JP5147364B2 - プラズマ化学気相堆積のための方法および装置 - Google Patents
プラズマ化学気相堆積のための方法および装置 Download PDFInfo
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Description
本発明は、例示的実施形態に基づいてかつ添付図面を参照にして下記でより詳細に説明される。
Claims (14)
- プラズマ気相堆積を用いて基板をコーティングするための方法であって、コーティングしようとする基板の基板表面の周囲の少なくとも一部が排気され、前記コーティングのための開始物質をもつプロセス・ガスが入れられ、前記コーティングが、前記プロセス・ガスで満たされた前記基板表面の前記周囲において電磁エネルギーを放射することによって点火されるプラズマにより堆積され、
前記電磁エネルギーが、マイクロ波または無線周波パルスの、多数のパルス・シーケンスの形態で放射され、前記パルス・シーケンスが第1の間隔で時間的に間隔をあけられた多数のパルスをもち、放射された前記電磁エネルギーが前記第1の間隔で停止され、前記パルス・シーケンス間の前記間隔が、パルス・シーケンス内の前記パルス間の前記第1の間隔より少なくとも3倍長く、前記パルス電力が無調整方式で結合され、
前記パルス電力または前記パルス電力に依存する少なくとも1つの変数が測定され、前記個々のパルスにわたる時間に関して積分され、前記パルス・シーケンスの間の前記間隔の長さが、前記測定された変数を基準にして制御装置を用いて構成される
方法。 - パルス電力または前記パルス電力に依存する少なくとも1つの変数が測定され、前記個々のパルスにわたる時間に関して積分され、前記積分したパルス電力が所定の閾値を超える場合、前記パルス・シーケンスが制御装置を用いて終了され、間隔の後に次のパルス・シーケンスが開始される請求項1に記載の方法。
- 前記電磁エネルギーを結合させるための導波管において結合出力される磁界の強さが測定され、前記個々のパルスにわたり積分される請求項2に記載の方法。
- 前記プラズマの光の放出の強さが測定され、時間に関して積分され、時間に関して積分された前記光の放出が予め決められた閾値を超える場合には前記パルス・シーケンスが終了される請求項2または3に記載の方法。
- 前記基板の温度が検出され、前記パルス・シーケンスの長さ、または前記パルス・シーケンスの間の間隔の長さと前記パルス・シーケンスの長さの比が前記測定された温度を基準にして構成される請求項1乃至4のいずれか1項に記載の方法。
- 前記基板の温度が予め決められた値より高い場合、前記パルス・シーケンスの前記長さを短くする、または前記パルス・シーケンスの長さの前記パルス・シーケンス間の前記パルスの間隔の長さに対する比を低減する、および/または前記基板の前記温度が予め決められた値の下にある場合には前記パルス・シーケンスの前記長さを長くする、または前記パルス・シーケンスの長さの前記パルス・シーケンス間の前記パルスの間隔の長さに対する前記比を大きくする請求項5に記載の方法。
- 前記パルス・シーケンス内の前記パルスが、パルス・シーケンスの継続期間の1/10より短い継続期間を有する請求項1乃至6のいずれか1項に記載の方法。
- 前記パルス・シーケンス内の前記パルスが、最大でも5マイクロ秒の継続期間を有する請求項1乃至7のいずれか1項に記載の方法。
- プラズマ気相堆積を用いて、具体的には請求項1乃至8いずれか1項に記載の方法を用いて基板をコーティングするための装置であって、
コーティングしようとする基板の基板表面の周囲の少なくとも一部を排気し、前記コーティングのための開始物質をもつプロセス・ガスを入れるための装置を伴う少なくとも1つのリアクタを備え、
前記装置が、パルス状電磁エネルギーのための供給源を有し、前記パルス状電磁エネルギーのための供給源はパルス化方式で動作するマイクロ波または無線周波の供給源を有し、
前記供給源が、前記プロセス・ガスで満たされている前記基板表面の前記周囲で電磁エネルギーを放射することによってプラズマを点火し、かつコーティングを堆積するために前記リアクタに結合されており、
前記装置が、前記電磁エネルギーが多数のパルス・シーケンスの形態で放射され、前記パルス・シーケンスが第1の間隔で時間的に間隔をあけられた多数のパルスをもち、前記供給源が前記第1の間隔で不動作にされ、前記パルス・シーケンス間の前記間隔が、パルス・シーケンス内の前記パルス間の前記第1の間隔より少なくとも3倍長くなるように前記供給源を制御する制御装置を有し、パルス状電磁エネルギーのための供給源が無調整電力出力を有し、
前記パルス電力または前記パルス電力に依存する少なくとも1つの変数を測定することができる測定装置が設けられ、前記制御装置が、前記測定された値を前記個々のパルスにわたる時間に関して積分し、前記パルス・シーケンスの間の前記間隔の前記長さを前記積分された測定値を基準にして構成するように設定されている
装置。 - パルス電力または前記パルス電力に依存する少なくとも1つの変数を測定する測定装置を特徴として備え、前記制御装置が、前記測定された値を前記個々のパルスにわたる時間に関して積分し、前記積分されたパルス電力が所定の閾値を超える場合には前記パルス・シーケンスを終了させ、予め決められた長さの間隔の後に次のパルス・シーケンスを開始させるように設計されている請求項9に記載の装置。
- 前記測定装置が、前記電磁エネルギーを結合させるための導波管において結合出力される磁界の強さを測定するセンサを備える請求項10に記載の装置。
- 前記プラズマの光の強さを測定するための装置を特徴として備え、前記制御装置が、時間に関して積分された前記光の放出の強さが予め決められた値を超える場合パルス・シーケンスを終了させるように設定されている請求項10または11に記載の装置。
- 前記基板の温度を検出するための測定装置を特徴として備え、前記制御装置が、前記検出された温度の値を基準にして前記パルス・シーケンスの前記長さを構成するようになされている請求項9乃至12のいずれか1項に記載の装置。
- 前記制御装置が、前記基板の温度が予め決められた値より高い場合、前記パルス・シーケンスの前記長さを短くする、または前記パルス・シーケンスの長さの前記パルス・シーケンス間の前記パルスの間隔の長さに対する比を低減する、および/または前記基板の温度が予め決められた値の下にある場合には前記パルス・シーケンスの前記長さを長くする、
または前記パルス・シーケンスの長さの前記パルス・シーケンス間の前記パルスの間隔の長さに対する比を大きくするように設定されている請求項9乃至13に記載の装置。
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DE102006053366A DE102006053366A1 (de) | 2006-11-10 | 2006-11-10 | Verfahren und Vorrichtung zur plasmaunterstützten chemischen Dampfphasenabscheidung |
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US9458536B2 (en) | 2009-07-02 | 2016-10-04 | Sio2 Medical Products, Inc. | PECVD coating methods for capped syringes, cartridges and other articles |
DE102010012501A1 (de) | 2010-03-12 | 2011-09-15 | Khs Corpoplast Gmbh | Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken |
US11624115B2 (en) | 2010-05-12 | 2023-04-11 | Sio2 Medical Products, Inc. | Syringe with PECVD lubrication |
DE102010048960A1 (de) * | 2010-10-18 | 2012-04-19 | Khs Corpoplast Gmbh | Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken |
US9878101B2 (en) | 2010-11-12 | 2018-01-30 | Sio2 Medical Products, Inc. | Cyclic olefin polymer vessels and vessel coating methods |
US9272095B2 (en) | 2011-04-01 | 2016-03-01 | Sio2 Medical Products, Inc. | Vessels, contact surfaces, and coating and inspection apparatus and methods |
US11116695B2 (en) | 2011-11-11 | 2021-09-14 | Sio2 Medical Products, Inc. | Blood sample collection tube |
EP2776603B1 (en) | 2011-11-11 | 2019-03-06 | SiO2 Medical Products, Inc. | PASSIVATION, pH PROTECTIVE OR LUBRICITY COATING FOR PHARMACEUTICAL PACKAGE, COATING PROCESS AND APPARATUS |
GB2505685B (en) * | 2012-09-07 | 2015-11-04 | Univ Salford | Method of coating and etching |
US9664626B2 (en) | 2012-11-01 | 2017-05-30 | Sio2 Medical Products, Inc. | Coating inspection method |
WO2014078666A1 (en) | 2012-11-16 | 2014-05-22 | Sio2 Medical Products, Inc. | Method and apparatus for detecting rapid barrier coating integrity characteristics |
KR102211950B1 (ko) | 2012-11-30 | 2021-02-04 | 에스아이오2 메디컬 프로덕츠, 인크. | 의료용 주사기 카트리지 등의 pecvd 증착 균일성 제어 |
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-
2006
- 2006-11-10 DE DE102006053366A patent/DE102006053366A1/de not_active Withdrawn
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2007
- 2007-09-07 EP EP07017531.0A patent/EP1921656B8/de not_active Not-in-force
- 2007-11-08 US US11/937,280 patent/US7947337B2/en not_active Expired - Fee Related
- 2007-11-09 KR KR1020070114461A patent/KR100988354B1/ko active IP Right Grant
- 2007-11-09 JP JP2007291900A patent/JP5147364B2/ja not_active Expired - Fee Related
- 2007-11-09 TW TW096142429A patent/TWI371502B/zh not_active IP Right Cessation
- 2007-11-09 CN CN2007103081994A patent/CN101220469B/zh not_active Expired - Fee Related
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Also Published As
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JP2008121116A (ja) | 2008-05-29 |
US20080124488A1 (en) | 2008-05-29 |
EP1921656B8 (de) | 2014-07-09 |
US7947337B2 (en) | 2011-05-24 |
CN101220469A (zh) | 2008-07-16 |
JP5543500B2 (ja) | 2014-07-09 |
KR20080042752A (ko) | 2008-05-15 |
DE102006053366A1 (de) | 2008-05-15 |
JP2012062579A (ja) | 2012-03-29 |
TWI371502B (en) | 2012-09-01 |
EP1921656A1 (de) | 2008-05-14 |
KR100988354B1 (ko) | 2010-10-18 |
TW200837216A (en) | 2008-09-16 |
CN101220469B (zh) | 2010-08-11 |
EP1921656B1 (de) | 2014-04-30 |
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