JP5188161B2 - プローブカード - Google Patents

プローブカード Download PDF

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Publication number
JP5188161B2
JP5188161B2 JP2007310114A JP2007310114A JP5188161B2 JP 5188161 B2 JP5188161 B2 JP 5188161B2 JP 2007310114 A JP2007310114 A JP 2007310114A JP 2007310114 A JP2007310114 A JP 2007310114A JP 5188161 B2 JP5188161 B2 JP 5188161B2
Authority
JP
Japan
Prior art keywords
support plate
probe card
center
guide
card according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007310114A
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English (en)
Japanese (ja)
Other versions
JP2009133724A (ja
JP2009133724A5 (https=
Inventor
俊裕 米沢
慎一郎 高瀬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP2007310114A priority Critical patent/JP5188161B2/ja
Priority to TW097142533A priority patent/TWI396846B/zh
Priority to US12/745,303 priority patent/US8415964B2/en
Priority to CN2008801185440A priority patent/CN101883987B/zh
Priority to EP08853954A priority patent/EP2216655A4/en
Priority to PCT/JP2008/070110 priority patent/WO2009069439A1/ja
Priority to KR1020107010746A priority patent/KR101164011B1/ko
Publication of JP2009133724A publication Critical patent/JP2009133724A/ja
Publication of JP2009133724A5 publication Critical patent/JP2009133724A5/ja
Application granted granted Critical
Publication of JP5188161B2 publication Critical patent/JP5188161B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/44—Modifications of instruments for temperature compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07378—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate adapter, e.g. space transformers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
JP2007310114A 2007-11-30 2007-11-30 プローブカード Expired - Fee Related JP5188161B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2007310114A JP5188161B2 (ja) 2007-11-30 2007-11-30 プローブカード
TW097142533A TWI396846B (zh) 2007-11-30 2008-11-04 探針卡
CN2008801185440A CN101883987B (zh) 2007-11-30 2008-11-05 探针卡
EP08853954A EP2216655A4 (en) 2007-11-30 2008-11-05 PROBE CARD
US12/745,303 US8415964B2 (en) 2007-11-30 2008-11-05 Probe card having a structure for being prevented from deforming
PCT/JP2008/070110 WO2009069439A1 (ja) 2007-11-30 2008-11-05 プローブカード
KR1020107010746A KR101164011B1 (ko) 2007-11-30 2008-11-05 프로브 카드

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007310114A JP5188161B2 (ja) 2007-11-30 2007-11-30 プローブカード

Publications (3)

Publication Number Publication Date
JP2009133724A JP2009133724A (ja) 2009-06-18
JP2009133724A5 JP2009133724A5 (https=) 2011-01-20
JP5188161B2 true JP5188161B2 (ja) 2013-04-24

Family

ID=40678341

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007310114A Expired - Fee Related JP5188161B2 (ja) 2007-11-30 2007-11-30 プローブカード

Country Status (7)

Country Link
US (1) US8415964B2 (https=)
EP (1) EP2216655A4 (https=)
JP (1) JP5188161B2 (https=)
KR (1) KR101164011B1 (https=)
CN (1) CN101883987B (https=)
TW (1) TWI396846B (https=)
WO (1) WO2009069439A1 (https=)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101593521B1 (ko) 2009-08-07 2016-02-15 삼성전자주식회사 테스터 및 이를 구비한 반도체 디바이스 검사 장치
JP2011043377A (ja) * 2009-08-20 2011-03-03 Tokyo Electron Ltd 検査用接触構造体
KR101358788B1 (ko) * 2012-09-27 2014-02-24 (주)티에스이 고밀도 프로브 카드 및 그 제조방법
TWI604198B (zh) * 2016-06-22 2017-11-01 思達科技股份有限公司 測試裝置、夾持組件及探針卡載具
KR102799834B1 (ko) * 2017-01-11 2025-04-28 (주)테크윙 테스트핸들러용 가압장치
JP7075725B2 (ja) * 2017-05-30 2022-05-26 株式会社日本マイクロニクス 電気的接続装置
US11226658B2 (en) * 2018-06-25 2022-01-18 Dell Products L.P. Apparatus and methods for mounting information handling system hardware components
JP2020009978A (ja) * 2018-07-12 2020-01-16 東京エレクトロン株式会社 回路装置、テスタ、検査装置及び回路基板の反り調整方法
KR102243839B1 (ko) * 2018-07-13 2021-04-22 도쿄엘렉트론가부시키가이샤 중간 접속 부재, 및 검사 장치
JP7090517B2 (ja) * 2018-09-20 2022-06-24 東京エレクトロン株式会社 検査装置及び検査方法
KR102673906B1 (ko) * 2018-11-02 2024-06-10 세메스 주식회사 카드 홀더 및 이를 포함하는 프로브 스테이션
CN109521230B (zh) * 2018-11-16 2024-06-25 矽电半导体设备(深圳)股份有限公司 一种承片台及半导体探针台
JP7308660B2 (ja) * 2019-05-27 2023-07-14 東京エレクトロン株式会社 中間接続部材及び検査装置
JP7148017B2 (ja) * 2020-03-13 2022-10-05 日本電産リード株式会社 検査治具及びそれを備えた基板検査装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7071714B2 (en) * 2001-11-02 2006-07-04 Formfactor, Inc. Method and system for compensating for thermally induced motion of probe cards
JP3621938B2 (ja) * 2002-08-09 2005-02-23 日本電子材料株式会社 プローブカード
EP1732120A4 (en) * 2004-03-31 2012-02-29 Jsr Corp PROBE DEVICE, WAFER SEARCHING DEVICE EQUIPPED WITH THE PROBE DEVICE, AND WAFER SEARCHING METHOD
JP2006010629A (ja) 2004-06-29 2006-01-12 Tokyo Electron Ltd 平行調整機構を備えたプローブカード
JP4326495B2 (ja) * 2005-04-20 2009-09-09 山一電機株式会社 半導体基板用検査装置の組立方法
JP4472593B2 (ja) * 2005-07-12 2010-06-02 東京エレクトロン株式会社 プローブカード
JP4642603B2 (ja) * 2005-08-25 2011-03-02 東京エレクトロン株式会社 プローブカード
JP4842640B2 (ja) * 2005-12-28 2011-12-21 日本発條株式会社 プローブカードおよび検査方法
US8456184B2 (en) * 2007-03-14 2013-06-04 Nhk Spring Co., Ltd. Probe card for a semiconductor wafer

Also Published As

Publication number Publication date
KR101164011B1 (ko) 2012-07-18
US20100301887A1 (en) 2010-12-02
JP2009133724A (ja) 2009-06-18
TWI396846B (zh) 2013-05-21
EP2216655A1 (en) 2010-08-11
KR20100072076A (ko) 2010-06-29
WO2009069439A1 (ja) 2009-06-04
CN101883987A (zh) 2010-11-10
CN101883987B (zh) 2013-06-26
EP2216655A4 (en) 2013-03-13
TW200935061A (en) 2009-08-16
US8415964B2 (en) 2013-04-09

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