JP5148965B2 - 被膜付き切削工具 - Google Patents
被膜付き切削工具 Download PDFInfo
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- JP5148965B2 JP5148965B2 JP2007269830A JP2007269830A JP5148965B2 JP 5148965 B2 JP5148965 B2 JP 5148965B2 JP 2007269830 A JP2007269830 A JP 2007269830A JP 2007269830 A JP2007269830 A JP 2007269830A JP 5148965 B2 JP5148965 B2 JP 5148965B2
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
- C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
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- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/081—Oxides of aluminium, magnesium or beryllium
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/083—Oxides of refractory metals or yttrium
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
- C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Physical Vapour Deposition (AREA)
- Drilling Tools (AREA)
Description
金属酸化物+金属酸化物のナノコンポジットAl2O3+ZrO2層とAl2O3層とが交互に積層した非周期的な多層構造を、RFスパッタリングPVD法により基材表面に堆積させた。
金属酸化物+金属酸化物のナノコンポジットAl2O3+ZrO2層とγAl2O3層とが交互に積層した多層構造被膜を、高純度のAlターゲットおよびZrターゲットを用いアルゴンと酸素の混合雰囲気中で反応性RFスパッタリングPVD法により基材表面に堆積させた。形成したナノコンポジット層中の2種類の酸化物の含有量は、あるレベルの出力をZrターゲットに照射し、これとは異なるレベルの出力をAlターゲットに照射することにより制御した。アルミナに対して1〜2倍のジルコニアat%の複合材料を形成する目的で、スパッタリングレートを調節した。Al2O3層は、アルミニウムターゲットを用い、アルゴンと酸素の混合雰囲気中で堆積させた。
金属酸化物+金属酸化物のナノコンポジットAl2O3+ZrO2層が2種類交互に積層した多層構造被膜を、高純度のAl+Zr複合ターゲットを用いアルゴンと酸素の混合雰囲気中で2重マグネトロンスパッタリングPVD法により基材表面に堆積させた。形成した2種類のナノコンポジット層中の2種類の酸化物の含有量は、Al+Zr複合ターゲット中の両成分の相対量によって制御した。基材取り付けテーブル全体の回転と、個々の基材を取り付けたピン毎のホルダーの回転と、個々のピンの回転とによる3重の回転を基材に行なった。
Claims (7)
- 超硬合金、サーメット、セラミクス、立方晶窒化硼素、高速度鋼のうちのいずれかの基材の表面の少なくとも機能部分に薄くて密着性があり硬質の耐摩耗被膜を施した切削工具において、上記被膜は、PVDまたはPECVDによる複数の金属酸化物層をMe1X+Me2X+Me1X+Me2X・・・・という形で交互に積層した多層構造を有し、金属元素Me1およびMe2はTi、Nb、V、Mo、Zr、Cr、Al、Hf、Ta、YおよびSiのうちの1種以上であり、Me1XおよびMe2Xのうちの少なくとも1種は、組成および組織が異なる2成分である成分Aおよび成分Bから成る金属酸化物+金属酸化物のナノコンポジット層であり、これら成分は各々が1種類の金属元素の単一の酸化物相または2種類以上の金属酸化物の固溶体であり、Me1X層およびMe2X層は組成および組織の一方または両方が異なり、個々の層の厚さは0.4nmより大で50nmより小、これらが交互に積層した多層構造の上記被膜の合計厚さは0.2〜20μmであり、
上記成分Aは正方晶または立方晶のジルコニアを含み、上記成分Bは非晶質または結晶質のアルミナであり、該アルミナはα相およびγ相の一方または両方であり、
上記成分Aおよび上記成分Bの体積含有量がそれぞれ40〜95%および5〜60%であることを特徴とする切削工具。 - 請求項1において、上記Me1X層およびMe2X層の個々の厚さが1nmより大で30nmより小であることを特徴とする切削工具。
- 請求項1または2において、上記被膜が、単層または多層の第1内層として、Ti、Nb、V、Mo、Zr、Cr、Al、Hf、Ta、YまたはSiのうちから選択した1種以上の金属の炭化物、窒化物または炭窒化物から成り、厚さ0.2〜20μmの層を付加的に含むことを特徴とする切削工具。
- 請求項1から3までのいずれか1項において、上記多層構造の上に、単層または多層の外側被膜として、Ti、Nb、V、Mo、Zr、Cr、Al、Hf、Ta、YまたはSiのうちから選択した1種以上の金属の炭化物、窒化物または炭窒化物から成り、厚さ0.2〜5μmの層を付加的に含むことを特徴とする切削工具。
- 請求項1から4までのいずれか1項において、上記成分Aは、平均粒径が1〜100nmであることを特徴とする切削工具。
- 請求項1から5までのいずれか1項において、上記成分Bは、平均直線切片が0.5〜200nmであることを特徴とする切削工具。
- 請求項1から6までのいずれか1項において、Me1Xは金属酸化物+金属酸化物のナノコンポジット層であり、Me2Xはα相およびγ相の一方または両方の結晶質アルミナ層であることを特徴とする切削工具。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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SE0602192-7 | 2006-10-18 | ||
SE0602192A SE530515C2 (sv) | 2006-01-19 | 2006-10-18 | Skärverktyg belagt med laminerade nanokompositskikt av metalloxider |
Publications (3)
Publication Number | Publication Date |
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JP2008100345A JP2008100345A (ja) | 2008-05-01 |
JP2008100345A5 JP2008100345A5 (ja) | 2008-06-26 |
JP5148965B2 true JP5148965B2 (ja) | 2013-02-20 |
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JP2007269830A Expired - Fee Related JP5148965B2 (ja) | 2006-10-18 | 2007-10-17 | 被膜付き切削工具 |
Country Status (5)
Country | Link |
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EP (1) | EP1914331B1 (ja) |
JP (1) | JP5148965B2 (ja) |
KR (1) | KR101444460B1 (ja) |
CN (1) | CN101164773B (ja) |
IL (1) | IL186533A0 (ja) |
Families Citing this family (19)
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DE102007030735A1 (de) * | 2007-07-02 | 2009-01-08 | Walter Ag | Werkzeug mit mehrlagiger Metalloxidbeschichtung |
DE102008026358A1 (de) * | 2008-05-31 | 2009-12-03 | Walter Ag | Werkzeug mit Metalloxidbeschichtung |
KR101614979B1 (ko) * | 2009-04-03 | 2016-04-22 | 산드빅 인터렉츄얼 프로퍼티 에이비 | 높은 온도를 발생시키는 금속 절삭 분야를 위한 코팅된 절삭 공구 |
SE533884C2 (sv) * | 2009-06-01 | 2011-02-22 | Seco Tools Ab | Nanolaminerat belagt skärverktyg |
JP5382594B2 (ja) * | 2012-02-13 | 2014-01-08 | 住友電工ハードメタル株式会社 | 表面被覆切削工具 |
EP2636764B1 (en) * | 2012-03-07 | 2014-07-09 | Seco Tools Ab | Nanolaminated coated cutting tool |
US20150072135A1 (en) * | 2012-04-02 | 2015-03-12 | Osg Corporation | Hard coating film for cutting tool and cutting tool coated with hard coating film |
KR101626239B1 (ko) | 2012-04-09 | 2016-05-31 | 오에스지 가부시키가이샤 | 절삭 공구용 경질 피막 및 경질 피막 피복 절삭 공구 |
JP5950230B2 (ja) * | 2012-08-30 | 2016-07-13 | 住友電工ハードメタル株式会社 | セラミックス被膜 |
CN104313530B (zh) * | 2014-09-30 | 2017-05-10 | 苏州博利迈新材料科技有限公司 | 一种硬质合金表面纳米涂层及其制备方法 |
EP3323909A4 (en) * | 2015-07-15 | 2019-03-20 | Sumitomo Electric Industries, Ltd. | COATING |
RU2620521C2 (ru) * | 2015-10-06 | 2017-05-26 | Федеральное государственное автономное образовательное учреждение высшего профессионального образования "Белгородский государственный национальный исследовательский университет" (НИУ "БелГУ") | Износостойкое покрытие для режущего инструмента |
US11247275B2 (en) | 2016-02-19 | 2022-02-15 | Walter Ag | Cutting tool |
JP6701384B2 (ja) * | 2016-12-28 | 2020-05-27 | 住友電気工業株式会社 | 被膜 |
CN106593458B (zh) * | 2017-01-12 | 2019-03-01 | 河北工程大学 | 地铁施工用盾构机刀具 |
JP7072053B2 (ja) * | 2018-04-11 | 2022-05-19 | 住友電気工業株式会社 | 被膜 |
CN109267008B (zh) * | 2018-11-23 | 2020-05-05 | 东南大学 | 一种Y-AlYN-AlYNC多元涂层刀具及其制备方法 |
CN109970453B (zh) * | 2019-05-20 | 2021-07-23 | 石家庄铁道大学 | 一种Cr-C-N三元硬质材料及其制备方法 |
CN114561621B (zh) * | 2021-12-10 | 2022-12-02 | 吉林大学 | 一种高熵金属玻璃薄膜及其制备方法和应用 |
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US6660371B1 (en) | 1998-09-24 | 2003-12-09 | Widia Gmbh | Composite material coating and a method for the production thereof |
DE10244438B4 (de) * | 2002-09-24 | 2007-02-22 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verbundkörper mit einer verschleißmindernden Oberflächenschicht, Verfahren zu seiner Herstellung sowie Verwendung des Verbundkörpers |
WO2004033751A1 (de) | 2002-10-07 | 2004-04-22 | Kennametal Widia Gmbh & Co. Kg | Verbundwerkstoff |
DE102004044240A1 (de) * | 2004-09-14 | 2006-03-30 | Walter Ag | Schneidwerkzeug mit oxidischer Beschichtung |
SE529144C2 (sv) * | 2005-04-18 | 2007-05-15 | Sandvik Intellectual Property | Skär belagt med kompositoxidskikt |
-
2007
- 2007-09-28 EP EP07117451.0A patent/EP1914331B1/en not_active Not-in-force
- 2007-10-10 IL IL186533A patent/IL186533A0/en unknown
- 2007-10-17 JP JP2007269830A patent/JP5148965B2/ja not_active Expired - Fee Related
- 2007-10-18 CN CN2007101671164A patent/CN101164773B/zh not_active Expired - Fee Related
- 2007-10-18 KR KR1020070105188A patent/KR101444460B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
EP1914331B1 (en) | 2019-07-24 |
CN101164773B (zh) | 2012-02-22 |
EP1914331A3 (en) | 2009-12-16 |
IL186533A0 (en) | 2008-01-20 |
JP2008100345A (ja) | 2008-05-01 |
KR20080035495A (ko) | 2008-04-23 |
CN101164773A (zh) | 2008-04-23 |
KR101444460B1 (ko) | 2014-09-24 |
EP1914331A2 (en) | 2008-04-23 |
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