JP5117506B2 - 光音響検出器用発振素子 - Google Patents
光音響検出器用発振素子 Download PDFInfo
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- JP5117506B2 JP5117506B2 JP2009535843A JP2009535843A JP5117506B2 JP 5117506 B2 JP5117506 B2 JP 5117506B2 JP 2009535843 A JP2009535843 A JP 2009535843A JP 2009535843 A JP2009535843 A JP 2009535843A JP 5117506 B2 JP5117506 B2 JP 5117506B2
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- oscillation element
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- photoacoustic
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 239000004020 conductor Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 29
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 14
- 238000001514 detection method Methods 0.000 description 10
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- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 208000006673 asthma Diseases 0.000 description 2
- 239000010951 brass Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
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- 229910000154 gallium phosphate Inorganic materials 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
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Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
- G01N2021/1704—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in gases
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
- G01N2021/1708—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids with piezotransducers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/028—Material parameters
- G01N2291/02809—Concentration of a compound, e.g. measured by a surface mass change
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- Physics & Mathematics (AREA)
- Biochemistry (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Acoustics & Sound (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Description
Claims (8)
- サンプル混合物におけるサンプルの濃度を検出するための光音響検出器に用いられる発振素子であって、前記光音響検出器は、当該発振素子の励起領域の近傍において前記サンプルの分子の励起をなすための光ビームを用い、当該励起により当該発振素子の共振をもたらすようにした発振素子であって、
・機械的に歪んだときに電圧を発生する圧電性材料と、
・当該発生した電圧を記録するために当該発振素子の表面を少なくとも一部分カバーする電極と、
を有し、
・前記励起領域は、前記光ビームによる前記励起領域における前記電極の加熱が回避されるように構成され、
・前記電極は、前記光ビームの波長において光の高反射率を有する、
発振素子。 - 請求項1に記載の発振素子であって、前記電極は、前記励起領域において当該発振素子の表面をカバーしない、発振素子。
- 請求項1に記載の発振素子であって、前記電極は、前記高反射率を得るための被覆によりカバーされている、発振素子。
- 請求項1に記載の発振素子であって、前記電極は、透明な導電性材料により少なくとも一部が形成されている、発振素子。
- 請求項1に記載の発振素子であって、前記圧電性材料は、水晶である、発振素子。
- 請求項1に記載の発振素子であって、前記圧電性材料は、音叉として整形される、発振素子。
- 請求項6に記載の発振素子であって、前記励起領域は、前記音叉の2つの分岐突出部の端部に配される、発振素子。
- 請求項1に記載の発振素子を有する光音響検出器。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP06123826 | 2006-11-10 | ||
EP06123826.7 | 2006-11-10 | ||
PCT/IB2007/054472 WO2008056312A1 (en) | 2006-11-10 | 2007-11-05 | Oscillator element for photo acoustic detector |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010523937A JP2010523937A (ja) | 2010-07-15 |
JP5117506B2 true JP5117506B2 (ja) | 2013-01-16 |
Family
ID=39167479
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009535843A Expired - Fee Related JP5117506B2 (ja) | 2006-11-10 | 2007-11-05 | 光音響検出器用発振素子 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8040516B2 (ja) |
EP (1) | EP2092323A1 (ja) |
JP (1) | JP5117506B2 (ja) |
CN (1) | CN101535801A (ja) |
WO (1) | WO2008056312A1 (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008056307A1 (en) | 2006-11-10 | 2008-05-15 | Koninklijke Philips Electronics N.V. | Photo acoustic detector with improved signal processing |
US20110001964A1 (en) * | 2008-03-07 | 2011-01-06 | Koninklijke Philips Electronics N.V. | Photo acoustic sample detector with background compensation |
DE102009045724B3 (de) * | 2009-10-15 | 2011-01-27 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Photoakustischer Gassensor sowie Verfahren zu seiner Herstellung und Verwendung |
US8848191B2 (en) | 2012-03-14 | 2014-09-30 | Honeywell International Inc. | Photoacoustic sensor with mirror |
CN103175790B (zh) * | 2013-02-04 | 2015-05-13 | 山西大学 | 双石英晶振光谱测声器及采用该测声器的气体探测装置 |
WO2015020611A1 (en) * | 2013-08-06 | 2015-02-12 | Agency For Science, Technology And Research | A multi-mode mems aerosol detecting device |
US10307080B2 (en) | 2014-03-07 | 2019-06-04 | Spirosure, Inc. | Respiratory monitor |
WO2016026101A1 (en) * | 2014-08-20 | 2016-02-25 | Yuyang Feng | Tuning fork with relaxor ferroelectric and composite |
CN104914049B (zh) * | 2015-05-28 | 2017-07-28 | 北京航天控制仪器研究所 | 一种石英增强光声光谱气体封装检测装置 |
US10444199B2 (en) | 2016-04-08 | 2019-10-15 | The Chinese University Of Hong Kong | Evanescent-wave quartz-enhanced photoacoustic sensor with resonator elements |
WO2018160733A1 (en) | 2017-03-01 | 2018-09-07 | Spirosure, Inc. | Nitric oxide detection device with reducing gas |
CN107560787A (zh) * | 2017-08-25 | 2018-01-09 | 中国电子科技集团公司第四十九研究所 | 具有无电极谐振音叉的石英真空传感器 |
CN113267453B (zh) * | 2021-03-30 | 2023-03-03 | 安徽工程大学 | 无源音叉共振增强的全光纤三气体探测光声光谱系统及其探测方法 |
Family Cites Families (26)
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JPS56168144A (en) * | 1980-05-29 | 1981-12-24 | Nippon Hoso Kyokai <Nhk> | Sample stand for opto-acoustic spectroscope |
DE3146700A1 (de) | 1981-11-25 | 1983-07-07 | Fa. Carl Zeiss, 7920 Heidenheim | Verfahren und vorrichtung zur detektion thermooptischer signale |
SE455234B (sv) | 1983-11-14 | 1988-06-27 | Varilab Ab | Provberare for analys av en provsubstans i en fotakustisk eller optotermisk metcell |
JPH0621861B2 (ja) | 1987-09-28 | 1994-03-23 | 株式会社日立製作所 | 光音響分光装置 |
JP2734155B2 (ja) * | 1990-01-18 | 1998-03-30 | 松下電器産業株式会社 | 角速度センサ |
JPH07113789A (ja) * | 1993-10-19 | 1995-05-02 | Japan Atom Energy Res Inst | 光音響分光分析装置用のpzt検出器 |
US5742377A (en) * | 1994-04-12 | 1998-04-21 | The Board Of Trustees Of The Leland Stanford, Jr. University | Cantilever for scanning probe microscope including piezoelectric element and method of using the same |
JPH08271336A (ja) * | 1995-03-31 | 1996-10-18 | Kao Corp | 光音響分光測定装置 |
JPH09145683A (ja) * | 1995-11-24 | 1997-06-06 | Hitachi Ltd | 光音響分析方法及び光音響分析装置 |
US6182508B1 (en) * | 1996-12-18 | 2001-02-06 | Denso Corporation | Structure of angular rate sensor |
US6101878A (en) * | 1997-03-24 | 2000-08-15 | Denso Corporation | Angular rate sensor and method of improving output characteristic thereof |
US6094971A (en) * | 1997-09-24 | 2000-08-01 | Texas Instruments Incorporated | Scanning-probe microscope including non-optical means for detecting normal tip-sample interactions |
JP3825152B2 (ja) * | 1997-10-09 | 2006-09-20 | 株式会社東海理化電機製作所 | Pzt薄膜を備えた振動ジャイロ |
DE19911325C1 (de) | 1999-03-15 | 2000-07-27 | Draegerwerk Ag | Vorrichtung zur Analyse von mehreren Komponenten einer Gasprobe mittels akustooptisch durchstimmbarer Filter und deren Verwendung |
JP4449128B2 (ja) * | 1999-12-14 | 2010-04-14 | パナソニック株式会社 | 角速度センサ |
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JP4234393B2 (ja) * | 2002-10-31 | 2009-03-04 | 株式会社東芝 | 生体情報計測装置 |
JP2004153624A (ja) * | 2002-10-31 | 2004-05-27 | Nippon Dempa Kogyo Co Ltd | 音叉型水晶振動子及び棒状振動子 |
DE10321806A1 (de) | 2003-05-14 | 2004-12-30 | Gerhart Schroff | Verfahren und Anordnung zur Fremdgaserkennung in optischen Abbildungs- und/oder Strahlführungssystemen |
CN100538329C (zh) * | 2005-01-03 | 2009-09-09 | 皇家飞利浦电子股份有限公司 | 用于检测试样中是否存在待检测组分的光声装置和方法 |
JP2008532036A (ja) * | 2005-03-04 | 2008-08-14 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 光音響分光法の検出器及びシステム |
CN101163956B (zh) * | 2005-04-26 | 2011-02-02 | 皇家飞利浦电子股份有限公司 | 用于含氮气体化合物检测的低成本设备 |
WO2008056307A1 (en) | 2006-11-10 | 2008-05-15 | Koninklijke Philips Electronics N.V. | Photo acoustic detector with improved signal processing |
EP2019307B1 (en) * | 2007-07-24 | 2018-10-03 | Axetris AG | Method and gas sensor for performing quartz-enhanced photoacoustic spectroscopy |
-
2007
- 2007-11-05 US US12/513,521 patent/US8040516B2/en not_active Expired - Fee Related
- 2007-11-05 CN CNA2007800418059A patent/CN101535801A/zh active Pending
- 2007-11-05 WO PCT/IB2007/054472 patent/WO2008056312A1/en active Application Filing
- 2007-11-05 JP JP2009535843A patent/JP5117506B2/ja not_active Expired - Fee Related
- 2007-11-05 EP EP07826974A patent/EP2092323A1/en not_active Ceased
Also Published As
Publication number | Publication date |
---|---|
CN101535801A (zh) | 2009-09-16 |
JP2010523937A (ja) | 2010-07-15 |
WO2008056312A1 (en) | 2008-05-15 |
US20100045990A1 (en) | 2010-02-25 |
EP2092323A1 (en) | 2009-08-26 |
US8040516B2 (en) | 2011-10-18 |
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