JP5230875B2 - 光照射装置の光照射方法及び光照射装置 - Google Patents

光照射装置の光照射方法及び光照射装置 Download PDF

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Publication number
JP5230875B2
JP5230875B2 JP2010523222A JP2010523222A JP5230875B2 JP 5230875 B2 JP5230875 B2 JP 5230875B2 JP 2010523222 A JP2010523222 A JP 2010523222A JP 2010523222 A JP2010523222 A JP 2010523222A JP 5230875 B2 JP5230875 B2 JP 5230875B2
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Japan
Prior art keywords
light
light irradiation
linear beam
along
illuminance
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JP2010523222A
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Japanese (ja)
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JPWO2010125836A1 (ja
Inventor
茂 遠藤
憲彦 羽田野
徹二 門脇
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Ulvac Inc
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Ulvac Inc
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1339—Gaskets; Spacers; Sealing of cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
  • Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
JP2010523222A 2009-04-28 2010-01-27 光照射装置の光照射方法及び光照射装置 Expired - Fee Related JP5230875B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010523222A JP5230875B2 (ja) 2009-04-28 2010-01-27 光照射装置の光照射方法及び光照射装置

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2009110136 2009-04-28
JP2009110135 2009-04-28
JP2009110135 2009-04-28
JP2009110136 2009-04-28
JP2010523222A JP5230875B2 (ja) 2009-04-28 2010-01-27 光照射装置の光照射方法及び光照射装置
PCT/JP2010/051013 WO2010125836A1 (ja) 2009-04-28 2010-01-27 光照射装置の光照射方法及び光照射装置

Publications (2)

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JPWO2010125836A1 JPWO2010125836A1 (ja) 2012-10-25
JP5230875B2 true JP5230875B2 (ja) 2013-07-10

Family

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JP2010523222A Expired - Fee Related JP5230875B2 (ja) 2009-04-28 2010-01-27 光照射装置の光照射方法及び光照射装置

Country Status (5)

Country Link
JP (1) JP5230875B2 (ko)
KR (1) KR101240367B1 (ko)
CN (1) CN101978308B (ko)
TW (1) TWI402152B (ko)
WO (1) WO2010125836A1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018084804A (ja) * 2016-11-17 2018-05-31 東京エレクトロン株式会社 露光装置、露光装置の調整方法及び記憶媒体

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5771776B2 (ja) * 2010-12-21 2015-09-02 パナソニックＩｐマネジメント株式会社 紫外線照射装置
JP5732971B2 (ja) * 2011-03-31 2015-06-10 東芝ライテック株式会社 紫外線照射装置
CN102435307B (zh) * 2011-11-09 2013-09-18 深圳市华星光电技术有限公司 Tft-lcd制程中多层uv烘烤炉的uv照度的检测方法及用于实施该方法的取片组合装置
JP2013219205A (ja) * 2012-04-10 2013-10-24 Ｈｏｙａ Ｃａｎｄｅｏ Ｏｐｔｒｏｎｉｃｓ株式会社 光照射装置
JP6206945B2 (ja) * 2013-03-07 2017-10-04 株式会社ブイ・テクノロジー 走査露光装置及び走査露光方法
JP5884776B2 (ja) * 2013-06-22 2016-03-15 ウシオ電機株式会社 光配向用偏光光照射装置
JP2015165546A (ja) * 2014-02-07 2015-09-17 株式会社ミマキエンジニアリング 紫外線発光ダイオードユニット、紫外線発光ダイオードユニットのセット、インクジェット装置および三次元造形物製造装置
JP6394317B2 (ja) * 2014-11-21 2018-09-26 東芝ライテック株式会社 光照射装置
JP6809188B2 (ja) * 2016-12-13 2021-01-06 東京エレクトロン株式会社 光照射装置
CN108681211A (zh) * 2018-04-20 2018-10-19 佛山市鑫东陶陶瓷有限公司 一种点光源曝光装置
WO2020217288A1 (ja) * 2019-04-22 2020-10-29 カンタム・ウシカタ株式会社 光学系装置
DE102022128497A1 (de) 2022-10-27 2024-05-02 Forschungszentrum Jülich GmbH Vorrichtung und verfahren zur thermischen behandlung von werkstücken

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005099783A (ja) * 2003-08-28 2005-04-14 Shibaura Mechatronics Corp 紫外光照射装置及び照射方法
JP2006235617A (ja) * 2005-01-28 2006-09-07 Shibaura Mechatronics Corp 紫外光照射装置及び照射方法、基板製造装置及び基板製造方法
JP2007057861A (ja) * 2005-08-25 2007-03-08 Harison Toshiba Lighting Corp 角形状集光用光学系および液晶パネル用紫外線照射装置
JP2007334039A (ja) * 2006-06-15 2007-12-27 Ulvac Japan Ltd 光源装置及びこれを用いた基板の貼り合わせ方法
JP2008033056A (ja) * 2006-07-28 2008-02-14 Shibaura Mechatronics Corp シール剤硬化装置及び基板製造装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006030933A (ja) * 2004-06-18 2006-02-02 Shin Etsu Chem Co Ltd 液晶表示セル基板の基板面シール方法及び紫外線照射装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005099783A (ja) * 2003-08-28 2005-04-14 Shibaura Mechatronics Corp 紫外光照射装置及び照射方法
JP2006235617A (ja) * 2005-01-28 2006-09-07 Shibaura Mechatronics Corp 紫外光照射装置及び照射方法、基板製造装置及び基板製造方法
JP2007057861A (ja) * 2005-08-25 2007-03-08 Harison Toshiba Lighting Corp 角形状集光用光学系および液晶パネル用紫外線照射装置
JP2007334039A (ja) * 2006-06-15 2007-12-27 Ulvac Japan Ltd 光源装置及びこれを用いた基板の貼り合わせ方法
JP2008033056A (ja) * 2006-07-28 2008-02-14 Shibaura Mechatronics Corp シール剤硬化装置及び基板製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018084804A (ja) * 2016-11-17 2018-05-31 東京エレクトロン株式会社 露光装置、露光装置の調整方法及び記憶媒体

Also Published As

Publication number Publication date
JPWO2010125836A1 (ja) 2012-10-25
CN101978308B (zh) 2012-09-19
KR20100132024A (ko) 2010-12-16
WO2010125836A1 (ja) 2010-11-04
KR101240367B1 (ko) 2013-03-11
CN101978308A (zh) 2011-02-16
TWI402152B (zh) 2013-07-21
TW201038384A (en) 2010-11-01

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