JP5190194B2 - 精製装置 - Google Patents

精製装置 Download PDF

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Publication number
JP5190194B2
JP5190194B2 JP2006315110A JP2006315110A JP5190194B2 JP 5190194 B2 JP5190194 B2 JP 5190194B2 JP 2006315110 A JP2006315110 A JP 2006315110A JP 2006315110 A JP2006315110 A JP 2006315110A JP 5190194 B2 JP5190194 B2 JP 5190194B2
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Japan
Prior art keywords
purification
tube
end portion
unit
inner diameter
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Expired - Fee Related
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JP2006315110A
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English (en)
Japanese (ja)
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JP2007175698A5 (enrdf_load_stackoverflow
JP2007175698A (ja
Inventor
晴恵 中島
祥子 川上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
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Semiconductor Energy Laboratory Co Ltd
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Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP2006315110A priority Critical patent/JP5190194B2/ja
Publication of JP2007175698A publication Critical patent/JP2007175698A/ja
Publication of JP2007175698A5 publication Critical patent/JP2007175698A5/ja
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Publication of JP5190194B2 publication Critical patent/JP5190194B2/ja
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  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
JP2006315110A 2005-12-02 2006-11-22 精製装置 Expired - Fee Related JP5190194B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006315110A JP5190194B2 (ja) 2005-12-02 2006-11-22 精製装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005348659 2005-12-02
JP2005348659 2005-12-02
JP2006315110A JP5190194B2 (ja) 2005-12-02 2006-11-22 精製装置

Publications (3)

Publication Number Publication Date
JP2007175698A JP2007175698A (ja) 2007-07-12
JP2007175698A5 JP2007175698A5 (enrdf_load_stackoverflow) 2009-12-24
JP5190194B2 true JP5190194B2 (ja) 2013-04-24

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ID=38301408

Family Applications (1)

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JP2006315110A Expired - Fee Related JP5190194B2 (ja) 2005-12-02 2006-11-22 精製装置

Country Status (1)

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JP (1) JP5190194B2 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101129449B1 (ko) 2011-05-23 2012-03-26 (주)씨에스엘쏠라 분리형 유기재료의 승화 정제용 내부관
JP6096144B2 (ja) * 2014-03-26 2017-03-15 出光興産株式会社 搬送治具、装填方法、および精製方法
KR101649620B1 (ko) * 2016-03-18 2016-08-19 임아영 패럴린 코팅장치
JP6432874B1 (ja) * 2018-06-26 2018-12-05 株式会社奥本研究所 精製装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6036304A (ja) * 1983-08-08 1985-02-25 Nippon Telegr & Teleph Corp <Ntt> 薬品の精製装置
JP2583306B2 (ja) * 1989-02-10 1997-02-19 日本電信電話株式会社 試薬の精製装置とその精製方法
JPH03143506A (ja) * 1989-10-27 1991-06-19 Nippon Telegr & Teleph Corp <Ntt> 精製装置及び精製方法
JP3246060B2 (ja) * 1993-04-14 2002-01-15 日本電信電話株式会社 フッ化物原料の精製方法
JP3828090B2 (ja) * 2003-04-15 2006-09-27 勝華科技股▲ふん▼有限公司 昇華純化方法
JP2005111303A (ja) * 2003-10-03 2005-04-28 Sony Corp 昇華管及びその製造方法、並びに昇華精製装置

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JP2007175698A (ja) 2007-07-12

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