JP5198910B2 - 切削装置 - Google Patents
切削装置 Download PDFInfo
- Publication number
- JP5198910B2 JP5198910B2 JP2008076198A JP2008076198A JP5198910B2 JP 5198910 B2 JP5198910 B2 JP 5198910B2 JP 2008076198 A JP2008076198 A JP 2008076198A JP 2008076198 A JP2008076198 A JP 2008076198A JP 5198910 B2 JP5198910 B2 JP 5198910B2
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- JP
- Japan
- Prior art keywords
- cutting
- workpiece
- housing
- air
- imaging
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000003384 imaging method Methods 0.000 claims description 24
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 11
- 230000003068 static effect Effects 0.000 claims description 4
- 239000003595 mist Substances 0.000 description 10
- 238000011109 contamination Methods 0.000 description 9
- 238000004140 cleaning Methods 0.000 description 6
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 244000309466 calf Species 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Images
Landscapes
- Auxiliary Devices For Machine Tools (AREA)
- Machine Tool Sensing Apparatuses (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Description
15 撮像手段
16 保持手段
30 筐体
31 開口部
40 遮蔽手段
50 エアー供給手段
W 被加工物
Claims (1)
- 被加工物を保持する保持手段と、該保持手段に保持された被加工物を撮像する撮像手段と、前記保持手段に保持された被加工物の切削部に切削水を供給しながら該被加工物を切削する切削手段とを備える切削装置であって、
前記撮像手段の対物レンズに対応する位置に開口部が形成されて該撮像手段全体を覆う筐体と、
前記開口部を開閉自在に遮蔽する遮蔽手段と、
前記筐体内部にエアーを供給するエアー供給手段と、
を備え、
前記エアー供給手段により前記筐体内部にエアーを供給し、前記撮像手段と前記筐体と間に形成される隙間から外部に向かうエアー流が前記筐体内部に生じることで、前記隙間に静圧がかかることを特徴とする切削装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008076198A JP5198910B2 (ja) | 2008-03-24 | 2008-03-24 | 切削装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008076198A JP5198910B2 (ja) | 2008-03-24 | 2008-03-24 | 切削装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009226555A JP2009226555A (ja) | 2009-10-08 |
JP5198910B2 true JP5198910B2 (ja) | 2013-05-15 |
Family
ID=41242576
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008076198A Active JP5198910B2 (ja) | 2008-03-24 | 2008-03-24 | 切削装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5198910B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5936845B2 (ja) * | 2011-11-02 | 2016-06-22 | 株式会社ディスコ | 切削装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3319944B2 (ja) * | 1996-04-12 | 2002-09-03 | 日本鋼管株式会社 | 水質監視装置 |
JP3275301B2 (ja) * | 1998-06-24 | 2002-04-15 | 株式会社東京精密 | ダイシング装置 |
JP4084890B2 (ja) * | 1998-08-28 | 2008-04-30 | 日工株式会社 | ミキサ監視用カメラ装置 |
JP4694675B2 (ja) * | 2000-06-28 | 2011-06-08 | 株式会社ディスコ | 切削装置の撮像機構 |
JP2005084367A (ja) * | 2003-09-09 | 2005-03-31 | Hitachi Kokusai Electric Inc | 監視カメラ及び監視カメラシステム |
JP4664788B2 (ja) * | 2005-09-26 | 2011-04-06 | 株式会社ディスコ | 切削装置 |
JP4630220B2 (ja) * | 2006-04-17 | 2011-02-09 | 新日本製鐵株式会社 | レーザ用光学素子の汚れ防止装置及び方法 |
-
2008
- 2008-03-24 JP JP2008076198A patent/JP5198910B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP2009226555A (ja) | 2009-10-08 |
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