JP5175148B2 - 高スループットのマクロ分子分析用のナノチャンネル・アレイ並びにその準備および使用 - Google Patents
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Description
本願は、2001年7月25日出願の米国仮特許出願第60/307,666号の優先権を主張する。DARPA付与番号MDA972-00-1-0031により、本文に開示する発明の1部分に至る研究が支援された。したがって、米国政府は、これら発明において一定の権利を有することがある。
本発明は、ナノチャンネル・アレイに関するものである。また、本発明は、ナノチャンネル・アレイを準備する方法に関する。さらにまた、本発明は、ナノチャンネル・アレイを含むナノ流体チップに関する。また、本発明は、マクロ分子の高スループットの分析に適したシステムに関する。さらに、本発明は、ナノチャンネル・アレイを使用することによって少なくとも1つのマクロ分子を分析する方法に関するものである。
本発明の1つ形態は、実質上包囲された複数のチャンネルをもつナノチャンネル・アレイを包含している。図1に示すように、ナノチャンネル・アレイ100は、表面102を有し、そしてこの表面は、表面106の材料内に複数のチャンネル104を含んでいる。チャンネル104は、壁110と、チャンネル中心112を有している。1つのチャンネル104の内側の、チャンネル中心112に対し垂直に対向する壁表面110間の距離は、トレンチ幅として規定する。チャンネル104には、シーリング材料108が載っており、そしてこのシーリング材料108は、チャンネル104を少なくとも実質上包囲されたものとする。
本文では、以下の略語を使用する。すなわち、“nm”はナノメートル、“mTorr”はミリTorrである。
NILおよびエッチング後に、シーリング材料の不均一な堆積を提供し、これは、種々の角度にて傾斜させたサンプル・ウエハでのEビーム蒸着により、または大きなソース・ターゲットを使用したスパッタリング堆積によって行った。このステップを使用して、トレンチ幅を減少させるとともにチャンネルをシーリングした。
以下の実施例では、ナノチャンネル・アレイは、スパッタリングによってSiO2シーリング材料をパターニングした基板上に堆積させるプロセスを使って、準備した。チャンネル開口部は、基板を割ることによって準備し、そして走査電子顕微鏡(SEM)によってイメージ化した。その結果は、以下の通りであり、そしてこれは、トレンチ幅が、スパッタリングを使用したシーリング材料の堆積によって狭くなる、ということを示している。
表面であって、この表面の材料内に複数のチャンネルを有し、これらチャンネルが、約150ナノメートル未満のトレンチ幅と、200ナノメートル未満のトレンチ深さを有する、前記の表面と、
前記チャンネルの少なくともいくつかであって、シーリング材料が上に載って、それらチャンネルを少なくとも実質上包囲されるようにした、前記の少なくともいくつかのチャンネルと、
を備える。
Claims (6)
- ナノチャンネル・アレイであって、
表面であって、該表面の材料に複数のチャンネルを有し、該チャンネルが、約100ナノメートル未満のトレンチ幅と、100ナノメートル未満のトレンチ深さを有する、前記の表面と、
前記チャンネルの少なくともいくつかであって、シーリング材料が上に載って、それらチャンネルを少なくとも実質上包囲するようにした、前記の少なくともいくつかのチャンネルと、
を備え、前記チャンネルの長さは少なくとも1mmであり、前記シーリング材料は前記チャンネルに堆積されるものである、ナノチャンネル・アレイ。 - ナノチャンネル・アレイを準備する方法であって、
表面を有する基板を提供する工程と、
前記表面の材料に複数のチャンネルを形成する工程と、
シーリング材料を前記複数のチャンネル上に堆積させて前記複数のチャンネル上に載るようにして、そのようなチャンネルを少なくとも実質上包囲されたものとする工程であって、該実質上包囲されたチャンネルが、約100ナノメートル未満のトレンチ幅と、100ナノメートル未満のトレンチ深さとを有する、前記の工程と、
を備え、前記チャンネルの長さは少なくとも1mmである、ナノチャンネル・アレイ準備方法。 - ナノ流体チップであって、
a)ナノチャンネル・アレイであって、
表面を有する基板と、
前記表面の材料内の複数の平行なチャンネルであって、該チャンネルが、約100ナノメートル未満のトレンチ幅と、100ナノメートル未満のトレンチ深さを有する、前記のチャンネルと、
前記チャンネルの少なくともいくつかであって、シーリング材料が上に載って、それらチャンネルを少なくとも実質上包囲するようにした、前記の少なくともいくつかのチャンネルと、
前記チャンネルの少なくともいくつかであって、流体を受け入れることができる、前記の少なくともいくつかのチャンネルと、
を備え、前記チャンネルの長さは少なくとも1mmであり、前記シーリング材料は前記チャンネルに堆積されるものである、前記のナノチャンネル・アレイと、
b)前記チャンネルの少なくとも1つのものと流体連通状態にある少なくとも1つの試料容器であって、流体を放出することができる、前記の少なくとも1つの試料容器と、
c)前記チャンネルの少なくとも1つのものと流体連通状態にある少なくとも1つの廃棄物容器であって、流体を受けることができる、前記の少なくとも1つの廃棄物容器と、
を備えたナノ流体チップ。 - システムであって、
A)ナノ流体チップであって、
a)ナノチャンネル・アレイであって、
表面を有する基板と、
前記表面の材料内の複数の平行なチャンネルであって、該チャンネルが、約100ナノメートル未満のトレンチ幅と、100ナノメートル未満のトレンチ深さを有する、前記のチャンネルと、
前記チャンネルの少なくとも1つであって、シーリング材料が上に載って、それらチャンネルを少なくとも実質上包囲するようにした、前記の少なくとも1つのチャンネルと、
前記チャンネルの少なくとも1つであって、流体を受け入れることができる、前記の少なくとも1つのチャンネルと、
を備え、前記チャンネルの長さは少なくとも1mmであり、前記シーリング材料は前記チャンネルに堆積されるものである、前記のナノチャンネル・アレイと、
b)前記チャンネルの少なくとも1つのものと流体連通状態にある少なくとも1つの試料容器であって、流体を放出することができる、前記の少なくとも1つの試料容器と、
を備えた、前記のナノ流体チップと、
B)前記ナノチャンネル・アレイ内の前記少なくとも1つの流体から送られる少なくとも1つの信号を検出する装置と、
を備えたシステム。 - 少なくとも1つのマクロ分子を分析する分析方法であって、
ナノ流体チップを提供する工程であって、該ナノ流体チップが、
a)ナノチャンネル・アレイであって、
表面であって、該表面の材料内に複数の平行なチャンネルを有し、該チャンネルが、約100ナノメートル未満のトレンチ幅と、100ナノメートル未満のトレンチ深さを有する、前記の表面と、
前記チャンネルの少なくとも1つであって、シーリング材料が上に載って、それらチャンネルを少なくとも実質上包囲するようにした、前記の少なくとも1つのチャンネルと、
前記チャンネルの少なくとも1つであって、流体を受け入れることができる、前記の少なくとも1つのチャンネルと、
を備え、前記チャンネルの長さは少なくとも1mmであり、前記シーリング材料は前記チャンネルに堆積されるものである、前記のナノチャンネル・アレイと、
b)前記チャンネルの少なくとも1つのものと流体連通状態にある少なくとも1つの試料容器であって、少なくとも1つのマクロ分子を含有する流体を放出することができる、前記の少なくとも1つの試料容器と、
を備えた、前記の工程と、
前記少なくとも1つの試料容器に少なくとも1つの流体を提供する工程であって、前記流体が少なくとも1つのマクロ分子を含有する、前記の工程と、
前記少なくとも1つのマクロ分子を前記少なくとも1つのチャンネルに移送して、前記少なくとも1つのマクロ分子を長くする工程と、
前記少なくとも1つの長くしたマクロ分子から送られる少なくとも1つの信号を検出する工程と、
前記検出した信号を、前記少なくとも1つのマクロ分子の少なくとも1つの特性に相関させる工程と、
を備えた分析方法。 - 少なくとも1つのナノ流体チップを含むカートリッジであって、該カートリッジが、マクロ分子分析を実施するためのシステムに挿入しまたそれから除去することができ、前記少なくとも1つのナノ流体チップが、少なくとも1つのナノチャンネル・アレイを含み、前記ナノチャンネル・アレイが、
表面であって、該表面の材料内に複数のチャンネルを有し、該チャンネルが、約100ナノメートル未満のトレンチ幅と、100ナノメートル未満のトレンチ深さを有する、前記の表面と、
前記チャンネルの少なくともいくつかであって、シーリング材料が上に載って、それらチャンネルを少なくとも実質上包囲するようにした、前記の少なくともいくつかのチャンネルと、
を備え、前記チャンネルの長さは少なくとも1mmであり、前記シーリング材料は前記チャンネルに堆積されるものである、カートリッジ。
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