JP5213730B2 - 調整方法 - Google Patents

調整方法 Download PDF

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Publication number
JP5213730B2
JP5213730B2 JP2009006118A JP2009006118A JP5213730B2 JP 5213730 B2 JP5213730 B2 JP 5213730B2 JP 2009006118 A JP2009006118 A JP 2009006118A JP 2009006118 A JP2009006118 A JP 2009006118A JP 5213730 B2 JP5213730 B2 JP 5213730B2
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Japan
Prior art keywords
light
wavelength
light source
origin
interference signal
Prior art date
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Expired - Fee Related
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JP2009006118A
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English (en)
Japanese (ja)
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JP2010164389A5 (enExample
JP2010164389A (ja
Inventor
雄三 瀬尾
政治 久米
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Canon Inc
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Canon Inc
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Priority to JP2009006118A priority Critical patent/JP5213730B2/ja
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Publication of JP2010164389A5 publication Critical patent/JP2010164389A5/ja
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  • Length Measuring Devices By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP2009006118A 2009-01-14 2009-01-14 調整方法 Expired - Fee Related JP5213730B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009006118A JP5213730B2 (ja) 2009-01-14 2009-01-14 調整方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009006118A JP5213730B2 (ja) 2009-01-14 2009-01-14 調整方法

Publications (3)

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JP2010164389A JP2010164389A (ja) 2010-07-29
JP2010164389A5 JP2010164389A5 (enExample) 2012-03-01
JP5213730B2 true JP5213730B2 (ja) 2013-06-19

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ID=42580676

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JP2009006118A Expired - Fee Related JP5213730B2 (ja) 2009-01-14 2009-01-14 調整方法

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JP (1) JP5213730B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106323162A (zh) * 2016-08-31 2017-01-11 茂莱（南京）仪器有限公司 一种激光干涉仪的光路调校装置和调校方法

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6271493B2 (ja) * 2015-05-25 2018-01-31 Ckd株式会社 三次元計測装置
TWI619927B (zh) * 2015-05-25 2018-04-01 Ckd Corp Three-dimensional measuring device
JP6279013B2 (ja) * 2016-05-26 2018-02-14 Ckd株式会社 三次元計測装置
JP6513619B2 (ja) 2016-09-28 2019-05-15 Ckd株式会社 三次元計測装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4804058B2 (ja) * 2005-07-28 2011-10-26 キヤノン株式会社 干渉測定装置
JP4898639B2 (ja) * 2007-11-22 2012-03-21 キヤノン株式会社 絶対位置の計測装置及び計測方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106323162A (zh) * 2016-08-31 2017-01-11 茂莱（南京）仪器有限公司 一种激光干涉仪的光路调校装置和调校方法
CN106323162B (zh) * 2016-08-31 2018-09-25 茂莱（南京）仪器有限公司 一种激光干涉仪的光路调校装置和调校方法

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JP2010164389A (ja) 2010-07-29

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