JP5088373B2 - 電子部品の製造方法 - Google Patents
電子部品の製造方法 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims description 22
- 238000007789 sealing Methods 0.000 claims description 184
- 229920005989 resin Polymers 0.000 claims description 78
- 239000011347 resin Substances 0.000 claims description 78
- 239000000758 substrate Substances 0.000 claims description 47
- 230000001133 acceleration Effects 0.000 claims description 31
- 238000000034 method Methods 0.000 claims description 27
- 238000010438 heat treatment Methods 0.000 claims description 25
- 229920001187 thermosetting polymer Polymers 0.000 claims description 23
- 238000005304 joining Methods 0.000 claims description 21
- 229920001721 polyimide Polymers 0.000 claims description 21
- 239000004642 Polyimide Substances 0.000 claims description 16
- 230000009477 glass transition Effects 0.000 claims description 14
- 238000002844 melting Methods 0.000 claims description 8
- 230000008018 melting Effects 0.000 claims description 8
- 229920005992 thermoplastic resin Polymers 0.000 claims description 8
- 230000002093 peripheral effect Effects 0.000 claims description 7
- 238000005979 thermal decomposition reaction Methods 0.000 claims description 5
- 239000000853 adhesive Substances 0.000 description 13
- 230000001070 adhesive effect Effects 0.000 description 13
- 238000001514 detection method Methods 0.000 description 7
- 238000003384 imaging method Methods 0.000 description 7
- 238000006073 displacement reaction Methods 0.000 description 6
- 238000012986 modification Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 238000013007 heat curing Methods 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000001723 curing Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000006185 dispersion Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 238000005488 sandblasting Methods 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000000016 photochemical curing Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229920006259 thermoplastic polyimide Polymers 0.000 description 1
- 239000004634 thermosetting polymer Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00261—Processes for packaging MEMS devices
- B81C1/00269—Bonding of solid lids or wafers to the substrate
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
- G01P1/02—Housings
- G01P1/023—Housings for acceleration measuring devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
- G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/10—Containers; Seals characterised by the material or arrangement of seals between parts, e.g. between cap and base of the container or between leads and walls of the container
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0228—Inertial sensors
- B81B2201/0235—Accelerometers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0118—Cantilevers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/10—Methods of surface bonding and/or assembly therefor
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Pressure Sensors (AREA)
- Measuring Fluid Pressure (AREA)
Description
2 SOI基板
7 機能部
8 錘部
9 梁部
10 ピエゾ抵抗部
11 封止枠
12 上蓋
13 封止層
17,18,17a,18a 凹部
Claims (13)
- 一方主面側の周囲に硬化された樹脂からなる封止枠が形成されかつ前記封止枠に取り囲まれた領域に機械的動作可能な機能部が配置された、基板を用意する工程と、
前記封止枠に接合されるべき封止層が前記樹脂と同じ硬化された樹脂をもって一方主面の全面にわたって形成された、蓋を用意する工程と、
前記機能部を封止するように前記基板と前記蓋とを一体化させるため、前記封止枠と前記封止層とを、互いに接触させながら加熱および加圧することによって、互いに接合する工程と
を備え、
前記樹脂は熱硬化性樹脂であり、前記接合する工程における前記加熱は、前記樹脂のガラス転移点より高く、かつ熱分解温度より低い温度で実施され、
前記蓋を用意する工程は、前記封止層の、前記封止枠と接触すべき部分および/またはその近傍に、凹部を形成する工程を含む、電子部品の製造方法。 - 一方主面側の周囲に硬化された樹脂からなる封止枠が形成されかつ前記封止枠に取り囲まれた領域に機械的動作可能な機能部が配置された、基板を用意する工程と、
前記封止枠に接合されるべき封止層が前記樹脂と同じ硬化された樹脂をもって一方主面の全面にわたって形成された、蓋を用意する工程と、
前記機能部を封止するように前記基板と前記蓋とを一体化させるため、前記封止枠と前記封止層とを、互いに接触させながら加熱および加圧することによって、互いに接合する工程と
を備え、
前記樹脂は熱可塑性樹脂であり、前記接合する工程における前記加熱は、前記樹脂のガラス転移点より高く、かつ融点より低い温度で実施され、
前記蓋を用意する工程は、前記封止層の、前記封止枠と接触すべき部分および/またはその近傍に、凹部を形成する工程を含む、電子部品の製造方法。 - 前記凹部は、前記封止層の、前記封止枠と接触すべき部分の内周縁に沿って延びる溝状に形成される、請求項1または2に記載の電子部品の製造方法。
- 前記封止枠は平面形状が四角形であり、前記凹部は、前記封止枠の角部分に対応する部分において、他の部分に比べて、より大きな容積を与えるようにされる、請求項3に記載の電子部品の製造方法。
- 前記封止枠は平面形状が四角形であり、前記凹部は、前記封止枠の角部分に対応する部分に分布するように形成される、請求項1または2に記載の電子部品の製造方法。
- 一方主面側の周囲に硬化された樹脂からなる封止枠が形成されかつ前記封止枠に取り囲まれた領域に機能部が配置された、基板を用意する工程と、
前記封止枠に接合されるべき封止層が前記樹脂と同じ硬化された樹脂をもって一方主面の全面にわたって形成された、蓋を用意する工程と、
前記機能部を封止するように前記基板と前記蓋とを一体化させるため、前記封止枠と前記封止層とを、互いに接触させながら加熱および加圧することによって、互いに接合する工程と
を備え、
前記樹脂は熱硬化性樹脂であり、前記接合する工程における前記加熱は、前記樹脂のガラス転移点より高く、かつ熱分解温度より低い温度で実施され、
前記基板を用意する工程は、前記封止枠の、前記封止層と接触すべき面の一部に、凹部を形成する工程を含む、電子部品の製造方法。 - 一方主面側の周囲に硬化された樹脂からなる封止枠が形成されかつ前記封止枠に取り囲まれた領域に機能部が配置された、基板を用意する工程と、
前記封止枠に接合されるべき封止層が前記樹脂と同じ硬化された樹脂をもって一方主面の全面にわたって形成された、蓋を用意する工程と、
前記機能部を封止するように前記基板と前記蓋とを一体化させるため、前記封止枠と前記封止層とを、互いに接触させながら加熱および加圧することによって、互いに接合する工程と
を備え、
前記樹脂は熱可塑性樹脂であり、前記接合する工程における前記加熱は、前記樹脂のガラス転移点より高く、かつ融点より低い温度で実施され、
前記基板を用意する工程は、前記封止枠の、前記封止層と接触すべき面の一部に、凹部を形成する工程を含む、電子部品の製造方法。 - 前記凹部は、前記封止枠の内周縁に沿って延びる溝状に形成される、請求項6または7に記載の電子部品の製造方法。
- 前記封止枠は平面形状が四角形であり、前記凹部は、前記封止枠の角部分において、他の部分に比べて、より大きな容積を与えるようにされる、請求項8に記載の電子部品の製造方法。
- 前記封止枠は平面形状が四角形であり、前記凹部は、前記封止枠の角部分に分布するように形成される、請求項6または7に記載の電子部品の製造方法。
- 前記封止層の厚み方向寸法は前記封止枠の厚み方向寸法より大きい、請求項1、2、6または7に記載の電子部品の製造方法。
- 前記樹脂はポリイミドである、請求項1、2、6または7に記載の電子部品の製造方法。
- 前記機能部は、錘部と、前記基板に対して前記錘部を変位可能に支持する梁部と、前記梁部に生じる応力を検出するためのピエゾ抵抗部とを備え、前記電子部品は3軸加速度センサを構成する、請求項1、2、6または7に記載の電子部品の製造方法。
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JP2009528053A JP5088373B2 (ja) | 2007-08-10 | 2008-06-27 | 電子部品の製造方法 |
PCT/JP2008/061708 WO2009022498A1 (ja) | 2007-08-10 | 2008-06-27 | 電子部品の製造方法 |
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WO (1) | WO2009022498A1 (ja) |
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US8518201B2 (en) * | 2009-04-22 | 2013-08-27 | Midwest Diversified Technologies, Inc. | Method of manufacturing a tubing for a subsurface water drainage system |
EP2259018B1 (en) | 2009-05-29 | 2017-06-28 | Infineon Technologies AG | Gap control for die or layer bonding using intermediate layers of a micro-electromechanical system |
JP5544762B2 (ja) * | 2009-06-08 | 2014-07-09 | 大日本印刷株式会社 | 力学量センサの製造方法 |
KR20130016607A (ko) * | 2011-08-08 | 2013-02-18 | 삼성전기주식회사 | 관성센서 및 그 제조방법 |
JP5673850B2 (ja) * | 2012-04-23 | 2015-02-18 | 株式会社村田製作所 | 水晶振動装置及びその製造方法 |
Citations (4)
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JP2002118191A (ja) * | 2000-10-10 | 2002-04-19 | Sanyo Electric Co Ltd | 半導体装置およびその製造方法 |
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WO2006040986A1 (ja) * | 2004-10-13 | 2006-04-20 | Sumitomo Bakelite Co., Ltd. | 受光装置 |
JP2007189032A (ja) * | 2006-01-12 | 2007-07-26 | Nippon Steel Chem Co Ltd | 中空封止型半導体装置の製造方法 |
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US5278429A (en) * | 1989-12-19 | 1994-01-11 | Fujitsu Limited | Semiconductor device having improved adhesive structure and method of producing same |
SE513801C2 (sv) * | 1999-02-18 | 2000-11-06 | Ericsson Telefon Ab L M | Metod att sammanfoga två element samt element av plastmaterial |
US7604706B2 (en) * | 2001-03-30 | 2009-10-20 | Minolta Co., Ltd. | Method for producing resin-molded substrate and method for producing reversible image display medium |
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2008
- 2008-06-27 JP JP2009528053A patent/JP5088373B2/ja not_active Expired - Fee Related
- 2008-06-27 WO PCT/JP2008/061708 patent/WO2009022498A1/ja active Application Filing
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2010
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002118191A (ja) * | 2000-10-10 | 2002-04-19 | Sanyo Electric Co Ltd | 半導体装置およびその製造方法 |
JP2002231920A (ja) * | 2001-02-06 | 2002-08-16 | Olympus Optical Co Ltd | 固体撮像装置及びその製造方法 |
WO2006040986A1 (ja) * | 2004-10-13 | 2006-04-20 | Sumitomo Bakelite Co., Ltd. | 受光装置 |
JP2007189032A (ja) * | 2006-01-12 | 2007-07-26 | Nippon Steel Chem Co Ltd | 中空封止型半導体装置の製造方法 |
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US8382934B2 (en) | 2013-02-26 |
WO2009022498A1 (ja) | 2009-02-19 |
US20110265929A1 (en) | 2011-11-03 |
US8002942B2 (en) | 2011-08-23 |
JPWO2009022498A1 (ja) | 2010-11-11 |
US20100132185A1 (en) | 2010-06-03 |
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