JP5172465B2 - 放電表面処理用電極の製造方法および放電表面処理用電極 - Google Patents
放電表面処理用電極の製造方法および放電表面処理用電極 Download PDFInfo
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- JP5172465B2 JP5172465B2 JP2008132026A JP2008132026A JP5172465B2 JP 5172465 B2 JP5172465 B2 JP 5172465B2 JP 2008132026 A JP2008132026 A JP 2008132026A JP 2008132026 A JP2008132026 A JP 2008132026A JP 5172465 B2 JP5172465 B2 JP 5172465B2
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- surface treatment
- electrode
- discharge surface
- discharge
- metal powder
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
- C23C8/24—Nitriding
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/80—After-treatment
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F19/00—Preventing the formation of deposits or corrosion, e.g. by using filters or scrapers
- F28F19/02—Preventing the formation of deposits or corrosion, e.g. by using filters or scrapers by using coatings, e.g. vitreous or enamel coatings
- F28F19/06—Preventing the formation of deposits or corrosion, e.g. by using filters or scrapers by using coatings, e.g. vitreous or enamel coatings of metal
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2230/00—Manufacture
- F05B2230/30—Manufacture with deposition of material
- F05B2230/31—Layer deposition
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2230/00—Manufacture
- F05B2230/90—Coating; Surface treatment
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D9/00—Heat-exchange apparatus having stationary plate-like or laminated conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F21/00—Constructions of heat-exchange apparatus characterised by the selection of particular materials
- F28F21/08—Constructions of heat-exchange apparatus characterised by the selection of particular materials of metal
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E20/00—Combustion technologies with mitigation potential
- Y02E20/14—Combined heat and power generation [CHP]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49204—Contact or terminal manufacturing
- Y10T29/49206—Contact or terminal manufacturing by powder metallurgy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49204—Contact or terminal manufacturing
- Y10T29/49224—Contact or terminal manufacturing with coating
Description
図3に示すプラズマアトマイズ法と回転ディスクプロセスとを融合させた方法により、線幅が0.3mmのチタン線を、プラズマトーチ12により溶解させて造粒を行なった。このとき、回転ディスク8を100krpmで回転させて、平均粒径が20μmのチタン微粒子を製造した。この微粒子の製造は真空化で行なった。
従来の方法により放電表面処理用電極を作製して、得られた電極を用いて実施例1と同様に放電表面処理によりワーク2上に厚みが300μmの放電表面処理被膜1を形成させて、電極の評価を行なった。
平均粒径が20μmのTiN粒子を金属粉末として用いて、更なる窒化物被膜の形成を行なわなかった以外は実施例1と同様にして放電表面処理用電極を作製した。作製した放電表面処理用電極を用いて、実施例1と同様の方法により電極の評価を行なった。その結果、比較例2で得られた放電表面処理用電極の放電処理においては、基板との密着強度が20MPa以下となり、実施例で得られた電極と比べて、その物性が劣るものであることがわかった。これは、セラミックであるTiNが金属であるTiと比較して脆い特性を有することおよび、融点が3000℃程度と高いことから、放電処理時に十分な溶融が進まず、微粒子状態で被膜に取り込まれる割合が高いためと推察される。
Claims (6)
- 金属粉末を圧縮成形した圧粉体により構成される放電表面処理用電極の製造方法であって、
前記金属粉末の表面を窒化して窒化物被膜を形成する第1工程と、
表面を窒化した前記金属粉末を圧縮成形して圧粉体を形成する第2工程とを含む放電表面処理用電極の製造方法。 - 前記第1工程において形成された前記窒化物被膜は、導電性を有する請求項1に記載の放電表面処理用電極の製造方法。
- 前記第1工程において形成された前記窒化物被膜は、その厚みが10nm以上20nm以下である請求項1または2に記載の放電表面処理用電極の製造方法。
- 前記第1工程における窒化は、真空雰囲気下で行なわれる請求項1〜3のいずれかに記載の放電表面処理用電極の製造方法。
- 前記第1工程において窒化される前記金属粉末は、チタン、クロム、ジルコニウムおよびタングステンからなる群より選択される1種以上の金属または合金により構成される請求項1〜4のいずれかに記載の放電表面処理用電極の製造方法。
- 金属粉末を圧縮成形した圧粉体により構成される放電表面処理用電極であって、前記金属粉末はその表面に窒化物被膜を備える放電表面処理用電極。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008132026A JP5172465B2 (ja) | 2008-05-20 | 2008-05-20 | 放電表面処理用電極の製造方法および放電表面処理用電極 |
US12/422,421 US8460603B2 (en) | 2008-05-20 | 2009-04-13 | Method of manufacturing electrical discharge surface treatment-purpose electrode and electrical discharge surface treatment-purpose electrode |
Applications Claiming Priority (1)
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JP2008132026A JP5172465B2 (ja) | 2008-05-20 | 2008-05-20 | 放電表面処理用電極の製造方法および放電表面処理用電極 |
Publications (2)
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JP2009280842A JP2009280842A (ja) | 2009-12-03 |
JP5172465B2 true JP5172465B2 (ja) | 2013-03-27 |
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JP2008132026A Expired - Fee Related JP5172465B2 (ja) | 2008-05-20 | 2008-05-20 | 放電表面処理用電極の製造方法および放電表面処理用電極 |
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JP (1) | JP5172465B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102331181B (zh) * | 2011-10-21 | 2013-09-18 | 浙江大东吴集团建设新材料有限公司 | 陶粒冷却加热双用窑 |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
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US9284647B2 (en) | 2002-09-24 | 2016-03-15 | Mitsubishi Denki Kabushiki Kaisha | Method for coating sliding surface of high-temperature member, high-temperature member and electrode for electro-discharge surface treatment |
RU2320775C2 (ru) | 2002-09-24 | 2008-03-27 | Исикавадзима-Харима Хэви Индастриз Ко., Лтд. | Способ нанесения покрытия на скользящую поверхность жаропрочного элемента, жаропрочный элемент и электрод для электроразрядной обработки поверхности |
WO2004033755A1 (ja) * | 2002-10-09 | 2004-04-22 | Ishikawajima-Harima Heavy Industries Co., Ltd. | 回転体及びそのコーティング方法 |
CA2600080C (en) * | 2005-03-09 | 2012-01-03 | Ihi Corporation | Surface treatment method and repair method |
KR101356820B1 (ko) * | 2010-06-17 | 2014-01-28 | 서울대학교산학협력단 | 전도성 나노구조물 및 이의 성형 방법 및 이를 이용하는 전계 방출 에미터의 제조 방법 |
WO2015111361A1 (ja) * | 2014-01-24 | 2015-07-30 | 勝義 近藤 | 窒素固溶チタン粉末材料、チタン素材及び窒素固溶チタン粉末材料の製造方法 |
EP3425085A1 (fr) * | 2017-07-07 | 2019-01-09 | The Swatch Group Research and Development Ltd | Procede de traitement de surface de particules d'une poudre metallique et particules de poudre metallique obtenues grace a ce procede |
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58204102A (ja) | 1982-05-24 | 1983-11-28 | Hitachi Maxell Ltd | 金属粉の安定化法 |
JPS6320032A (ja) | 1986-07-14 | 1988-01-27 | Res Dev Corp Of Japan | 被膜を有する超微粒子の製造法 |
JPS63266001A (ja) | 1987-04-22 | 1988-11-02 | Sumitomo Metal Mining Co Ltd | 複合球状粉末の製造方法 |
US5147448A (en) * | 1990-10-01 | 1992-09-15 | Nuclear Metals, Inc. | Techniques for producing fine metal powder |
JPH05503322A (ja) * | 1990-10-09 | 1993-06-03 | アイオワ・ステイト・ユニバーシティ・リサーチ・ファウンデーション・インコーポレイテッド | 環境に対して安定な反応性を有する合金粉末及びその製造方法 |
JPH04247836A (ja) * | 1991-01-24 | 1992-09-03 | Tokyo Yogyo Co Ltd | チタン基複合材の製造方法 |
JP3093846B2 (ja) | 1991-11-18 | 2000-10-03 | 科学技術振興事業団 | 金属材料の表面処理方法 |
JP3098654B2 (ja) * | 1993-03-24 | 2000-10-16 | 科学技術振興事業団 | 放電加工による表面処理方法及び装置 |
JP4020169B2 (ja) | 1997-10-03 | 2007-12-12 | 株式会社石塚研究所 | 燃焼合成反応を用いる火花溶着用の電極棒、その製法及びこの電極を用いた火花溶着金属被覆法 |
US7067197B2 (en) * | 2003-01-07 | 2006-06-27 | Cabot Corporation | Powder metallurgy sputtering targets and methods of producing same |
KR100753274B1 (ko) * | 2003-06-04 | 2007-08-29 | 미쓰비시덴키 가부시키가이샤 | 방전 표면 처리용 전극 및 그 제조 방법 |
JP4332636B2 (ja) * | 2004-01-29 | 2009-09-16 | 三菱電機株式会社 | 放電表面処理用電極の製造方法及び放電表面処理用電極 |
JP4895151B2 (ja) * | 2004-02-27 | 2012-03-14 | 日立金属株式会社 | 鉄系ナノサイズ粒子およびその製造方法 |
JP2006249462A (ja) * | 2005-03-08 | 2006-09-21 | Ishikawajima Harima Heavy Ind Co Ltd | 電極の製造方法、及び電極 |
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- 2008-05-20 JP JP2008132026A patent/JP5172465B2/ja not_active Expired - Fee Related
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- 2009-04-13 US US12/422,421 patent/US8460603B2/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102331181B (zh) * | 2011-10-21 | 2013-09-18 | 浙江大东吴集团建设新材料有限公司 | 陶粒冷却加热双用窑 |
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JP2009280842A (ja) | 2009-12-03 |
US20090288809A1 (en) | 2009-11-26 |
US8460603B2 (en) | 2013-06-11 |
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