JP5228828B2 - 低コヒーレンス干渉計、低コヒーレンス干渉装置、及び低コヒーレンス干渉測定方法 - Google Patents

低コヒーレンス干渉計、低コヒーレンス干渉装置、及び低コヒーレンス干渉測定方法 Download PDF

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JP5228828B2
JP5228828B2 JP2008295433A JP2008295433A JP5228828B2 JP 5228828 B2 JP5228828 B2 JP 5228828B2 JP 2008295433 A JP2008295433 A JP 2008295433A JP 2008295433 A JP2008295433 A JP 2008295433A JP 5228828 B2 JP5228828 B2 JP 5228828B2
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low coherence
interference
peak
measurement
light source
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JP2010122043A5 (enExample
JP2010122043A (ja
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繁 中山
雄一 瀧川
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Nikon Corp
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Nikon Corp
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  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2008295433A 2008-11-19 2008-11-19 低コヒーレンス干渉計、低コヒーレンス干渉装置、及び低コヒーレンス干渉測定方法 Active JP5228828B2 (ja)

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JP2010122043A5 JP2010122043A5 (enExample) 2012-07-12
JP5228828B2 true JP5228828B2 (ja) 2013-07-03

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017049118A (ja) * 2015-09-02 2017-03-09 株式会社東京精密 エタロン及び寸法測定装置

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010261776A (ja) * 2009-05-01 2010-11-18 Canon Inc 光波干渉計測装置
JP2010261890A (ja) * 2009-05-11 2010-11-18 Canon Inc 光波干渉計測装置
CN102322801B (zh) * 2011-08-09 2012-12-12 天津大学 高信噪比摆动式低相干干涉位移解调装置及其解调方法
JP6030346B2 (ja) * 2012-05-31 2016-11-24 株式会社ミツトヨ 形状測定機
KR101382004B1 (ko) 2013-04-03 2014-04-04 조선대학교산학협력단 주파수 변조 레이저 다이오드를 이용한 저간섭성 간섭계
JP2017049117A (ja) * 2015-09-02 2017-03-09 株式会社東京精密 寸法測定装置及び参照光路長走査装置
JP7751788B2 (ja) * 2021-09-15 2025-10-09 オムロン株式会社 光干渉測距センサ

Family Cites Families (7)

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Publication number Priority date Publication date Assignee Title
JP2003148909A (ja) * 2001-11-08 2003-05-21 Canon Inc 干渉装置
JP3934490B2 (ja) * 2002-06-21 2007-06-20 フジノン株式会社 低コヒーレント干渉縞解析方法
US7440112B2 (en) * 2004-08-18 2008-10-21 National University Corporation Method and an apparatus for shape measurement, and a frequency comb light generator
JP2006078446A (ja) * 2004-09-13 2006-03-23 Nikon Corp 干渉測定方法および干渉測定装置
WO2007044786A2 (en) * 2005-10-11 2007-04-19 Zygo Corporation Interferometry method and system including spectral decomposition
US7460242B2 (en) * 2006-08-30 2008-12-02 University Of Central Florida Research Foundation, Inc. Systems and methods for high-precision length measurement
JP4602372B2 (ja) * 2007-03-14 2010-12-22 株式会社トプコン 光画像計測装置及び光画像計測方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017049118A (ja) * 2015-09-02 2017-03-09 株式会社東京精密 エタロン及び寸法測定装置

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