JP5148624B2 - フォトポリマーベースの誘電材料ならびにその調製方法および使用方法 - Google Patents
フォトポリマーベースの誘電材料ならびにその調製方法および使用方法 Download PDFInfo
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- JP5148624B2 JP5148624B2 JP2009539298A JP2009539298A JP5148624B2 JP 5148624 B2 JP5148624 B2 JP 5148624B2 JP 2009539298 A JP2009539298 A JP 2009539298A JP 2009539298 A JP2009539298 A JP 2009539298A JP 5148624 B2 JP5148624 B2 JP 5148624B2
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- 0 CCCCCC(CC(C1)*1C#C)(C(C)C(CCCCC)=C1CCCC1)[C@](C(C)CC#*)(C=CC)C(C)=CC Chemical compound CCCCCC(CC(C1)*1C#C)(C(C)C(CCCCC)=C1CCCC1)[C@](C(C)CC#*)(C=CC)C(C)=CC 0.000 description 8
- SXZBLRJQULKINM-VHEBQXMUSA-N CC(C)(C)CC(C)(C(C)(C)C(C)(CC1(C)C(C)(C)C)[O]=C1OCCOC(/C=C/c1ccccc1)=O)C(OCCOC(C)=O)=O Chemical compound CC(C)(C)CC(C)(C(C)(C)C(C)(CC1(C)C(C)(C)C)[O]=C1OCCOC(/C=C/c1ccccc1)=O)C(OCCOC(C)=O)=O SXZBLRJQULKINM-VHEBQXMUSA-N 0.000 description 1
- XPJPFKIDFXYKFK-UHFFFAOYSA-N CCCC(C)C(CC(CC=C)=O)N Chemical compound CCCC(C)C(CC(CC=C)=O)N XPJPFKIDFXYKFK-UHFFFAOYSA-N 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
- C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
- C08F220/10—Esters
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- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Thin Film Transistor (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
- Formation Of Insulating Films (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US86130806P | 2006-11-28 | 2006-11-28 | |
| US60/861,308 | 2006-11-28 | ||
| PCT/US2007/024473 WO2008066826A1 (en) | 2006-11-28 | 2007-11-28 | Photopolymer-based dielectric materials and methods of preparation and use thereof |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010511094A JP2010511094A (ja) | 2010-04-08 |
| JP2010511094A5 JP2010511094A5 (enExample) | 2012-01-26 |
| JP5148624B2 true JP5148624B2 (ja) | 2013-02-20 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009539298A Active JP5148624B2 (ja) | 2006-11-28 | 2007-11-28 | フォトポリマーベースの誘電材料ならびにその調製方法および使用方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US7981989B2 (enExample) |
| EP (1) | EP2089442B1 (enExample) |
| JP (1) | JP5148624B2 (enExample) |
| ES (1) | ES2525040T3 (enExample) |
| WO (1) | WO2008066826A1 (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018018928A (ja) * | 2016-07-27 | 2018-02-01 | 東ソー株式会社 | 絶縁膜及びこれを含む有機電界効果トランジスタデバイス |
| US12291587B2 (en) | 2017-03-16 | 2025-05-06 | Tosoh Corporation | Photocrosslinkable polymer, insulating film, planarization film, lyophilic/liquid repellent patterned film, and organic field effect transistor device comprising same |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| EP1839339A2 (en) | 2004-12-23 | 2007-10-03 | Northwestern University | Siloxane-polymer dielectric compositions and related organic field-effect transistors |
| US20070078675A1 (en) * | 2005-09-30 | 2007-04-05 | Kaplan Craig A | Contributor reputation-based message boards and forums |
| WO2008002660A2 (en) * | 2006-06-28 | 2008-01-03 | Northwestern University | Crosslinked polymeric dielectric materials and methods of manufacturing and use thereof |
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| TWI521302B (zh) | 2010-08-30 | 2016-02-11 | 住友化學股份有限公司 | 阻劑組成物及阻劑圖案的產生方法 |
| US8436068B2 (en) | 2010-10-27 | 2013-05-07 | Industrial Technology Research Institute | Composition and polymer |
| JP5829939B2 (ja) | 2011-02-25 | 2015-12-09 | 住友化学株式会社 | レジスト組成物及びレジストパターンの製造方法 |
| JP5829940B2 (ja) | 2011-02-25 | 2015-12-09 | 住友化学株式会社 | レジスト組成物及びレジストパターンの製造方法 |
| JP6034025B2 (ja) | 2011-02-25 | 2016-11-30 | 住友化学株式会社 | レジスト組成物及びレジストパターンの製造方法 |
| JP5947053B2 (ja) | 2011-02-25 | 2016-07-06 | 住友化学株式会社 | レジスト組成物及びレジストパターンの製造方法 |
| JP5947051B2 (ja) | 2011-02-25 | 2016-07-06 | 住友化学株式会社 | レジスト組成物及びレジストパターンの製造方法 |
| JP5898520B2 (ja) | 2011-02-25 | 2016-04-06 | 住友化学株式会社 | レジスト組成物及びレジストパターンの製造方法 |
| JP5898521B2 (ja) | 2011-02-25 | 2016-04-06 | 住友化学株式会社 | レジスト組成物及びレジストパターンの製造方法 |
| JP6034026B2 (ja) | 2011-02-25 | 2016-11-30 | 住友化学株式会社 | レジスト組成物及びレジストパターンの製造方法 |
| JP5829941B2 (ja) * | 2011-02-25 | 2015-12-09 | 住友化学株式会社 | レジスト組成物及びレジストパターンの製造方法 |
| WO2012129511A2 (en) | 2011-03-24 | 2012-09-27 | Northwestern University | Semiconducting compounds and devices incorporating same |
| JP2013008951A (ja) * | 2011-05-26 | 2013-01-10 | Sumitomo Chemical Co Ltd | 光及び熱エネルギー架橋性有機薄膜トランジスタ絶縁層材料 |
| KR101308489B1 (ko) | 2011-05-26 | 2013-09-17 | 경희대학교 산학협력단 | 폴리(2-히드록시알킬메타아크릴레이트)계 유도체를 사용한 액정 배향막 및 이의 제조방법 |
| JP5886696B2 (ja) | 2011-07-19 | 2016-03-16 | 住友化学株式会社 | レジスト組成物及びレジストパターンの製造方法 |
| JP6013799B2 (ja) | 2011-07-19 | 2016-10-25 | 住友化学株式会社 | レジスト組成物及びレジストパターンの製造方法 |
| JP6013797B2 (ja) | 2011-07-19 | 2016-10-25 | 住友化学株式会社 | レジスト組成物及びレジストパターンの製造方法 |
| JP6189020B2 (ja) | 2011-07-19 | 2017-08-30 | 住友化学株式会社 | レジスト組成物及びレジストパターンの製造方法 |
| JP5912912B2 (ja) | 2011-07-19 | 2016-04-27 | 住友化学株式会社 | レジスト組成物及びレジストパターンの製造方法 |
| US9171961B2 (en) | 2012-07-11 | 2015-10-27 | Polyera Corporation | Coating materials for oxide thin film transistors |
| US9035287B2 (en) * | 2013-02-01 | 2015-05-19 | Polyera Corporation | Polymeric materials for use in metal-oxide-semiconductor field-effect transistors |
| CN105555822B (zh) * | 2013-07-15 | 2018-05-08 | 飞利斯有限公司 | 可曝光成像的材料和相关的电子器件及方法 |
| KR20160103083A (ko) | 2013-12-24 | 2016-08-31 | 폴리에라 코퍼레이션 | 탈부착형 2차원 플렉서블 전자 기기용 지지 구조물 |
| KR20160118340A (ko) | 2014-02-07 | 2016-10-11 | 올싸거널 인코포레이티드 | 교차-결합 가능한 플루오르화된 포토폴리머 |
| JP6034326B2 (ja) * | 2014-03-26 | 2016-11-30 | 富士フイルム株式会社 | 半導体素子及び絶縁層形成用組成物 |
| US10261634B2 (en) | 2014-03-27 | 2019-04-16 | Flexterra, Inc. | Infrared touch system for flexible displays |
| WO2015183567A1 (en) | 2014-05-28 | 2015-12-03 | Polyera Corporation | Low power display updates |
| CN107003608B (zh) | 2014-10-24 | 2020-09-25 | 飞利斯有限公司 | 可光图案化组合物及使用其制造晶体管器件的方法 |
| WO2016100983A1 (en) | 2014-12-19 | 2016-06-23 | Polyera Corporation | Photocrosslinkable compositions, patterned high k thin film dielectrics and related devices |
| US9761817B2 (en) | 2015-03-13 | 2017-09-12 | Corning Incorporated | Photo-patternable gate dielectrics for OFET |
| US10254795B2 (en) | 2015-05-06 | 2019-04-09 | Flexterra, Inc. | Attachable, flexible display device with flexible tail |
| DE102015119939A1 (de) | 2015-11-18 | 2017-05-18 | ALTANA Aktiengesellschaft | Vernetzbare polymere Materialien für dielektrische Schichten in elektronischen Bauteilen |
| JP6801374B2 (ja) * | 2016-10-31 | 2020-12-16 | 東ソー株式会社 | 重合体、絶縁膜及びこれを含む有機電界効果トランジスタデバイス |
| DE102021125407A1 (de) * | 2021-09-30 | 2023-03-30 | Polymer Competence Center Leoben Gmbh | Verfahren zur Herstellung eines Dielektrikums für einen Kondensator und Verfahren zur Herstellung eines Kondensators und Kondensator |
| JP2023064968A (ja) * | 2021-10-27 | 2023-05-12 | 東ソー株式会社 | 光架橋性重合体、絶縁膜及びこれを含む有機電界効果トランジスタデバイス |
Family Cites Families (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4940391A (enExample) * | 1972-08-28 | 1974-04-15 | ||
| JPS5027405B2 (enExample) * | 1973-05-18 | 1975-09-08 | ||
| JPS5037562B2 (enExample) * | 1973-08-01 | 1975-12-03 | ||
| JPS5134007A (ja) | 1974-09-12 | 1976-03-23 | Fuji Photo Film Co Ltd | Insatsubanyoshijitainosetozohoho |
| JPS5540416A (en) * | 1978-09-14 | 1980-03-21 | Mitsubishi Chem Ind Ltd | Photosensitive composition |
| JPH0760265B2 (ja) * | 1985-07-02 | 1995-06-28 | 三菱化学株式会社 | 感光性組成物 |
| JP2582089B2 (ja) * | 1987-09-23 | 1997-02-19 | 千秋 東 | 感光性ミクロゲル超微粒子 |
| US5223356A (en) | 1990-08-24 | 1993-06-29 | University Of Lowell | Photocrosslinked second order nonlinear optical polymers |
| EP0800563B1 (en) * | 1994-12-28 | 2000-07-12 | Cambridge Display Technology Limited | Polymers for use in optical devices |
| CA2231077A1 (en) | 1997-03-04 | 1998-09-04 | Guojun Liu | Polymeric material and process for production thereof |
| KR19980078124A (ko) * | 1997-04-25 | 1998-11-16 | 손욱 | 광중합형 액정 배향재 및 이를 이용한 액정 배향막의 제조방법 |
| JP3546687B2 (ja) | 1998-03-26 | 2004-07-28 | 住友化学工業株式会社 | フォトレジスト組成物 |
| JP3681106B2 (ja) | 2000-04-07 | 2005-08-10 | 住友ベークライト株式会社 | 有機絶縁膜材料および有機絶縁膜 |
| US7012306B2 (en) | 2001-03-07 | 2006-03-14 | Acreo Ab | Electrochemical device |
| EP2204861A1 (en) | 2001-12-19 | 2010-07-07 | Merck Patent GmbH | Organic field effect transistor with an organic dielectric |
| KR100524552B1 (ko) | 2002-09-28 | 2005-10-28 | 삼성전자주식회사 | 유기 게이트 절연막 및 이를 이용한 유기박막 트랜지스터 |
| JP2004161877A (ja) | 2002-11-13 | 2004-06-10 | Shin Etsu Chem Co Ltd | 多孔質膜形成用組成物、多孔質膜とその製造方法、層間絶縁膜及び半導体装置 |
| US7279777B2 (en) | 2003-05-08 | 2007-10-09 | 3M Innovative Properties Company | Organic polymers, laminates, and capacitors |
| US7098525B2 (en) | 2003-05-08 | 2006-08-29 | 3M Innovative Properties Company | Organic polymers, electronic devices, and methods |
| KR100995451B1 (ko) | 2003-07-03 | 2010-11-18 | 삼성전자주식회사 | 다층 구조의 게이트 절연막을 포함하는 유기 박막 트랜지스터 |
| JP2005093921A (ja) * | 2003-09-19 | 2005-04-07 | Canon Inc | 電界効果型有機トランジスタおよびその製造方法 |
| FR2863485B1 (fr) | 2003-12-11 | 2007-06-01 | Oreal | Composition cosmetique capillaire contenant un nano-objet de forme allongee en polymere synthetique reticule, procede mettant en oeuvre cette composition et utilisation |
| CA2554302C (en) | 2004-01-26 | 2013-03-26 | Northwestern University | Perylene n-type semiconductors and related devices |
| US7270845B2 (en) | 2004-03-31 | 2007-09-18 | Endicott Interconnect Technologies, Inc. | Dielectric composition for forming dielectric layer for use in circuitized substrates |
| JP4864375B2 (ja) * | 2004-08-09 | 2012-02-01 | ドンジン セミケム カンパニー リミテッド | スペーサ用感光性樹脂組成物、スペーサ及び液晶表示素子 |
| CN101056873A (zh) | 2004-09-14 | 2007-10-17 | 西北大学 | 羰基官能化的噻吩化合物和相关的器件结构 |
| EP1839339A2 (en) | 2004-12-23 | 2007-10-03 | Northwestern University | Siloxane-polymer dielectric compositions and related organic field-effect transistors |
| US7605225B2 (en) | 2006-05-11 | 2009-10-20 | Northwestern University | Silole-based polymers and semiconductor materials prepared from the same |
| WO2007146250A2 (en) | 2006-06-12 | 2007-12-21 | Northwestern University | Naphthalene-based semiconductor materials and methods of preparing and use thereof |
| WO2008002660A2 (en) | 2006-06-28 | 2008-01-03 | Northwestern University | Crosslinked polymeric dielectric materials and methods of manufacturing and use thereof |
-
2007
- 2007-11-28 EP EP07862266.9A patent/EP2089442B1/en active Active
- 2007-11-28 WO PCT/US2007/024473 patent/WO2008066826A1/en not_active Ceased
- 2007-11-28 US US11/998,159 patent/US7981989B2/en active Active
- 2007-11-28 JP JP2009539298A patent/JP5148624B2/ja active Active
- 2007-11-28 ES ES07862266.9T patent/ES2525040T3/es active Active
-
2011
- 2011-07-14 US US13/183,083 patent/US8338555B2/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018018928A (ja) * | 2016-07-27 | 2018-02-01 | 東ソー株式会社 | 絶縁膜及びこれを含む有機電界効果トランジスタデバイス |
| US12291587B2 (en) | 2017-03-16 | 2025-05-06 | Tosoh Corporation | Photocrosslinkable polymer, insulating film, planarization film, lyophilic/liquid repellent patterned film, and organic field effect transistor device comprising same |
Also Published As
| Publication number | Publication date |
|---|---|
| US8338555B2 (en) | 2012-12-25 |
| JP2010511094A (ja) | 2010-04-08 |
| ES2525040T3 (es) | 2014-12-16 |
| EP2089442B1 (en) | 2014-10-01 |
| WO2008066826A1 (en) | 2008-06-05 |
| US7981989B2 (en) | 2011-07-19 |
| EP2089442A1 (en) | 2009-08-19 |
| US20080161524A1 (en) | 2008-07-03 |
| US20110266534A1 (en) | 2011-11-03 |
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