fiber 32b and the spacer 31b and approaches, for example, about 5 μm. A region surrounded by both the substrates W1 and W2 and the sealing material 32a is filled with a liquid crystal material 32f.

  Next, in the process of FIG. 8 (L), the required amount of light determined by the UV mask 15 of the UV light through the heat ray cut filter 21 of the UV lamp 20 that has been opened for a predetermined time and turned on in advance is UV transmitted. The second sheet W2 is irradiated through the special sheet 11. Thereby, the sealing materials 32a and 32c located between the first substrate W1 and the second substrate W2 are cured, and the cell structure 30 having a predetermined cell gap is completed.

  Thus, when the cell structure 30 is completed, the valve 26b is closed and the valve 26a is opened, whereby the atmosphere A is introduced into the first chamber CH2. Thereby, as shown in FIG. 8 (M), the adhesion of the UV transparent special sheet 11 to the second substrate W2 is released, and the UV transparent special sheet 11 returns to the initial position. Then, the stage 2 is lowered to the initial position, the open / close door 23 is moved by the elevating device 24, and the cell supported by the holder 8 a of the support rod 8 raised from the substrate carry-in window 1 b of the vacant housing 1. The structure 30 can be taken out by the robot arm RB1 or RB2.

  As described above in detail, in the sealing device of the present invention, the opening on the upper surface of the vacant housing 1 is covered with the UV transmission special sheet 11 and the UV mask support frame 14 containing the UV mask 15 is placed. In addition, a movable sealing plate 18 that covers and closes the opening of the UV mask support frame 14 is placed. Since the substrate carry-in window 1b is formed in the vacant casing 1 and the opening / closing door is disposed on the front surface, the vacant casing 1 can be miniaturized as much as possible. Exhaust treatment for forming can be performed quickly, production efficiency can be improved, and a highly versatile sealing device corresponding to production of a liquid crystal display panel or an organic EL display panel can be obtained. .

DESCRIPTION OF SYMBOLS 1 ... Empty housing 2 ... Stage 3 ... Rod 4 ... Gear box 5 ... Motor 6 ... Support rod 7 ...・ ・ ・ Fluid pressure cylinder 8 ・ ・ ・ Support rod 9 ・ ・ ・ Fluid pressure cylinder 10 ・ ・ ・ Alignment camera 11 ・ ・ ・ UV transmission special sheet 12 ・ ・ ・ Supply roll 13 ・ ・ ・・ Take-up roll 14... UV mask support frame 15... UV mask 16... O-ring 17 ... O-ring 18. 20 ... UV lamp 21 ... Heat ray cut filter 22 ... Shutter 23 ... Open / close door 24 ... Lifting device 25 ... Fluid pressure tube 26a, 26b, 26c ... .... Valve 27a, 27b, 27c ... Bed 28 ... vacuum pump 30 ... cell structure W1 ... first substrate W2 ... second substrate CH1 · · · first chamber CH2 · · · second chamber

Claims (6)

An opening housing is formed on the upper surface and has an air intake / exhaust port, and a vacant housing in which a stage, a support rod for the lower substrate, and a support rod for the upper substrate are provided to be movable up and down,
A sheet member having flexibility and translucency covering the opening of the vacant housing;
A UV mask support frame having an outer shape substantially matching the vacant housing and having an intake / exhaust port; and a UV transmission mask accommodated therein and placed on the sheet member;
A movable sealing plate that covers the opening on the upper surface of the UV mask support frame;
A light source portion disposed above the movable sealing board,
When a UV mask support frame and a movable sealing plate are disposed on the vacant housing via a sheet member, the lower vacant housing having the sheet member as a boundary serves as a first chamber that can be decompressed. The sealing device is characterized in that the interior surrounded by the upper UV mask support frame and the movable sealing board with the sheet member as a boundary is a second chamber capable of depressurization.   A first support rod configured to support the first substrate in the vacant housing so as to be movable up and down; a second support rod configured to support the second substrate and configured to be movable up and down; and a cell The sealing device according to claim 1, further comprising a stage on which the structure is placed so that the structure can be moved up and down.   The sealing device according to claim 2, wherein the first support rod is configured to move up and down in the stage.   The sealing device according to claim 2, wherein a drive mechanism for raising and lowering the first and second support rods and the stage is configured below the bottom surface of the empty housing.   The sealing device according to claim 2, wherein an opening / closing door is provided on an arbitrary side surface of the vacant housing so that the airtight state of the first chamber can be maintained.   The sealing apparatus according to claim 2, wherein an alignment camera for adjusting alignment between the first substrate and the second substrate is provided on a side portion of the stage.

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