JP5259842B2 - 光素子 - Google Patents
光素子 Download PDFInfo
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- JP5259842B2 JP5259842B2 JP2011551653A JP2011551653A JP5259842B2 JP 5259842 B2 JP5259842 B2 JP 5259842B2 JP 2011551653 A JP2011551653 A JP 2011551653A JP 2011551653 A JP2011551653 A JP 2011551653A JP 5259842 B2 JP5259842 B2 JP 5259842B2
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
- G02F1/2257—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure the optical waveguides being made of semiconducting material
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/0206—Substrates, e.g. growth, shape, material, removal or bonding
- H01S5/021—Silicon based substrates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/12—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/3027—IV compounds
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12097—Ridge, rib or the like
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/12178—Epitaxial growth
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/212—Mach-Zehnder type
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/218—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference using semi-conducting materials
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/12—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2202/00—Materials and properties
- G02F2202/06—Materials and properties dopant
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2202/00—Materials and properties
- G02F2202/09—Materials and properties inorganic glass
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2202/00—Materials and properties
- G02F2202/10—Materials and properties semiconductor
- G02F2202/105—Materials and properties semiconductor single crystal Si
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/06—Polarisation independent
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/04—Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
- H01S5/042—Electrical excitation ; Circuits therefor
- H01S5/0421—Electrical excitation ; Circuits therefor characterised by the semiconducting contacting layers
- H01S5/0422—Electrical excitation ; Circuits therefor characterised by the semiconducting contacting layers with n- and p-contacts on the same side of the active layer
- H01S5/0424—Electrical excitation ; Circuits therefor characterised by the semiconducting contacting layers with n- and p-contacts on the same side of the active layer lateral current injection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
- H01S5/3202—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures grown on specifically orientated substrates, or using orientation dependent growth
Description
2 二酸化シリコン膜
3 単結晶シリコン膜
4 ノッチ
5 二酸化シリコン膜
6 シリコン光導波路コア
7 シリコン光導波路クラッド
8 変調部シリコン光導波路コア
9 二酸化シリコン・ハード・マスク
10 開口部
11 薄膜単結晶シリコン
12 p型拡散層電極
13 n型拡散層電極
14 TiN電極
15 Al電極
16 テーパー型光結合部
17 切断線
18 逆テーパー型光結合部
19 有機光導波路
20 薄膜p型拡散層
21 薄膜n型拡散層
22 二股分岐部
23 急峻曲げ部
24 曲線曲げ部
25 二酸化シリコン・ハード・マスク
30 フィン形状シリコン
31 シリコン・ゲルマニウム
32 フィン形状ゲルマニウム
33 シリコン・ゲルマニウム
34 二酸化シリコン
35 シリコン光導波路コア
36 シリコン・ゲルマニウム光導波路コア
37 切断線
38 切断線
39 p型シリコン・ゲルマニウム拡散層電極
40 n型シリコン・ゲルマニウム拡散層電極
G ゲート電極
Claims (18)
- シリコン基板と、
前記シリコン基板上に配置され、上面の面方位は(110)面またはこれと結晶学的に等価な面方位であり、かつ、側面の面方位は(111)面またはこれと結晶学的に等価な面方位である単結晶シリコンのコアを有する第1光導波路と、を備え、
前記第1光導波路のコアは、<1−12>方向および<−112>の一方に伸びており、
前記第1光導波路のコアに接続され、前記<1−12>方向および<−112>の他方に伸びたコアを有する第2光導波路を備えた光素子。 - シリコン基板と、
前記シリコン基板上に配置され、上面の面方位は(110)面またはこれと結晶学的に等価な面方位であり、かつ、<1−12>方向および<−112>の一方に伸び、断面形状が方形である単結晶シリコンのコアを有する第1光導波路と、を備え、
前記第1光導波路のコアに接続され、前記<1−12>方向および<−112>の他方に伸びたコアを有する第2光導波路を備えた光素子。 - 請求項1記載の光素子において、
前記コアはシリコンで構成されていることを特徴とする光素子。 - 請求項2記載の光素子において、
前記コアはシリコンで構成されていることを特徴とする光素子。 - 請求項1記載の光素子において、
前記光導波路は、前記コアの上にシリコン酸化膜で構成されたクラッド層を備えていることを特徴とする光素子。 - 請求項2記載の光素子において、
前記光導波路は、前記コアの上にシリコン酸化膜で構成されたクラッド層を備えていることを特徴とする光素子。 - 請求項1記載の光素子において、
前記シリコン基板下に配置されたシリコン酸化膜を備えていることを特徴とする光素子。 - 請求項2記載の光素子において、
前記シリコン基板下に配置されたシリコン酸化膜を備えていることを特徴とする光素子。 - 請求項1記載の光素子において、
前記第1光導波路のコアが伸びる方向と前記第2光導波路のコアが伸びる方向のなす角度は、arccos(1/3)*180/πであることを特徴とする光素子。 - 請求項2記載の光素子において、
前記第1光導波路のコアが伸びる方向と前記第2光導波路のコアが伸びる方向のなす角度は、arccos(1/3)*180/πであることを特徴とする光素子。 - 請求項1記載の光素子において、
前記第1光導波路はコアの幅が広い部分で分岐していることを特徴とする光素子。 - 請求項2記載の光素子において、
前記第1光導波路はコアの幅が広い部分で分岐していることを特徴とする光素子。 - 請求項11記載の光素子において、
前記第1光導波路は、分岐路の少なくとも一つに光の変調を行うpinダイオードを有する変調器を備えていることを特徴とする光素子。 - 請求項12記載の光素子において、
前記第1光導波路は、分岐路の少なくとも一つに光の変調を行うpinダイオードを有する変調器を備えていることを特徴とする光素子。 - 請求項1記載の光素子において、
前記第1光導波路は、側面の面方位は(111)面またはこれと結晶学的に等価な面方位を保ちながら段階的に前記コアの幅が変わっている部分を備えていることを特徴とする光素子。 - 請求項2記載の光素子において、
前記第1光導波路は、側面の面方位は(111)面またはこれと結晶学的に等価な面方位を保ちながら段階的に前記コアの幅が変わっている部分を備えていることを特徴とする光素子。 - 請求項1記載の光素子において、
前記第2光導波路のコアは、前記第1光導波路のコアより低屈折率の材料で構成され、前記第1光導波路のコアよりも幅が広いことを特徴とする光素子。 - 請求項17記載の光素子において、
前記第2光導波路は、有機物で構成されていることを特徴とする光素子。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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PCT/JP2010/051332 WO2011092861A1 (ja) | 2010-02-01 | 2010-02-01 | 光素子 |
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JPWO2011092861A1 JPWO2011092861A1 (ja) | 2013-05-30 |
JP5259842B2 true JP5259842B2 (ja) | 2013-08-07 |
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JP2011551653A Expired - Fee Related JP5259842B2 (ja) | 2010-02-01 | 2010-02-01 | 光素子 |
Country Status (3)
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US (1) | US8909021B2 (ja) |
JP (1) | JP5259842B2 (ja) |
WO (1) | WO2011092861A1 (ja) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
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FR2968776B1 (fr) * | 2010-12-13 | 2012-12-28 | Commissariat Energie Atomique | Procédé pour réaliser un guide optique a fente sur silicium |
JP5831165B2 (ja) * | 2011-11-21 | 2015-12-09 | 富士通株式会社 | 半導体光素子 |
KR101872957B1 (ko) * | 2012-01-02 | 2018-07-02 | 삼성전자주식회사 | 반도체 장치 및 그 제조 방법 |
US8995805B2 (en) | 2012-04-20 | 2015-03-31 | Micron Technology, Inc. | Method and apparatus providing a coupled photonic structure |
KR102125277B1 (ko) * | 2012-06-26 | 2020-06-22 | 삼성전자주식회사 | 광 집적 회로, 이를 포함하는 반도체 장치 및 그 제조 방법 |
KR101923730B1 (ko) * | 2012-10-15 | 2018-11-30 | 한국전자통신연구원 | 반도체 레이저 및 그 제조방법 |
GB201313592D0 (en) * | 2013-07-30 | 2013-09-11 | Univ St Andrews | Optical modulator with plasmon based coupling |
US9311935B2 (en) * | 2013-11-07 | 2016-04-12 | HGST Netherlands B.V. | Method and apparatus for magnetic recording head having a waveguide |
US9435948B2 (en) | 2014-06-13 | 2016-09-06 | Globalfoundries Inc. | Silicon waveguide structure with arbitrary geometry on bulk silicon substrate, related systems and program products |
JP6330041B2 (ja) * | 2014-06-19 | 2018-05-23 | 株式会社日立製作所 | 光変調器、及びその製造方法 |
JP6384152B2 (ja) * | 2014-07-02 | 2018-09-05 | 富士通株式会社 | 光デバイス及びその製造方法 |
JP6556511B2 (ja) * | 2015-06-17 | 2019-08-07 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
JP2017032680A (ja) * | 2015-07-30 | 2017-02-09 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
JP6992961B2 (ja) * | 2017-03-31 | 2022-01-13 | 日本電気株式会社 | 電気光学変調器 |
US10340661B2 (en) * | 2017-11-01 | 2019-07-02 | International Business Machines Corporation | Electro-optical device with lateral current injection regions |
US10670804B1 (en) * | 2018-12-28 | 2020-06-02 | Globalfoundries Inc. | Composite waveguiding structures including semiconductor fins |
US11977282B2 (en) * | 2019-07-02 | 2024-05-07 | Nippon Telegraph And Telephone Corporation | Optical modulator |
US11175451B2 (en) * | 2019-09-26 | 2021-11-16 | Intel Corporation | Mechanisms for refractive index tuning semiconductor photonic devices |
US20210249845A1 (en) * | 2020-02-12 | 2021-08-12 | International Business Machines Corporation | Germanium-based laser diode |
US11808974B2 (en) * | 2022-02-08 | 2023-11-07 | Renesas Electronics Corporation | Semiconductor device and method of manufacturing the same |
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KR100277695B1 (ko) * | 1998-09-12 | 2001-02-01 | 정선종 | 에스 오 아이 광도파로를 이용한 하이브리드 광집적회로용 기판 제조방법 |
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2010
- 2010-02-01 WO PCT/JP2010/051332 patent/WO2011092861A1/ja active Application Filing
- 2010-02-01 JP JP2011551653A patent/JP5259842B2/ja not_active Expired - Fee Related
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Patent Citations (3)
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JP2004077305A (ja) * | 2002-08-19 | 2004-03-11 | Nec Corp | 検出装置 |
JP2004085744A (ja) * | 2002-08-26 | 2004-03-18 | Matsushita Electric Works Ltd | 光スイッチ及びその製造方法 |
JP2007178550A (ja) * | 2005-12-27 | 2007-07-12 | Nec Corp | 光機能素子、その駆動方法及び製造方法 |
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JPWO2011092861A1 (ja) | 2013-05-30 |
US20120288228A1 (en) | 2012-11-15 |
US8909021B2 (en) | 2014-12-09 |
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