JP5093650B2 - 研磨装置及び研磨方法 - Google Patents
研磨装置及び研磨方法 Download PDFInfo
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- JP5093650B2 JP5093650B2 JP2007151167A JP2007151167A JP5093650B2 JP 5093650 B2 JP5093650 B2 JP 5093650B2 JP 2007151167 A JP2007151167 A JP 2007151167A JP 2007151167 A JP2007151167 A JP 2007151167A JP 5093650 B2 JP5093650 B2 JP 5093650B2
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1 CMP装置(研磨装置)
2 ガラス板(研磨対象物)
20 副研磨装置(研磨機構)
21 副研磨ヘッド回転軸
25 研磨パッド(研磨パッド)
32 チャック回転軸
33 チャック回転台(回転部材)
34 チャックY軸移動台(保持部材移動機構)
35 チャックX軸移動台(保持部材移動機構)
36 真空チャック(保持部材)
Claims (3)
- 研磨対象物を保持する保持部材と、
前記保持部材に保持された研磨対象物の研磨対象面と対向するとともに前記研磨対象面の局所的な研磨を行うに適した小径の研磨面を有する研磨パッドを備え、前記研磨パッドを自転及び往復動させながら前記研磨面を前記研磨対象面の研磨対象部に当接させて前記研磨対象部の研磨を行う研磨機構と、
前記保持部材を支持して回転可能であり、その回転軸が前記研磨パッドの往復動軌跡と略交差するように設けられた回転部材と、
前記回転部材に対して前記保持部材を前記回転軸に垂直な面内で移動させる保持部材移動機構とを備え、
前記保持部材移動機構により前記保持部材を前記回転部材上で移動させて前記保持部材により保持した研磨対象物の研磨対象部を前記回転部材の回転軸と重なるように位置させ、前記回転部材を回転させて前記保持部材及び前記研磨対象物を前記回転軸を中心として回転させ、前記研磨パッドを自転及び往復動させながら前記研磨対象物の研磨対象面に当接させて前記研磨対象部の研磨を行うことを特徴とする研磨装置。 - 前記研磨機構は、前記研磨パッドの外径の0.4倍以上の往復動ストロークで前記研磨パッドを往復動させることを特徴とする請求項1に記載の研磨装置。
- 前記研磨対象物はSiO2からなる矩形状のガラス板であり、
請求項1もしくは請求項2に記載の研磨装置を用いて前記ガラス板の研磨対象部を研磨する研磨方法。
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JP2007151167A JP5093650B2 (ja) | 2007-06-07 | 2007-06-07 | 研磨装置及び研磨方法 |
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JP2007151167A JP5093650B2 (ja) | 2007-06-07 | 2007-06-07 | 研磨装置及び研磨方法 |
Publications (2)
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JP2008302458A JP2008302458A (ja) | 2008-12-18 |
JP5093650B2 true JP5093650B2 (ja) | 2012-12-12 |
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JP2007151167A Active JP5093650B2 (ja) | 2007-06-07 | 2007-06-07 | 研磨装置及び研磨方法 |
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Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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KR101232787B1 (ko) * | 2010-08-18 | 2013-02-13 | 주식회사 엘지화학 | 연마 시스템용 연마 패드 |
JP5614723B2 (ja) * | 2011-01-07 | 2014-10-29 | 旭硝子株式会社 | 研磨装置及び被研磨物の研磨方法 |
JP6454599B2 (ja) * | 2015-05-14 | 2019-01-16 | 株式会社ディスコ | 研磨装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH1133898A (ja) * | 1997-07-18 | 1999-02-09 | Nikon Corp | 研磨装置 |
JP2003311613A (ja) * | 2002-04-18 | 2003-11-05 | Disco Abrasive Syst Ltd | 研磨装置 |
JP4008854B2 (ja) * | 2003-06-24 | 2007-11-14 | 株式会社ノリタケカンパニーリミテド | 高平面度加工方法 |
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