JP5098375B2 - 液晶装置の製造方法 - Google Patents
液晶装置の製造方法 Download PDFInfo
- Publication number
- JP5098375B2 JP5098375B2 JP2007061346A JP2007061346A JP5098375B2 JP 5098375 B2 JP5098375 B2 JP 5098375B2 JP 2007061346 A JP2007061346 A JP 2007061346A JP 2007061346 A JP2007061346 A JP 2007061346A JP 5098375 B2 JP5098375 B2 JP 5098375B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- vapor deposition
- vacuum chamber
- liquid crystal
- deposition material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004973 liquid crystal related substance Substances 0.000 title claims description 66
- 238000004519 manufacturing process Methods 0.000 title claims description 29
- 239000000758 substrate Substances 0.000 claims description 243
- 238000007740 vapor deposition Methods 0.000 claims description 111
- 239000000463 material Substances 0.000 claims description 67
- 238000000151 deposition Methods 0.000 claims description 42
- 230000008021 deposition Effects 0.000 claims description 31
- 239000010409 thin film Substances 0.000 claims description 12
- 230000005484 gravity Effects 0.000 claims description 9
- 238000010438 heat treatment Methods 0.000 claims description 9
- 230000008020 evaporation Effects 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims description 3
- 230000001105 regulatory effect Effects 0.000 claims description 3
- 239000010408 film Substances 0.000 description 103
- 238000000034 method Methods 0.000 description 30
- 229910004298 SiO 2 Inorganic materials 0.000 description 9
- 230000007246 mechanism Effects 0.000 description 9
- 229910010272 inorganic material Inorganic materials 0.000 description 5
- 239000011147 inorganic material Substances 0.000 description 5
- 239000003566 sealing material Substances 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Images
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- Liquid Crystal (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007061346A JP5098375B2 (ja) | 2007-03-12 | 2007-03-12 | 液晶装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007061346A JP5098375B2 (ja) | 2007-03-12 | 2007-03-12 | 液晶装置の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008224922A JP2008224922A (ja) | 2008-09-25 |
| JP2008224922A5 JP2008224922A5 (enExample) | 2010-02-25 |
| JP5098375B2 true JP5098375B2 (ja) | 2012-12-12 |
Family
ID=39843637
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007061346A Expired - Fee Related JP5098375B2 (ja) | 2007-03-12 | 2007-03-12 | 液晶装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5098375B2 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009075459A (ja) | 2007-09-21 | 2009-04-09 | Fujifilm Corp | 二軸性複屈折体の製造方法、二軸性複屈折体及び液晶プロジェクタ |
| WO2018066829A1 (ko) * | 2016-10-04 | 2018-04-12 | 주식회사 셀코스 | 수평배향 액정 디바이스 및 수평배향 액정기판의 배향막 증착방법 |
| JP6566977B2 (ja) * | 2017-02-07 | 2019-08-28 | キヤノン株式会社 | 蒸着装置及び蒸着源 |
| JP6570561B2 (ja) * | 2017-02-07 | 2019-09-04 | キヤノン株式会社 | 蒸着装置及び蒸着源 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63313123A (ja) * | 1987-06-17 | 1988-12-21 | Konica Corp | 液晶表示素子の製造方法 |
| JP3623292B2 (ja) * | 1995-11-21 | 2005-02-23 | 株式会社アルバック | 真空蒸着用基板傾斜自公転装置 |
| JP4835826B2 (ja) * | 2005-04-25 | 2011-12-14 | 株式会社昭和真空 | 液晶配向膜用真空蒸着装置およびその成膜方法 |
| JP5028584B2 (ja) * | 2005-05-27 | 2012-09-19 | 株式会社昭和真空 | 液晶配向膜用真空蒸着装置およびその成膜方法 |
| JP4329738B2 (ja) * | 2005-07-14 | 2009-09-09 | セイコーエプソン株式会社 | 液晶装置の製造装置、液晶装置の製造方法 |
-
2007
- 2007-03-12 JP JP2007061346A patent/JP5098375B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2008224922A (ja) | 2008-09-25 |
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