JP5258590B2 - 集積回路の試験装置 - Google Patents

集積回路の試験装置 Download PDF

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Publication number
JP5258590B2
JP5258590B2 JP2009008181A JP2009008181A JP5258590B2 JP 5258590 B2 JP5258590 B2 JP 5258590B2 JP 2009008181 A JP2009008181 A JP 2009008181A JP 2009008181 A JP2009008181 A JP 2009008181A JP 5258590 B2 JP5258590 B2 JP 5258590B2
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Japan
Prior art keywords
wiring
wiring board
disposed
conductive
probe card
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JP2009008181A
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Japanese (ja)
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JP2010164490A5 (enExample
JP2010164490A (ja
Inventor
明久 赤平
圭吾 木村
義徳 菊地
克司 星
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Micronics Japan Co Ltd
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Micronics Japan Co Ltd
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Priority to JP2009008181A priority Critical patent/JP5258590B2/ja
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Publication of JP2010164490A5 publication Critical patent/JP2010164490A5/ja
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  • Measuring Leads Or Probes (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2009008181A 2009-01-16 2009-01-16 集積回路の試験装置 Active JP5258590B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009008181A JP5258590B2 (ja) 2009-01-16 2009-01-16 集積回路の試験装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009008181A JP5258590B2 (ja) 2009-01-16 2009-01-16 集積回路の試験装置

Publications (3)

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JP2010164490A JP2010164490A (ja) 2010-07-29
JP2010164490A5 JP2010164490A5 (enExample) 2012-01-26
JP5258590B2 true JP5258590B2 (ja) 2013-08-07

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JP2009008181A Active JP5258590B2 (ja) 2009-01-16 2009-01-16 集積回路の試験装置

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11585833B2 (en) 2021-04-23 2023-02-21 Samsung Electronics Co., Ltd. Probe card having power converter and test system including the same

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5928203B2 (ja) 2012-07-10 2016-06-01 三菱電機株式会社 検査装置
CN103795340A (zh) * 2014-02-14 2014-05-14 苏州众显电子科技有限公司 一种聚光型便携光源的功率表测试高倍聚光电池片装置
CN105353253B (zh) * 2015-11-28 2018-04-10 南通华夏飞机工程技术股份有限公司 航空风扇测试电路
JP7157410B2 (ja) * 2018-02-21 2022-10-20 国立大学法人大阪大学 半導体検査装置及び半導体検査方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1243302B (it) * 1990-06-19 1994-05-26 St Microelectronics Srl Connessione universale multicontatto tra scheda portasonde ews e scheda di prova per una stazione di collaudo su fetta di dispositivi a semiconduttore.
JP4794777B2 (ja) * 2001-09-13 2011-10-19 オリンパス株式会社 内視鏡用光源装置の回転フィルタ
JP4439360B2 (ja) * 2004-09-14 2010-03-24 株式会社日本マイクロニクス 電気的接続装置
WO2007142204A1 (ja) * 2006-06-08 2007-12-13 Nhk Spring Co., Ltd. プローブカード
JP2008128838A (ja) * 2006-11-21 2008-06-05 Shinko Electric Ind Co Ltd プローブ装置
JP4981525B2 (ja) * 2007-06-04 2012-07-25 日本電子材料株式会社 半導体検査装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11585833B2 (en) 2021-04-23 2023-02-21 Samsung Electronics Co., Ltd. Probe card having power converter and test system including the same

Also Published As

Publication number Publication date
JP2010164490A (ja) 2010-07-29

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