JP5180121B2 - 基板処理方法 - Google Patents
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- JP5180121B2 JP5180121B2 JP2009038046A JP2009038046A JP5180121B2 JP 5180121 B2 JP5180121 B2 JP 5180121B2 JP 2009038046 A JP2009038046 A JP 2009038046A JP 2009038046 A JP2009038046 A JP 2009038046A JP 5180121 B2 JP5180121 B2 JP 5180121B2
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- 238000003672 processing method Methods 0.000 title claims description 40
- 239000007789 gas Substances 0.000 claims description 242
- 238000005530 etching Methods 0.000 claims description 147
- 238000000151 deposition Methods 0.000 claims description 76
- 230000008021 deposition Effects 0.000 claims description 63
- 238000000034 method Methods 0.000 claims description 63
- 238000012545 processing Methods 0.000 claims description 63
- 229910052717 sulfur Inorganic materials 0.000 claims description 16
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 claims description 14
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 claims description 14
- 229910052794 bromium Inorganic materials 0.000 claims description 14
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims description 12
- 239000011593 sulfur Substances 0.000 claims description 12
- 229910052736 halogen Inorganic materials 0.000 claims description 10
- 150000002367 halogens Chemical class 0.000 claims description 10
- 229910052798 chalcogen Inorganic materials 0.000 claims description 9
- 230000000737 periodic effect Effects 0.000 claims description 9
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 4
- 239000001257 hydrogen Substances 0.000 claims description 4
- 150000002431 hydrogen Chemical class 0.000 claims description 4
- 229910052739 hydrogen Inorganic materials 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 52
- 229920002120 photoresistant polymer Polymers 0.000 description 49
- 238000012546 transfer Methods 0.000 description 25
- 229910003481 amorphous carbon Inorganic materials 0.000 description 22
- 150000002500 ions Chemical class 0.000 description 19
- 239000004065 semiconductor Substances 0.000 description 19
- 230000006870 function Effects 0.000 description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- 230000000694 effects Effects 0.000 description 6
- 238000003860 storage Methods 0.000 description 6
- 230000005284 excitation Effects 0.000 description 5
- 238000004380 ashing Methods 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000009832 plasma treatment Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 230000003044 adaptive effect Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
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- 238000009826 distribution Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 231100001231 less toxic Toxicity 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000005549 size reduction Methods 0.000 description 1
- 230000002195 synergetic effect Effects 0.000 description 1
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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Description
また、シュリンクエッチングステップにおけるデポ性ガスをCHF 3 ガスとしたので、マスク層の開口部の側壁面にデポを堆積させて開口幅を、例えば20〜25nm程度に縮小することができる。更に、異方性エッチングガスを、臭素(Br)もしくは臭素(Br)よりも原子番号が大きいハロゲン元素又は周期律表第16族元素であって、硫黄(S)もしくは硫黄(S)よりも原子番号が大きい元素を含むガスとしたので、異方性エッチングガスから生成されたプラズマを開口部底部に到達させることができ、もって、底部へのデポの堆積を抑制しつつ、Si−ARC膜をエッチングすることができる。
また、犠牲膜形成ステップにおけるデポ性ガスが、一般式CxHyFz(x、y、zは、0又は正の整数)で表わされるガスであるので、マスク層上にデポを堆積させて所定の犠牲膜を形成することができ、シュリンクエッチングステップにおけるデポ性ガスをCHF 3 ガスとしたので、マスク層の開口部の側壁面にデポを堆積させて開口幅を、例えば20〜25nm程度に縮小することができる。更に、異方性エッチングガスを、臭素(Br)もしくは臭素(Br)よりも原子番号が大きいハロゲン元素又は周期律表第16族元素であって、硫黄(S)もしくは硫黄(S)よりも原子番号が大きい元素を含むガスとしたので、異方性エッチングガスから生成されたプラズマを開口部底部に到達させることができ、もって、底部へのデポの堆積を抑制しつつ、Si−ARC膜をエッチングすることができる。
12,13,14 プロセスモジュール
50、60 シリコン基材
51、61 アモルファスカーボン膜(下層レジスト膜)
52、62 Si−ARC膜
53、63 フォトレジスト膜
54、64 開口部
55、65 デポ
66 犠牲膜
Claims (7)
- 処理対象層、中間層及びマスク層が順に積層され、前記中間層がSi−ARC膜からなり、前記マスク層は、前記Si−ARC膜の一部を露出させる開口部を有する基板を処理する基板処理方法であって、
デポ性ガスと異方性エッチングガスとの混合ガスから生成されたプラズマによって、前記マスク層の前記開口部の側壁面にデポを堆積させる開口幅縮小ステップと、前記開口部の底部を形成する前記Si−ARC膜をエッチングするエッチングステップを1ステップで行うシュリンクエッチングステップを有し、
前記デポ性ガスは、CHF 3 ガスであり、
前記異方性エッチングガスは、臭素(Br)もしくは臭素(Br)よりも原子番号が大きいハロゲン元素又は周期律表第16族元素であって、硫黄(S)もしくは硫黄(S)よりも原子番号が大きい元素を含むガスであることを特徴とする基板処理方法。 - 処理対象層、中間層及びマスク層が順に積層され、前記中間層がSi−ARC膜からなり、前記マスク層は、前記Si−ARC膜の一部を露出させる開口部を有する基板を処理する基板処理方法であって、
デポ性ガスから生成されたプラズマによって、前記マスク層の表面及び前記マスク層の前記開口部の底部に犠牲膜を形成する犠牲膜形成ステップと、
デポ性ガスと異方性エッチングガスとの混合ガスから生成されたプラズマによって、前記マスク層の前記開口部の側壁面にデポを堆積させる開口幅縮小ステップと、前記開口部の底部を形成する前記犠牲膜及び前記Si−ARC膜をエッチングするエッチングステップを1ステップで行うシュリンクエッチングステップを有し、
前記犠牲膜形成ステップにおける前記デポ性ガスは、一般式C x H y F z (x、y、zは、0又は正の整数)で表わされるガスであり、
前記シュリンクエッチングステップにおける前記デポ性ガスは、CHF 3 ガスであり、
前記異方性エッチングガスは、臭素(Br)もしくは臭素(Br)よりも原子番号が大きいハロゲン元素又は周期律表第16族元素であって、硫黄(S)もしくは硫黄(S)よりも原子番号が大きい元素を含むガスであることを特徴とする基板処理方法。 - 前記異方性エッチングガスは、CF3Iガス、CF3Brガス、HIガス又はHBrガスであることを特徴とする請求項1又は2に記載の基板処理方法。
- 前記シュリンクエッチングステップにおいて、前記デポ性ガスとして水素(H2)ガスを用いることを特徴とする請求項1乃至3のいずれか1項に記載の基板処理方法。
- 前記シュリンクエッチングステップにおいて、前記デポ性ガスと前記異方性エッチングガスとの混合比を調整して前記マスク層の前記開口部側壁面へのデポ堆積速度に対する前記開口部の底部を形成する膜のエッチング速度比を制御することを特徴とする請求項1乃至4のいずれか1項に記載の基板処理方法。
- 前記シュリンクエッチングステップにおいて、前記水素ガスと前記異方性エッチングガスとの混合比を調整して前記マスク層の前記開口部側壁面へのデポ堆積速度に対する前記開口部の底部を形成する膜のエッチング速度比を制御することを特徴とする請求項4に記載の基板処理方法。
- 前記シュリンクエッチングステップによって開口幅が縮小された前記マスク層の開口部に対応する開口部が設けられた前記Si−ARC膜の開口部を前記処理対象層に転写する処理対象層エッチングステップを有することを特徴とする請求項1乃至6のいずれか1項に記載の基板処理方法。
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JP5357710B2 (ja) * | 2009-11-16 | 2013-12-04 | 東京エレクトロン株式会社 | 基板処理方法,基板処理装置,プログラムを記録した記録媒体 |
CN103915321A (zh) * | 2013-01-06 | 2014-07-09 | 中国科学院微电子研究所 | 半导体结构及其制造方法 |
DE112015004272T5 (de) * | 2014-09-19 | 2017-06-01 | Semiconductor Energy Laboratory Co., Ltd. | Herstellungsverfahren der Halbleitervorrichtung |
US9508719B2 (en) * | 2014-11-26 | 2016-11-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Fin field effect transistor (FinFET) device with controlled end-to-end critical dimension and method for forming the same |
US9679850B2 (en) * | 2015-10-30 | 2017-06-13 | Taiwan Semiconductor Manufacturing Company Ltd. | Method of fabricating semiconductor structure |
JP6608332B2 (ja) * | 2016-05-23 | 2019-11-20 | 東京エレクトロン株式会社 | 成膜装置 |
US10679891B2 (en) * | 2017-06-30 | 2020-06-09 | Taiwan Semiconductor Manufacturing Company, Ltd. | Methods of forming interconnect structures using a vacuum environment |
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