CN102322801B - 高信噪比摆动式低相干干涉位移解调装置及其解调方法 - Google Patents
高信噪比摆动式低相干干涉位移解调装置及其解调方法 Download PDFInfo
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- CN102322801B CN102322801B CN201110226963XA CN201110226963A CN102322801B CN 102322801 B CN102322801 B CN 102322801B CN 201110226963X A CN201110226963X A CN 201110226963XA CN 201110226963 A CN201110226963 A CN 201110226963A CN 102322801 B CN102322801 B CN 102322801B
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- 238000006073 displacement reaction Methods 0.000 title claims abstract description 41
- 238000000034 method Methods 0.000 title claims abstract description 23
- 230000001427 coherent effect Effects 0.000 title abstract 3
- 230000003287 optical effect Effects 0.000 claims abstract description 83
- 230000010287 polarization Effects 0.000 claims abstract description 21
- 239000013078 crystal Substances 0.000 claims description 10
- 239000013307 optical fiber Substances 0.000 claims description 10
- 238000012545 processing Methods 0.000 claims description 10
- 230000005540 biological transmission Effects 0.000 claims description 9
- 230000011514 reflex Effects 0.000 claims description 6
- 238000001228 spectrum Methods 0.000 claims description 6
- 239000000835 fiber Substances 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 229910052736 halogen Inorganic materials 0.000 claims description 4
- 150000002367 halogens Chemical class 0.000 claims description 4
- 238000000926 separation method Methods 0.000 claims description 3
- 230000000630 rising effect Effects 0.000 claims description 2
- 238000005070 sampling Methods 0.000 claims description 2
- 239000011148 porous material Substances 0.000 abstract 2
- 238000010586 diagram Methods 0.000 description 4
- 230000007774 longterm Effects 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000008447 perception Effects 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/0209—Low-coherence interferometers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02056—Passive reduction of errors
- G01B9/02057—Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02062—Active error reduction, i.e. varying with time
- G01B9/02064—Active error reduction, i.e. varying with time by particular adjustment of coherence gate, i.e. adjusting position of zero path difference in low coherence interferometry
- G01B9/02065—Active error reduction, i.e. varying with time by particular adjustment of coherence gate, i.e. adjusting position of zero path difference in low coherence interferometry using a second interferometer before or after measuring interferometer
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29302—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means based on birefringence or polarisation, e.g. wavelength dependent birefringence, polarisation interferometers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/32—Optical coupling means having lens focusing means positioned between opposed fibre ends
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B2207/00—Coding scheme for general features or characteristics of optical elements and systems of subclass G02B, but not including elements and systems which would be classified in G02B6/00 and subgroups
- G02B2207/117—Adjustment of the optical path length
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3083—Birefringent or phase retarding elements
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- General Physics & Mathematics (AREA)
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Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
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CN201110226963XA CN102322801B (zh) | 2011-08-09 | 2011-08-09 | 高信噪比摆动式低相干干涉位移解调装置及其解调方法 |
US13/880,730 US8958075B2 (en) | 2011-08-09 | 2012-05-28 | Swing-style and high signal-to-noise ratio demodulation devices and corresponding demodulation method for the measurement of low coherence interference displacement |
PCT/CN2012/076145 WO2013020407A1 (zh) | 2011-08-09 | 2012-05-28 | 高信噪比摆动式低相干干涉位移解调装置及其解调方法 |
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CN201110226963XA CN102322801B (zh) | 2011-08-09 | 2011-08-09 | 高信噪比摆动式低相干干涉位移解调装置及其解调方法 |
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CN102322801A CN102322801A (zh) | 2012-01-18 |
CN102322801B true CN102322801B (zh) | 2012-12-12 |
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US (1) | US8958075B2 (zh) |
CN (1) | CN102322801B (zh) |
WO (1) | WO2013020407A1 (zh) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102322801B (zh) * | 2011-08-09 | 2012-12-12 | 天津大学 | 高信噪比摆动式低相干干涉位移解调装置及其解调方法 |
CN102607614B (zh) * | 2012-03-29 | 2014-10-29 | 天津大学 | 基于相位斜率定位中心波峰的低相干干涉解调方法 |
CN102980601B (zh) * | 2012-12-07 | 2015-04-08 | 天津大学 | 基于低相干干涉的光纤杨氏干涉光程差解调装置及方法 |
CN104730001A (zh) * | 2015-04-16 | 2015-06-24 | 福州大学 | 一种高时间分辨率高精度的椭偏测量装置及其方法 |
CN105466621B (zh) * | 2015-12-28 | 2018-02-13 | 天津大学 | 一种高分辨率偏振低相干干涉压力测量装置及方法 |
CN106017519B (zh) * | 2016-05-05 | 2018-05-22 | 重庆大学 | 一种光纤法珀传感器解调系统及方法 |
CN105890679B (zh) * | 2016-06-20 | 2019-11-22 | 天津大学 | 局部弯曲导流的光纤法珀式流量测试方法 |
CN106773154A (zh) * | 2016-11-22 | 2017-05-31 | 福州大学 | 一种液晶指向矢快速测量装置及其实现方法 |
CN106646859B (zh) * | 2016-12-01 | 2019-03-26 | 上海航天控制技术研究所 | 单电机驱动的双光楔光学扫描执行机构 |
US10463243B2 (en) * | 2017-03-16 | 2019-11-05 | Carestream Dental Technology Topco Limited | Structured light generation for intraoral 3D camera using 1D MEMS scanning |
CN108507597A (zh) * | 2018-04-09 | 2018-09-07 | 西安工业大学 | 光纤法珀传感器解调装置及方法 |
CN108709506B (zh) * | 2018-08-01 | 2023-11-10 | 天津博科光电科技有限公司 | 一种光纤位移传感探头及光纤位移传感系统 |
CN110618138B (zh) * | 2019-10-30 | 2022-06-07 | 安徽工业大学 | 一种利用等厚干涉原理检测显示屏中缺陷的方法 |
CN112525328A (zh) * | 2020-11-30 | 2021-03-19 | 北京遥测技术研究所 | 一种基于psd的光纤光栅振动传感器解调系统及方法 |
CN113176032B (zh) * | 2021-04-23 | 2022-04-05 | 天津大学 | 基于正交相位快速解调和强度补偿的压力测量装置及方法 |
CN114964157B (zh) * | 2022-04-26 | 2023-11-17 | 深圳市深视智能科技有限公司 | 倾角测量探头及测量装置 |
CN115755424B (zh) * | 2022-12-07 | 2024-03-08 | 中国科学院长春光学精密机械与物理研究所 | 基于光学增强腔模式匹配的光路准直装置及准直方法 |
CN115900535B (zh) * | 2023-01-04 | 2023-05-23 | 北京佰为深科技发展有限公司 | 干涉解调装置和干涉测量系统 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020195548A1 (en) * | 2001-06-06 | 2002-12-26 | Dowski Edward Raymond | Wavefront coding interference contrast imaging systems |
CN1381707A (zh) * | 2000-07-26 | 2002-11-27 | 日本马克西斯株式会社 | 被测物的厚度测定方法及其装置 |
JP2004191176A (ja) * | 2002-12-11 | 2004-07-08 | Mitsubishi Electric Corp | 段差の高さ測定方法および測定装置ならびに半導体装置の製造方法 |
CN2682437Y (zh) * | 2003-11-03 | 2005-03-02 | 四川大学 | 光学相干断层成像系统中纵向扫描装置 |
CN100472274C (zh) * | 2004-08-31 | 2009-03-25 | 东南大学 | 双折射正弦投影栅线发生器 |
CN100451694C (zh) * | 2004-09-20 | 2009-01-14 | 奥普森斯公司 | 采用低相干的干涉测量法的光学传感器 |
US7426036B2 (en) * | 2005-07-08 | 2008-09-16 | Imalux Corporation | Common path frequency domain optical coherence reflectometer and common path frequency domain optical coherence tomography device |
US7428053B2 (en) * | 2005-07-08 | 2008-09-23 | Imalux Corporation | Common path frequency domain optical coherence reflectometry/tomography device |
ATE484727T1 (de) * | 2005-08-09 | 2010-10-15 | Gen Hospital Corp | Gerät und verfahren zur durchführung von polarisationsbasierter quadraturdemodulation bei optischer kohärenztomographie |
JP5403972B2 (ja) * | 2008-08-12 | 2014-01-29 | 株式会社東京精密 | 寸法測定装置 |
JP5228828B2 (ja) * | 2008-11-19 | 2013-07-03 | 株式会社ニコン | 低コヒーレンス干渉計、低コヒーレンス干渉装置、及び低コヒーレンス干渉測定方法 |
CN102052902B (zh) * | 2010-12-10 | 2012-10-24 | 天津大学 | 一种高精度大量程低相干干涉位移解调装置及其解调方法 |
CN102322801B (zh) * | 2011-08-09 | 2012-12-12 | 天津大学 | 高信噪比摆动式低相干干涉位移解调装置及其解调方法 |
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2011
- 2011-08-09 CN CN201110226963XA patent/CN102322801B/zh not_active Expired - Fee Related
-
2012
- 2012-05-28 WO PCT/CN2012/076145 patent/WO2013020407A1/zh active Application Filing
- 2012-05-28 US US13/880,730 patent/US8958075B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
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US20140176959A1 (en) | 2014-06-26 |
WO2013020407A1 (zh) | 2013-02-14 |
US8958075B2 (en) | 2015-02-17 |
CN102322801A (zh) | 2012-01-18 |
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Application publication date: 20120118 Assignee: NANJING XINTIANWEI PHOTOELECTRIC TECHNOLOGY Co.,Ltd. Assignor: Tianjin University Contract record no.: 2015320000247 Denomination of invention: Oscillating type demodulation device with high signal-to-noise ratio and low coherent interference displacement and demodulation method for demodulation device Granted publication date: 20121212 License type: Common License Record date: 20150416 |
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