JP4949172B2 - Light irradiation device - Google Patents

Description

  The present invention relates to a light irradiation apparatus having a configuration in which a light-shielding mask is held by a mask holding member made of a light transmissive member such as glass, and more specifically, is used for a flat panel display (FPD) such as liquid crystal. The present invention relates to a light irradiation device used in a bonding process of two substrates.

Conventionally, in this type of light irradiation apparatus, light from a light source provided above a mask holding member is disposed below the light shielding mask via the mask holding member and a light shielding mask held by suction on the lower surface thereof. The bonded substrate is irradiated (see, for example, Patent Document 1). In such a mask holding member of the light irradiation apparatus, only the peripheral edge of the mask holding member is supported by the mask stage in order to secure a portion through which light from the light source passes. Thereby, the holding surface holding the light-shielding mask can be widened on the lower surface of the mask holding member.
JP 2006-66585 A

  However, in the light irradiation apparatus as described above, since the mask holding member is supported at the peripheral portion, there arises a problem that the holding member is bent by its own weight. When the mask holding member bends, it becomes difficult to make the light shielding mask adhere to the lower surface of the mask holding member, and it becomes difficult to suck and hold. Further, since the light shielding mask is sucked and held in a state of being bent following the mask holding member, a large gap (proximity gap) between the light shielding mask and the bonded substrate is taken into consideration. Must be set to a value. In a state where the proximity gap is enlarged, it is difficult to sharply irradiate the bonded substrate, and there is a possibility that light is irradiated even on a portion where light shielding is desired.

  In such a light irradiation apparatus used for laminating a flat panel display that tends to increase in size in recent years, the shading mask and the mask holding member become large with an increase in the panel size. It will appear particularly prominently.

  The present invention has been made to solve the above-mentioned problems, and its object is to irradiate light to an object to be irradiated through a mask holding member and a light-shielding mask tightly held by the mask holding member. In the apparatus, the mask holding member is flattened.

  In order to solve the above-mentioned problems, the invention according to claim 1 is directed to an irradiated plate disposed under the light shielding mask, wherein the light shielding mask is closely held on the lower surface of the mask holding member whose peripheral edge is supported. A light irradiation device for irradiating light from a light source provided above the mask holding member through the mask holding member and the light shielding mask, and is connected to a portion of the mask holding member other than the peripheral portion. In addition, the gist of the present invention is that a lifting member for lifting the connecting portion is provided.

  In this invention, the lifting member is connected to a portion of the mask holding member other than the peripheral portion that may be bent downward by its own weight, and the connecting member is pulled upward by the lifting member, so that the mask holding member is flattened. can do.

  According to a second aspect of the present invention, in the light irradiation apparatus according to the first aspect, the lifting member includes a holding portion provided above the mask holding member and a holding portion that is suspended from the holding portion and has a lower end. The gist of the present invention is that the mask holding member is connected to a suspended portion.

  In the present invention, the lifting member includes a holding portion provided above the mask holding member and a hanging portion that is suspended and held by the holding portion and whose lower end is connected to the mask holding member. The mask holding member can be flattened by pulling upward the connecting portion with the suspended portion.

  According to a third aspect of the present invention, in the light irradiation apparatus according to the second aspect, the light shielding mask is replaceable, and the hanging portion is common to a plurality of types of light shielding masks that can be held by the mask holding member. The gist is that it is provided above the light-shielded region.

  In this invention, when the light shielding mask is replaced with a mask having a different mask pattern, the suspended portion blocks light to be irradiated to the irradiated object through the light shielding mask among the light emitted from the light source. Can be prevented.

The gist of the invention according to claim 4 is that, in the light irradiation device according to claim 2 or 3, the suspended portion is provided so as to be movable in the horizontal direction.
According to the present invention, when the hanging part is disposed above the light transmitting area due to a shift at the time of replacement of the light shielding mask, the installation position of the hanging part is moved above the area shielded by the light shielding mask. It becomes possible to make it. Further, even when a light shielding mask having a new mask pattern is used, the suspended portion can be moved above the light shielded region.

  According to a fifth aspect of the present invention, in the light irradiation device according to any one of the second to fourth aspects, the hanging portion is a wire, and the wire is attached to the lifting member upward. The gist is that a biasing member is provided.

In this invention, it is suppressed that a mask holding member bends downward by the heat | fever elongation etc. of a wire.
The invention according to claim 6 is the light irradiation apparatus according to any one of claims 2 to 4, wherein the suspended portion is connected to the mask holding member by vacuum suction.

  In this invention, the mask holding member can be easily attached to and detached from the suspended portion. Further, since it is not necessary to provide a connecting member to the lifting member on the mask holding member, when the lifting member is configured to be movable in the horizontal direction, the mask holding member is used as it is, and the connection position (suction) Position) can be changed.

  Invention of Claim 7 is the light irradiation apparatus of any one of Claims 2-6, WHEREIN: The said light source is provided so that a movement in a horizontal direction is possible above the said holding | maintenance part, The gist is that an auxiliary light source that moves together with the light source and irradiates a position below the holding portion is provided.

  In the present invention, the auxiliary light source complementarily irradiates the portion that is difficult to be irradiated by the holding portion provided below the main light source, so that the shortage of light from the main light source can be compensated for, and as a result Irradiation unevenness can be suppressed.

  Therefore, according to the above-described invention, the mask holding member can be flattened in the light irradiating apparatus that irradiates the irradiated object with light through the mask holding member and the light-shielding mask tightly held by the mask holding member. it can.

(First embodiment)
Hereinafter, a first embodiment in which the present invention is embodied in an ultraviolet irradiation device used in a panel manufacturing apparatus for manufacturing a liquid crystal display (LCD) panel will be described with reference to the drawings.

  The ultraviolet irradiation device shown in FIG. 1 irradiates ultraviolet rays onto a sealing material (not shown) made of an ultraviolet curable resin interposed between bonded substrates W (upper center in the drawing) constituting the liquid crystal panel. In order to cure the sealing material. The bonded substrate W with the sealing material interposed is formed by a sealing material application process, a liquid crystal dropping process, and a pressing process in the panel manufacturing apparatus. By these steps, a sealing material is formed in a frame shape between the bonded substrates W along the plate surface, and dropped liquid crystal (not shown) exists in the frame of the sealing material.

  As shown in FIG. 1, a work stage portion 11 for placing a bonded substrate W transported after the pressing step is provided on a base portion 1 having a flat surface. The work moving mechanism 12 at the lower stage of the work stage unit 11 is provided so as to be movable in a direction along the upper surface of the base 1 and is provided to be rotatable in the horizontal direction with respect to the upper surface of the base 1. An upper stage of the work moving mechanism 12 is provided with a drive unit 13 for moving the work stage unit 11 up and down. A pair of lift pins 14 is erected on the drive unit 13, and a support base 15 that straddles the lift pins 14 is fixed at an intermediate position in the vertical direction of the lift pins 14. Between each lift pin 14 in the drive part 13, the columnar movable part 16 inserted in the support stand 15 is provided so that it can move to an up-down direction.

  A work stage main body 17 as a mounting table is fixed to the upper end of the movable portion 16, and a flat mounting surface 17 a is formed on the upper surface of the work stage main body 17. The work stage main body 17 moves and rotates in a plane with the operation of the work moving mechanism 12 and moves up and down with the operation of the movable portion 16. The work stage main body 17 is formed with through holes 17b through which the lift pins 14 are inserted, and through holes 17c are formed at both sides of the through holes 17b. In addition, the opening lower end of the through-hole 17c is obstruct | occluded with the transparent plate 17d. Further, the lower end of the through hole 17c and the transparent plate 17d and the gap between the insertion hole 17b and the lift pin 14 are sealed. During the irradiation processing, the bonded substrate W is placed on the placement surface 17a of the work stage main body 17 as described above.

  The mask stage 21 erected on the base 1 around the work stage unit 11 has an upper end bent inward, and a rectangular opening 21a is formed at the upper end. The mask stage 21 is provided so that the bonded substrate W can be inserted from the side and placed on the work stage main body 17. In addition, an alignment camera 21c for aligning the work stage unit 11 is provided on each of the pair of support units 21b provided so as to extend inward at the intermediate position in the vertical direction of the mask stage 21. It is fixed at a position directly below.

  On the upper part of the mask stage 21, a mask holding member 22 made of a rectangular plate-like high transmission glass is detachably fixed so as to cover the opening 21a. The mask holding member 22 is formed in a size slightly larger than the opening 21a in the horizontal direction, and is supported by the mask stage 21 over the entire peripheral edge portion 22a. In the present embodiment, the mask holding member 22 has a side length of 2000 mm or more and a plate thickness of 15 mm to 20 mm in plan view. In FIG. 1, the thickness of the mask holding member 22 is exaggerated for convenience of explanation.

  A suction groove 23 having a frame shape is formed on the lower surface 22b of the mask holding member 22, and a vacuum pump (not shown) is connected to the mask holding member 22 so that the inside of the suction groove 23 can be decompressed. . On the lower surface 22 b of the mask holding member 22, a plate-shaped light shielding mask 24 disposed so as to cover the entire suction groove 23 is sucked and held by decompression of the suction groove 23. The light shielding mask 24 is formed by forming a predetermined mask pattern on the lower surface of a light transmissive plate member. Such a light shielding mask 24 is prepared in a plurality of types according to the type of the bonded substrate W, and can be exchanged according to a change in the type of the bonded substrate W.

  A lamp house 25 supported and fixed to a housing (not shown) is disposed above the mask holding member 22, and a lamp 26 as a light source (ultraviolet light source) is attached in the lamp house 25. The ultraviolet rays emitted downward from the lamp 26 are partly shielded by the light shielding mask 24 so that only the sealing material of the bonded substrate W is irradiated with the ultraviolet rays.

  A fixed base 31 as a holding portion supported by the housing above the lamp house 25 is provided with a fixing portion 32 for fixing a wire 40 as a suspended portion. Note that six 2 × 3 fixing portions 32 (only two are shown in FIG. 1) are provided above the mask holding member 22. The fixed portion 32 is provided with a compression coil spring 33 as an urging member whose lower end is in contact with the fixed base 31, and the upper end of the spring 33 is in contact with an engaging portion 34 provided so as to be movable in the vertical direction. Yes. The compression coil spring 33 is interposed between the fixed base 31 and the engaging portion 34 in a compressed state.

  The upper ends of the wires 40 are fixed to the engaging portions 34 of the fixing portions 32, and the wires 40 are suspended through the fixing base 31 and the lamp house 25. The lower ends of the wires 40 are detachably fixed to the connecting portions 35 that are bonded and fixed to the upper surface of the mask holding member 22 via the rings 36. The fixed base 31 and the wire 40 constitute a lifting member. Each connecting portion 35 is provided at a position directly below each fixing portion 32, and is provided at a portion other than the peripheral edge portion 22 a of the mask holding member 22. Each connecting portion 35 is provided symmetrically with respect to the horizontal center of the mask holding member 22. The length of the wire 40 is set in consideration of the distance between the fixed portion 32 and the connecting portion 35, and the pulling force by the wire 40 is set to a size that maintains the horizontal state of the mask holding member 22. Has been.

  Further, the wire 40 and the connecting portion 35 are provided above a region that is shielded in common in the plurality of types of light shielding masks that can be held by the mask holding member 22. As a result, when the light shielding mask 24 is replaced with one having a different mask pattern, the ultraviolet rays to be applied to the sealing material of the bonded substrate W through the light shielding mask 24 out of the light emitted from the lamp 26 are changed to the wire 40. And it is prevented that the connection part 35 interrupts | blocks.

  As described above, the mask holding member 22 that holds the light-shielding mask 24 is supported by the mask stage 21 at the peripheral portion 22a, and is moved upward by the wire 40 suspended from the fixed portion 32 to the connecting portion 35. The pulling force is given. As a result, the mask holding member 22 is flattened without the portions other than the peripheral edge portion 22a being bent downward by its own weight. Further, the wire 40 fixed to the engaging portion 34 is given an upward pulling force by the compression coil spring 33. Thereby, when the wire 40 extends in the vertical direction due to thermal expansion or the like, the spring 33 pulls the wire 40 upward, so that the mask holding member 22 is prevented from bending downward.

  FIGS. 2A and 2B are schematic views showing the distribution of the downward deflection of the mask holding member in the conventional ultraviolet irradiation device and the ultraviolet irradiation device of the present embodiment, respectively. In FIG. 2A and FIG. 2B, the state of bending is shown with the same gradation, but their scales are different. As shown in FIG. 2 (a), in the conventional ultraviolet irradiation device in which only the peripheral edge portion 41a of the mask holding member 41 is supported, the downward deflection amount of the mask holding member 41 (the deformation amount with reference to the peripheral edge portion 41a). ) Gradually increases from the peripheral portion 41a to the center, and the amount of deflection is maximum at the center portion of the mask holding member 41. When a mask holding member (one side of 2000 mm or more, plate thickness of 15 mm to 20 mm) is supported with respect to a planar size as in the present embodiment, the maximum deflection amount ranges from about 6 to 7 mm.

  On the other hand, as shown in FIG. 2B, in the ultraviolet irradiation device of the present embodiment, although it is slightly bent from the peripheral portion 22a of the mask holding member 22 to the inside, the amount of bending approaches the wire connecting portion 35a. The connecting portion 35a has the same height as the peripheral portion 22a (the amount of deflection is 0 mm). In FIG. 2B, the darkest gradation portion is the portion with the largest deflection amount, but the deflection amount is about 0.1 to 0.2 mm, and the mask holding member 22 is in a substantially horizontal state. It is kept.

  When the light shielding mask 24 is attracted and held on such a mask holding member 22, the work stage body 17 on which the light shielding mask 24 is placed is raised so that the light shielding mask 24 contacts the lower surface 22 b of the mask holding member 22. After the contact, the inside of the suction groove 23 is depressurized by the vacuum pump. As a result, the air remaining between the light shielding mask 24 and the mask holding member 22 is sucked into the suction grooves 23 and the light shielding mask 24 is sucked and held. At this time, as described above, since the bending of the mask holding member 22 is suppressed by the lifting of the wire 40, the light shielding mask 24 is easily adhered to the lower surface 22b of the mask holding member 22, and as a result, the light shielding mask 24 is removed. It is easy to adsorb and hold.

  When the mask holding member 22 is attached or detached, the work stage main body 17 is lifted and the mounting surface 17a is brought into contact with the lower surface 22b of the mask holding member 22, so that the work stage main body 17 is brought into contact with the mask holding member. 22 is supported from below.

Next, characteristic effects of the present embodiment will be described.
(1) A wire 40 as a suspended portion is connected to a connecting portion 35 fixed to a portion other than the peripheral edge portion 22 a of the mask holding member 22, and the connecting portion 35 is lifted by the wire 40. Thereby, since the connection part 35 in the mask holding member 22 is pulled upward by the wire 40, the mask holding member 22 can be flattened.

  (2) The light shielding mask 24 is replaceable, and the wire 40 and the connecting portion 35 are provided above a region that is shielded in common among a plurality of types of light shielding masks that can be held by the mask holding member 22. For this reason, when the light shielding mask 24 is replaced with one having a different mask pattern, the ultraviolet rays to be applied to the sealing material of the bonded substrate W through the light shielding mask 24 out of the light emitted from the lamp 26 are supplied to the wire 40. And it can prevent that the connection part 35 interrupts | blocks.

  (3) Since the fixed portion 32 is provided with a compression coil spring 33 as an urging member for urging the wire 40 upward, the mask holding member 22 is prevented from being bent downward due to thermal expansion of the wire. The

  (4) Since the fixed base 31 for holding the wire 40 is provided above the lamp 26, the fixed base 31 is prevented from blocking the ultraviolet rays emitted from the lamp 26.

(5) Since the mask holding member 22 is detachably connected to the wire 40, the mask holding member 22 can be easily replaced when the mask holding member 22 deteriorates.
In addition, you may change the said 1st Embodiment as follows.

  In the above-described embodiment, the wire 40 is used as the suspended portion. However, for example, a configuration as shown in FIG. As shown in FIG. 3, a vacuum tube 52 is held in a fixed portion 51 provided so as to be movable in a horizontal direction at a predetermined position on a fixed base 31 as a holding portion. The vacuum tube 52 has an upper end connected to a vacuum pump (not shown) and a lower end connected to the vacuum pad 53. The vacuum tube 52 and the vacuum pad 53 constitute a suspended portion. The fixing portion 51 (elevating means) is configured to be able to move up and down the vacuum tube 52 and the vacuum pad 53. While the vacuum pad 53 is in contact with the upper surface of the mask holding member 22, the inside thereof is depressurized by a vacuum pump, thereby holding the mask holding member 22 by suction. In addition, it is possible to apply a force in the vertical direction to the connecting portion between the vacuum pad 53 and the mask holding member 22 by moving the vacuum tube 52 and the vacuum pad 53 up and down by the fixing portion 51 as the lifting means. . According to this configuration, the vacuum tube 52 and the vacuum pad 53 constituting the suspended portion are connected to the mask holding member 22 by vacuum suction, so that the mask holding member 22 can be easily attached and detached. Further, since the fixing portion 51 that holds the vacuum tube 52 is provided so as to be movable in the horizontal direction, the vacuum tube 52 and the vacuum pad 53 are disposed above the light transmitting region due to a shift or the like when the light shielding mask 24 is replaced. In such a case, it is possible to move the installation position above the area shielded by the light shielding mask 24. Even when a light shielding mask having a new mask pattern is used, the vacuum tube 52 and the vacuum pad 53 can be moved above the light shielded region. Further, it is not necessary to provide a member for connecting to the lifting member on the upper surface of the mask holding member 22. In the above embodiment, even if the fixing portion 32 is provided so as to be movable in the horizontal direction and the connecting portion 35 is provided on the upper surface of the mask holding member 22 so as to be detachable by vacuum suction, the same effect as described above can be obtained. It is done. Further, for example, when removing the light shielding mask 24 sucked and held by the mask holding member 22, it is possible to easily peel the light shielding mask 24 by flexing the mask holding member 22 in the vertical direction.

(Second Embodiment)
Hereinafter, a second embodiment of the present invention will be described with reference to the drawings.
The ultraviolet irradiation device of the present embodiment is of a lamp scan type that scans the light source in the horizontal direction, and is changed with a focus on the configuration of the light source and the holding unit as compared with the ultraviolet irradiation device of the first embodiment. . Therefore, hereinafter, the light source and the holding unit will be mainly described, and the same components as those in the first embodiment will be denoted by the same reference numerals and detailed description thereof will be omitted.

  As shown in FIGS. 4A and 4B, a columnar holding beam 62 as a holding portion is spanned and fixed to a pair of support portions 61 provided on the upper surface of the mask stage 21. A fixed portion 63 is fixed at a predetermined position on the upper surface of the holding beam 62, and an upper end of a wire 64 as a suspended portion suspended through the holding beam 62 is fixed to the fixed portion 63. Similarly to the first embodiment, the lower end of the wire 64 is detachably fixed via a ring 36 to a connecting portion 35 that is bonded and fixed to the upper surface of the mask holding member 22. As in the first embodiment, the peripheral portion 22 a of the mask holding member 22 is supported by the mask stage 21, and an upward pulling force is applied to the connecting portion 35 by a wire 64. Thereby, the bending by the dead weight of the mask holding member 22 is suppressed.

  FIG. 4B is a schematic diagram in which the ultraviolet irradiation device of FIG. 4A is inverted by 90 ° in the horizontal direction. As shown in FIG. 4B, a lamp house 72 is stretched over the pair of scanning stages 71 provided on the upper surface of the mask stage 21 so as to cover the upper side and the side of the holding beam 62. The extending direction of the lamp house 72 is orthogonal to the extending direction of the holding beam 62, and the lamp house 72 is movable in the direction perpendicular to the plane of the paper in FIG. 4B (left and right direction in FIG. 4A). It is configured. A lamp 73 as a light source (ultraviolet light source) is provided in the lamp house 72, and the ultraviolet light emitted from the lamp 73 is pasted together via the mask holding member 22 and the light shielding mask 24. The substrate W (see FIG. 1) is irradiated. A support portion 74 extending downward is fixed to the lamp house 72, and an auxiliary lamp 75 as an auxiliary light source is provided at the lower end thereof. The auxiliary lamp 75 is provided so as to irradiate a portion below the holding beam 62.

  At the time of ultraviolet irradiation processing on the bonded substrate W, the lamp house 72 emits ultraviolet rays from the lamp 73 and the auxiliary lamp 75 while scanning in the horizontal direction (from right to left in FIG. 4A). The auxiliary lamp 75 moves in the horizontal direction together with the lamp 73. At this time, since the auxiliary lamp 75 complementarily irradiates the portion that is difficult to be irradiated with the ultraviolet rays emitted from the lamp 73 by the holding beam 62, the shortage of the light from the lamp 73 can be compensated. As a result, uneven irradiation can be suppressed.

Although the ultraviolet irradiation device of the present embodiment is slightly different from the ultraviolet irradiation device of the first embodiment, it has the effects described in the first embodiment.
In addition, you may change each said embodiment as follows.

In the first embodiment, the compression coil spring 33 is provided as a biasing member that biases the wire 40 upward. However, the present invention is not limited to this.
-In the said 1st Embodiment, although six lifting members (wire 40) were provided, it is not limited to this, For example, you may provide 1-5, or 7 or more.

-In above-mentioned 2nd Embodiment, although the fixing | fixed part 63 was fixed to the holding beam 62, you may provide it so that a movement in a horizontal direction is possible.
In the second embodiment, the wire 64 is used as the suspended portion, but the vacuum tube 52 and the vacuum pad 53 (see FIG. 3) as described above may be used.

  In each of the above embodiments, the connecting portion 35 is bonded and fixed to the upper surface of the mask holding member 22, but is not limited to this, and may be suction fixed, for example. According to this configuration, the installation position of the connecting portion 35 on the upper surface of the mask holding member 22 can be easily changed.

  In each of the above embodiments, the mask stage 21 has the opening 21a formed at the top thereof and is supported over the entire peripheral edge portion 22a of the mask holding member 22. However, the present invention is not particularly limited thereto. The stage 21 may be provided on the four sides around the mask holding member 22 to partially support the peripheral portion 22a of the mask holding member 22.

In each of the above embodiments, the peripheral edge portion 22a of the mask holding member 22 is supported by the mask stage 21. However, the present invention is not limited to this, and may be suspended support, for example.
In each of the above embodiments, the mask holding member 22 has a plate-like rectangle. However, for example, a plate-like circle may be used. Further, the size of the mask holding member 22 is not limited to the above embodiments.

  In each of the above embodiments, the present invention is applied to an ultraviolet irradiation device used in a panel manufacturing apparatus for manufacturing a liquid crystal display panel. However, the present invention is not limited to this, and a panel manufacturing apparatus for a flat panel display other than liquid crystal may be used. The present invention may be applied to a light irradiation device that emits, for example, visible light other than ultraviolet rays.

Next, technical ideas that can be grasped from the above embodiments and other examples will be described below.
(A) Elevating means for elevating the lifting member to apply a vertical force to the mask holding member is provided.

  According to this configuration, for example, when removing the light shielding mask sucked and held by the mask holding member, it is possible to easily peel the light shielding mask by flexing the mask holding member in the vertical direction.

Schematic which shows the ultraviolet irradiation device of 1st Embodiment. (A) The schematic diagram which shows the bending of the mask holding member in the conventional ultraviolet irradiation device, (b) The schematic diagram which shows the bending of the mask holding member in the ultraviolet irradiation device of 1st Embodiment. Schematic which shows the ultraviolet irradiation device of another example. (A) (b) Schematic which shows the ultraviolet irradiation device of 2nd Embodiment.

Explanation of symbols

  W: Bonded substrate as irradiated plate, 22: Mask holding member, 22a: Peripheral part, 24: Light shielding mask, 26, 73 ... Lamp as light source, 31 ... Fixed base as holding part constituting lifting member , 32 ... fixing part, 33 ... compression coil spring as urging member, 35 ... connecting part, 40, 64 ... wire as suspension part, 51 ... fixing part, 52 ... vacuum tube constituting suspension part, 53 ... suspension part A vacuum pad constituting 62, a holding beam as a holding part constituting the lifting member, 75 ... an auxiliary lamp as an auxiliary light source.

Claims (7)

A light-shielding mask is held in close contact with the lower surface of the mask-holding member whose peripheral edge is supported, and the mask is held from a light source provided above the mask-holding member with respect to an irradiated plate disposed below the light-shielding mask. A light irradiation device for irradiating light through a member and the light shielding mask,
A light irradiation apparatus comprising: a lifting member that is connected to a portion of the mask holding member other than the peripheral portion and lifts the connection portion. In the light irradiation apparatus of Claim 1,
The lifting member comprises a holding portion provided above the mask holding member, and a hanging portion which is suspended and held by the holding portion and whose lower end is connected to the mask holding member. apparatus. In the light irradiation apparatus of Claim 2,
The shading mask is replaceable,
The light irradiating apparatus according to claim 1, wherein the hanging portion is provided above a region that is commonly shielded from light by a plurality of types of light shielding masks that can be held by the mask holding member. In the light irradiation apparatus of Claim 2 or 3,
The hanging portion is provided so as to be movable in the horizontal direction. In the light irradiation apparatus of any one of Claims 2-4,
The hanging portion is a wire;
The light irradiation apparatus according to claim 1, wherein the lifting member is provided with a biasing member that biases the wire upward. In the light irradiation apparatus of any one of Claims 2-4,
The light irradiation apparatus, wherein the suspended portion is connected to the mask holding member by vacuum suction. In the light irradiation apparatus of any one of Claims 2-6,
The light source is provided so as to be movable in the horizontal direction above the holding portion,
A light irradiation apparatus comprising an auxiliary light source that moves together with the light source and irradiates a position below the holding unit.

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