JP5182314B2 - 空気流量測定装置 - Google Patents

空気流量測定装置 Download PDF

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Publication number
JP5182314B2
JP5182314B2 JP2010070590A JP2010070590A JP5182314B2 JP 5182314 B2 JP5182314 B2 JP 5182314B2 JP 2010070590 A JP2010070590 A JP 2010070590A JP 2010070590 A JP2010070590 A JP 2010070590A JP 5182314 B2 JP5182314 B2 JP 5182314B2
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JP
Japan
Prior art keywords
cavity
deep groove
air flow
recess
sensor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2010070590A
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English (en)
Japanese (ja)
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JP2010281809A (ja
Inventor
崇 榎本
順三 山口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp filed Critical Denso Corp
Priority to JP2010070590A priority Critical patent/JP5182314B2/ja
Priority to DE201010028387 priority patent/DE102010028387A1/de
Publication of JP2010281809A publication Critical patent/JP2010281809A/ja
Application granted granted Critical
Publication of JP5182314B2 publication Critical patent/JP5182314B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G01F1/692—Thin-film arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
JP2010070590A 2009-05-01 2010-03-25 空気流量測定装置 Active JP5182314B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2010070590A JP5182314B2 (ja) 2009-05-01 2010-03-25 空気流量測定装置
DE201010028387 DE102010028387A1 (de) 2009-05-01 2010-04-29 Luftstrommessvorrichtung

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2009111907 2009-05-01
JP2009111907 2009-05-01
JP2010070590A JP5182314B2 (ja) 2009-05-01 2010-03-25 空気流量測定装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2012236557A Division JP5477446B2 (ja) 2009-05-01 2012-10-26 空気流量測定装置

Publications (2)

Publication Number Publication Date
JP2010281809A JP2010281809A (ja) 2010-12-16
JP5182314B2 true JP5182314B2 (ja) 2013-04-17

Family

ID=42813894

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010070590A Active JP5182314B2 (ja) 2009-05-01 2010-03-25 空気流量測定装置

Country Status (2)

Country Link
JP (1) JP5182314B2 (de)
DE (1) DE102010028387A1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5533590B2 (ja) * 2010-11-23 2014-06-25 株式会社デンソー 感熱式流量センサ
JP5435059B2 (ja) 2011-08-26 2014-03-05 株式会社デンソー 空気流量測定装置
JP5710538B2 (ja) 2012-04-06 2015-04-30 日立オートモティブシステムズ株式会社 流量センサ
JP5758851B2 (ja) 2012-06-15 2015-08-05 日立オートモティブシステムズ株式会社 熱式流量計
JP5755185B2 (ja) * 2012-06-15 2015-07-29 日立オートモティブシステムズ株式会社 熱式流量計
JP5971199B2 (ja) 2013-06-12 2016-08-17 株式会社デンソー 空気流量調整装置
JP6129225B2 (ja) * 2015-03-04 2017-05-17 日立オートモティブシステムズ株式会社 流量センサ
US10757973B2 (en) * 2016-07-25 2020-09-01 Fontem Holdings 1 B.V. Electronic cigarette with mass air flow sensor
WO2018141637A1 (en) * 2017-01-31 2018-08-09 Belimo Holding Ag Flow sensor and air flow device with such flow sensor
JP6416357B1 (ja) * 2017-10-05 2018-10-31 三菱電機株式会社 流量測定装置
US11965762B2 (en) 2019-10-21 2024-04-23 Flusso Limited Flow sensor
US11262224B2 (en) 2020-06-19 2022-03-01 Honeywell International Inc. Flow sensing device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10035538A1 (de) * 2000-07-21 2002-02-07 Bosch Gmbh Robert Sensor
JP2002139360A (ja) * 2000-10-31 2002-05-17 Mitsubishi Electric Corp 感熱式流量センサ
JP4705766B2 (ja) * 2004-07-30 2011-06-22 株式会社山武 流量センサ
JP4609019B2 (ja) * 2004-09-24 2011-01-12 株式会社デンソー 熱式流量センサ及びその製造方法
JP4488031B2 (ja) 2007-06-14 2010-06-23 株式会社デンソー 空気流量測定装置

Also Published As

Publication number Publication date
JP2010281809A (ja) 2010-12-16
DE102010028387A1 (de) 2010-11-04

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